DE69433428D1 - Durch ein gehäuse umschlossener verschliessbarer halbleiterscheibenhalter - Google Patents

Durch ein gehäuse umschlossener verschliessbarer halbleiterscheibenhalter

Info

Publication number
DE69433428D1
DE69433428D1 DE69433428T DE69433428T DE69433428D1 DE 69433428 D1 DE69433428 D1 DE 69433428D1 DE 69433428 T DE69433428 T DE 69433428T DE 69433428 T DE69433428 T DE 69433428T DE 69433428 D1 DE69433428 D1 DE 69433428D1
Authority
DE
Germany
Prior art keywords
holder
semiconductor wafer
housing connected
wafer holder
semiconductor holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69433428T
Other languages
English (en)
Other versions
DE69433428T2 (de
Inventor
E Holliday
M Gallagher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Empak Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Empak Inc filed Critical Empak Inc
Application granted granted Critical
Publication of DE69433428D1 publication Critical patent/DE69433428D1/de
Publication of DE69433428T2 publication Critical patent/DE69433428T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
    • Y10S414/138—Wafers positioned vertically within cassette
DE69433428T 1994-03-11 1994-06-29 Durch ein gehäuse umschlossener verschliessbarer halbleiterscheibenhalter Expired - Lifetime DE69433428T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/209,227 US5472086A (en) 1994-03-11 1994-03-11 Enclosed sealable purgible semiconductor wafer holder
PCT/US1994/007357 WO1995024348A1 (en) 1994-03-11 1994-06-29 Enclosed sealable purgible semiconductor wafer holder

Publications (2)

Publication Number Publication Date
DE69433428D1 true DE69433428D1 (de) 2004-01-29
DE69433428T2 DE69433428T2 (de) 2004-10-07

Family

ID=22777887

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69433428T Expired - Lifetime DE69433428T2 (de) 1994-03-11 1994-06-29 Durch ein gehäuse umschlossener verschliessbarer halbleiterscheibenhalter

Country Status (6)

Country Link
US (2) US5472086A (de)
EP (1) EP0749393B1 (de)
JP (1) JP3202991B2 (de)
AT (1) ATE256915T1 (de)
DE (1) DE69433428T2 (de)
WO (1) WO1995024348A1 (de)

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US5472086A (en) * 1994-03-11 1995-12-05 Holliday; James E. Enclosed sealable purgible semiconductor wafer holder
US6833035B1 (en) * 1994-04-28 2004-12-21 Semitool, Inc. Semiconductor processing system with wafer container docking and loading station
JP3257328B2 (ja) * 1995-03-16 2002-02-18 株式会社日立製作所 プラズマ処理装置及びプラズマ処理方法
KR960043084A (ko) * 1995-05-22 1996-12-23 웨인 피이 베일리 단일 구조의 퍼드 및 카세트 조립체
US5833726A (en) * 1995-05-26 1998-11-10 Extraction System, Inc. Storing substrates between process steps within a processing facility
USD378873S (en) * 1995-10-13 1997-04-22 Empak, Inc. 300 mm microenvironment pod with door on side
WO1997013710A1 (en) * 1995-10-13 1997-04-17 Empak, Inc. 300mm MICROENVIRONMENT POD WITH DOOR ON SIDE
USD387903S (en) * 1995-10-13 1997-12-23 Empak, Inc. Shipping container
USD383898S (en) * 1995-10-13 1997-09-23 Empak, Inc. Combination shipping and transport cassette
US5873468A (en) * 1995-11-16 1999-02-23 Sumitomo Sitix Corporation Thin-plate supporting container with filter means
US6723174B2 (en) 1996-03-26 2004-04-20 Semitool, Inc. Automated semiconductor processing system
US6942738B1 (en) 1996-07-15 2005-09-13 Semitool, Inc. Automated semiconductor processing system
US6003674A (en) * 1996-05-13 1999-12-21 Brooks; Ray Gene Method and apparatus for packing contaminant-sensitive articles and resulting package
US5724748A (en) * 1996-07-24 1998-03-10 Brooks; Ray G. Apparatus for packaging contaminant-sensitive articles and resulting package
US5921397A (en) * 1996-12-10 1999-07-13 Empak, Inc. Disk cassette
US5833067A (en) * 1997-03-10 1998-11-10 Seagate Technologies, Inc. Disk caddy and lid with barrier means
US6736268B2 (en) * 1997-07-11 2004-05-18 Entegris, Inc. Transport module
US6010008A (en) * 1997-07-11 2000-01-04 Fluoroware, Inc. Transport module
US6076585A (en) * 1998-03-02 2000-06-20 Motorola, Inc. Method of manufacturing a semiconductor device and apparatus therefor
JP3656701B2 (ja) * 1998-03-23 2005-06-08 東京エレクトロン株式会社 処理装置
JP3370279B2 (ja) * 1998-07-07 2003-01-27 信越ポリマー株式会社 精密基板収納容器
US6267245B1 (en) * 1998-07-10 2001-07-31 Fluoroware, Inc. Cushioned wafer container
US6095335A (en) * 1998-07-10 2000-08-01 H-Square Corporation Wafer support device having a retrofit to provide size convertibility
US6216874B1 (en) * 1998-07-10 2001-04-17 Fluoroware, Inc. Wafer carrier having a low tolerance build-up
US6464081B2 (en) * 1999-01-06 2002-10-15 Entegris, Inc. Door guide for a wafer container
AUPP914099A0 (en) 1999-03-12 1999-04-01 Kyrwood, William Stephen Golf club support
US6561894B1 (en) 1999-04-19 2003-05-13 Tdk Corporation Clean box, clean transfer method and apparatus therefor
US6168364B1 (en) * 1999-04-19 2001-01-02 Tdk Corporation Vacuum clean box, clean transfer method and apparatus therefor
JP3556519B2 (ja) * 1999-04-30 2004-08-18 信越ポリマー株式会社 基板収納容器の識別構造及び基板収納容器の識別方法
JP3226511B2 (ja) * 1999-06-23 2001-11-05 ティーディーケイ株式会社 容器および容器の封止方法
JP3998386B2 (ja) * 2000-01-26 2007-10-24 三菱電機株式会社 液晶表示装置の製造装置および液晶表示装置の製造方法
EP1332349A4 (de) * 2000-07-07 2008-12-17 Semitool Inc Automatisiertes verarbeitungssystem
EP1184724A1 (de) 2000-08-29 2002-03-06 Motorola, Inc. Elektronische Vorrichtung für einen lithographischen Maskenbehälter und Verfahren unter Verwendung derselben
CN1128470C (zh) 2000-09-01 2003-11-19 陈正明 晶片减薄后与载体分离的工艺方法及其装置
JP4128811B2 (ja) * 2001-08-10 2008-07-30 株式会社トプコン 表面検査装置
US6866150B2 (en) * 2001-11-15 2005-03-15 The Mason Box Company, Inc. Containment unit for protecting medical slides during transit
AU2002359492A1 (en) * 2001-11-27 2003-06-10 Entegris Inc. Front opening wafer carrier with path to ground effectuated by door
US7175026B2 (en) 2002-05-03 2007-02-13 Maxtor Corporation Memory disk shipping container with improved contaminant control
US6719142B1 (en) * 2002-07-16 2004-04-13 Ion Systems, Inc. Apparatus and method for measuring static charge on wafers, disks, substrates, masks, and flat panel displays
US6781205B1 (en) * 2002-10-11 2004-08-24 Ion Systems, Inc. Electrostatic charge measurement on semiconductor wafers
WO2004079818A1 (ja) * 2003-03-04 2004-09-16 Shin-Etsu Polymer Co., Ltd. 精密基板収納容器
US7201276B2 (en) * 2003-11-07 2007-04-10 Entegris, Inc. Front opening substrate container with bottom plate
US7252199B2 (en) * 2004-03-26 2007-08-07 Entegris, Inc. Disk cassette system
US7584851B2 (en) * 2004-10-08 2009-09-08 Seagate Technology Llc Container for disk drives
US7596456B2 (en) * 2005-11-18 2009-09-29 Texas Instruments Incorporated Method and apparatus for cassette integrity testing using a wafer sorter
US7810639B2 (en) * 2006-02-10 2010-10-12 Seagate Technology Llc Container for consumer electronics
KR100788005B1 (ko) * 2006-04-27 2007-12-21 에스에스알 엠에프지 코포레이션 박막 디스크용 카세트 뚜껑 개폐장치
US20080019811A1 (en) * 2006-07-11 2008-01-24 Michael Krolak Method and apparatus for vertical wafer transport, buffer and storage
WO2009008047A1 (ja) * 2007-07-09 2009-01-15 Kondoh Industries, Ltd. 半導体ウエハ収納容器内へのドライエアまたは窒素ガス充填装置並びに該装置を用いたウエハ静電除去装置
US20100020440A1 (en) * 2008-07-25 2010-01-28 Seagate Technology Llc Low profile substrate shipper
TWI346638B (en) * 2008-12-26 2011-08-11 Gudeng Prec Industral Co Ltd A purging valve and a wafer container having the purging valve
KR20140035377A (ko) 2011-05-03 2014-03-21 인티그리스, 인코포레이티드 입자 쉴드를 가지는 웨이퍼 용기
US20120288355A1 (en) * 2011-05-11 2012-11-15 Ming-Teng Hsieh Method for storing wafers
JP5888288B2 (ja) * 2013-06-26 2016-03-16 株式会社ダイフク 物品保管設備の検査装置
US10566226B2 (en) * 2014-11-11 2020-02-18 Applied Materials, Inc. Multi-cassette carrying case
JP6451453B2 (ja) * 2015-03-31 2019-01-16 Tdk株式会社 ガスパージ装置、ロードポート装置、パージ対象容器の設置台およびガスパージ方法

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Also Published As

Publication number Publication date
DE69433428T2 (de) 2004-10-07
EP0749393B1 (de) 2003-12-17
WO1995024348A1 (en) 1995-09-14
US5472086A (en) 1995-12-05
US5755332A (en) 1998-05-26
ATE256915T1 (de) 2004-01-15
EP0749393A1 (de) 1996-12-27
EP0749393A4 (de) 1997-07-02
JPH09507726A (ja) 1997-08-05
JP3202991B2 (ja) 2001-08-27

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: ENTEGRIS, INC., CHASKA, MINN., US

8364 No opposition during term of opposition