DE69511919D1 - Elektrisch abstimmbarer, durch mikrotechnische Oberflächenbearbeitung hergestellter Fabry-Perot-Interferometer zum optischen Untersuchung von Materialien - Google Patents

Elektrisch abstimmbarer, durch mikrotechnische Oberflächenbearbeitung hergestellter Fabry-Perot-Interferometer zum optischen Untersuchung von Materialien

Info

Publication number
DE69511919D1
DE69511919D1 DE69511919T DE69511919T DE69511919D1 DE 69511919 D1 DE69511919 D1 DE 69511919D1 DE 69511919 T DE69511919 T DE 69511919T DE 69511919 T DE69511919 T DE 69511919T DE 69511919 D1 DE69511919 D1 DE 69511919D1
Authority
DE
Germany
Prior art keywords
microtechnical
materials
surface treatment
perot interferometer
electrically tunable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69511919T
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English (en)
Other versions
DE69511919T2 (de
Inventor
Martti Blomberg
Ari Lehto
Markku Orpana
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vaisala Oy
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Application granted granted Critical
Publication of DE69511919D1 publication Critical patent/DE69511919D1/de
Publication of DE69511919T2 publication Critical patent/DE69511919T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
DE69511919T 1994-02-17 1995-02-09 Elektrisch abstimmbarer, durch mikrotechnische Oberflächenbearbeitung hergestellter Fabry-Perot-Interferometer zum optischen Untersuchung von Materialien Expired - Lifetime DE69511919T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI940742A FI94804C (fi) 1994-02-17 1994-02-17 Sähköisesti säädettävä pintamikromekaaninen Fabry-Perot-interferometri käytettäväksi optisessa materiaalianalyysissä

Publications (2)

Publication Number Publication Date
DE69511919D1 true DE69511919D1 (de) 1999-10-14
DE69511919T2 DE69511919T2 (de) 2000-05-04

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
DE69511919T Expired - Lifetime DE69511919T2 (de) 1994-02-17 1995-02-09 Elektrisch abstimmbarer, durch mikrotechnische Oberflächenbearbeitung hergestellter Fabry-Perot-Interferometer zum optischen Untersuchung von Materialien

Country Status (5)

Country Link
US (1) US5561523A (de)
EP (1) EP0668490B1 (de)
JP (1) JP3742124B2 (de)
DE (1) DE69511919T2 (de)
FI (1) FI94804C (de)

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DE69511919T2 (de) 2000-05-04
JPH07286809A (ja) 1995-10-31
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US5561523A (en) 1996-10-01
EP0668490B1 (de) 1999-09-08
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