DE69426070D1 - Verfahren zur topographischen oberflächenmessung durch raumfrequenzanalyse eines interferogrammes - Google Patents

Verfahren zur topographischen oberflächenmessung durch raumfrequenzanalyse eines interferogrammes

Info

Publication number
DE69426070D1
DE69426070D1 DE69426070T DE69426070T DE69426070D1 DE 69426070 D1 DE69426070 D1 DE 69426070D1 DE 69426070 T DE69426070 T DE 69426070T DE 69426070 T DE69426070 T DE 69426070T DE 69426070 D1 DE69426070 D1 DE 69426070D1
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DE
Germany
Prior art keywords
interferogram
frequency analysis
surface measurement
space frequency
topographic surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69426070T
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English (en)
Other versions
DE69426070T2 (de
Inventor
Groot Peter De
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zygo Corp
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Zygo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp filed Critical Zygo Corp
Publication of DE69426070D1 publication Critical patent/DE69426070D1/de
Application granted granted Critical
Publication of DE69426070T2 publication Critical patent/DE69426070T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02084—Processing in the Fourier or frequency domain when not imaged in the frequency domain
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
DE69426070T 1993-02-08 1994-01-13 Verfahren zur topographischen oberflächenmessung durch raumfrequenzanalyse eines interferogrammes Expired - Lifetime DE69426070T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/014,707 US5398113A (en) 1993-02-08 1993-02-08 Method and apparatus for surface topography measurement by spatial-frequency analysis of interferograms
PCT/US1994/000660 WO1994018521A1 (en) 1993-02-08 1994-01-13 Method and apparatus for surface topography measurement by spatial-frequency analysis of interferograms

Publications (2)

Publication Number Publication Date
DE69426070D1 true DE69426070D1 (de) 2000-11-09
DE69426070T2 DE69426070T2 (de) 2001-06-13

Family

ID=21767193

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69426070T Expired - Lifetime DE69426070T2 (de) 1993-02-08 1994-01-13 Verfahren zur topographischen oberflächenmessung durch raumfrequenzanalyse eines interferogrammes

Country Status (5)

Country Link
US (1) US5398113A (de)
EP (1) EP0682771B1 (de)
JP (1) JP2679876B2 (de)
DE (1) DE69426070T2 (de)
WO (1) WO1994018521A1 (de)

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JP2679876B2 (ja) 1997-11-19
DE69426070T2 (de) 2001-06-13
WO1994018521A1 (en) 1994-08-18
US5398113A (en) 1995-03-14
EP0682771A4 (de) 1997-12-10
EP0682771B1 (de) 2000-10-04
JPH08502829A (ja) 1996-03-26

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