DE69529498D1 - Leitfähige Barriereschicht aus einer Legierung von Edelmetall und Isolator als Elektroden für Material mit hohen dielektrischen Konstanten - Google Patents

Leitfähige Barriereschicht aus einer Legierung von Edelmetall und Isolator als Elektroden für Material mit hohen dielektrischen Konstanten

Info

Publication number
DE69529498D1
DE69529498D1 DE69529498T DE69529498T DE69529498D1 DE 69529498 D1 DE69529498 D1 DE 69529498D1 DE 69529498 T DE69529498 T DE 69529498T DE 69529498 T DE69529498 T DE 69529498T DE 69529498 D1 DE69529498 D1 DE 69529498D1
Authority
DE
Germany
Prior art keywords
insulator
electrodes
alloy
barrier layer
layer made
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69529498T
Other languages
English (en)
Other versions
DE69529498T2 (de
Inventor
Scott R Summerfelt
Jason Reid
Marc Nicolet
Elzbieta Kolawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
California Institute of Technology CalTech
Texas Instruments Inc
Original Assignee
California Institute of Technology CalTech
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by California Institute of Technology CalTech, Texas Instruments Inc filed Critical California Institute of Technology CalTech
Application granted granted Critical
Publication of DE69529498D1 publication Critical patent/DE69529498D1/de
Publication of DE69529498T2 publication Critical patent/DE69529498T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/75—Electrodes comprising two or more layers, e.g. comprising a barrier layer and a metal layer
DE69529498T 1994-08-01 1995-07-28 Leitfähige Barriereschicht aus einer Legierung von Edelmetall und Isolator als Elektroden für Material mit hohen dielektrischen Konstanten Expired - Lifetime DE69529498T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/283,454 US5622893A (en) 1994-08-01 1994-08-01 Method of forming conductive noble-metal-insulator-alloy barrier layer for high-dielectric-constant material electrodes

Publications (2)

Publication Number Publication Date
DE69529498D1 true DE69529498D1 (de) 2003-03-06
DE69529498T2 DE69529498T2 (de) 2003-10-30

Family

ID=23086143

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69529498T Expired - Lifetime DE69529498T2 (de) 1994-08-01 1995-07-28 Leitfähige Barriereschicht aus einer Legierung von Edelmetall und Isolator als Elektroden für Material mit hohen dielektrischen Konstanten

Country Status (4)

Country Link
US (3) US5622893A (de)
EP (1) EP0698918B1 (de)
JP (1) JPH08191137A (de)
DE (1) DE69529498T2 (de)

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US5622893A (en) 1997-04-22
DE69529498T2 (de) 2003-10-30
US5696018A (en) 1997-12-09
US5729054A (en) 1998-03-17
JPH08191137A (ja) 1996-07-23
EP0698918B1 (de) 2003-01-29

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