DE69418275D1 - Gehäuse für Ladungsschleuseinterface - Google Patents
Gehäuse für LadungsschleuseinterfaceInfo
- Publication number
- DE69418275D1 DE69418275D1 DE69418275T DE69418275T DE69418275D1 DE 69418275 D1 DE69418275 D1 DE 69418275D1 DE 69418275 T DE69418275 T DE 69418275T DE 69418275 T DE69418275 T DE 69418275T DE 69418275 D1 DE69418275 D1 DE 69418275D1
- Authority
- DE
- Germany
- Prior art keywords
- housing
- lock interface
- cargo lock
- cargo
- interface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
- Y10S414/138—Wafers positioned vertically within cassette
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/146,482 US5538390A (en) | 1993-10-29 | 1993-10-29 | Enclosure for load lock interface |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69418275D1 true DE69418275D1 (de) | 1999-06-10 |
DE69418275T2 DE69418275T2 (de) | 2000-01-05 |
Family
ID=22517564
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69418275T Expired - Fee Related DE69418275T2 (de) | 1993-10-29 | 1994-10-28 | Gehäuse für Ladungsschleuseinterface |
Country Status (5)
Country | Link |
---|---|
US (2) | US5538390A (de) |
EP (1) | EP0651429B1 (de) |
JP (1) | JPH07183355A (de) |
KR (1) | KR100347203B1 (de) |
DE (1) | DE69418275T2 (de) |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3660391B2 (ja) * | 1994-05-27 | 2005-06-15 | 株式会社東芝 | 半導体装置の製造方法 |
TW295677B (de) * | 1994-08-19 | 1997-01-11 | Tokyo Electron Co Ltd | |
JP3796782B2 (ja) * | 1995-11-13 | 2006-07-12 | アシスト シンコー株式会社 | 機械的インターフェイス装置 |
FR2747112B1 (fr) * | 1996-04-03 | 1998-05-07 | Commissariat Energie Atomique | Dispositif de transport d'objets plats et procede de transfert de ces objets entre ledit dispositif et une machine de traitement |
US6048154A (en) * | 1996-10-02 | 2000-04-11 | Applied Materials, Inc. | High vacuum dual stage load lock and method for loading and unloading wafers using a high vacuum dual stage load lock |
US6491732B1 (en) * | 1996-11-15 | 2002-12-10 | Agere Systems Inc. | Wafer handling apparatus and method |
US6540466B2 (en) * | 1996-12-11 | 2003-04-01 | Applied Materials, Inc. | Compact apparatus and method for storing and loading semiconductor wafer carriers |
EP0875921A1 (de) * | 1997-05-03 | 1998-11-04 | Stäubli AG Pfäffikon | Umladevorrichtung für Wafer |
US5885045A (en) | 1997-03-17 | 1999-03-23 | Fortrend Engineering Corporation | Integrated wafer pod-load/unload and mass-transfer system |
US6280134B1 (en) * | 1997-06-17 | 2001-08-28 | Applied Materials, Inc. | Apparatus and method for automated cassette handling |
US6328858B1 (en) | 1998-10-01 | 2001-12-11 | Nexx Systems Packaging, Llc | Multi-layer sputter deposition apparatus |
US6217272B1 (en) | 1998-10-01 | 2001-04-17 | Applied Science And Technology, Inc. | In-line sputter deposition system |
US6106634A (en) * | 1999-02-11 | 2000-08-22 | Applied Materials, Inc. | Methods and apparatus for reducing particle contamination during wafer transport |
US6042324A (en) * | 1999-03-26 | 2000-03-28 | Asm America, Inc. | Multi-stage single-drive FOUP door system |
US6530733B2 (en) | 2000-07-27 | 2003-03-11 | Nexx Systems Packaging, Llc | Substrate processing pallet and related substrate processing method and machine |
US6682288B2 (en) | 2000-07-27 | 2004-01-27 | Nexx Systems Packaging, Llc | Substrate processing pallet and related substrate processing method and machine |
US6821912B2 (en) | 2000-07-27 | 2004-11-23 | Nexx Systems Packaging, Llc | Substrate processing pallet and related substrate processing method and machine |
US7018504B1 (en) * | 2000-09-11 | 2006-03-28 | Asm America, Inc. | Loadlock with integrated pre-clean chamber |
KR100419032B1 (ko) * | 2001-05-21 | 2004-02-19 | 이남수 | 정련기용 인젝터 및 정련방법 |
US20030132135A1 (en) * | 2002-01-14 | 2003-07-17 | Stephen Natale | Protective wafer storage system, device, and method |
US6899507B2 (en) * | 2002-02-08 | 2005-05-31 | Asm Japan K.K. | Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections |
US7959395B2 (en) * | 2002-07-22 | 2011-06-14 | Brooks Automation, Inc. | Substrate processing apparatus |
US8960099B2 (en) * | 2002-07-22 | 2015-02-24 | Brooks Automation, Inc | Substrate processing apparatus |
US20070183871A1 (en) * | 2002-07-22 | 2007-08-09 | Christopher Hofmeister | Substrate processing apparatus |
US7988398B2 (en) | 2002-07-22 | 2011-08-02 | Brooks Automation, Inc. | Linear substrate transport apparatus |
US7258520B2 (en) | 2002-08-31 | 2007-08-21 | Applied Materials, Inc. | Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing |
US6955197B2 (en) | 2002-08-31 | 2005-10-18 | Applied Materials, Inc. | Substrate carrier having door latching and substrate clamping mechanisms |
DE10247051A1 (de) * | 2002-10-09 | 2004-04-22 | Polymer Latex Gmbh & Co Kg | Latex und Verfahren zu seiner Herstellung |
US7100954B2 (en) | 2003-07-11 | 2006-09-05 | Nexx Systems, Inc. | Ultra-thin wafer handling system |
US10086511B2 (en) | 2003-11-10 | 2018-10-02 | Brooks Automation, Inc. | Semiconductor manufacturing systems |
US7458763B2 (en) | 2003-11-10 | 2008-12-02 | Blueshift Technologies, Inc. | Mid-entry load lock for semiconductor handling system |
US20070269297A1 (en) | 2003-11-10 | 2007-11-22 | Meulen Peter V D | Semiconductor wafer handling and transport |
EP1684951B1 (de) | 2003-11-10 | 2014-05-07 | Brooks Automation, Inc. | System zur handhabung von werkstücken in einem halbleiterhandhabungssystem auf vakuumbasis |
US7611319B2 (en) | 2004-06-16 | 2009-11-03 | Applied Materials, Inc. | Methods and apparatus for identifying small lot size substrate carriers |
US7409263B2 (en) | 2004-07-14 | 2008-08-05 | Applied Materials, Inc. | Methods and apparatus for repositioning support for a substrate carrier |
US7720558B2 (en) | 2004-09-04 | 2010-05-18 | Applied Materials, Inc. | Methods and apparatus for mapping carrier contents |
TWI447840B (zh) | 2004-11-15 | 2014-08-01 | 尼康股份有限公司 | 基板搬運裝置、基板搬運方法以及曝光裝置 |
US7428958B2 (en) * | 2004-11-15 | 2008-09-30 | Nikon Corporation | Substrate conveyor apparatus, substrate conveyance method and exposure apparatus |
US7597319B2 (en) * | 2005-05-20 | 2009-10-06 | Hewlett-Packard Development Company, L.P. | Sheet handling using a ramp and grippers on an endless belt |
TWI367539B (en) | 2006-01-11 | 2012-07-01 | Applied Materials Inc | Methods and apparatus for purging a substrate carrier |
CN101370963B (zh) * | 2006-01-19 | 2012-03-28 | Asm美国公司 | 高温原子层沉积进气歧管 |
US8398355B2 (en) * | 2006-05-26 | 2013-03-19 | Brooks Automation, Inc. | Linearly distributed semiconductor workpiece processing tool |
WO2008147379A1 (en) * | 2006-09-14 | 2008-12-04 | Brooks Automation Inc. | Carrier gas system and coupling substrate carrier to a loadport |
US9105673B2 (en) | 2007-05-09 | 2015-08-11 | Brooks Automation, Inc. | Side opening unified pod |
WO2008144668A1 (en) * | 2007-05-17 | 2008-11-27 | Brooks Automation, Inc. | Side opening substrate carrier and load port |
US8440048B2 (en) | 2009-01-28 | 2013-05-14 | Asm America, Inc. | Load lock having secondary isolation chamber |
US8602706B2 (en) * | 2009-08-17 | 2013-12-10 | Brooks Automation, Inc. | Substrate processing apparatus |
US9574268B1 (en) | 2011-10-28 | 2017-02-21 | Asm America, Inc. | Pulsed valve manifold for atomic layer deposition |
US9388492B2 (en) | 2011-12-27 | 2016-07-12 | Asm America, Inc. | Vapor flow control apparatus for atomic layer deposition |
US10662527B2 (en) | 2016-06-01 | 2020-05-26 | Asm Ip Holding B.V. | Manifolds for uniform vapor deposition |
KR102505486B1 (ko) * | 2018-03-22 | 2023-03-02 | 배트 홀딩 아게 | 안전 장치, 하나 이상의 안전 장치가 있는 웨이퍼 이송 컨테이너, 안전 장치가 있는 안전 시스템 및 방법 |
US11492701B2 (en) | 2019-03-19 | 2022-11-08 | Asm Ip Holding B.V. | Reactor manifolds |
KR20210048408A (ko) | 2019-10-22 | 2021-05-03 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 증착 반응기 매니폴드 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4523970A (en) * | 1981-06-22 | 1985-06-18 | Raychem Corporation | Process for manufacturing sealant coated articles |
US4534389A (en) * | 1984-03-29 | 1985-08-13 | Hewlett-Packard Company | Interlocking door latch for dockable interface for integrated circuit processing |
US4668478A (en) * | 1984-07-02 | 1987-05-26 | General Signal Corporation | Vertically positioned transfer system for controlling and initiating the flow of metered amounts of solid materials |
US4582219A (en) * | 1985-02-20 | 1986-04-15 | Empak, Inc. | Storage box having resilient fastening means |
US4705444A (en) * | 1985-07-24 | 1987-11-10 | Hewlett-Packard Company | Apparatus for automated cassette handling |
US5044871A (en) * | 1985-10-24 | 1991-09-03 | Texas Instruments Incorporated | Integrated circuit processing system |
US4739882A (en) * | 1986-02-13 | 1988-04-26 | Asyst Technologies | Container having disposable liners |
US4826360A (en) * | 1986-03-10 | 1989-05-02 | Shimizu Construction Co., Ltd. | Transfer system in a clean room |
US4746256A (en) * | 1986-03-13 | 1988-05-24 | Roboptek, Inc. | Apparatus for handling sensitive material such as semiconductor wafers |
JPS62222625A (ja) * | 1986-03-25 | 1987-09-30 | Shimizu Constr Co Ltd | 半導体製造装置 |
US4724874A (en) * | 1986-05-01 | 1988-02-16 | Asyst Technologies | Sealable transportable container having a particle filtering system |
JPS6372112A (ja) * | 1986-09-16 | 1988-04-01 | Hitachi Ltd | 熱処理装置 |
JPS6379317A (ja) * | 1986-09-24 | 1988-04-09 | Hitachi Ltd | 熱処理装置 |
US4709834A (en) * | 1987-02-02 | 1987-12-01 | Empak Inc. | Storage box |
JPS6464335A (en) * | 1987-09-04 | 1989-03-10 | Toshiba Corp | Wafer handling device |
US5092728A (en) * | 1987-10-15 | 1992-03-03 | Epsilon Technology, Inc. | Substrate loading apparatus for a CVD process |
JP2502661B2 (ja) * | 1988-03-04 | 1996-05-29 | 松下電器産業株式会社 | 気相成長装置 |
ATE208961T1 (de) * | 1988-05-24 | 2001-11-15 | Unaxis Balzers Ag | Vakuumanlage |
DE68928460T2 (de) * | 1988-09-06 | 1998-04-02 | Canon Kk | Maskenkassetten-Ladevorrichtung |
US4995430A (en) * | 1989-05-19 | 1991-02-26 | Asyst Technologies, Inc. | Sealable transportable container having improved latch mechanism |
FR2659263B1 (fr) * | 1990-03-07 | 1992-05-15 | Commissariat Energie Atomique | Porte soufflante pour conteneur de confinement ultrapropre. |
US5169272A (en) * | 1990-11-01 | 1992-12-08 | Asyst Technologies, Inc. | Method and apparatus for transferring articles between two controlled environments |
FR2674225B1 (fr) * | 1991-03-20 | 1993-07-16 | Euritech | Procede et installation pour transferer des produits d'une enceinte contaminee dans une deuxieme enceinte, sans contaminer cette derniere. |
JP2869212B2 (ja) * | 1991-06-27 | 1999-03-10 | 三洋電機株式会社 | 光発電装置 |
JPH0555344A (ja) * | 1991-08-27 | 1993-03-05 | Nec Corp | 半導体ウエハー収納カセツト保管容器と半導体ウエハー処理装置とのインターフエースシステム |
JP3277550B2 (ja) * | 1992-05-21 | 2002-04-22 | 神鋼電機株式会社 | 可搬式密閉コンテナ用ガスパージユニット |
KR100302012B1 (ko) * | 1992-11-06 | 2001-11-30 | 조셉 제이. 스위니 | 미소-환경 콘테이너 연결방법 및 미소-환경 로드 로크 |
-
1993
- 1993-10-29 US US08/146,482 patent/US5538390A/en not_active Expired - Fee Related
-
1994
- 1994-10-28 DE DE69418275T patent/DE69418275T2/de not_active Expired - Fee Related
- 1994-10-28 EP EP94117086A patent/EP0651429B1/de not_active Expired - Lifetime
- 1994-10-28 KR KR1019940027908A patent/KR100347203B1/ko not_active IP Right Cessation
- 1994-10-31 JP JP6267399A patent/JPH07183355A/ja active Pending
-
1995
- 1995-12-20 US US08/575,767 patent/US5630690A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5630690A (en) | 1997-05-20 |
JPH07183355A (ja) | 1995-07-21 |
KR950012675A (ko) | 1995-05-16 |
US5538390A (en) | 1996-07-23 |
KR100347203B1 (ko) | 2002-11-30 |
EP0651429B1 (de) | 1999-05-06 |
EP0651429A1 (de) | 1995-05-03 |
DE69418275T2 (de) | 2000-01-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |