DE69314296D1 - Verfahren zur Bestimmung einer vorgegebenen Eigenschaft einer Probe eines Materials - Google Patents
Verfahren zur Bestimmung einer vorgegebenen Eigenschaft einer Probe eines MaterialsInfo
- Publication number
- DE69314296D1 DE69314296D1 DE69314296T DE69314296T DE69314296D1 DE 69314296 D1 DE69314296 D1 DE 69314296D1 DE 69314296 T DE69314296 T DE 69314296T DE 69314296 T DE69314296 T DE 69314296T DE 69314296 D1 DE69314296 D1 DE 69314296D1
- Authority
- DE
- Germany
- Prior art keywords
- sample
- determining
- specified property
- property
- specified
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/248—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet using infrared
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/25—Measuring force or stress, in general using wave or particle radiation, e.g. X-rays, microwaves, neutrons
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/302—Accessories, mechanical or electrical features comparative arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/345—Accessories, mechanical or electrical features mathematical transformations on beams or signals, e.g. Fourier
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/607—Specific applications or type of materials strain
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/633—Specific applications or type of materials thickness, density, surface weight (unit area)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB929226552A GB9226552D0 (en) | 1992-12-21 | 1992-12-21 | A method of determining a given characteristic of a material sample |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69314296D1 true DE69314296D1 (de) | 1997-11-06 |
DE69314296T2 DE69314296T2 (de) | 1998-04-02 |
Family
ID=10726922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69314296T Expired - Fee Related DE69314296T2 (de) | 1992-12-21 | 1993-12-14 | Verfahren zur Bestimmung einer vorgegebenen Eigenschaft einer Probe eines Materials |
Country Status (5)
Country | Link |
---|---|
US (1) | US5442676A (de) |
EP (1) | EP0603943B1 (de) |
JP (1) | JPH06229950A (de) |
DE (1) | DE69314296T2 (de) |
GB (1) | GB9226552D0 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2289833B (en) * | 1994-05-24 | 1998-04-22 | Mitsubishi Electric Corp | Method and apparatus for evaluating thin-film multilayer structure |
JPH0843328A (ja) * | 1994-05-24 | 1996-02-16 | Mitsubishi Electric Corp | 薄膜多層構造の評価方法,評価ソフト,及び評価装置 |
JP3699723B2 (ja) * | 1994-06-25 | 2005-09-28 | パナリティカル ベー ヴィ | 材料サンプルの分析 |
JPH09297112A (ja) * | 1996-03-08 | 1997-11-18 | Mitsubishi Heavy Ind Ltd | 構造パラメータ解析装置及び解析方法 |
US6226348B1 (en) * | 1998-12-15 | 2001-05-01 | Philips Electronics North America Corporation | X-ray diffractometer method for determining thickness of multiple non-metallic crystalline layers and fourier transform method |
US6587794B1 (en) * | 1999-07-30 | 2003-07-01 | Koninklijke Philips Electronics N.V. | Method for measuring thin metal films |
FR2798195B1 (fr) * | 1999-09-02 | 2001-11-16 | St Microelectronics Sa | Caracterisation de zones de silicium-germanium sur silicium |
JP3953754B2 (ja) * | 2001-06-27 | 2007-08-08 | 株式会社リガク | 密度不均一試料解析方法ならびにその装置およびシステム |
GB0116825D0 (en) * | 2001-07-10 | 2001-08-29 | Koninl Philips Electronics Nv | Determination of material parameters |
FR2828933A1 (fr) * | 2001-08-27 | 2003-02-28 | Corning Inc | Procede de determination de la qualite optique d'un monocristal de fluorure et element optique |
US7330279B2 (en) * | 2002-07-25 | 2008-02-12 | Timbre Technologies, Inc. | Model and parameter selection for optical metrology |
US20040090629A1 (en) * | 2002-11-08 | 2004-05-13 | Emmanuel Drege | Diffraction order selection for optical metrology simulation |
DE60334842D1 (de) * | 2002-12-27 | 2010-12-16 | High Voltage Engineering Corp | Zerstörungsfreie charakterisierung von dünnen schichten durch messung von basisspektren und/oder basiert auf einem aufgenommenen spektrum |
DE10346433B4 (de) * | 2003-10-07 | 2006-05-11 | Bruker Axs Gmbh | Analytisches Verfahren zum Bestimmen von kristallographischen Phasen einer Messprobe |
US7265754B2 (en) * | 2003-11-12 | 2007-09-04 | Proto Manufacturing Ltd. | Method for displaying material characteristic information |
JP3914925B2 (ja) * | 2004-01-28 | 2007-05-16 | 株式会社リガク | 膜厚測定方法及び装置 |
US7388677B2 (en) * | 2004-03-22 | 2008-06-17 | Timbre Technologies, Inc. | Optical metrology optimization for repetitive structures |
US20060187466A1 (en) * | 2005-02-18 | 2006-08-24 | Timbre Technologies, Inc. | Selecting unit cell configuration for repeating structures in optical metrology |
US7355728B2 (en) * | 2005-06-16 | 2008-04-08 | Timbre Technologies, Inc. | Optical metrology model optimization for repetitive structures |
WO2010119844A1 (ja) * | 2009-04-14 | 2010-10-21 | 株式会社リガク | 表面微細構造計測方法、表面微細構造計測データ解析方法およびx線散乱測定装置 |
US8716037B2 (en) | 2010-12-14 | 2014-05-06 | International Business Machines Corporation | Measurement of CMOS device channel strain by X-ray diffraction |
US9022651B2 (en) * | 2013-07-12 | 2015-05-05 | Bruker Axs, Inc. | X-ray diffraction-based defective pixel correction method using an active pixel array sensor |
KR101414205B1 (ko) | 2013-09-30 | 2014-07-01 | 주식회사 엘지실트론 | 웨이퍼의 기계적 손상 깊이를 측정하는 방법 |
JP6377582B2 (ja) * | 2015-08-06 | 2018-08-22 | 株式会社リガク | X線分析の操作ガイドシステム、操作ガイド方法、及び操作ガイドプログラム |
US9939393B2 (en) * | 2015-09-28 | 2018-04-10 | United Technologies Corporation | Detection of crystallographic properties in aerospace components |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4095103A (en) * | 1976-03-12 | 1978-06-13 | Northwestern University | Apparatus and method for determination of residual stress in crystalline substances |
US4561062A (en) * | 1983-02-18 | 1985-12-24 | Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of Energy, Mines And Resources | Stress measurement by X-ray diffractometry |
US4662222A (en) * | 1984-12-21 | 1987-05-05 | Johnson Steven A | Apparatus and method for acoustic imaging using inverse scattering techniques |
US4821301A (en) * | 1986-02-28 | 1989-04-11 | Duke University | X-ray reflection method and apparatus for chemical analysis of thin surface layers |
US4974209A (en) * | 1988-09-02 | 1990-11-27 | The Perkin-Elmer Corporation | Interactive smoothing system |
US5148458A (en) * | 1990-01-18 | 1992-09-15 | Clayton Ruud | Method and apparatus for simultaneous phase composition and residual stress measurement by x-ray diffraction |
-
1992
- 1992-12-21 GB GB929226552A patent/GB9226552D0/en active Pending
-
1993
- 1993-12-14 EP EP93203508A patent/EP0603943B1/de not_active Expired - Lifetime
- 1993-12-14 DE DE69314296T patent/DE69314296T2/de not_active Expired - Fee Related
- 1993-12-16 US US08/168,732 patent/US5442676A/en not_active Expired - Lifetime
- 1993-12-20 JP JP5320046A patent/JPH06229950A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0603943B1 (de) | 1997-10-01 |
US5442676A (en) | 1995-08-15 |
EP0603943A1 (de) | 1994-06-29 |
DE69314296T2 (de) | 1998-04-02 |
GB9226552D0 (en) | 1993-02-17 |
JPH06229950A (ja) | 1994-08-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69314296T2 (de) | Verfahren zur Bestimmung einer vorgegebenen Eigenschaft einer Probe eines Materials | |
DE69614563D1 (de) | Verfahren zur quantifizierung von biologischem material in einer probe | |
DE1130397T1 (de) | Ausrüstung zur Bestimmung eines Analyten in einer Probe | |
DE69128357D1 (de) | Verfahren um eigenschaften und/oder zusammensetzungsdaten einer probe zu bestimmen | |
DE58908354D1 (de) | Verfahren zur quantitativen Bestimmung zumindest eines Parameters einer flüssigen oder gasförmigen Probe. | |
DE69529462T2 (de) | Verfahren zur auswahl einer population oder subpopulation einer probe | |
DE69739000D1 (de) | Gerät und verfahren zur bestimmung der quelle eines lokalsignals | |
DE68929385T2 (de) | Verfahren zur Bestimmung eines Analyten unter Verwendung einer replizierbare RNS enthaltenden Sonde | |
DE68903755D1 (de) | Verfahren und vorrichtung zur bestimmung einer eigenschaft der bewegung eines borhgestaenges. | |
DE69118295D1 (de) | Vorrichtung und Verfahren zur Messung einer Probe | |
DE69620371D1 (de) | Verfahren zur Messung von Dimensionen von Mustern auf einer Probe | |
DE68919622D1 (de) | Teilchenanalysevorrichtung und Verfahren zur Bestimmung einer Kernverschiebungsmesszahl. | |
DE19580537D2 (de) | Verfahren und Vorrichtung zur Bestimmung eines Analyten in einer biologischen Probe | |
DE59508310D1 (de) | Verfahren und Vorrichtung zur Bestimmung einer jeweiligen örtlichen Position eines Körpers durch kapazitive Abtastung | |
DE59709981D1 (de) | Verfahren zur bestimmung von eigenschaftsänderungen einer probe | |
DE69206890T2 (de) | Verfahren und Apparat zur Abschätzung der Restbetriebszeit eines einer Strahlung ausgesetzten Materials | |
DE69223875D1 (de) | Verfahren zum Rühren und zur Probenentnahme einer flüssigen Probe | |
ATA100089A (de) | Verfahren zur quantitativen bestimmung zumindest eines chemischen parameters eines probenmediums | |
DE69425656T2 (de) | Verfahren und anordnung zur entnahme einer probe | |
DE69118260T2 (de) | Verfahren zur Handhabung einer Probe für Atomabsorptionsanalysen | |
DE59408186D1 (de) | Verfahren zur messung der rauhigkeit einer materialoberfläche | |
ATA73490A (de) | Verfahren zur bestimmung des achsenverlaufes eines langgestreckten gegenstandes | |
DE4491893D2 (de) | Vorrichtung zur Ermittlung des Bindemittelgehaltes einer Probe eines bituminösen Baustoffs | |
DE69233073D1 (de) | Sensor und Verfahren zur Messung ausgewählter Bestandteile eines Materials | |
DE59205896D1 (de) | Messeinrichtung und Messverfahren zur Bestimmung von Eigenschaften einer Probe |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N |
|
8339 | Ceased/non-payment of the annual fee |