DE69331052D1 - Integrierte Randstruktur für Hochspannung-Halbleiteranordnungen und dazugehöriger Herstellungsprozess - Google Patents
Integrierte Randstruktur für Hochspannung-Halbleiteranordnungen und dazugehöriger HerstellungsprozessInfo
- Publication number
- DE69331052D1 DE69331052D1 DE69331052T DE69331052T DE69331052D1 DE 69331052 D1 DE69331052 D1 DE 69331052D1 DE 69331052 T DE69331052 T DE 69331052T DE 69331052 T DE69331052 T DE 69331052T DE 69331052 D1 DE69331052 D1 DE 69331052D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing process
- semiconductor devices
- edge structure
- voltage semiconductor
- associated manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66272—Silicon vertical transistors
- H01L29/66295—Silicon vertical transistors with main current going through the whole silicon substrate, e.g. power bipolar transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1004—Base region of bipolar transistors
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP93830286A EP0632503B1 (de) | 1993-07-01 | 1993-07-01 | Integrierte Randstruktur für Hochspannung-Halbleiteranordnungen und dazugehöriger Herstellungsprozess |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69331052D1 true DE69331052D1 (de) | 2001-12-06 |
DE69331052T2 DE69331052T2 (de) | 2002-06-06 |
Family
ID=8215196
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69331052T Expired - Fee Related DE69331052T2 (de) | 1993-07-01 | 1993-07-01 | Integrierte Randstruktur für Hochspannung-Halbleiteranordnungen und dazugehöriger Herstellungsprozess |
Country Status (4)
Country | Link |
---|---|
US (2) | US5489799A (de) |
EP (1) | EP0632503B1 (de) |
JP (1) | JPH07312372A (de) |
DE (1) | DE69331052T2 (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5798554A (en) * | 1995-02-24 | 1998-08-25 | Consorzio Per La Ricerca Sulla Microelettronica Nel Mezzogiorno | MOS-technology power device integrated structure and manufacturing process thereof |
DE69531783T2 (de) * | 1995-10-09 | 2004-07-15 | Consorzio Per La Ricerca Sulla Microelettronica Nel Mezzogiorno - Corimme | Herstellungsverfahren für Leistungsanordnung mit Schutzring |
JP3062065B2 (ja) * | 1995-10-20 | 2000-07-10 | 日本電気株式会社 | 半導体装置の製造方法 |
DE69534919T2 (de) * | 1995-10-30 | 2007-01-25 | Stmicroelectronics S.R.L., Agrate Brianza | Leistungsvorrichtung in MOS-Technologie mit einer einzigen kritischen Größe |
DE69533134T2 (de) * | 1995-10-30 | 2005-07-07 | Stmicroelectronics S.R.L., Agrate Brianza | Leistungsbauteil hoher Dichte in MOS-Technologie |
DE69515876T2 (de) * | 1995-11-06 | 2000-08-17 | St Microelectronics Srl | Leistungsbauelement in MOS-Technologie mit niedrigem Ausgangswiderstand und geringer Kapazität und dessen Herstellungsverfahren |
US6228719B1 (en) | 1995-11-06 | 2001-05-08 | Stmicroelectronics S.R.L. | MOS technology power device with low output resistance and low capacitance, and related manufacturing process |
DE69530216T2 (de) * | 1995-12-19 | 2004-02-12 | Consorzio Per La Ricerca Sulla Microelettronica Nel Mezzogiorno - Corimme | Monolithische Halbleiteranordnung mit Randstruktur und Verfahren zur Herstellung |
DE69518653T2 (de) * | 1995-12-28 | 2001-04-19 | St Microelectronics Srl | MOS-Technologie-Leistungsanordnung in integrierter Struktur |
DE19631872C2 (de) * | 1996-08-07 | 2003-04-17 | Daimler Chrysler Ag | Vertikales Halbleiterbauelement |
US5936284A (en) * | 1997-11-03 | 1999-08-10 | Sgs-Thomson Microelectronics S.R.L. | Electrostatic discharge protection circuit and transistor |
US6373100B1 (en) | 1998-03-04 | 2002-04-16 | Semiconductor Components Industries Llc | Semiconductor device and method for fabricating the same |
EP0961325B1 (de) | 1998-05-26 | 2008-05-07 | STMicroelectronics S.r.l. | MOS-Technologie-Leistungsanordnung mit hoher Integrationsdichte |
DE69833743T2 (de) * | 1998-12-09 | 2006-11-09 | Stmicroelectronics S.R.L., Agrate Brianza | Herstellungmethode einer integrierte Randstruktur für Hochspannung-Halbleiteranordnungen |
JP4484979B2 (ja) * | 1999-03-19 | 2010-06-16 | セイコーインスツル株式会社 | バイポ−ラトランジスタの製造方法 |
US6225181B1 (en) | 1999-04-19 | 2001-05-01 | National Semiconductor Corp. | Trench isolated bipolar transistor structure integrated with CMOS technology |
US6242784B1 (en) * | 1999-06-28 | 2001-06-05 | Intersil Corporation | Edge termination for silicon power devices |
US6236100B1 (en) * | 2000-01-28 | 2001-05-22 | General Electronics Applications, Inc. | Semiconductor with high-voltage components and low-voltage components on a shared die |
JP2001284632A (ja) * | 2000-04-03 | 2001-10-12 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
JP3730483B2 (ja) * | 2000-06-30 | 2006-01-05 | 株式会社東芝 | バイポーラトランジスタ |
JP4447768B2 (ja) * | 2000-12-01 | 2010-04-07 | 三菱電機株式会社 | フィールドmosトランジスタおよびそれを含む半導体集積回路 |
FR2820546B1 (fr) * | 2001-02-05 | 2003-07-11 | St Microelectronics Sa | Structure de protection contre des parasites |
US6797992B2 (en) * | 2001-08-07 | 2004-09-28 | Fabtech, Inc. | Apparatus and method for fabricating a high reverse voltage semiconductor device |
DE102004002181B4 (de) * | 2004-01-15 | 2011-08-18 | Infineon Technologies AG, 81669 | Integrierter Transistor, insbesondere für Spannungen größer 40 Volt, und Herstellungsverfahren |
US8150363B2 (en) | 2006-02-16 | 2012-04-03 | Telecommunication Systems, Inc. | Enhanced E911 network access for call centers |
CN101630683B (zh) | 2008-07-15 | 2011-03-23 | 中芯国际集成电路制造(上海)有限公司 | 集成静电放电器件 |
US9633993B1 (en) * | 2016-04-01 | 2017-04-25 | Texas Instruments Incorporated | Bipolar SCR |
US11273022B2 (en) | 2018-02-13 | 2022-03-15 | Emanate Biomedical, Inc. | Oral appliance in a blockchain system |
CN110010677B (zh) * | 2019-04-25 | 2024-02-13 | 江苏新顺微电子股份有限公司 | 一种改善结终端延伸结构三极管可靠性的器件结构及其制造方法 |
CN111554738A (zh) * | 2020-04-29 | 2020-08-18 | 杭州士兰微电子股份有限公司 | 半导体器件及其制造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57100744A (en) * | 1980-12-15 | 1982-06-23 | Matsushita Electric Works Ltd | Manufacture of semiconductor device |
FR2543739B1 (fr) * | 1983-03-30 | 1986-04-18 | Radiotechnique Compelec | Procede de realisation d'un transistor bipolaire haute tension |
IT1214805B (it) * | 1984-08-21 | 1990-01-18 | Ates Componenti Elettron | Spositivi a semiconduttore con giunprocesso per la fabbricazione di dizioni planari a concentrazione di carica variabile e ad altissima tensione di breakdown |
IT1217322B (it) * | 1987-12-22 | 1990-03-22 | Sgs Microelettronica Spa | Procedimento di fabbricazione di un dispositivo nonolitico a semiconduttope comprendente almeno un transistor di un circuito integrato di comando e un transistor di rotenza in tegrato nella stessa piastrina |
JPH0828373B2 (ja) * | 1988-12-06 | 1996-03-21 | 富士電機株式会社 | 集積回路装置用接合分離半導体領域構造 |
-
1993
- 1993-07-01 EP EP93830286A patent/EP0632503B1/de not_active Expired - Lifetime
- 1993-07-01 DE DE69331052T patent/DE69331052T2/de not_active Expired - Fee Related
-
1994
- 1994-06-27 JP JP6144414A patent/JPH07312372A/ja active Pending
- 1994-06-28 US US08/265,059 patent/US5489799A/en not_active Expired - Lifetime
-
1996
- 1996-02-20 US US08/604,110 patent/US5895249A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5489799A (en) | 1996-02-06 |
US5895249A (en) | 1999-04-20 |
EP0632503B1 (de) | 2001-10-31 |
JPH07312372A (ja) | 1995-11-28 |
EP0632503A1 (de) | 1995-01-04 |
DE69331052T2 (de) | 2002-06-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |