DE69513352D1 - Tunneleffektsensor aus Einzelhalbleiterscheibe und kostengünstige IC-Herstellungsmethode - Google Patents

Tunneleffektsensor aus Einzelhalbleiterscheibe und kostengünstige IC-Herstellungsmethode

Info

Publication number
DE69513352D1
DE69513352D1 DE69513352T DE69513352T DE69513352D1 DE 69513352 D1 DE69513352 D1 DE 69513352D1 DE 69513352 T DE69513352 T DE 69513352T DE 69513352 T DE69513352 T DE 69513352T DE 69513352 D1 DE69513352 D1 DE 69513352D1
Authority
DE
Germany
Prior art keywords
effective
manufacturing
cost
semiconductor wafer
effect sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69513352T
Other languages
English (en)
Other versions
DE69513352T2 (de
Inventor
Randall L Kubena
Gary M Atkinson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DirecTV Group Inc
Original Assignee
Hughes Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Electronics Corp filed Critical Hughes Electronics Corp
Application granted granted Critical
Publication of DE69513352D1 publication Critical patent/DE69513352D1/de
Publication of DE69513352T2 publication Critical patent/DE69513352T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0894—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by non-contact electron transfer, i.e. electron tunneling
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Micromachines (AREA)
DE69513352T 1994-08-19 1995-08-05 Tunneleffektsensor aus Einzelhalbleiterscheibe und kostengünstige IC-Herstellungsmethode Expired - Lifetime DE69513352T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/292,897 US5596194A (en) 1994-08-19 1994-08-19 Single-wafer tunneling sensor and low-cost IC manufacturing method

Publications (2)

Publication Number Publication Date
DE69513352D1 true DE69513352D1 (de) 1999-12-23
DE69513352T2 DE69513352T2 (de) 2000-08-10

Family

ID=23126706

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69513352T Expired - Lifetime DE69513352T2 (de) 1994-08-19 1995-08-05 Tunneleffektsensor aus Einzelhalbleiterscheibe und kostengünstige IC-Herstellungsmethode

Country Status (4)

Country Link
US (2) US5596194A (de)
EP (1) EP0701135B1 (de)
JP (1) JPH08181333A (de)
DE (1) DE69513352T2 (de)

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WO2002073673A1 (en) * 2001-03-13 2002-09-19 Rochester Institute Of Technology A micro-electro-mechanical switch and a method of using and making thereof
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DE10197405B4 (de) * 2001-06-21 2016-09-01 Mitsubishi Denki K.K. Herstellungsverfahren für einen Halbleiter-Beschleunigungssensor
US6905905B2 (en) * 2001-06-21 2005-06-14 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing thin-film structure
US6729019B2 (en) 2001-07-11 2004-05-04 Formfactor, Inc. Method of manufacturing a probe card
US7378775B2 (en) * 2001-10-26 2008-05-27 Nth Tech Corporation Motion based, electrostatic power source and methods thereof
US7211923B2 (en) * 2001-10-26 2007-05-01 Nth Tech Corporation Rotational motion based, electrostatic power source and methods thereof
WO2004079292A2 (en) * 2003-02-28 2004-09-16 Southwest Research Institute Mems sensor for detecting stress corrosion cracking
US7287328B2 (en) * 2003-08-29 2007-10-30 Rochester Institute Of Technology Methods for distributed electrode injection
US7217582B2 (en) * 2003-08-29 2007-05-15 Rochester Institute Of Technology Method for non-damaging charge injection and a system thereof
US8581308B2 (en) * 2004-02-19 2013-11-12 Rochester Institute Of Technology High temperature embedded charge devices and methods thereof
US20070074731A1 (en) * 2005-10-05 2007-04-05 Nth Tech Corporation Bio-implantable energy harvester systems and methods thereof
DE102009058320B4 (de) * 2009-12-15 2017-04-06 Airbus Defence and Space GmbH Drucksensor und Druckmessverfahren
DE102010029278B4 (de) * 2010-05-25 2019-05-23 Deutsches Zentrum für Luft- und Raumfahrt e.V. Sensor und Aktuator für mehrere Rotationsfreiheitsgrade
US8991250B2 (en) * 2012-09-11 2015-03-31 The United States Of America As Represented By Secretary Of The Navy Tuning fork gyroscope time domain inertial sensor
US8943611B2 (en) 2013-07-23 2015-01-27 National Institute Of Standards And Technology Probe module, method for making and use of same
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RU2685511C2 (ru) * 2014-08-19 2019-04-19 Атлас Джеймс РАССЕЛ Система, способ и устройство для переработки битумной черепицы и производства асфальтобетонной смеси
US10580605B2 (en) 2015-11-23 2020-03-03 University Of Utah Research Foundation Very low power microelectromechanical devices for the internet of everything
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IT201900013323A1 (it) * 2019-07-30 2021-01-30 Sleng S R L Interruttore remoto a funzionamento sonoro, in particolare per applicazioni su dispositivi vettori polifunzionali biocompatibili all’interno di fluidi e/o ambienti organici.

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Also Published As

Publication number Publication date
EP0701135B1 (de) 1999-11-17
DE69513352T2 (de) 2000-08-10
JPH08181333A (ja) 1996-07-12
US5665253A (en) 1997-09-09
US5596194A (en) 1997-01-21
EP0701135A1 (de) 1996-03-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: WITTE, WELLER & PARTNER, 70178 STUTTGART