DE69309420D1 - Verbundschleifmittel mit gesteuerter Abnützung, Gegenstände die diese beinhalten, und Verfahren zu deren Herstellung und Verwendung - Google Patents

Verbundschleifmittel mit gesteuerter Abnützung, Gegenstände die diese beinhalten, und Verfahren zu deren Herstellung und Verwendung

Info

Publication number
DE69309420D1
DE69309420D1 DE69309420T DE69309420T DE69309420D1 DE 69309420 D1 DE69309420 D1 DE 69309420D1 DE 69309420 T DE69309420 T DE 69309420T DE 69309420 T DE69309420 T DE 69309420T DE 69309420 D1 DE69309420 D1 DE 69309420D1
Authority
DE
Germany
Prior art keywords
abrasive
composite
binder
making
methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69309420T
Other languages
English (en)
Other versions
DE69309420T2 (de
Inventor
Louis D Hibbard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of DE69309420D1 publication Critical patent/DE69309420D1/de
Application granted granted Critical
Publication of DE69309420T2 publication Critical patent/DE69309420T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28Resins or natural or synthetic macromolecular compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B24D3/342Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
    • B24D3/344Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent the bonding agent being organic
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/34Silicon-containing compounds
    • C08K3/346Clay
DE69309420T 1992-12-31 1993-12-30 Verbundschleifmittel mit gesteuerter Abnützung, Gegenstände die diese beinhalten, und Verfahren zu deren Herstellung und Verwendung Expired - Fee Related DE69309420T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/999,097 US5342419A (en) 1992-12-31 1992-12-31 Abrasive composites having a controlled rate of erosion, articles incorporating same, and methods of making and using same

Publications (2)

Publication Number Publication Date
DE69309420D1 true DE69309420D1 (de) 1997-05-07
DE69309420T2 DE69309420T2 (de) 1997-11-27

Family

ID=25545897

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69309420T Expired - Fee Related DE69309420T2 (de) 1992-12-31 1993-12-30 Verbundschleifmittel mit gesteuerter Abnützung, Gegenstände die diese beinhalten, und Verfahren zu deren Herstellung und Verwendung

Country Status (8)

Country Link
US (2) US5342419A (de)
EP (1) EP0605008B1 (de)
JP (1) JPH06206167A (de)
KR (1) KR940013731A (de)
AT (1) ATE150999T1 (de)
CA (1) CA2107955A1 (de)
DE (1) DE69309420T2 (de)
ES (1) ES2099895T3 (de)

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US5378252A (en) * 1993-09-03 1995-01-03 Minnesota Mining And Manufacturing Company Abrasive articles
CA2134156A1 (en) * 1993-11-22 1995-05-23 Thomas P. Klun Coatable compositions, abrasive articles made therefrom, and methods of making and using same
JP3328439B2 (ja) * 1994-09-06 2002-09-24 活生株式会社 流体処理剤用組成物
US5958794A (en) * 1995-09-22 1999-09-28 Minnesota Mining And Manufacturing Company Method of modifying an exposed surface of a semiconductor wafer
US5700302A (en) * 1996-03-15 1997-12-23 Minnesota Mining And Manufacturing Company Radiation curable abrasive article with tie coat and method
US6379221B1 (en) 1996-12-31 2002-04-30 Applied Materials, Inc. Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing system
US5851247A (en) * 1997-02-24 1998-12-22 Minnesota Mining & Manufacturing Company Structured abrasive article adapted to abrade a mild steel workpiece
US8092707B2 (en) 1997-04-30 2012-01-10 3M Innovative Properties Company Compositions and methods for modifying a surface suited for semiconductor fabrication
US6194317B1 (en) 1998-04-30 2001-02-27 3M Innovative Properties Company Method of planarizing the upper surface of a semiconductor wafer
US5942015A (en) * 1997-09-16 1999-08-24 3M Innovative Properties Company Abrasive slurries and abrasive articles comprising multiple abrasive particle grades
US5897426A (en) 1998-04-24 1999-04-27 Applied Materials, Inc. Chemical mechanical polishing with multiple polishing pads
US6217432B1 (en) 1998-05-19 2001-04-17 3M Innovative Properties Company Abrasive article comprising a barrier coating
US6017351A (en) * 1998-11-17 2000-01-25 Street; Vernon D. Cosmetic method for removing detritus and foreign matter from the epidermis and a cosmetic abrasive pad for scrubbing the epidermis
JP4557105B2 (ja) * 1999-05-28 2010-10-06 日産化学工業株式会社 研磨用組成物
US6299516B1 (en) 1999-09-28 2001-10-09 Applied Materials, Inc. Substrate polishing article
US6422921B1 (en) 1999-10-22 2002-07-23 Applied Materials, Inc. Heat activated detachable polishing pad
US6607428B2 (en) 2000-01-18 2003-08-19 Applied Materials, Inc. Material for use in carrier and polishing pads
US6533645B2 (en) 2000-01-18 2003-03-18 Applied Materials, Inc. Substrate polishing article
US6623341B2 (en) 2000-01-18 2003-09-23 Applied Materials, Inc. Substrate polishing apparatus
US6569214B2 (en) * 2000-06-01 2003-05-27 U.S. Technology Corporation Composite polymer blast media
ES2189694A1 (es) * 2001-01-04 2003-07-01 Saint Gobain Abrasives Inc Tratamientos anti-ensuciamiento.
US6835220B2 (en) * 2001-01-04 2004-12-28 Saint-Gobain Abrasives Technology Company Anti-loading treatments
US6620027B2 (en) 2001-01-09 2003-09-16 Applied Materials Inc. Method and apparatus for hard pad polishing
US6811470B2 (en) 2001-07-16 2004-11-02 Applied Materials Inc. Methods and compositions for chemical mechanical polishing shallow trench isolation substrates
US6677239B2 (en) 2001-08-24 2004-01-13 Applied Materials Inc. Methods and compositions for chemical mechanical polishing
US6702866B2 (en) 2002-01-10 2004-03-09 Speedfam-Ipec Corporation Homogeneous fixed abrasive polishing pad
US6841480B2 (en) * 2002-02-04 2005-01-11 Infineon Technologies Ag Polyelectrolyte dispensing polishing pad, production thereof and method of polishing a substrate
US7199056B2 (en) * 2002-02-08 2007-04-03 Applied Materials, Inc. Low cost and low dishing slurry for polysilicon CMP
US6988937B2 (en) * 2002-04-11 2006-01-24 Saint-Gobain Abrasives Technology Company Method of roll grinding
US7063597B2 (en) 2002-10-25 2006-06-20 Applied Materials Polishing processes for shallow trench isolation substrates
EP1642914B1 (de) * 2002-11-14 2007-11-14 Rohm and Haas Company Haertbare Tonzusammensetzung, Verfahren und Anwendungen derselben
EP1697084A1 (de) * 2003-11-26 2006-09-06 3M Innovative Properties Company Verfahren zum schleifen eines werkstücks
US20060088976A1 (en) * 2004-10-22 2006-04-27 Applied Materials, Inc. Methods and compositions for chemical mechanical polishing substrates
US7591865B2 (en) * 2005-01-28 2009-09-22 Saint-Gobain Abrasives, Inc. Method of forming structured abrasive article
AU2006211183B2 (en) * 2005-01-28 2009-10-22 Saint-Gobain Abrasives, Inc. Abrasive articles and methods for making same
US8287611B2 (en) * 2005-01-28 2012-10-16 Saint-Gobain Abrasives, Inc. Abrasive articles and methods for making same
US7179159B2 (en) * 2005-05-02 2007-02-20 Applied Materials, Inc. Materials for chemical mechanical polishing
US20060265966A1 (en) * 2005-05-24 2006-11-30 Rostal William J Abrasive articles and methods of making and using the same
US20060265967A1 (en) * 2005-05-24 2006-11-30 3M Innovative Properties Company Abrasive articles and methods of making and using the same
US8435098B2 (en) * 2006-01-27 2013-05-07 Saint-Gobain Abrasives, Inc. Abrasive article with cured backsize layer
TWI289093B (en) * 2006-07-26 2007-11-01 Kinik Co Method of manufacturing diamond disk
US20080268227A1 (en) * 2007-04-30 2008-10-30 Chung-Chih Feng Complex polishing pad and method for making the same
JP5476666B2 (ja) * 2007-08-27 2014-04-23 学校法人早稲田大学 切削研削用組成物、切削研削油剤、切削研削用ホイール及び表面改質材
TW200927896A (en) * 2007-12-28 2009-07-01 Iv Technologies Co Ltd Polishing pad and polishing method
US20110094163A1 (en) * 2009-10-28 2011-04-28 Russell Eric E Coated abrasive product
DE102014216689A1 (de) * 2014-08-22 2016-02-25 Aktiebolaget Skf Verfahren zur Herstellung von Wälz- und Gleitlagern
US10086498B2 (en) * 2014-12-31 2018-10-02 Saint-Gobain Abrasives, Inc. Coated abrasives having a supersize layer including an active filler
JP6895441B2 (ja) 2015-12-30 2021-06-30 スリーエム イノベイティブ プロパティズ カンパニー 研磨物品及び関連する方法
CN108472786B (zh) 2015-12-30 2021-07-27 3M创新有限公司 磨料制品
US11845885B2 (en) 2015-12-30 2023-12-19 3M Innovative Properties Company Dual stage structural bonding adhesive

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US2676892A (en) * 1953-11-13 1954-04-27 Kanium Corp Method for making unicellular spherulized clay particles and articles and composition thereof
US2806772A (en) * 1954-09-15 1957-09-17 Electro Refractories & Abrasiv Abrasive bodies
DE1694594C3 (de) * 1960-01-11 1975-05-28 Minnesota Mining And Manufacturing Co., Saint Paul, Minn. (V.St.A.) Reinigungs- und Polierkörper
US3510283A (en) * 1965-12-29 1970-05-05 Minnesota Mining & Mfg Low density abrasive containing an epoxy-novolak resin bond
US3689346A (en) * 1970-09-29 1972-09-05 Rowland Dev Corp Method for producing retroreflective material
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US4644703A (en) * 1986-03-13 1987-02-24 Norton Company Plural layered coated abrasive
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US5011513A (en) * 1989-05-31 1991-04-30 Norton Company Single step, radiation curable ophthalmic fining pad
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JPH03146583A (ja) * 1989-11-01 1991-06-21 Hitachi Chem Co Ltd 摩擦材
US5152917B1 (en) * 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
US5256170A (en) * 1992-01-22 1993-10-26 Minnesota Mining And Manufacturing Company Coated abrasive article and method of making same
DE4207258A1 (de) * 1992-03-07 1993-09-09 Ruetgerswerke Ag Schleifmittel
US5342419A (en) * 1992-12-31 1994-08-30 Minnesota Mining And Manufacturing Company Abrasive composites having a controlled rate of erosion, articles incorporating same, and methods of making and using same

Also Published As

Publication number Publication date
KR940013731A (ko) 1994-07-15
ES2099895T3 (es) 1997-06-01
EP0605008A1 (de) 1994-07-06
US5342419A (en) 1994-08-30
JPH06206167A (ja) 1994-07-26
CA2107955A1 (en) 1994-07-01
DE69309420T2 (de) 1997-11-27
ATE150999T1 (de) 1997-04-15
US5518512A (en) 1996-05-21
EP0605008B1 (de) 1997-04-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee