DE69325799T2 - Apparat zum detektieren einer relativen bewegung - Google Patents

Apparat zum detektieren einer relativen bewegung

Info

Publication number
DE69325799T2
DE69325799T2 DE69325799T DE69325799T DE69325799T2 DE 69325799 T2 DE69325799 T2 DE 69325799T2 DE 69325799 T DE69325799 T DE 69325799T DE 69325799 T DE69325799 T DE 69325799T DE 69325799 T2 DE69325799 T2 DE 69325799T2
Authority
DE
Germany
Prior art keywords
scale
detector
phase
orders
poly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69325799T
Other languages
English (en)
Other versions
DE69325799D1 (de
Inventor
Donald Mitchell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Novanta Inc
Original Assignee
MicroE Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25372143&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69325799(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by MicroE Inc filed Critical MicroE Inc
Publication of DE69325799D1 publication Critical patent/DE69325799D1/de
Application granted granted Critical
Publication of DE69325799T2 publication Critical patent/DE69325799T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
DE69325799T 1992-05-05 1993-05-04 Apparat zum detektieren einer relativen bewegung Expired - Lifetime DE69325799T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US87849492A 1992-05-05 1992-05-05
PCT/US1993/004260 WO1993022615A1 (en) 1992-05-05 1993-05-04 Apparatus for detecting relative movement

Publications (2)

Publication Number Publication Date
DE69325799D1 DE69325799D1 (de) 1999-09-02
DE69325799T2 true DE69325799T2 (de) 2000-04-13

Family

ID=25372143

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69325799T Expired - Lifetime DE69325799T2 (de) 1992-05-05 1993-05-04 Apparat zum detektieren einer relativen bewegung

Country Status (7)

Country Link
US (1) US5559600A (de)
EP (1) EP0639259B1 (de)
JP (1) JP3390440B2 (de)
AT (1) ATE182677T1 (de)
CA (1) CA2118110C (de)
DE (1) DE69325799T2 (de)
WO (1) WO1993022615A1 (de)

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US7519493B2 (en) 2002-02-14 2009-04-14 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
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WO2008030681A2 (en) * 2006-09-08 2008-03-13 Gsi Group Corporation Interferometric position encoder employing spatial filtering of diffraction orders
GB2468263B (en) * 2008-08-28 2013-04-03 Faro Tech Inc Indexed optical encoder method for indexing an optical encoder, and method for dynamically adjusting gain and offset in an optical encoder
JP5170046B2 (ja) 2009-09-18 2013-03-27 株式会社安川電機 ロータリエンコーダ、ロータリモータ、ロータリモータシステム、ディスク及びロータリエンコーダの製造方法
EP2372302A1 (de) 2010-03-26 2011-10-05 Leica Geosystems AG Messverfahren für eine oberflächenvermessende Messmaschine
WO2011152076A1 (ja) 2010-05-31 2011-12-08 株式会社安川電機 ロータリエンコーダ、ロータリモータ及びロータリモータシステム
JP5126290B2 (ja) 2010-06-07 2013-01-23 株式会社安川電機 エンコーダ、サーボモータ、サーボユニット及びエンコーダの製造方法
CN103080701B (zh) 2010-09-02 2016-05-04 株式会社安川电机 编码器、伺服马达和马达单元
JP2018513385A (ja) 2015-04-22 2018-05-24 ファロ テクノロジーズ インコーポレーテッド 指標付き光学エンコーダ

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Also Published As

Publication number Publication date
WO1993022615A1 (en) 1993-11-11
DE69325799D1 (de) 1999-09-02
CA2118110A1 (en) 1993-11-11
CA2118110C (en) 2002-08-13
EP0639259A1 (de) 1995-02-22
JP3390440B2 (ja) 2003-03-24
EP0639259B1 (de) 1999-07-28
EP0639259A4 (de) 1997-11-05
ATE182677T1 (de) 1999-08-15
JPH07506669A (ja) 1995-07-20
US5559600A (en) 1996-09-24

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: GSI LUMONICS CORP., NORTHVILLE, MICH., US

8328 Change in the person/name/address of the agent

Representative=s name: CBDL PATENTANWAELTE, 47051 DUISBURG

8327 Change in the person/name/address of the patent owner

Owner name: GSI GROUP CORP., NORTHVILLE, MICH., US