DE69302586D1 - Halbleiterwafer transport-modul mit drehbarem und horizontal ausziehbarem halter - Google Patents

Halbleiterwafer transport-modul mit drehbarem und horizontal ausziehbarem halter

Info

Publication number
DE69302586D1
DE69302586D1 DE69302586T DE69302586T DE69302586D1 DE 69302586 D1 DE69302586 D1 DE 69302586D1 DE 69302586 T DE69302586 T DE 69302586T DE 69302586 T DE69302586 T DE 69302586T DE 69302586 D1 DE69302586 D1 DE 69302586D1
Authority
DE
Germany
Prior art keywords
rotating
semiconductor wafer
transport module
wafer transport
extendable holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69302586T
Other languages
English (en)
Other versions
DE69302586T2 (de
Inventor
Julian Hodos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Materials Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Materials Research Corp filed Critical Materials Research Corp
Publication of DE69302586D1 publication Critical patent/DE69302586D1/de
Application granted granted Critical
Publication of DE69302586T2 publication Critical patent/DE69302586T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
DE69302586T 1992-12-23 1993-12-16 Halbleiterwafer transport-modul mit drehbarem und horizontal ausziehbarem halter Expired - Fee Related DE69302586T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/996,102 US5295777A (en) 1992-12-23 1992-12-23 Wafer transport module with rotatable and horizontally extendable wafer holder
PCT/US1993/012274 WO1994015355A2 (en) 1992-12-23 1993-12-16 Wafer transport module with rotatable and horizontally extendable wafer holder

Publications (2)

Publication Number Publication Date
DE69302586D1 true DE69302586D1 (de) 1996-06-13
DE69302586T2 DE69302586T2 (de) 1996-09-26

Family

ID=25542509

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69302586T Expired - Fee Related DE69302586T2 (de) 1992-12-23 1993-12-16 Halbleiterwafer transport-modul mit drehbarem und horizontal ausziehbarem halter

Country Status (10)

Country Link
US (1) US5295777A (de)
EP (1) EP0676086B1 (de)
JP (1) JP3079111B2 (de)
KR (1) KR100281257B1 (de)
AU (1) AU6441494A (de)
CA (1) CA2149902A1 (de)
DE (1) DE69302586T2 (de)
SG (1) SG49038A1 (de)
TW (1) TW241240B (de)
WO (1) WO1994015355A2 (de)

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EP0676086A1 (de) 1995-10-11
KR100281257B1 (ko) 2001-03-02
WO1994015355A2 (en) 1994-07-07
AU6441494A (en) 1994-07-19
SG49038A1 (en) 1998-05-18
JPH08505268A (ja) 1996-06-04
DE69302586T2 (de) 1996-09-26
JP3079111B2 (ja) 2000-08-21
TW241240B (de) 1995-02-21
WO1994015355A3 (en) 1994-08-18
US5295777A (en) 1994-03-22
EP0676086B1 (de) 1996-05-08

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