DE69311327T2 - Mikrotechnologisch hergestellter sensor - Google Patents
Mikrotechnologisch hergestellter sensorInfo
- Publication number
- DE69311327T2 DE69311327T2 DE69311327T DE69311327T DE69311327T2 DE 69311327 T2 DE69311327 T2 DE 69311327T2 DE 69311327 T DE69311327 T DE 69311327T DE 69311327 T DE69311327 T DE 69311327T DE 69311327 T2 DE69311327 T2 DE 69311327T2
- Authority
- DE
- Germany
- Prior art keywords
- technology sensor
- micro technology
- micro
- sensor
- technology
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
- G01L9/002—Optical excitation or measuring
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/10—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings
- G01L1/103—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings optical excitation or measuring of vibrations
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP92200910 | 1992-03-30 | ||
PCT/EP1993/000736 WO1993020422A1 (en) | 1992-03-30 | 1993-03-24 | Micromachined sensor device |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69311327D1 DE69311327D1 (de) | 1997-07-10 |
DE69311327T2 true DE69311327T2 (de) | 1997-09-25 |
Family
ID=8210517
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69311327T Expired - Fee Related DE69311327T2 (de) | 1992-03-30 | 1993-03-24 | Mikrotechnologisch hergestellter sensor |
Country Status (8)
Country | Link |
---|---|
US (1) | US5338929A (de) |
EP (1) | EP0634008B1 (de) |
AU (1) | AU671985B2 (de) |
BR (1) | BR9306173A (de) |
CA (1) | CA2133217C (de) |
DE (1) | DE69311327T2 (de) |
NO (1) | NO308051B1 (de) |
WO (1) | WO1993020422A1 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9524624D0 (en) * | 1995-12-01 | 1996-01-31 | Weston Aerospace Ltd | Pressure sensor |
US5780844A (en) * | 1996-04-23 | 1998-07-14 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Strain insensitive optical phase locked loop |
US6408496B1 (en) | 1997-07-09 | 2002-06-25 | Ronald S. Maynard | Method of manufacturing a vibrational transducer |
EP1153194B1 (de) | 1999-01-13 | 2003-11-19 | Vermeer Manufacturing Company | Automatisiertes bohrplanungsverfahren und vorrichtung zum horizontalen richtungsbohren |
US6315062B1 (en) | 1999-09-24 | 2001-11-13 | Vermeer Manufacturing Company | Horizontal directional drilling machine employing inertial navigation control system and method |
US6834552B1 (en) * | 1999-11-03 | 2004-12-28 | Vestas Wind Systems A/S | Fibre-optical strain-gauge |
US7443509B1 (en) | 2004-12-12 | 2008-10-28 | Burns David W | Optical and electronic interface for optically coupled resonators |
US7605391B2 (en) * | 2004-12-12 | 2009-10-20 | Burns David W | Optically coupled resonator |
US7499604B1 (en) | 2004-12-12 | 2009-03-03 | Burns David W | Optically coupled resonant pressure sensor and process |
US7379629B1 (en) | 2004-12-12 | 2008-05-27 | Burns David W | Optically coupled resonant pressure sensor |
US7176048B1 (en) | 2004-12-12 | 2007-02-13 | Burns David W | Optically coupled sealed-cavity resonator and process |
US7673679B2 (en) * | 2005-09-19 | 2010-03-09 | Schlumberger Technology Corporation | Protective barriers for small devices |
FR2928007B1 (fr) * | 2008-02-22 | 2010-02-19 | Senseor | Procede d'interrogation de resonateur piezoelectrique et dispositif d'interrogation integrant le procede d'interrogation. |
BR112013011189A2 (pt) * | 2010-11-05 | 2016-08-02 | Baker Hughes Inc | aparelho, sistema e método para estimar uma propriedade de um fluido de fundo de poço |
US9512715B2 (en) * | 2013-07-30 | 2016-12-06 | General Electric Company | Systems and methods for pressure and temperature measurement |
US20150276686A1 (en) * | 2014-03-26 | 2015-10-01 | General Electric Company | Systems and methods for addressing one or more sensors along a cable |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4535638A (en) * | 1983-10-03 | 1985-08-20 | Quartztronics, Inc. | Resonator transducer system with temperature compensation |
GB8610253D0 (en) * | 1986-04-26 | 1986-05-29 | Stc Plc | Resonator device |
GB8610252D0 (en) * | 1986-04-26 | 1986-06-25 | Stc Plc | Remote sensor |
US4972076A (en) * | 1988-09-29 | 1990-11-20 | Schlumberger Industries Limited | Solid state sensor with dual resonant vibratable members |
GB2223582B (en) * | 1988-10-04 | 1992-06-17 | Stc Plc | Transducer device |
US5165289A (en) * | 1990-07-10 | 1992-11-24 | Johnson Service Company | Resonant mechanical sensor |
US5085080A (en) * | 1990-10-05 | 1992-02-04 | Micron Technology, Inc. | Temperature and pressure measuring technique using the photoacoustic effect and mechanical resonance |
-
1993
- 1993-03-02 US US08/024,995 patent/US5338929A/en not_active Expired - Lifetime
- 1993-03-24 CA CA002133217A patent/CA2133217C/en not_active Expired - Fee Related
- 1993-03-24 WO PCT/EP1993/000736 patent/WO1993020422A1/en active IP Right Grant
- 1993-03-24 BR BR9306173A patent/BR9306173A/pt not_active IP Right Cessation
- 1993-03-24 AU AU37523/93A patent/AU671985B2/en not_active Ceased
- 1993-03-24 EP EP93906618A patent/EP0634008B1/de not_active Expired - Lifetime
- 1993-03-24 DE DE69311327T patent/DE69311327T2/de not_active Expired - Fee Related
-
1994
- 1994-09-28 NO NO943607A patent/NO308051B1/no unknown
Also Published As
Publication number | Publication date |
---|---|
BR9306173A (pt) | 1998-01-13 |
US5338929A (en) | 1994-08-16 |
DE69311327D1 (de) | 1997-07-10 |
NO943607D0 (no) | 1994-09-28 |
AU3752393A (en) | 1993-11-08 |
WO1993020422A1 (en) | 1993-10-14 |
CA2133217A1 (en) | 1993-10-14 |
NO943607L (no) | 1994-09-29 |
CA2133217C (en) | 2004-07-20 |
EP0634008A1 (de) | 1995-01-18 |
AU671985B2 (en) | 1996-09-19 |
EP0634008B1 (de) | 1997-06-04 |
NO308051B1 (no) | 2000-07-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69323618D1 (de) | Pyrheliometrischer sensor | |
DE69325165T2 (de) | Verschiebungssensor | |
DE59304596D1 (de) | Sensoranordnung | |
DE69319592D1 (de) | Sechsachsiger kraftsensor | |
DE69310474D1 (de) | Piezoelektrischer Sensor | |
BR9306946A (pt) | Sensor de pressão | |
BR9204701A (pt) | Dispositivo sensor | |
DE69401347T2 (de) | Sensor | |
DE69306019D1 (de) | Drucksensor | |
DE59308671D1 (de) | Fühler | |
DE69311327D1 (de) | Mikrotechnologisch hergestellter sensor | |
DE69310678T2 (de) | Mikromechanisch hergestellter Messaufnehmer | |
DE69525935D1 (de) | Beschleunigungssensor | |
DE59306188D1 (de) | Polarographischer sensor | |
DE69323602T2 (de) | Piezoelektrische Messfühler | |
DE69504428T2 (de) | Beschleunigungssensor | |
DE69406169T2 (de) | Mechanischer Sensor | |
NO308921B1 (no) | Trykkføler | |
DE69301053D1 (de) | Drucksensor | |
BR9202421A (pt) | Dispositivo sensor | |
DE69315529T2 (de) | Mechanischer Sensor | |
DE69316986T2 (de) | Positionsensoren | |
NO953593L (no) | Akselerasjonsgiver | |
DE59407958D1 (de) | Mikrovakuumsensor | |
BR9300842A (pt) | Estrutura de montagem de sensor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |