DE69605459D1 - Herstellungsverfahrung einer Elektronenfeldemissionsvorrichtung - Google Patents

Herstellungsverfahrung einer Elektronenfeldemissionsvorrichtung

Info

Publication number
DE69605459D1
DE69605459D1 DE69605459T DE69605459T DE69605459D1 DE 69605459 D1 DE69605459 D1 DE 69605459D1 DE 69605459 T DE69605459 T DE 69605459T DE 69605459 T DE69605459 T DE 69605459T DE 69605459 D1 DE69605459 D1 DE 69605459D1
Authority
DE
Germany
Prior art keywords
field emission
emission device
electron field
manufacturing experience
experience
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69605459T
Other languages
English (en)
Other versions
DE69605459T2 (de
Inventor
Sungho Jin
Wei Zhu
Gregory P Kochanski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Publication of DE69605459D1 publication Critical patent/DE69605459D1/de
Application granted granted Critical
Publication of DE69605459T2 publication Critical patent/DE69605459T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
    • H01J23/02—Electrodes; Magnetic control means; Screens
    • H01J23/06—Electron or ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30457—Diamond
DE69605459T 1995-01-31 1996-01-24 Herstellungsverfahrung einer Elektronenfeldemissionsvorrichtung Expired - Fee Related DE69605459T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/381,375 US5616368A (en) 1995-01-31 1995-01-31 Field emission devices employing activated diamond particle emitters and methods for making same

Publications (2)

Publication Number Publication Date
DE69605459D1 true DE69605459D1 (de) 2000-01-13
DE69605459T2 DE69605459T2 (de) 2000-07-27

Family

ID=23504783

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69605459T Expired - Fee Related DE69605459T2 (de) 1995-01-31 1996-01-24 Herstellungsverfahrung einer Elektronenfeldemissionsvorrichtung

Country Status (5)

Country Link
US (1) US5616368A (de)
EP (1) EP0725415B1 (de)
JP (1) JP3096629B2 (de)
CA (1) CA2166507C (de)
DE (1) DE69605459T2 (de)

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FR2726689B1 (fr) * 1994-11-08 1996-11-29 Commissariat Energie Atomique Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence
US5982095A (en) * 1995-09-19 1999-11-09 Lucent Technologies Inc. Plasma displays having electrodes of low-electron affinity materials
WO1997018576A1 (en) * 1995-11-15 1997-05-22 E.I. Du Pont De Nemours And Company Diamond powder field emitters and field emitter cathodes made therefrom
JP3755830B2 (ja) * 1995-11-15 2006-03-15 イー・アイ・デユポン・ドウ・ヌムール・アンド・カンパニー 粒子状の電界放射材料を用いた電界放射体陰極の製造方法
US5837331A (en) * 1996-03-13 1998-11-17 Motorola, Inc. Amorphous multi-layered structure and method of making the same
US6259202B1 (en) * 1996-06-12 2001-07-10 The Trustees Of Princeton University Plasma treatment of conductive layers
GB9626221D0 (en) * 1996-12-18 1997-02-05 Smiths Industries Plc Diamond surfaces
KR20010006238A (ko) 1997-04-09 2001-01-26 모리시타 요이찌 전자 방출 소자 및 이의 제조 방법
RU2161838C2 (ru) * 1997-06-24 2001-01-10 Тарис Технолоджис, Инк. Холодноэмиссионный пленочный катод и способы его получения
DE19757141A1 (de) * 1997-12-20 1999-06-24 Philips Patentverwaltung Array aus Diamant/wasserstoffhaltigen Elektroden
JPH11213866A (ja) 1998-01-22 1999-08-06 Sony Corp 電子放出装置及びその製造方法並びにこれを用いた表示装置
US6010918A (en) * 1998-02-10 2000-01-04 Fed Corporation Gate electrode structure for field emission devices and method of making
JP2963993B1 (ja) * 1998-07-24 1999-10-18 工業技術院長 超微粒子成膜法
JP2000182508A (ja) * 1998-12-16 2000-06-30 Sony Corp 電界放出型カソード、電子放出装置、および電子放出装置の製造方法
GB9905132D0 (en) 1999-03-06 1999-04-28 Smiths Industries Plc Electron emitting devices
JP3595718B2 (ja) 1999-03-15 2004-12-02 株式会社東芝 表示素子およびその製造方法
GB0006762D0 (en) * 2000-03-22 2000-05-10 Smiths Industries Plc Displays
GB0015928D0 (en) * 2000-06-30 2000-08-23 Printable Field Emitters Limit Field emitters
US6876724B2 (en) * 2000-10-06 2005-04-05 The University Of North Carolina - Chapel Hill Large-area individually addressable multi-beam x-ray system and method of forming same
US7227924B2 (en) * 2000-10-06 2007-06-05 The University Of North Carolina At Chapel Hill Computed tomography scanning system and method using a field emission x-ray source
US7082182B2 (en) * 2000-10-06 2006-07-25 The University Of North Carolina At Chapel Hill Computed tomography system for imaging of human and small animal
US6553096B1 (en) 2000-10-06 2003-04-22 The University Of North Carolina Chapel Hill X-ray generating mechanism using electron field emission cathode
US7085351B2 (en) * 2000-10-06 2006-08-01 University Of North Carolina At Chapel Hill Method and apparatus for controlling electron beam current
US6436221B1 (en) * 2001-02-07 2002-08-20 Industrial Technology Research Institute Method of improving field emission efficiency for fabricating carbon nanotube field emitters
JP4095272B2 (ja) * 2001-09-25 2008-06-04 株式会社東芝 微粒子製造方法および微粒子製造装置
US6541397B1 (en) * 2002-03-29 2003-04-01 Applied Materials, Inc. Removable amorphous carbon CMP stop
JP2006509260A (ja) * 2002-12-09 2006-03-16 ピクセリジェント・テクノロジーズ・エルエルシー ナノサイズの半導体粒子をベースとするプログラム可能なフォトリソグラフィマスクおよび可逆性フォトブリーチング可能な材料、ならびにそれらの用途
US7447298B2 (en) * 2003-04-01 2008-11-04 Cabot Microelectronics Corporation Decontamination and sterilization system using large area x-ray source
JP2005174856A (ja) * 2003-12-15 2005-06-30 Toshiba Corp シール材、およびシール材を用いた画像表示装置
US7262555B2 (en) * 2005-03-17 2007-08-28 Micron Technology, Inc. Method and system for discretely controllable plasma processing
US8155262B2 (en) * 2005-04-25 2012-04-10 The University Of North Carolina At Chapel Hill Methods, systems, and computer program products for multiplexing computed tomography
JP2007299723A (ja) * 2006-04-07 2007-11-15 Asahi Glass Co Ltd 電界電子放出素子
US8189893B2 (en) * 2006-05-19 2012-05-29 The University Of North Carolina At Chapel Hill Methods, systems, and computer program products for binary multiplexing x-ray radiography
WO2009012453A1 (en) * 2007-07-19 2009-01-22 The University Of North Carolina At Chapel Hill Stationary x-ray digital breast tomosynthesis systems and related methods
US8600003B2 (en) 2009-01-16 2013-12-03 The University Of North Carolina At Chapel Hill Compact microbeam radiation therapy systems and methods for cancer treatment and research
US8338317B2 (en) * 2011-04-06 2012-12-25 Infineon Technologies Ag Method for processing a semiconductor wafer or die, and particle deposition device
JP5987150B2 (ja) * 2010-03-04 2016-09-07 イマジニアリング株式会社 被膜形成装置
US8358739B2 (en) 2010-09-03 2013-01-22 The University Of North Carolina At Chapel Hill Systems and methods for temporal multiplexing X-ray imaging
US9782136B2 (en) 2014-06-17 2017-10-10 The University Of North Carolina At Chapel Hill Intraoral tomosynthesis systems, methods, and computer readable media for dental imaging
US10980494B2 (en) 2014-10-20 2021-04-20 The University Of North Carolina At Chapel Hill Systems and related methods for stationary digital chest tomosynthesis (s-DCT) imaging
US10835199B2 (en) 2016-02-01 2020-11-17 The University Of North Carolina At Chapel Hill Optical geometry calibration devices, systems, and related methods for three dimensional x-ray imaging

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US5131941A (en) * 1959-04-08 1992-07-21 Lemelson Jerome H Reaction apparatus and method
CA1235087A (en) * 1983-11-28 1988-04-12 Akio Hiraki Diamond-like thin film and method for making the same
FR2623013A1 (fr) * 1987-11-06 1989-05-12 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source
JPH01246116A (ja) * 1988-03-29 1989-10-02 Natl Inst For Res In Inorg Mater 針状，繊維状，多孔質状ダイヤモンドまたはそれらの集合体の製造法
US4874981A (en) * 1988-05-10 1989-10-17 Sri International Automatically focusing field emission electrode
US5019003A (en) * 1989-09-29 1991-05-28 Motorola, Inc. Field emission device having preformed emitters
US5234723A (en) * 1990-10-05 1993-08-10 Polar Materials Inc. Continous plasma activated species treatment process for particulate
US5129850A (en) * 1991-08-20 1992-07-14 Motorola, Inc. Method of making a molded field emission electron emitter employing a diamond coating
US5138237A (en) * 1991-08-20 1992-08-11 Motorola, Inc. Field emission electron device employing a modulatable diamond semiconductor emitter
JP3255960B2 (ja) * 1991-09-30 2002-02-12 株式会社神戸製鋼所 冷陰極エミッタ素子
US5283500A (en) * 1992-05-28 1994-02-01 At&T Bell Laboratories Flat panel field emission display apparatus
US5278475A (en) * 1992-06-01 1994-01-11 Motorola, Inc. Cathodoluminescent display apparatus and method for realization using diamond crystallites
US5463271A (en) * 1993-07-09 1995-10-31 Silicon Video Corp. Structure for enhancing electron emission from carbon-containing cathode
US5474808A (en) * 1994-01-07 1995-12-12 Michigan State University Method of seeding diamond
US5709577A (en) * 1994-12-22 1998-01-20 Lucent Technologies Inc. Method of making field emission devices employing ultra-fine diamond particle emitters
US5925701A (en) * 1997-12-22 1999-07-20 Eastman Kodak Company Stable aqueous polymeric dispersions containing hydrated metal salts of strong acids

Also Published As

Publication number Publication date
JP3096629B2 (ja) 2000-10-10
EP0725415A3 (de) 1996-11-27
US5616368A (en) 1997-04-01
EP0725415A2 (de) 1996-08-07
EP0725415B1 (de) 1999-12-08
JPH08241665A (ja) 1996-09-17
DE69605459T2 (de) 2000-07-27
CA2166507A1 (en) 1996-08-01
CA2166507C (en) 2000-12-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee