DE69309420D1 - Verbundschleifmittel mit gesteuerter Abnützung, Gegenstände die diese beinhalten, und Verfahren zu deren Herstellung und Verwendung - Google Patents
Verbundschleifmittel mit gesteuerter Abnützung, Gegenstände die diese beinhalten, und Verfahren zu deren Herstellung und VerwendungInfo
- Publication number
- DE69309420D1 DE69309420D1 DE69309420T DE69309420T DE69309420D1 DE 69309420 D1 DE69309420 D1 DE 69309420D1 DE 69309420 T DE69309420 T DE 69309420T DE 69309420 T DE69309420 T DE 69309420T DE 69309420 D1 DE69309420 D1 DE 69309420D1
- Authority
- DE
- Germany
- Prior art keywords
- abrasive
- composite
- binder
- making
- methods
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002131 composite material Substances 0.000 title abstract 7
- 238000000034 method Methods 0.000 title abstract 2
- 239000003082 abrasive agent Substances 0.000 title 1
- 239000002245 particle Substances 0.000 abstract 6
- 239000011230 binding agent Substances 0.000 abstract 4
- 239000004927 clay Substances 0.000 abstract 3
- 239000000203 mixture Substances 0.000 abstract 2
- 238000005299 abrasion Methods 0.000 abstract 1
- 230000003628 erosive effect Effects 0.000 abstract 1
- 239000004744 fabric Substances 0.000 abstract 1
- 239000004745 nonwoven fabric Substances 0.000 abstract 1
- 239000002243 precursor Substances 0.000 abstract 1
- 239000011347 resin Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
- B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
- B24D3/344—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent the bonding agent being organic
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/34—Silicon-containing compounds
- C08K3/346—Clay
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/999,097 US5342419A (en) | 1992-12-31 | 1992-12-31 | Abrasive composites having a controlled rate of erosion, articles incorporating same, and methods of making and using same |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69309420D1 true DE69309420D1 (de) | 1997-05-07 |
DE69309420T2 DE69309420T2 (de) | 1997-11-27 |
Family
ID=25545897
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69309420T Expired - Fee Related DE69309420T2 (de) | 1992-12-31 | 1993-12-30 | Verbundschleifmittel mit gesteuerter Abnützung, Gegenstände die diese beinhalten, und Verfahren zu deren Herstellung und Verwendung |
Country Status (8)
Country | Link |
---|---|
US (2) | US5342419A (de) |
EP (1) | EP0605008B1 (de) |
JP (1) | JPH06206167A (de) |
KR (1) | KR940013731A (de) |
AT (1) | ATE150999T1 (de) |
CA (1) | CA2107955A1 (de) |
DE (1) | DE69309420T2 (de) |
ES (1) | ES2099895T3 (de) |
Families Citing this family (51)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5342419A (en) * | 1992-12-31 | 1994-08-30 | Minnesota Mining And Manufacturing Company | Abrasive composites having a controlled rate of erosion, articles incorporating same, and methods of making and using same |
US5378252A (en) * | 1993-09-03 | 1995-01-03 | Minnesota Mining And Manufacturing Company | Abrasive articles |
CA2134156A1 (en) * | 1993-11-22 | 1995-05-23 | Thomas P. Klun | Coatable compositions, abrasive articles made therefrom, and methods of making and using same |
JP3328439B2 (ja) * | 1994-09-06 | 2002-09-24 | 活生株式会社 | 流体処理剤用組成物 |
US5958794A (en) * | 1995-09-22 | 1999-09-28 | Minnesota Mining And Manufacturing Company | Method of modifying an exposed surface of a semiconductor wafer |
US5700302A (en) * | 1996-03-15 | 1997-12-23 | Minnesota Mining And Manufacturing Company | Radiation curable abrasive article with tie coat and method |
US6379221B1 (en) | 1996-12-31 | 2002-04-30 | Applied Materials, Inc. | Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing system |
US5851247A (en) * | 1997-02-24 | 1998-12-22 | Minnesota Mining & Manufacturing Company | Structured abrasive article adapted to abrade a mild steel workpiece |
US8092707B2 (en) | 1997-04-30 | 2012-01-10 | 3M Innovative Properties Company | Compositions and methods for modifying a surface suited for semiconductor fabrication |
US6194317B1 (en) | 1998-04-30 | 2001-02-27 | 3M Innovative Properties Company | Method of planarizing the upper surface of a semiconductor wafer |
US5942015A (en) * | 1997-09-16 | 1999-08-24 | 3M Innovative Properties Company | Abrasive slurries and abrasive articles comprising multiple abrasive particle grades |
US5897426A (en) | 1998-04-24 | 1999-04-27 | Applied Materials, Inc. | Chemical mechanical polishing with multiple polishing pads |
US6217432B1 (en) | 1998-05-19 | 2001-04-17 | 3M Innovative Properties Company | Abrasive article comprising a barrier coating |
US6017351A (en) * | 1998-11-17 | 2000-01-25 | Street; Vernon D. | Cosmetic method for removing detritus and foreign matter from the epidermis and a cosmetic abrasive pad for scrubbing the epidermis |
JP4557105B2 (ja) * | 1999-05-28 | 2010-10-06 | 日産化学工業株式会社 | 研磨用組成物 |
US6299516B1 (en) | 1999-09-28 | 2001-10-09 | Applied Materials, Inc. | Substrate polishing article |
US6422921B1 (en) | 1999-10-22 | 2002-07-23 | Applied Materials, Inc. | Heat activated detachable polishing pad |
US6607428B2 (en) | 2000-01-18 | 2003-08-19 | Applied Materials, Inc. | Material for use in carrier and polishing pads |
US6533645B2 (en) | 2000-01-18 | 2003-03-18 | Applied Materials, Inc. | Substrate polishing article |
US6623341B2 (en) | 2000-01-18 | 2003-09-23 | Applied Materials, Inc. | Substrate polishing apparatus |
US6569214B2 (en) * | 2000-06-01 | 2003-05-27 | U.S. Technology Corporation | Composite polymer blast media |
ES2189694A1 (es) * | 2001-01-04 | 2003-07-01 | Saint Gobain Abrasives Inc | Tratamientos anti-ensuciamiento. |
US6835220B2 (en) * | 2001-01-04 | 2004-12-28 | Saint-Gobain Abrasives Technology Company | Anti-loading treatments |
US6620027B2 (en) | 2001-01-09 | 2003-09-16 | Applied Materials Inc. | Method and apparatus for hard pad polishing |
US6811470B2 (en) | 2001-07-16 | 2004-11-02 | Applied Materials Inc. | Methods and compositions for chemical mechanical polishing shallow trench isolation substrates |
US6677239B2 (en) | 2001-08-24 | 2004-01-13 | Applied Materials Inc. | Methods and compositions for chemical mechanical polishing |
US6702866B2 (en) | 2002-01-10 | 2004-03-09 | Speedfam-Ipec Corporation | Homogeneous fixed abrasive polishing pad |
US6841480B2 (en) * | 2002-02-04 | 2005-01-11 | Infineon Technologies Ag | Polyelectrolyte dispensing polishing pad, production thereof and method of polishing a substrate |
US7199056B2 (en) * | 2002-02-08 | 2007-04-03 | Applied Materials, Inc. | Low cost and low dishing slurry for polysilicon CMP |
US6988937B2 (en) * | 2002-04-11 | 2006-01-24 | Saint-Gobain Abrasives Technology Company | Method of roll grinding |
US7063597B2 (en) | 2002-10-25 | 2006-06-20 | Applied Materials | Polishing processes for shallow trench isolation substrates |
EP1642914B1 (de) * | 2002-11-14 | 2007-11-14 | Rohm and Haas Company | Haertbare Tonzusammensetzung, Verfahren und Anwendungen derselben |
EP1697084A1 (de) * | 2003-11-26 | 2006-09-06 | 3M Innovative Properties Company | Verfahren zum schleifen eines werkstücks |
US20060088976A1 (en) * | 2004-10-22 | 2006-04-27 | Applied Materials, Inc. | Methods and compositions for chemical mechanical polishing substrates |
US7591865B2 (en) * | 2005-01-28 | 2009-09-22 | Saint-Gobain Abrasives, Inc. | Method of forming structured abrasive article |
AU2006211183B2 (en) * | 2005-01-28 | 2009-10-22 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods for making same |
US8287611B2 (en) * | 2005-01-28 | 2012-10-16 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods for making same |
US7179159B2 (en) * | 2005-05-02 | 2007-02-20 | Applied Materials, Inc. | Materials for chemical mechanical polishing |
US20060265966A1 (en) * | 2005-05-24 | 2006-11-30 | Rostal William J | Abrasive articles and methods of making and using the same |
US20060265967A1 (en) * | 2005-05-24 | 2006-11-30 | 3M Innovative Properties Company | Abrasive articles and methods of making and using the same |
US8435098B2 (en) * | 2006-01-27 | 2013-05-07 | Saint-Gobain Abrasives, Inc. | Abrasive article with cured backsize layer |
TWI289093B (en) * | 2006-07-26 | 2007-11-01 | Kinik Co | Method of manufacturing diamond disk |
US20080268227A1 (en) * | 2007-04-30 | 2008-10-30 | Chung-Chih Feng | Complex polishing pad and method for making the same |
JP5476666B2 (ja) * | 2007-08-27 | 2014-04-23 | 学校法人早稲田大学 | 切削研削用組成物、切削研削油剤、切削研削用ホイール及び表面改質材 |
TW200927896A (en) * | 2007-12-28 | 2009-07-01 | Iv Technologies Co Ltd | Polishing pad and polishing method |
US20110094163A1 (en) * | 2009-10-28 | 2011-04-28 | Russell Eric E | Coated abrasive product |
DE102014216689A1 (de) * | 2014-08-22 | 2016-02-25 | Aktiebolaget Skf | Verfahren zur Herstellung von Wälz- und Gleitlagern |
US10086498B2 (en) * | 2014-12-31 | 2018-10-02 | Saint-Gobain Abrasives, Inc. | Coated abrasives having a supersize layer including an active filler |
JP6895441B2 (ja) | 2015-12-30 | 2021-06-30 | スリーエム イノベイティブ プロパティズ カンパニー | 研磨物品及び関連する方法 |
CN108472786B (zh) | 2015-12-30 | 2021-07-27 | 3M创新有限公司 | 磨料制品 |
US11845885B2 (en) | 2015-12-30 | 2023-12-19 | 3M Innovative Properties Company | Dual stage structural bonding adhesive |
Family Cites Families (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2322156A (en) * | 1941-12-30 | 1943-06-15 | Behr Manning Corp | Coated abrasive |
US2534805A (en) * | 1947-03-10 | 1950-12-19 | Behr Manning Corp | Coated abrasive articles and backings for such articles |
US2676892A (en) * | 1953-11-13 | 1954-04-27 | Kanium Corp | Method for making unicellular spherulized clay particles and articles and composition thereof |
US2806772A (en) * | 1954-09-15 | 1957-09-17 | Electro Refractories & Abrasiv | Abrasive bodies |
DE1694594C3 (de) * | 1960-01-11 | 1975-05-28 | Minnesota Mining And Manufacturing Co., Saint Paul, Minn. (V.St.A.) | Reinigungs- und Polierkörper |
US3510283A (en) * | 1965-12-29 | 1970-05-05 | Minnesota Mining & Mfg | Low density abrasive containing an epoxy-novolak resin bond |
US3689346A (en) * | 1970-09-29 | 1972-09-05 | Rowland Dev Corp | Method for producing retroreflective material |
GB1482839A (en) * | 1974-10-29 | 1977-08-17 | Sanyo Trading Co | Vulcanisable rubber compositions and vulcanised rubber prepared therefrom |
US4318766A (en) * | 1975-09-02 | 1982-03-09 | Minnesota Mining And Manufacturing Company | Process of using photocopolymerizable compositions based on epoxy and hydroxyl-containing organic materials |
US4576850A (en) * | 1978-07-20 | 1986-03-18 | Minnesota Mining And Manufacturing Company | Shaped plastic articles having replicated microstructure surfaces |
US4588419A (en) * | 1980-10-08 | 1986-05-13 | Carborundum Abrasives Company | Resin systems for high energy electron curable resin coated webs |
EP0109581A3 (de) * | 1982-11-22 | 1985-04-24 | Allied Corporation | System zur Informationsfeld-Ortung auf einem Anzeigegerät und zur Feldbeschreibererzeugung mit Information, die mit jedem der Anzeigefelder verwandt ist |
JPS61146475A (ja) * | 1984-12-20 | 1986-07-04 | Mitsubishi Heavy Ind Ltd | 砥粒保持用ボンド |
US4642126A (en) * | 1985-02-11 | 1987-02-10 | Norton Company | Coated abrasives with rapidly curable adhesives and controllable curvature |
US4652275A (en) * | 1985-08-07 | 1987-03-24 | Minnesota Mining And Manufacturing Company | Erodable agglomerates and abrasive products containing the same |
US4652274A (en) * | 1985-08-07 | 1987-03-24 | Minnesota Mining And Manufacturing Company | Coated abrasive product having radiation curable binder |
US4773920B1 (en) * | 1985-12-16 | 1995-05-02 | Minnesota Mining & Mfg | Coated abrasive suitable for use as a lapping material. |
US4644703A (en) * | 1986-03-13 | 1987-02-24 | Norton Company | Plural layered coated abrasive |
US4751138A (en) * | 1986-08-11 | 1988-06-14 | Minnesota Mining And Manufacturing Company | Coated abrasive having radiation curable binder |
JPS6393567A (ja) * | 1986-10-09 | 1988-04-23 | Toray Ind Inc | 擦過処理用素材 |
US4828583A (en) * | 1987-04-02 | 1989-05-09 | Minnesota Mining And Manufacturing Company | Coated abrasive binder containing ternary photoinitiator system |
US4735632A (en) * | 1987-04-02 | 1988-04-05 | Minnesota Mining And Manufacturing Company | Coated abrasive binder containing ternary photoinitiator system |
US4952612A (en) * | 1987-08-28 | 1990-08-28 | Minnesota Mining And Manufacturing Company | Energy-induced curable compositions |
US4950696A (en) * | 1987-08-28 | 1990-08-21 | Minnesota Mining And Manufacturing Company | Energy-induced dual curable compositions |
US4871376A (en) * | 1987-12-14 | 1989-10-03 | Minnesota Mining And Manufacturing Company | Resin systems for coated products; and method |
US4985340A (en) * | 1988-06-01 | 1991-01-15 | Minnesota Mining And Manufacturing Company | Energy curable compositions: two component curing agents |
US5011512A (en) * | 1988-07-08 | 1991-04-30 | Minnesota Mining And Manufacturing Company | Coated abrasive products employing nonabrasive diluent grains |
US4927431A (en) * | 1988-09-08 | 1990-05-22 | Minnesota Mining And Manufacturing Company | Binder for coated abrasives |
US4903440A (en) * | 1988-11-23 | 1990-02-27 | Minnesota Mining And Manufacturing Company | Abrasive product having binder comprising an aminoplast resin |
US4933373A (en) * | 1989-04-06 | 1990-06-12 | Minnesota Mining And Manufacturing Company | Abrasive wheels |
US5014468A (en) * | 1989-05-05 | 1991-05-14 | Norton Company | Patterned coated abrasive for fine surface finishing |
US5011513A (en) * | 1989-05-31 | 1991-04-30 | Norton Company | Single step, radiation curable ophthalmic fining pad |
JPH0369382A (ja) * | 1989-08-09 | 1991-03-25 | Fujitsu Ltd | クリーニングテープ |
JPH03146583A (ja) * | 1989-11-01 | 1991-06-21 | Hitachi Chem Co Ltd | 摩擦材 |
US5152917B1 (en) * | 1991-02-06 | 1998-01-13 | Minnesota Mining & Mfg | Structured abrasive article |
US5256170A (en) * | 1992-01-22 | 1993-10-26 | Minnesota Mining And Manufacturing Company | Coated abrasive article and method of making same |
DE4207258A1 (de) * | 1992-03-07 | 1993-09-09 | Ruetgerswerke Ag | Schleifmittel |
US5342419A (en) * | 1992-12-31 | 1994-08-30 | Minnesota Mining And Manufacturing Company | Abrasive composites having a controlled rate of erosion, articles incorporating same, and methods of making and using same |
-
1992
- 1992-12-31 US US07/999,097 patent/US5342419A/en not_active Expired - Lifetime
-
1993
- 1993-10-07 CA CA002107955A patent/CA2107955A1/en not_active Abandoned
- 1993-12-24 JP JP5327359A patent/JPH06206167A/ja active Pending
- 1993-12-30 KR KR1019930031224A patent/KR940013731A/ko not_active Application Discontinuation
- 1993-12-30 AT AT93121124T patent/ATE150999T1/de not_active IP Right Cessation
- 1993-12-30 EP EP93121124A patent/EP0605008B1/de not_active Expired - Lifetime
- 1993-12-30 ES ES93121124T patent/ES2099895T3/es not_active Expired - Lifetime
- 1993-12-30 DE DE69309420T patent/DE69309420T2/de not_active Expired - Fee Related
-
1994
- 1994-06-01 US US08/252,418 patent/US5518512A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR940013731A (ko) | 1994-07-15 |
ES2099895T3 (es) | 1997-06-01 |
EP0605008A1 (de) | 1994-07-06 |
US5342419A (en) | 1994-08-30 |
JPH06206167A (ja) | 1994-07-26 |
CA2107955A1 (en) | 1994-07-01 |
DE69309420T2 (de) | 1997-11-27 |
ATE150999T1 (de) | 1997-04-15 |
US5518512A (en) | 1996-05-21 |
EP0605008B1 (de) | 1997-04-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |