DE69525558T2 - Methode zur Herstellung eines Dünnfilm-Transistors mit invertierter Struktur - Google Patents
Methode zur Herstellung eines Dünnfilm-Transistors mit invertierter StrukturInfo
- Publication number
- DE69525558T2 DE69525558T2 DE69525558T DE69525558T DE69525558T2 DE 69525558 T2 DE69525558 T2 DE 69525558T2 DE 69525558 T DE69525558 T DE 69525558T DE 69525558 T DE69525558 T DE 69525558T DE 69525558 T2 DE69525558 T2 DE 69525558T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- thin film
- film transistor
- inverted structure
- inverted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8422994 | 1994-04-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69525558D1 DE69525558D1 (de) | 2002-04-04 |
DE69525558T2 true DE69525558T2 (de) | 2002-08-22 |
Family
ID=13824652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69525558T Expired - Lifetime DE69525558T2 (de) | 1994-04-22 | 1995-04-20 | Methode zur Herstellung eines Dünnfilm-Transistors mit invertierter Struktur |
Country Status (5)
Country | Link |
---|---|
US (1) | US5561074A (de) |
EP (1) | EP0678907B1 (de) |
KR (1) | KR0180323B1 (de) |
DE (1) | DE69525558T2 (de) |
TW (1) | TW291597B (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2833545B2 (ja) * | 1995-03-06 | 1998-12-09 | 日本電気株式会社 | 半導体装置の製造方法 |
JP3082679B2 (ja) * | 1996-08-29 | 2000-08-28 | 日本電気株式会社 | 薄膜トランジスタおよびその製造方法 |
WO1998057506A1 (en) * | 1997-06-12 | 1998-12-17 | Northern Telecom Limited | Directory service based on geographic location of a mobile telecommunications unit |
JP2001308339A (ja) | 2000-02-18 | 2001-11-02 | Sharp Corp | 薄膜トランジスタ |
JP4118484B2 (ja) | 2000-03-06 | 2008-07-16 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2001257350A (ja) | 2000-03-08 | 2001-09-21 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
JP4700160B2 (ja) | 2000-03-13 | 2011-06-15 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP4118485B2 (ja) | 2000-03-13 | 2008-07-16 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP4683688B2 (ja) | 2000-03-16 | 2011-05-18 | 株式会社半導体エネルギー研究所 | 液晶表示装置の作製方法 |
JP4393662B2 (ja) | 2000-03-17 | 2010-01-06 | 株式会社半導体エネルギー研究所 | 液晶表示装置の作製方法 |
JP4785229B2 (ja) | 2000-05-09 | 2011-10-05 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US7071037B2 (en) | 2001-03-06 | 2006-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
KR101576813B1 (ko) * | 2007-08-17 | 2015-12-11 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
WO2009060922A1 (en) * | 2007-11-05 | 2009-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor and display device having the thin film transistor |
TWI535037B (zh) * | 2008-11-07 | 2016-05-21 | 半導體能源研究所股份有限公司 | 半導體裝置和其製造方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61237420A (ja) * | 1985-04-13 | 1986-10-22 | Oki Electric Ind Co Ltd | P型アモルフアスシリコン薄膜の製造方法 |
US4882295A (en) * | 1985-07-26 | 1989-11-21 | Energy Conversion Devices, Inc. | Method of making a double injection field effect transistor |
US5270224A (en) * | 1988-03-11 | 1993-12-14 | Fujitsu Limited | Method of manufacturing a semiconductor device having a region doped to a level exceeding the solubility limit |
JPH01241175A (ja) * | 1988-03-23 | 1989-09-26 | Seikosha Co Ltd | 非晶質シリコン薄膜トランジスタの製造方法 |
US5053354A (en) * | 1988-05-30 | 1991-10-01 | Seikosha Co., Ltd. | Method of fabricating a reverse staggered type silicon thin film transistor |
JPH01302769A (ja) * | 1988-05-30 | 1989-12-06 | Seikosha Co Ltd | 逆スタガー型シリコン薄膜トランジスタの製造方法 |
JPH07114285B2 (ja) * | 1988-12-16 | 1995-12-06 | 日本電気株式会社 | 薄膜トランジスタの製造方法 |
US5109260A (en) * | 1989-07-10 | 1992-04-28 | Seikosha Co., Ltd. | Silicon thin film transistor and method for producing the same |
EP0606114A1 (de) * | 1989-08-11 | 1994-07-13 | Seiko Instruments Inc. | Verfahren zur Herstellung eines Feldeffekttransistors |
DE4192351T (de) * | 1990-10-05 | 1992-10-08 | ||
JPH04321275A (ja) * | 1991-04-19 | 1992-11-11 | Nec Corp | 薄膜トランジスタ |
JPH04367277A (ja) * | 1991-06-14 | 1992-12-18 | Nec Corp | 薄膜トランジスタおよびその製造方法 |
JPH04367276A (ja) * | 1991-06-14 | 1992-12-18 | Nec Corp | 薄膜トランジスタおよびその製造方法 |
JPH0583197A (ja) * | 1991-09-21 | 1993-04-02 | Alpine Electron Inc | デイジタルオーデイオ装置 |
-
1995
- 1995-04-20 US US08/425,806 patent/US5561074A/en not_active Expired - Lifetime
- 1995-04-20 DE DE69525558T patent/DE69525558T2/de not_active Expired - Lifetime
- 1995-04-20 EP EP95105936A patent/EP0678907B1/de not_active Expired - Lifetime
- 1995-04-21 TW TW084103943A patent/TW291597B/zh not_active IP Right Cessation
- 1995-04-21 KR KR1019950009475A patent/KR0180323B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0678907A2 (de) | 1995-10-25 |
KR950030282A (ko) | 1995-11-24 |
EP0678907A3 (de) | 1997-08-20 |
TW291597B (de) | 1996-11-21 |
KR0180323B1 (ko) | 1999-04-15 |
US5561074A (en) | 1996-10-01 |
EP0678907B1 (de) | 2002-02-27 |
DE69525558D1 (de) | 2002-04-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: NEC LCD TECHNOLOGIES, LTD., KAWASAKI, KANAGAWA, JP |
|
8327 | Change in the person/name/address of the patent owner |
Owner name: NEC CORP., TOKYO, JP |
|
R082 | Change of representative |
Ref document number: 678907 Country of ref document: EP Representative=s name: MUELLER-BORE & PARTNER PATENTANWAELTE, EUROPEA, DE |