DE69305231D1 - Piezoelektrischer/elektrostriktiver Antrieb - Google Patents
Piezoelektrischer/elektrostriktiver AntriebInfo
- Publication number
- DE69305231D1 DE69305231D1 DE69305231T DE69305231T DE69305231D1 DE 69305231 D1 DE69305231 D1 DE 69305231D1 DE 69305231 T DE69305231 T DE 69305231T DE 69305231 T DE69305231 T DE 69305231T DE 69305231 D1 DE69305231 D1 DE 69305231D1
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric
- electrostrictive drive
- electrostrictive
- drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/1051—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
- H10N30/10513—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16020492 | 1992-05-27 | ||
JP08799793A JP3144949B2 (ja) | 1992-05-27 | 1993-03-22 | 圧電/電歪アクチュエータ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69305231D1 true DE69305231D1 (de) | 1996-11-14 |
DE69305231T2 DE69305231T2 (de) | 1997-03-06 |
Family
ID=26429216
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69305231T Expired - Lifetime DE69305231T2 (de) | 1992-05-27 | 1993-05-26 | Piezoelektrischer/elektrostriktiver Antrieb |
Country Status (6)
Country | Link |
---|---|
US (2) | US5643379A (de) |
EP (1) | EP0572230B1 (de) |
JP (1) | JP3144949B2 (de) |
DE (1) | DE69305231T2 (de) |
HK (1) | HK24397A (de) |
SG (1) | SG50389A1 (de) |
Families Citing this family (93)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3144948B2 (ja) * | 1992-05-27 | 2001-03-12 | 日本碍子株式会社 | インクジェットプリントヘッド |
JP3317308B2 (ja) * | 1992-08-26 | 2002-08-26 | セイコーエプソン株式会社 | 積層型インクジェット記録ヘッド、及びその製造方法 |
US6601949B1 (en) | 1992-08-26 | 2003-08-05 | Seiko Epson Corporation | Actuator unit for ink jet recording head |
JP3106044B2 (ja) * | 1992-12-04 | 2000-11-06 | 日本碍子株式会社 | アクチュエータ及びそれを用いたインクジェットプリントヘッド |
JP3106026B2 (ja) * | 1993-02-23 | 2000-11-06 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
US5790149A (en) * | 1993-06-03 | 1998-08-04 | Seiko Epson Corporation | Ink jet recording head |
US6004644A (en) * | 1994-07-26 | 1999-12-21 | Ngk Insulators, Ltd. | Zirconia diaphragm structure and piezoelectric/electrostrictive film element having the zirconia diaphragm structure |
IL106803A (en) * | 1993-08-25 | 1998-02-08 | Scitex Corp Ltd | Printable inkjet head |
IT1268870B1 (it) * | 1993-08-23 | 1997-03-13 | Seiko Epson Corp | Testa di registrazione a getto d'inchiostro e procedimento per la sua fabbricazione. |
JP3280799B2 (ja) * | 1993-10-14 | 2002-05-13 | 日本碍子株式会社 | 薄肉ジルコニアダイヤフラム構造体及びその製造法並びにそれを用いた圧電/電歪膜型素子 |
EP0659562B1 (de) * | 1993-12-24 | 2002-07-24 | Seiko Epson Corporation | Lamellenartig aufgebauter Tintenstrahlaufzeichnungskopf |
SG64335A1 (en) | 1993-12-28 | 1999-04-27 | Seiko Epson Corp | Ink jet recording head |
JP3088890B2 (ja) * | 1994-02-04 | 2000-09-18 | 日本碍子株式会社 | 圧電/電歪膜型アクチュエータ |
US6049158A (en) * | 1994-02-14 | 2000-04-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same |
US5545461A (en) * | 1994-02-14 | 1996-08-13 | Ngk Insulators, Ltd. | Ceramic diaphragm structure having convex diaphragm portion and method of producing the same |
JP3162584B2 (ja) * | 1994-02-14 | 2001-05-08 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
DE19515406C2 (de) * | 1994-04-26 | 1999-04-01 | Seiko Epson Corp | Tintenstrahl-Schreibkopf und Herstellungsverfahren für den Tintentstrahl-Schreibkopf |
US5825121A (en) | 1994-07-08 | 1998-10-20 | Seiko Epson Corporation | Thin film piezoelectric device and ink jet recording head comprising the same |
DE59509149D1 (de) * | 1994-08-03 | 2001-05-10 | Francotyp Postalia Gmbh | Anordnung für plattenförmige Piezoaktoren und Verfahren zu deren Herstellung |
CN1045231C (zh) * | 1994-08-11 | 1999-09-22 | 日本碍子株式会社 | 陶瓷膜片结构及其制作方法 |
JP3196811B2 (ja) * | 1994-10-17 | 2001-08-06 | セイコーエプソン株式会社 | 積層型インクジェット式記録ヘッド、及びその製造方法 |
JP3471447B2 (ja) * | 1994-11-16 | 2003-12-02 | 日本碍子株式会社 | セラミックダイヤフラム構造体およびその製造方法 |
JP3388060B2 (ja) * | 1994-11-25 | 2003-03-17 | 日本碍子株式会社 | 流体の特性測定用素子及び流体の特性測定装置 |
JP3570447B2 (ja) * | 1994-12-21 | 2004-09-29 | セイコーエプソン株式会社 | 積層型インクジェット式記録ヘッド、及びその製造方法、及び記録装置 |
US5814923A (en) * | 1994-12-27 | 1998-09-29 | Seiko Epson Corporation | Piezoelectric thin-film device, process for producing the same, and ink jet recording head using said device |
US5907338A (en) * | 1995-01-13 | 1999-05-25 | Burr; Ronald F. | High-performance ink jet print head |
JP3366146B2 (ja) * | 1995-03-06 | 2003-01-14 | セイコーエプソン株式会社 | インク噴射ヘッド |
JP3320947B2 (ja) * | 1995-05-26 | 2002-09-03 | 日本碍子株式会社 | 微細貫通孔を有するセラミック部材 |
JP3987139B2 (ja) * | 1995-06-27 | 2007-10-03 | セイコーエプソン株式会社 | インクジェット式記録ヘッド |
US6158847A (en) | 1995-07-14 | 2000-12-12 | Seiko Epson Corporation | Laminated ink-jet recording head, a process for production thereof and a printer equipped with the recording head |
US5907340A (en) * | 1995-07-24 | 1999-05-25 | Seiko Epson Corporation | Laminated ink jet recording head with plural actuator units connected at outermost ends |
US5963234A (en) * | 1995-08-23 | 1999-10-05 | Seiko Epson Corporation | Laminated ink jet recording head having flow path unit with recess that confronts but does not communicate with common ink chamber |
JP3890634B2 (ja) | 1995-09-19 | 2007-03-07 | セイコーエプソン株式会社 | 圧電体薄膜素子及びインクジェット式記録ヘッド |
JP3585310B2 (ja) * | 1996-02-20 | 2004-11-04 | 日本碍子株式会社 | マルチダイヤフラム構造体の製造法 |
EP1118467B1 (de) * | 1996-04-10 | 2006-01-25 | Seiko Epson Corporation | Tintenstrahlaufzeichnungskopf |
JP3267151B2 (ja) * | 1996-04-12 | 2002-03-18 | ミノルタ株式会社 | 圧電振動部材およびその製造方法 |
EP0810676B1 (de) * | 1996-05-27 | 2002-08-28 | Ngk Insulators, Ltd. | Piezoelektrisches Element des Dünnschichttyps |
US5958165A (en) * | 1996-07-19 | 1999-09-28 | Ngk Insulators, Ltd. | Method of manufacturing ceramic member |
JPH10211701A (ja) * | 1996-11-06 | 1998-08-11 | Seiko Epson Corp | 圧電体素子を備えたアクチュエータ及びインクジェット式記録ヘッド、並びにこれらの製造方法 |
US5877580A (en) * | 1996-12-23 | 1999-03-02 | Regents Of The University Of California | Micromachined chemical jet dispenser |
JP3592023B2 (ja) * | 1997-03-04 | 2004-11-24 | 日本碍子株式会社 | 機能性膜素子の製造方法 |
US6786420B1 (en) | 1997-07-15 | 2004-09-07 | Silverbrook Research Pty. Ltd. | Data distribution mechanism in the form of ink dots on cards |
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US6879341B1 (en) | 1997-07-15 | 2005-04-12 | Silverbrook Research Pty Ltd | Digital camera system containing a VLIW vector processor |
US7110024B1 (en) | 1997-07-15 | 2006-09-19 | Silverbrook Research Pty Ltd | Digital camera system having motion deblurring means |
US7551201B2 (en) | 1997-07-15 | 2009-06-23 | Silverbrook Research Pty Ltd | Image capture and processing device for a print on demand digital camera system |
US6624848B1 (en) | 1997-07-15 | 2003-09-23 | Silverbrook Research Pty Ltd | Cascading image modification using multiple digital cameras incorporating image processing |
DE69936075T2 (de) | 1998-01-22 | 2007-09-13 | Seiko Epson Corp. | Piezoelektrisches Schichtelement und Tintenstrahldruckkopf, der dieses benutzt |
JP3520403B2 (ja) | 1998-01-23 | 2004-04-19 | セイコーエプソン株式会社 | 圧電体薄膜素子、アクチュエータ、インクジェット式記録ヘッド、及びインクジェット式記録装置 |
US6616270B1 (en) | 1998-08-21 | 2003-09-09 | Seiko Epson Corporation | Ink jet recording head and ink jet recording apparatus comprising the same |
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JP3436735B2 (ja) * | 1999-10-01 | 2003-08-18 | 日本碍子株式会社 | 圧電/電歪デバイス及びその製造方法 |
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EP1372199B1 (de) | 2001-03-12 | 2010-12-15 | NGK Insulators, Ltd. | Betätigungsglied des typs mit piezoelektischem/elektrostriktivem film und verfahren zu seiner herstellung |
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JP6197311B2 (ja) * | 2013-03-11 | 2017-09-20 | セイコーエプソン株式会社 | 流路基板の製造方法、流路ユニットの製造方法、流路ユニット、液体噴射ヘッド、及び、液体噴射装置 |
JP6263871B2 (ja) * | 2013-06-25 | 2018-01-24 | セイコーエプソン株式会社 | 流路ユニット、液体噴射ヘッド、液体噴射装置 |
JP6861558B2 (ja) * | 2017-03-31 | 2021-04-21 | ローム株式会社 | 超音波装置 |
Family Cites Families (19)
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---|---|---|---|---|
US3946398A (en) * | 1970-06-29 | 1976-03-23 | Silonics, Inc. | Method and apparatus for recording with writing fluids and drop projection means therefor |
SE349676B (de) * | 1971-01-11 | 1972-10-02 | N Stemme | |
US4611219A (en) * | 1981-12-29 | 1986-09-09 | Canon Kabushiki Kaisha | Liquid-jetting head |
JPS5989163A (ja) * | 1982-10-25 | 1984-05-23 | Seiko Epson Corp | インクジエツトヘツド |
US4516140A (en) * | 1983-12-27 | 1985-05-07 | At&T Teletype Corporation | Print head actuator for an ink jet printer |
US4680595A (en) * | 1985-11-06 | 1987-07-14 | Pitney Bowes Inc. | Impulse ink jet print head and method of making same |
US4730197A (en) * | 1985-11-06 | 1988-03-08 | Pitney Bowes Inc. | Impulse ink jet system |
JPS62213399A (ja) * | 1986-03-12 | 1987-09-19 | Omron Tateisi Electronics Co | 圧電磁器 |
US4695854A (en) * | 1986-07-30 | 1987-09-22 | Pitney Bowes Inc. | External manifold for ink jet array |
JPS63149159A (ja) * | 1986-12-12 | 1988-06-21 | Fuji Electric Co Ltd | インクジエツト記録ヘツド |
JP2806386B2 (ja) * | 1988-02-16 | 1998-09-30 | 富士電機株式会社 | インクジェット記録ヘッド |
JPH0764060B2 (ja) * | 1989-06-09 | 1995-07-12 | シャープ株式会社 | インクジェットプリンタ |
JP2842448B2 (ja) * | 1989-07-11 | 1999-01-06 | 日本碍子株式会社 | 圧電/電歪膜型アクチュエータ |
EP0408306B1 (de) * | 1989-07-11 | 1996-05-01 | Ngk Insulators, Ltd. | Einen piezoelektrischen/elektrostriktiven Film enthaltende piezoelektrischer/elektrostriktiver Antrieb |
JP2886588B2 (ja) * | 1989-07-11 | 1999-04-26 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
US5089455A (en) * | 1989-08-11 | 1992-02-18 | Corning Incorporated | Thin flexible sintered structures |
JP3041952B2 (ja) * | 1990-02-23 | 2000-05-15 | セイコーエプソン株式会社 | インクジェット式記録ヘッド、圧電振動体、及びこれらの製造方法 |
JPH07108102B2 (ja) * | 1990-05-01 | 1995-11-15 | 日本碍子株式会社 | 圧電/電歪膜型アクチュエータの製造方法 |
US5210455A (en) * | 1990-07-26 | 1993-05-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion |
-
1993
- 1993-03-22 JP JP08799793A patent/JP3144949B2/ja not_active Expired - Lifetime
- 1993-05-26 EP EP93304069A patent/EP0572230B1/de not_active Expired - Lifetime
- 1993-05-26 SG SG1995002317A patent/SG50389A1/en unknown
- 1993-05-26 DE DE69305231T patent/DE69305231T2/de not_active Expired - Lifetime
-
1995
- 1995-03-22 US US08/408,387 patent/US5643379A/en not_active Expired - Lifetime
- 1995-03-23 US US08/408,814 patent/US5475279A/en not_active Expired - Lifetime
-
1997
- 1997-02-27 HK HK24397A patent/HK24397A/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0572230A2 (de) | 1993-12-01 |
SG50389A1 (en) | 1998-07-20 |
DE69305231T2 (de) | 1997-03-06 |
JPH0640035A (ja) | 1994-02-15 |
US5643379A (en) | 1997-07-01 |
US5475279A (en) | 1995-12-12 |
EP0572230B1 (de) | 1996-10-09 |
JP3144949B2 (ja) | 2001-03-12 |
HK24397A (en) | 1997-02-27 |
EP0572230A3 (de) | 1994-04-06 |
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