DE69303149D1 - Meniskusbeschichtungsverfahren - Google Patents

Meniskusbeschichtungsverfahren

Info

Publication number
DE69303149D1
DE69303149D1 DE69303149T DE69303149T DE69303149D1 DE 69303149 D1 DE69303149 D1 DE 69303149D1 DE 69303149 T DE69303149 T DE 69303149T DE 69303149 T DE69303149 T DE 69303149T DE 69303149 D1 DE69303149 D1 DE 69303149D1
Authority
DE
Germany
Prior art keywords
coating process
meniscus coating
meniscus
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69303149T
Other languages
English (en)
Other versions
DE69303149T2 (de
Inventor
Hendrik F Bok
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Specialty Coating Systems Inc
Original Assignee
Specialty Coating Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Specialty Coating Systems Inc filed Critical Specialty Coating Systems Inc
Application granted granted Critical
Publication of DE69303149D1 publication Critical patent/DE69303149D1/de
Publication of DE69303149T2 publication Critical patent/DE69303149T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/02—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material to surfaces by single means not covered by groups B05C1/00 - B05C7/00, whether or not also using other means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers
DE69303149T 1992-12-18 1993-12-17 Meniskusbeschichtungsverfahren Expired - Fee Related DE69303149T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/993,315 US5270079A (en) 1992-12-18 1992-12-18 Methods of meniscus coating

Publications (2)

Publication Number Publication Date
DE69303149D1 true DE69303149D1 (de) 1996-07-18
DE69303149T2 DE69303149T2 (de) 1997-01-30

Family

ID=25539377

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69303149T Expired - Fee Related DE69303149T2 (de) 1992-12-18 1993-12-17 Meniskusbeschichtungsverfahren

Country Status (6)

Country Link
US (1) US5270079A (de)
EP (1) EP0603007B1 (de)
JP (1) JP2987797B2 (de)
CA (1) CA2111795C (de)
DE (1) DE69303149T2 (de)
MX (1) MX9308187A (de)

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US5358750A (en) * 1990-12-14 1994-10-25 Scapa Group Plc Industrial fabrics
US5650196A (en) * 1993-05-05 1997-07-22 Steag Microtech Gmbh Device for coating substrates in semiconductor production
WO1994027737A1 (fr) * 1993-05-27 1994-12-08 Dai Nippon Printing Co., Ltd. Procede et appareil pour l'application d'un liquide
US5688324A (en) * 1994-07-15 1997-11-18 Dainippon Screen Mfg. Co., Ltd. Apparatus for coating substrate
US5545440A (en) * 1994-12-05 1996-08-13 At&T Global Information Solutions Company (Aka Ncr Corporation) Method and apparatus for polymer coating of substrates
US5601655A (en) * 1995-02-14 1997-02-11 Bok; Hendrik F. Method of cleaning substrates
US5902399A (en) * 1995-07-27 1999-05-11 Micron Technology, Inc. Method and apparatus for improved coating of a semiconductor wafer
US5935653A (en) 1996-01-18 1999-08-10 Micron Technology, Inc. Methods for coating a substrate
US5762773A (en) * 1996-01-19 1998-06-09 Micron Display Technology, Inc. Method and system for manufacture of field emission display
US5900273A (en) * 1996-01-19 1999-05-04 Micron Technology, Inc. Method for coating a substrate covered with a plurality of spacer members
US6117294A (en) 1996-01-19 2000-09-12 Micron Technology, Inc. Black matrix material and methods related thereto
US5858459A (en) * 1996-02-22 1999-01-12 Micron Technology, Inc. Cassette invertor apparatus and method
US5695833A (en) * 1996-06-12 1997-12-09 Bok; Hendrik F. Method for uniform film coating of substrates
US6039059A (en) 1996-09-30 2000-03-21 Verteq, Inc. Wafer cleaning system
TW418116B (en) * 1997-11-04 2001-01-11 Matsushita Electric Ind Co Ltd Water-repellent coating and coating device
US5869219A (en) * 1997-11-05 1999-02-09 Taiwan Semiconductor Manufacturing Co. Ltd. Method for depositing a polyimide film
CA2270807A1 (en) 1999-05-03 2000-11-03 Ibm Canada Limited-Ibm Canada Limitee Closed chamber method and apparatus for the coating of liquid films
US6593690B1 (en) 1999-09-03 2003-07-15 3M Innovative Properties Company Large area organic electronic devices having conducting polymer buffer layers and methods of making same
US8852383B2 (en) * 1999-09-29 2014-10-07 Materials And Technologies Corporation Wet processing using a fluid meniscus apparatus
US7122126B1 (en) * 2000-09-28 2006-10-17 Materials And Technologies Corporation Wet processing using a fluid meniscus, apparatus and method
JP2001113214A (ja) * 1999-10-19 2001-04-24 Casio Comput Co Ltd 薄膜の形成方法、及び形成装置
US6528117B2 (en) * 2001-01-19 2003-03-04 Paul Lewis Method for coating a substance on one side of a substrate using a single miniscus
DE10139923A1 (de) * 2001-08-14 2003-03-06 Inductotherm Coating Equipment Verfahren und Vorrichtung zum schmelzflüssigen Beschichten
ATE480868T1 (de) * 2004-03-22 2010-09-15 Rena Sondermaschinen Gmbh Verfahren zur behandlung von substratoberflächen
TWI352628B (en) * 2006-07-21 2011-11-21 Akrion Technologies Inc Nozzle for use in the megasonic cleaning of substr
JP2008036536A (ja) * 2006-08-07 2008-02-21 Nippon Densan Corp 撥油剤溶液の塗布方法
DE102007033226A1 (de) 2007-07-17 2009-01-22 Kosub, Johann Aerodynamisches Schleuderverfahren zum Auftragen von flüssigen Schichten
WO2009105758A1 (en) * 2008-02-22 2009-08-27 Materials And Technologies Corporation Single-sided high throughput wet etching and wet processing apparatus and method
EP2397230B1 (de) * 2009-02-16 2014-10-01 Osaka University Vorrichtung zur herstellung eines partikelfilms und verfahren zur herstellung eines partikelfilms
US20110024043A1 (en) * 2009-07-02 2011-02-03 Dexcom, Inc. Continuous analyte sensors and methods of making same
JP5444300B2 (ja) 2011-09-26 2014-03-19 株式会社東芝 塗布装置
KR20150058860A (ko) * 2013-11-21 2015-05-29 한국기계연구원 대면적기판 나노입자 코팅장치
JP6272138B2 (ja) * 2014-05-22 2018-01-31 東京エレクトロン株式会社 塗布処理装置
JP5897749B1 (ja) * 2015-03-18 2016-03-30 株式会社東芝 塗布方法および塗布装置
JP6239548B2 (ja) 2015-03-18 2017-11-29 株式会社東芝 塗布装置及び塗布方法
DE102016210883A1 (de) 2016-06-17 2017-12-21 Singulus Technologies Ag Vorrichtung und Verfahren zur Behandlung von Substraten unter Verwendung einer Auflagerolle mit porösem Material

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1289507A (en) * 1917-12-06 1918-12-31 Barrett Co Method and apparatus for treating coated roofing materials.
BE555735A (de) * 1956-03-12
US3294576A (en) * 1963-01-14 1966-12-27 First Safe Deposit Nat Bank Of Method of producing printed circuit structures
US3429741A (en) * 1965-06-11 1969-02-25 Eastman Kodak Co Method of coating using a bead coater
US3367791A (en) * 1966-07-11 1968-02-06 Addressograph Multigraph Liquid development of electrostatic images
US3589975A (en) * 1967-03-23 1971-06-29 Reynolds Metals Co Composite sheet of plastic and metallic material and method of making the same
US3473955A (en) * 1967-05-05 1969-10-21 Eastman Kodak Co Coating process
US3535157A (en) * 1967-12-18 1970-10-20 Shipley Co Method of coating printed circuit board having through-holes
GB1246749A (en) * 1968-08-22 1971-09-15 Asahi Glass Co Ltd Method of and apparatus for coating glass surfaces
US4004045A (en) * 1974-08-09 1977-01-18 Stelter Manfred K Method for fluid film application
US4082868A (en) * 1976-03-18 1978-04-04 Armco Steel Corporation Method for continuously contact-coating one side only of a ferrous base metal strip with a molten coating metal
US4154193A (en) * 1976-11-16 1979-05-15 Tokyo Shibaura Electric Co., Ltd. Glass frit mixture coating apparatus
US4370356A (en) * 1981-05-20 1983-01-25 Integrated Technologies, Inc. Method of meniscus coating
US4676404A (en) * 1983-10-17 1987-06-30 Nippon Zeon Co., Ltd. Method and apparatus for feeding drug liquid from hermetic returnable can
EP0395957B1 (de) * 1989-04-21 1995-07-05 Idemitsu Kosan Company Limited Herstellungsverfahren für ein mit einem Film aus flüssigkristallinem Material überzogenes Substrat sowie Verfahren und Gerät zur Herstellung einer optischen Vorrichtung mit einem Flüssigkristall

Also Published As

Publication number Publication date
CA2111795C (en) 1999-12-07
EP0603007B1 (de) 1996-06-12
MX9308187A (es) 1995-01-31
JP2987797B2 (ja) 1999-12-06
DE69303149T2 (de) 1997-01-30
US5270079A (en) 1993-12-14
EP0603007A1 (de) 1994-06-22
JPH06206027A (ja) 1994-07-26
CA2111795A1 (en) 1994-06-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee