DE69418782T2 - Tintenstrahlkopf und Verfahren zur Herstellung - Google Patents

Tintenstrahlkopf und Verfahren zur Herstellung

Info

Publication number
DE69418782T2
DE69418782T2 DE69418782T DE69418782T DE69418782T2 DE 69418782 T2 DE69418782 T2 DE 69418782T2 DE 69418782 T DE69418782 T DE 69418782T DE 69418782 T DE69418782 T DE 69418782T DE 69418782 T2 DE69418782 T2 DE 69418782T2
Authority
DE
Germany
Prior art keywords
manufacturing
ink jet
jet head
head
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69418782T
Other languages
English (en)
Other versions
DE69418782D1 (de
Inventor
Hirotsugu Matoba
Susumu Hirata
Yorishige Ishii
Tetsuya Inui
Kenji Ohta
Shingo Abe
Zenjiro Yamashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP17342193A external-priority patent/JP3241874B2/ja
Priority claimed from JP27827193A external-priority patent/JP3062518B2/ja
Application filed by Sharp Corp filed Critical Sharp Corp
Application granted granted Critical
Publication of DE69418782D1 publication Critical patent/DE69418782D1/de
Publication of DE69418782T2 publication Critical patent/DE69418782T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14346—Ejection by pressure produced by thermal deformation of ink chamber, e.g. buckling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
DE69418782T 1993-07-13 1994-07-11 Tintenstrahlkopf und Verfahren zur Herstellung Expired - Fee Related DE69418782T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP17342193A JP3241874B2 (ja) 1993-07-13 1993-07-13 インクジェットヘッドおよびその製造方法
JP27827193A JP3062518B2 (ja) 1993-11-08 1993-11-08 インクジェットヘッドおよびその製造方法

Publications (2)

Publication Number Publication Date
DE69418782D1 DE69418782D1 (de) 1999-07-08
DE69418782T2 true DE69418782T2 (de) 1999-11-18

Family

ID=26495400

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69418782T Expired - Fee Related DE69418782T2 (de) 1993-07-13 1994-07-11 Tintenstrahlkopf und Verfahren zur Herstellung

Country Status (3)

Country Link
US (1) US5666141A (de)
EP (1) EP0634273B1 (de)
DE (1) DE69418782T2 (de)

Families Citing this family (138)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6439702B1 (en) 1993-08-25 2002-08-27 Aprion Digital Ltd. Inkjet print head
JPH07285221A (ja) * 1994-04-19 1995-10-31 Sharp Corp インクジェットヘッド
DE19516997C2 (de) * 1994-05-10 1998-02-26 Sharp Kk Tintenstrahlkopf und Verfahren zu dessen Herstellung
JPH07314673A (ja) * 1994-05-27 1995-12-05 Sharp Corp インクジェットヘッド
JPH08276572A (ja) * 1995-04-07 1996-10-22 Sharp Corp インクジェットプリンター、及び、インクジェットプリンターの調整方法
JPH08336965A (ja) * 1995-06-14 1996-12-24 Sharp Corp インクジェットヘッド
JPH0985946A (ja) * 1995-09-25 1997-03-31 Sharp Corp インクジェットヘッド及びその製造方法
JP3240366B2 (ja) * 1995-10-26 2001-12-17 シャープ株式会社 サーマルヘッドとその製造方法
US5812163A (en) * 1996-02-13 1998-09-22 Hewlett-Packard Company Ink jet printer firing assembly with flexible film expeller
DE19626428A1 (de) * 1996-07-01 1998-01-15 Heinzl Joachim Tröpfchenwolkenerzeuger
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US7891767B2 (en) * 1997-07-15 2011-02-22 Silverbrook Research Pty Ltd Modular self-capping wide format print assembly
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US7784902B2 (en) * 1997-07-15 2010-08-31 Silverbrook Research Pty Ltd Printhead integrated circuit with more than 10000 nozzles
US7524026B2 (en) * 1997-07-15 2009-04-28 Silverbrook Research Pty Ltd Nozzle assembly with heat deflected actuator
US6682176B2 (en) 1997-07-15 2004-01-27 Silverbrook Research Pty Ltd Ink jet printhead chip with nozzle arrangements incorporating spaced actuating arms
US6648453B2 (en) * 1997-07-15 2003-11-18 Silverbrook Research Pty Ltd Ink jet printhead chip with predetermined micro-electromechanical systems height
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US6814429B2 (en) * 1997-07-15 2004-11-09 Silverbrook Research Pty Ltd Ink jet printhead incorporating a backflow prevention mechanism
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US6540332B2 (en) * 1997-07-15 2003-04-01 Silverbrook Research Pty Ltd Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead
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US6213589B1 (en) 1997-07-15 2001-04-10 Silverbrook Research Pty Ltd. Planar thermoelastic bend actuator ink jet printing mechanism
US7753463B2 (en) * 1997-07-15 2010-07-13 Silverbrook Research Pty Ltd Processing of images for high volume pagewidth printing
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US6916082B2 (en) * 1997-07-15 2005-07-12 Silverbrook Research Pty Ltd Printing mechanism for a wide format pagewidth inkjet printer
US6690419B1 (en) 1997-07-15 2004-02-10 Silverbrook Research Pty Ltd Utilising eye detection methods for image processing in a digital image camera
US7381340B2 (en) * 1997-07-15 2008-06-03 Silverbrook Research Pty Ltd Ink jet printhead that incorporates an etch stop layer
US7468139B2 (en) * 1997-07-15 2008-12-23 Silverbrook Research Pty Ltd Method of depositing heater material over a photoresist scaffold
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US6488359B2 (en) * 1997-07-15 2002-12-03 Silverbrook Research Pty Ltd Ink jet printhead that incorporates through-chip ink ejection nozzle arrangements
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US6840600B2 (en) * 1997-07-15 2005-01-11 Silverbrook Research Pty Ltd Fluid ejection device that incorporates covering formations for actuators of the fluid ejection device
US7607756B2 (en) * 1997-07-15 2009-10-27 Silverbrook Research Pty Ltd Printhead assembly for a wallpaper printer
US6527374B2 (en) * 1997-07-15 2003-03-04 Silverbrook Research Pty Ltd Translation to rotation conversion in an inkjet printhead
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US6652052B2 (en) * 1997-07-15 2003-11-25 Silverbrook Research Pty Ltd Processing of images for high volume pagewidth printing
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US6880918B2 (en) * 1997-07-15 2005-04-19 Silverbrook Research Pty Ltd Micro-electromechanical device that incorporates a motion-transmitting structure
US6682174B2 (en) 1998-03-25 2004-01-27 Silverbrook Research Pty Ltd Ink jet nozzle arrangement configuration
US7011390B2 (en) * 1997-07-15 2006-03-14 Silverbrook Research Pty Ltd Printing mechanism having wide format printing zone
US7551201B2 (en) 1997-07-15 2009-06-23 Silverbrook Research Pty Ltd Image capture and processing device for a print on demand digital camera system
US6582059B2 (en) * 1997-07-15 2003-06-24 Silverbrook Research Pty Ltd Discrete air and nozzle chambers in a printhead chip for an inkjet printhead
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US7110024B1 (en) 1997-07-15 2006-09-19 Silverbrook Research Pty Ltd Digital camera system having motion deblurring means
US20100277531A1 (en) * 1997-07-15 2010-11-04 Silverbrook Research Pty Ltd Printer having processor for high volume printing
US20040130599A1 (en) * 1997-07-15 2004-07-08 Silverbrook Research Pty Ltd Ink jet printhead with amorphous ceramic chamber
US6746105B2 (en) 1997-07-15 2004-06-08 Silverbrook Research Pty. Ltd. Thermally actuated ink jet printing mechanism having a series of thermal actuator units
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ATE409119T1 (de) * 1997-07-15 2008-10-15 Silverbrook Res Pty Ltd Düsenkammer mit Paddelschaufel und externem thermischen Betätigungselement
US7465030B2 (en) * 1997-07-15 2008-12-16 Silverbrook Research Pty Ltd Nozzle arrangement with a magnetic field generator
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EP0634273B1 (de) 1999-06-02
US5666141A (en) 1997-09-09
DE69418782D1 (de) 1999-07-08
EP0634273A3 (de) 1995-08-23

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