DE69535202D1 - Elektrostatischer entladungsschutz für einen isfet-sensor - Google Patents

Elektrostatischer entladungsschutz für einen isfet-sensor

Info

Publication number
DE69535202D1
DE69535202D1 DE69535202T DE69535202T DE69535202D1 DE 69535202 D1 DE69535202 D1 DE 69535202D1 DE 69535202 T DE69535202 T DE 69535202T DE 69535202 T DE69535202 T DE 69535202T DE 69535202 D1 DE69535202 D1 DE 69535202D1
Authority
DE
Germany
Prior art keywords
electrostatic discharge
discharge protection
isfet sensor
isfet
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69535202T
Other languages
English (en)
Other versions
DE69535202T2 (de
Inventor
D Baxter
G Connery
D Fogel
W Silverthorne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Application granted granted Critical
Publication of DE69535202D1 publication Critical patent/DE69535202D1/de
Publication of DE69535202T2 publication Critical patent/DE69535202T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
    • H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4148—Integrated circuits therefor, e.g. fabricated by CMOS processing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
DE69535202T 1994-01-19 1995-01-12 Elektrostatischer entladungsschutz für einen isfet-sensor Expired - Lifetime DE69535202T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US183733 1994-01-19
US08/183,733 US5414284A (en) 1994-01-19 1994-01-19 ESD Protection of ISFET sensors
PCT/US1995/000426 WO1995020243A1 (en) 1994-01-19 1995-01-12 Electrostatic discharge protection of isfet sensors

Publications (2)

Publication Number Publication Date
DE69535202D1 true DE69535202D1 (de) 2006-10-12
DE69535202T2 DE69535202T2 (de) 2007-07-19

Family

ID=22674080

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69535202T Expired - Lifetime DE69535202T2 (de) 1994-01-19 1995-01-12 Elektrostatischer entladungsschutz für einen isfet-sensor

Country Status (10)

Country Link
US (2) US5414284A (de)
EP (1) EP0749632B1 (de)
JP (1) JP3701308B2 (de)
KR (1) KR100358534B1 (de)
CN (1) CN1120985C (de)
AU (1) AU1602195A (de)
CA (1) CA2181591C (de)
DE (1) DE69535202T2 (de)
RU (1) RU2134877C1 (de)
WO (1) WO1995020243A1 (de)

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Also Published As

Publication number Publication date
US5407854A (en) 1995-04-18
CA2181591C (en) 2008-04-29
JP3701308B2 (ja) 2005-09-28
EP0749632A4 (de) 1999-11-24
EP0749632B1 (de) 2006-08-30
WO1995020243A1 (en) 1995-07-27
CA2181591A1 (en) 1995-07-27
CN1143428A (zh) 1997-02-19
KR100358534B1 (ko) 2003-01-25
DE69535202T2 (de) 2007-07-19
RU2134877C1 (ru) 1999-08-20
JPH09508207A (ja) 1997-08-19
CN1120985C (zh) 2003-09-10
US5414284A (en) 1995-05-09
EP0749632A1 (de) 1996-12-27
AU1602195A (en) 1995-08-08

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