DE69313337T2 - Infrarotsensor und Verfahren für dessen Herstellung - Google Patents

Infrarotsensor und Verfahren für dessen Herstellung

Info

Publication number
DE69313337T2
DE69313337T2 DE69313337T DE69313337T DE69313337T2 DE 69313337 T2 DE69313337 T2 DE 69313337T2 DE 69313337 T DE69313337 T DE 69313337T DE 69313337 T DE69313337 T DE 69313337T DE 69313337 T2 DE69313337 T2 DE 69313337T2
Authority
DE
Germany
Prior art keywords
manufacture
infrared sensor
infrared
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69313337T
Other languages
English (en)
Other versions
DE69313337D1 (de
Inventor
Kiyoshi Komatsu
Takehisa Mori
Atsushi Sone
Mitsuteru Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Terumo Corp
Original Assignee
Terumo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP09769392A external-priority patent/JP3181363B2/ja
Priority claimed from JP13061692A external-priority patent/JP3249174B2/ja
Priority claimed from JP13061792A external-priority patent/JP3179861B2/ja
Priority claimed from JP31170992A external-priority patent/JP3200657B2/ja
Application filed by Terumo Corp filed Critical Terumo Corp
Publication of DE69313337D1 publication Critical patent/DE69313337D1/de
Application granted granted Critical
Publication of DE69313337T2 publication Critical patent/DE69313337T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/041—Mountings in enclosures or in a particular environment
    • G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/09—Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/095—Devices sensitive to infrared, visible or ultraviolet radiation comprising amorphous semiconductors
DE69313337T 1992-04-17 1993-04-19 Infrarotsensor und Verfahren für dessen Herstellung Expired - Fee Related DE69313337T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP09769392A JP3181363B2 (ja) 1992-04-17 1992-04-17 赤外線センサおよびその製造方法
JP11191492 1992-04-30
JP13061692A JP3249174B2 (ja) 1992-05-22 1992-05-22 赤外線センサおよびその製造方法
JP13061792A JP3179861B2 (ja) 1992-05-22 1992-05-22 赤外線センサの製造方法
JP31170992A JP3200657B2 (ja) 1992-04-30 1992-11-20 赤外線センサ

Publications (2)

Publication Number Publication Date
DE69313337D1 DE69313337D1 (de) 1997-10-02
DE69313337T2 true DE69313337T2 (de) 1998-01-02

Family

ID=27525876

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69313337T Expired - Fee Related DE69313337T2 (de) 1992-04-17 1993-04-19 Infrarotsensor und Verfahren für dessen Herstellung

Country Status (3)

Country Link
US (2) US5397897A (de)
EP (1) EP0566156B1 (de)
DE (1) DE69313337T2 (de)

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Also Published As

Publication number Publication date
US5397897A (en) 1995-03-14
EP0566156A1 (de) 1993-10-20
US5521123A (en) 1996-05-28
DE69313337D1 (de) 1997-10-02
EP0566156B1 (de) 1997-08-27

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