DE69531170D1 - Unebener Halbleiter-Speicherkondensator - Google Patents

Unebener Halbleiter-Speicherkondensator

Info

Publication number
DE69531170D1
DE69531170D1 DE69531170T DE69531170T DE69531170D1 DE 69531170 D1 DE69531170 D1 DE 69531170D1 DE 69531170 T DE69531170 T DE 69531170T DE 69531170 T DE69531170 T DE 69531170T DE 69531170 D1 DE69531170 D1 DE 69531170D1
Authority
DE
Germany
Prior art keywords
storage capacitor
semiconductor storage
uneven semiconductor
uneven
tungsten nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69531170T
Other languages
English (en)
Other versions
DE69531170T2 (de
Inventor
Scott Meikle
Trung Doan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micron Technology Inc
Original Assignee
Micron Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micron Technology Inc filed Critical Micron Technology Inc
Application granted granted Critical
Publication of DE69531170D1 publication Critical patent/DE69531170D1/de
Publication of DE69531170T2 publication Critical patent/DE69531170T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
DE69531170T 1994-11-30 1995-11-30 Unebener Halbleiter-Speicherkondensator Expired - Lifetime DE69531170T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US34864694A 1994-11-30 1994-11-30
US348646 1994-11-30

Publications (2)

Publication Number Publication Date
DE69531170D1 true DE69531170D1 (de) 2003-07-31
DE69531170T2 DE69531170T2 (de) 2004-05-06

Family

ID=23368940

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69517158T Expired - Lifetime DE69517158T2 (de) 1994-11-30 1995-11-30 Verfahren zum auftragen von wolframnitrid unter verwendung eines silicium enthaltenden gases
DE69531170T Expired - Lifetime DE69531170T2 (de) 1994-11-30 1995-11-30 Unebener Halbleiter-Speicherkondensator

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69517158T Expired - Lifetime DE69517158T2 (de) 1994-11-30 1995-11-30 Verfahren zum auftragen von wolframnitrid unter verwendung eines silicium enthaltenden gases

Country Status (8)

Country Link
US (4) US5691235A (de)
EP (2) EP0742847B1 (de)
JP (1) JPH09509288A (de)
KR (1) KR100247455B1 (de)
AT (1) ATE193335T1 (de)
AU (1) AU4290396A (de)
DE (2) DE69517158T2 (de)
WO (1) WO1996017104A1 (de)

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Also Published As

Publication number Publication date
DE69517158T2 (de) 2001-01-25
AU4290396A (en) 1996-06-19
ATE193335T1 (de) 2000-06-15
US5691235A (en) 1997-11-25
US6472323B1 (en) 2002-10-29
JPH09509288A (ja) 1997-09-16
EP0742847A1 (de) 1996-11-20
US20020045322A1 (en) 2002-04-18
US6429086B1 (en) 2002-08-06
WO1996017104A1 (en) 1996-06-06
DE69517158D1 (de) 2000-06-29
EP0742847B1 (de) 2000-05-24
DE69531170T2 (de) 2004-05-06
US6730954B2 (en) 2004-05-04
KR100247455B1 (ko) 2000-04-01
EP0982772B1 (de) 2003-06-25
EP0982772A1 (de) 2000-03-01

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