DE69504563T2 - Verfahren zur Herstellung von Dünnschichten - Google Patents

Verfahren zur Herstellung von Dünnschichten

Info

Publication number
DE69504563T2
DE69504563T2 DE69504563T DE69504563T DE69504563T2 DE 69504563 T2 DE69504563 T2 DE 69504563T2 DE 69504563 T DE69504563 T DE 69504563T DE 69504563 T DE69504563 T DE 69504563T DE 69504563 T2 DE69504563 T2 DE 69504563T2
Authority
DE
Germany
Prior art keywords
production
thin layers
layers
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69504563T
Other languages
English (en)
Other versions
DE69504563D1 (de
Inventor
Yoshifumi Kato
Yoshifumi Fujita
Atsushi Hozumi
Akiteru Nishio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyoda Jidoshokki Seisakusho KK
Toyoda Automatic Loom Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP07617994A external-priority patent/JP3396951B2/ja
Priority claimed from JP28561694A external-priority patent/JP3400148B2/ja
Priority claimed from JP31677394A external-priority patent/JP3374560B2/ja
Application filed by Toyoda Jidoshokki Seisakusho KK, Toyoda Automatic Loom Works Ltd filed Critical Toyoda Jidoshokki Seisakusho KK
Application granted granted Critical
Publication of DE69504563D1 publication Critical patent/DE69504563D1/de
Publication of DE69504563T2 publication Critical patent/DE69504563T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J3/00—Processes of treating or compounding macromolecular substances
    • C08J3/24—Crosslinking, e.g. vulcanising, of macromolecules
    • C08J3/243—Two or more independent types of crosslinking for one or more polymers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/042—Coating with two or more layers, where at least one layer of a composition contains a polymer binder
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/0427—Coating with only one layer of a composition containing a polymer binder
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/08—Heat treatment
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12—Chemical modification
    • C08J7/16—Chemical modification with polymerisable compounds
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2333/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers
    • C08J2333/04—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters
    • C08J2333/06—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters of esters containing only carbon, hydrogen, and oxygen, the oxygen atom being present only as part of the carboxyl radical
    • C08J2333/10—Homopolymers or copolymers of methacrylic acid esters
    • C08J2333/12—Homopolymers or copolymers of methyl methacrylate
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2369/00—Characterised by the use of polycarbonates; Derivatives of polycarbonates
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2483/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen, or carbon only; Derivatives of such polymers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2483/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen, or carbon only; Derivatives of such polymers
    • C08J2483/04—Polysiloxanes
DE69504563T 1994-04-14 1995-04-12 Verfahren zur Herstellung von Dünnschichten Expired - Lifetime DE69504563T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP07617994A JP3396951B2 (ja) 1994-04-14 1994-04-14 薄膜形成方法
JP28561694A JP3400148B2 (ja) 1994-11-18 1994-11-18 撥水性耐摩耗薄膜の形成方法
JP31677394A JP3374560B2 (ja) 1994-12-20 1994-12-20 撥水性耐摩耗薄膜の形成方法

Publications (2)

Publication Number Publication Date
DE69504563D1 DE69504563D1 (de) 1998-10-15
DE69504563T2 true DE69504563T2 (de) 1999-04-08

Family

ID=27302084

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69504563T Expired - Lifetime DE69504563T2 (de) 1994-04-14 1995-04-12 Verfahren zur Herstellung von Dünnschichten

Country Status (4)

Country Link
US (2) US5571569A (de)
EP (1) EP0678545B1 (de)
KR (1) KR0155460B1 (de)
DE (1) DE69504563T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USH1935H1 (en) 1997-09-26 2001-01-02 Tredegar Corporation Combination pouch and release sheet and method for producing same
US6312808B1 (en) 1999-05-03 2001-11-06 Guardian Industries Corporation Hydrophobic coating with DLC & FAS on substrate
US6368664B1 (en) 1999-05-03 2002-04-09 Guardian Industries Corp. Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon
US6475573B1 (en) 1999-05-03 2002-11-05 Guardian Industries Corp. Method of depositing DLC inclusive coating on substrate
US6447891B1 (en) 1999-05-03 2002-09-10 Guardian Industries Corp. Low-E coating system including protective DLC
US6280834B1 (en) 1999-05-03 2001-08-28 Guardian Industries Corporation Hydrophobic coating including DLC and/or FAS on substrate
US6461731B1 (en) 1999-05-03 2002-10-08 Guardian Industries Corp. Solar management coating system including protective DLC
US6277480B1 (en) 1999-05-03 2001-08-21 Guardian Industries Corporation Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method
JP3932083B2 (ja) * 1999-07-30 2007-06-20 株式会社豊田自動織機 光触媒機能を有する被膜の形成方法
US6500553B1 (en) * 1999-11-16 2002-12-31 Asahi Glass Company, Limited Substrate having treated surface layers and process for producing it
US20030143320A1 (en) * 2002-01-30 2003-07-31 Cheng-Chung Lee Light diffuser fabrication method
EP1491916A1 (de) * 2002-03-26 2004-12-29 TDK Corporation Artikel mit einer zusammengesetzten hartbeschichtungsschicht und verfahren zur ausbildung der zusammengesetzten hartbeschichtungsschicht
KR100970478B1 (ko) * 2003-01-28 2010-07-16 삼성전자주식회사 생화학 반응장치 기재의 표면 처리방법
TWI418929B (zh) * 2005-12-26 2013-12-11 Kimoto Kk Surface protection film
WO2012107804A1 (en) * 2011-02-07 2012-08-16 Indian Institute Of Science Cold field emission cathodes using carbon nanotubes
MX2016014934A (es) 2014-05-20 2017-07-28 Whitford Corp Composiciones de sol-gel con dureza y resistencia al impacto mejoradas.

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3935346A (en) * 1973-03-12 1976-01-27 Owens-Illinois, Inc. Coated plastic substrates for coating compositions
US4084021A (en) * 1974-10-08 1978-04-11 Minnesota Mining And Manufacturing Company Method for rendering substrates resistant to abrasion
US4246298A (en) * 1979-03-14 1981-01-20 American Can Company Rapid curing of epoxy resin coating compositions by combination of photoinitiation and controlled heat application
US4758448A (en) * 1982-09-07 1988-07-19 Signet Armorlite, Inc. Coated ophthalmic lenses and method for coating the same
JPH03227463A (ja) * 1990-02-01 1991-10-08 Idemitsu Petrochem Co Ltd 合成樹脂タイル
JP2975402B2 (ja) * 1990-07-17 1999-11-10 昭和電工株式会社 コーティング膜の製造方法

Also Published As

Publication number Publication date
EP0678545A2 (de) 1995-10-25
KR0155460B1 (ko) 1998-12-01
US5783260A (en) 1998-07-21
DE69504563D1 (de) 1998-10-15
US5571569A (en) 1996-11-05
EP0678545B1 (de) 1998-09-09
EP0678545A3 (de) 1995-11-22
KR950029300A (ko) 1995-11-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: KABUSHIKI KAISHA TOYOTA JIDOSHOKKI, KARIYA, AICHI,

8320 Willingness to grant licences declared (paragraph 23)