DE69501638T2 - Verfahren zur Herstellung eines Keramikteils aus Siliciumnitrid - Google Patents
Verfahren zur Herstellung eines Keramikteils aus SiliciumnitridInfo
- Publication number
- DE69501638T2 DE69501638T2 DE69501638T DE69501638T DE69501638T2 DE 69501638 T2 DE69501638 T2 DE 69501638T2 DE 69501638 T DE69501638 T DE 69501638T DE 69501638 T DE69501638 T DE 69501638T DE 69501638 T2 DE69501638 T2 DE 69501638T2
- Authority
- DE
- Germany
- Prior art keywords
- producing
- silicon nitride
- ceramic part
- ceramic
- nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
- C04B35/5935—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
- C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
- C04B2235/3865—Aluminium nitrides
- C04B2235/3869—Aluminium oxynitrides, e.g. AlON, sialon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
- C04B2235/6567—Treatment time
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/76—Crystal structural characteristics, e.g. symmetry
- C04B2235/766—Trigonal symmetry, e.g. alpha-Si3N4 or alpha-Sialon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Products (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6109113A JPH07299708A (ja) | 1994-04-26 | 1994-04-26 | 窒化ケイ素系セラミックス部品の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69501638D1 DE69501638D1 (de) | 1998-04-02 |
DE69501638T2 true DE69501638T2 (de) | 1998-07-23 |
Family
ID=14501898
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69501638T Expired - Lifetime DE69501638T2 (de) | 1994-04-26 | 1995-04-24 | Verfahren zur Herstellung eines Keramikteils aus Siliciumnitrid |
Country Status (6)
Country | Link |
---|---|
US (1) | US5599493A (de) |
EP (1) | EP0679616B1 (de) |
JP (1) | JPH07299708A (de) |
KR (1) | KR0138018B1 (de) |
DE (1) | DE69501638T2 (de) |
TW (1) | TW284747B (de) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0742348B1 (de) * | 1994-11-14 | 2004-07-21 | Sumitomo Electric Industries, Limited | Keramisches gleitstück |
JP4070417B2 (ja) * | 2000-03-31 | 2008-04-02 | 日本特殊陶業株式会社 | 窒化珪素質部材及びその製造方法並びに切削工具 |
DE10165080B4 (de) * | 2000-09-20 | 2015-05-13 | Hitachi Metals, Ltd. | Siliciumnitrid-Pulver und -Sinterkörper sowie Verfahren zu deren Herstellung und Leiterplatte damit |
JP2003176178A (ja) * | 2001-12-07 | 2003-06-24 | Nhk Spring Co Ltd | ウエハ支持体およびその周辺部品 |
JP4087244B2 (ja) * | 2002-12-20 | 2008-05-21 | 電気化学工業株式会社 | セラミックスの改質方法 |
TW200903026A (en) | 2007-07-12 | 2009-01-16 | Young Optics Inc | Fixed-focus lens |
KR101019706B1 (ko) * | 2008-12-30 | 2011-03-07 | 주식회사 하이닉스반도체 | 반도체 패키지 및 이의 제조 방법 |
EP2658680B1 (de) | 2010-12-31 | 2020-12-09 | Saint-Gobain Ceramics & Plastics, Inc. | Schleifgegenstanden mit Schleifpartikeln mit besonderen Formen und Verfahren zur Formung solcher Gegenständen |
WO2013003830A2 (en) | 2011-06-30 | 2013-01-03 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles including abrasive particles of silicon nitride |
CN103764349B (zh) | 2011-06-30 | 2017-06-09 | 圣戈本陶瓷及塑料股份有限公司 | 液相烧结碳化硅研磨颗粒 |
EP2760639B1 (de) | 2011-09-26 | 2021-01-13 | Saint-Gobain Ceramics & Plastics, Inc. | Schleifartikel mit abrasiven teilchen, beschichtetes schleifmittel mit abrasiven teilchen und herstellungsverfahren dafür |
BR112014016159A8 (pt) | 2011-12-30 | 2017-07-04 | Saint Gobain Ceramics | formação de partículas abrasivas moldadas |
CN104114327B (zh) | 2011-12-30 | 2018-06-05 | 圣戈本陶瓷及塑料股份有限公司 | 复合成型研磨颗粒及其形成方法 |
KR20140106713A (ko) | 2011-12-30 | 2014-09-03 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자 및 이의 형성방법 |
CA3170246A1 (en) | 2012-01-10 | 2013-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having complex shapes and methods of forming same |
WO2013106602A1 (en) | 2012-01-10 | 2013-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
EP2830829B1 (de) | 2012-03-30 | 2018-01-10 | Saint-Gobain Abrasives, Inc. | Schleifmittel mit fibrillierten fasern |
IN2014DN10170A (de) | 2012-05-23 | 2015-08-21 | Saint Gobain Ceramics | |
US10106714B2 (en) | 2012-06-29 | 2018-10-23 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
RU2614488C2 (ru) | 2012-10-15 | 2017-03-28 | Сен-Гобен Абразивс, Инк. | Абразивные частицы, имеющие определенные формы, и способы формирования таких частиц |
US9074119B2 (en) | 2012-12-31 | 2015-07-07 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
EP2957368B1 (de) | 2013-02-13 | 2020-04-22 | Kyocera Corporation | Schneidewerkzeug |
CN105073343B (zh) | 2013-03-29 | 2017-11-03 | 圣戈班磨料磨具有限公司 | 具有特定形状的磨粒、形成这种粒子的方法及其用途 |
TW201502263A (zh) | 2013-06-28 | 2015-01-16 | Saint Gobain Ceramics | 包含成形研磨粒子之研磨物品 |
MX2016004000A (es) | 2013-09-30 | 2016-06-02 | Saint Gobain Ceramics | Particulas abrasivas moldeadas y metodos para formación de ellas. |
EP3089851B1 (de) | 2013-12-31 | 2019-02-06 | Saint-Gobain Abrasives, Inc. | Schleifartikel mit geformten schleifpartikeln |
US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
CA3123554A1 (en) | 2014-04-14 | 2015-10-22 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
CN106457521A (zh) | 2014-04-14 | 2017-02-22 | 圣戈本陶瓷及塑料股份有限公司 | 包括成形磨粒的研磨制品 |
US9902045B2 (en) | 2014-05-30 | 2018-02-27 | Saint-Gobain Abrasives, Inc. | Method of using an abrasive article including shaped abrasive particles |
US9707529B2 (en) | 2014-12-23 | 2017-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
US9676981B2 (en) | 2014-12-24 | 2017-06-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle fractions and method of forming same |
CN107636109A (zh) | 2015-03-31 | 2018-01-26 | 圣戈班磨料磨具有限公司 | 固定磨料制品和其形成方法 |
TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
KR102006615B1 (ko) | 2015-06-11 | 2019-08-02 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마 입자들을 포함하는 연마 물품 |
US20170335155A1 (en) | 2016-05-10 | 2017-11-23 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles and methods of forming same |
ES2922927T3 (es) | 2016-05-10 | 2022-09-21 | Saint Gobain Ceramics & Plastics Inc | Procedimientos de formación de partículas abrasivas |
EP4349896A2 (de) | 2016-09-29 | 2024-04-10 | Saint-Gobain Abrasives, Inc. | Feste schleifartikel und verfahren zur formung davon |
US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
WO2018236989A1 (en) | 2017-06-21 | 2018-12-27 | Saint-Gobain Ceramics & Plastics, Inc. | PARTICULATE MATERIALS AND METHODS OF FORMATION THEREOF |
KR102047662B1 (ko) * | 2017-11-30 | 2019-11-22 | (주) 존인피니티 | 신규한 질화규소 분말의 제조방법 |
US11926019B2 (en) | 2019-12-27 | 2024-03-12 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles and methods of forming same |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6081076A (ja) * | 1983-10-07 | 1985-05-09 | 株式会社日立製作所 | セラミツクスの機械的強度向上法 |
JPS6355180A (ja) * | 1986-08-22 | 1988-03-09 | 株式会社東芝 | 窒化ケイ素系セラミックス部品の製造方法 |
JPH02167864A (ja) * | 1988-12-22 | 1990-06-28 | Nkk Corp | サイアロン焼結体の熱処理方法 |
JPH04367579A (ja) * | 1991-06-14 | 1992-12-18 | Toshiba Tungaloy Co Ltd | 酸化膜付窒化ケイ素焼結体 |
JPH05149112A (ja) * | 1991-11-25 | 1993-06-15 | Riken Corp | セラミツクバルブの製造方法 |
JP3198662B2 (ja) * | 1992-09-21 | 2001-08-13 | 住友電気工業株式会社 | 窒化ケイ素系焼結体及びその製造方法 |
US5384292A (en) * | 1993-04-14 | 1995-01-24 | Sumitomo Electric Industries, Ltd. | Silicon nitride composite sintered body and process for producing the same |
-
1994
- 1994-04-26 JP JP6109113A patent/JPH07299708A/ja active Pending
-
1995
- 1995-04-24 EP EP95106079A patent/EP0679616B1/de not_active Expired - Lifetime
- 1995-04-24 TW TW084104016A patent/TW284747B/zh active
- 1995-04-24 DE DE69501638T patent/DE69501638T2/de not_active Expired - Lifetime
- 1995-04-25 KR KR1019950009734A patent/KR0138018B1/ko not_active IP Right Cessation
- 1995-04-26 US US08/429,067 patent/US5599493A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR0138018B1 (ko) | 1998-04-27 |
EP0679616B1 (de) | 1998-02-25 |
DE69501638D1 (de) | 1998-04-02 |
JPH07299708A (ja) | 1995-11-14 |
EP0679616A2 (de) | 1995-11-02 |
EP0679616A3 (de) | 1995-11-29 |
TW284747B (de) | 1996-09-01 |
US5599493A (en) | 1997-02-04 |
KR950029233A (ko) | 1995-11-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: FIENER, J., PAT.-ANW., 87719 MINDELHEIM |