DE69309283D1 - Kaltkathoden - Google Patents

Kaltkathoden

Info

Publication number
DE69309283D1
DE69309283D1 DE69309283T DE69309283T DE69309283D1 DE 69309283 D1 DE69309283 D1 DE 69309283D1 DE 69309283 T DE69309283 T DE 69309283T DE 69309283 T DE69309283 T DE 69309283T DE 69309283 D1 DE69309283 D1 DE 69309283D1
Authority
DE
Germany
Prior art keywords
cold cathodes
cathodes
cold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69309283T
Other languages
English (en)
Other versions
DE69309283T2 (de
Inventor
Peter Wilshaw
Emily Trinity College Boswell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BTG International Ltd
Original Assignee
British Technology Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Technology Group Ltd filed Critical British Technology Group Ltd
Application granted granted Critical
Publication of DE69309283D1 publication Critical patent/DE69309283D1/de
Publication of DE69309283T2 publication Critical patent/DE69309283T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/02—Manufacture of cathodes
    • H01J2209/022—Cold cathodes
    • H01J2209/0223—Field emission cathodes
    • H01J2209/0226—Sharpening or resharpening of emitting point or edge
DE69309283T 1992-08-05 1993-08-04 Kaltkathoden Expired - Fee Related DE69309283T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB929216647A GB9216647D0 (en) 1992-08-05 1992-08-05 Cold cathodes
PCT/GB1993/001650 WO1994003916A1 (en) 1992-08-05 1993-08-04 Method of manufacturing cold cathodes

Publications (2)

Publication Number Publication Date
DE69309283D1 true DE69309283D1 (de) 1997-04-30
DE69309283T2 DE69309283T2 (de) 1997-07-03

Family

ID=10719877

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69309283T Expired - Fee Related DE69309283T2 (de) 1992-08-05 1993-08-04 Kaltkathoden

Country Status (6)

Country Link
US (1) US5652474A (de)
EP (1) EP0654171B1 (de)
JP (1) JP2941058B2 (de)
DE (1) DE69309283T2 (de)
GB (1) GB9216647D0 (de)
WO (1) WO1994003916A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6187604B1 (en) 1994-09-16 2001-02-13 Micron Technology, Inc. Method of making field emitters using porous silicon
KR100287271B1 (ko) * 1994-11-04 2001-04-16 마이크론 테크놀로지 인코포레이티드 저온 산화공정을 사용하여 이미터 사이트를 예리하게 하는 방법
JP3281533B2 (ja) * 1996-03-26 2002-05-13 パイオニア株式会社 冷電子放出表示装置及び半導体冷電子放出素子
US5990605A (en) * 1997-03-25 1999-11-23 Pioneer Electronic Corporation Electron emission device and display device using the same
JP3631015B2 (ja) 1997-11-14 2005-03-23 キヤノン株式会社 電子放出素子及びその製造方法
EP0926698A3 (de) * 1997-12-25 2001-10-17 Pioneer Electronic Corporation Flacher Bildschirm mit Elektronenemittern
KR100375848B1 (ko) * 1999-03-19 2003-03-15 가부시끼가이샤 도시바 전계방출소자의 제조방법 및 디스플레이 장치
US20040003679A1 (en) * 2002-07-05 2004-01-08 David Ide Apparatus and method for in vitro recording and stimulation of cells
CA2533191C (en) * 2003-07-22 2012-11-13 Yeda Research And Development Company Ltd. Electron emission device
US7786662B2 (en) * 2005-05-19 2010-08-31 Texas Instruments Incorporated Display using a movable electron field emitter and method of manufacture thereof
US8023250B2 (en) * 2008-09-12 2011-09-20 Avx Corporation Substrate for use in wet capacitors
US8279585B2 (en) * 2008-12-09 2012-10-02 Avx Corporation Cathode for use in a wet capacitor
JP6311547B2 (ja) * 2013-11-05 2018-04-18 東京エレクトロン株式会社 マスク構造体の形成方法、成膜装置及び記憶媒体

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU700882A2 (ru) * 1975-11-14 1979-11-30 Томский Институт Автоматизированных Систем Управления И Радиоэлектроники Способ изготовлени холодного катода
GB8816689D0 (en) * 1988-07-13 1988-08-17 Emi Plc Thorn Method of manufacturing cold cathode field emission device & field emission device manufactured by method
US5085746A (en) * 1990-09-10 1992-02-04 North Carolina State University Method of fabricating scanning tunneling microscope tips
JP2550798B2 (ja) * 1991-04-12 1996-11-06 富士通株式会社 微小冷陰極の製造方法
US5525857A (en) * 1994-08-19 1996-06-11 Texas Instruments Inc. Low density, high porosity material as gate dielectric for field emission device

Also Published As

Publication number Publication date
JP2941058B2 (ja) 1999-08-25
EP0654171B1 (de) 1997-03-26
GB9216647D0 (en) 1992-09-16
JPH07509803A (ja) 1995-10-26
WO1994003916A1 (en) 1994-02-17
US5652474A (en) 1997-07-29
DE69309283T2 (de) 1997-07-03
EP0654171A1 (de) 1995-05-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: BTG INTERNATIONAL LTD., LONDON, GB

8339 Ceased/non-payment of the annual fee