DE69609493D1 - Magnetische modulation des kraftsensors zur wechseldetektion in einem rasterkraftmikroskop - Google Patents
Magnetische modulation des kraftsensors zur wechseldetektion in einem rasterkraftmikroskopInfo
- Publication number
- DE69609493D1 DE69609493D1 DE69609493T DE69609493T DE69609493D1 DE 69609493 D1 DE69609493 D1 DE 69609493D1 DE 69609493 T DE69609493 T DE 69609493T DE 69609493 T DE69609493 T DE 69609493T DE 69609493 D1 DE69609493 D1 DE 69609493D1
- Authority
- DE
- Germany
- Prior art keywords
- graphic
- force
- magnetic modulation
- alternate detection
- force sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/32—AC mode
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
- G01Q30/12—Fluid environment
- G01Q30/14—Liquid environment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/85—Scanning probe control process
- Y10S977/851—Particular movement or positioning of scanning tip
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/863—Atomic force probe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/865—Magnetic force probe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/872—Positioner
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/873—Tip holder
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/875—Scanning probe structure with tip detail
- Y10S977/879—Material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/88—Manufacture, treatment, or detection of nanostructure with arrangement, process, or apparatus for testing
- Y10S977/881—Microscopy or spectroscopy, e.g. sem, tem
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/949—Radiation emitter using nanostructure
- Y10S977/95—Electromagnetic energy
- Y10S977/951—Laser
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/403,238 US5513518A (en) | 1994-05-19 | 1995-03-10 | Magnetic modulation of force sensor for AC detection in an atomic force microscope |
PCT/US1996/002753 WO1996028706A1 (en) | 1995-03-10 | 1996-02-29 | Magnetic modulation of force sensor for ac detection in an atomic force microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69609493D1 true DE69609493D1 (de) | 2000-08-31 |
DE69609493T2 DE69609493T2 (de) | 2001-06-28 |
Family
ID=23595030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69609493T Expired - Lifetime DE69609493T2 (de) | 1995-03-10 | 1996-02-29 | Magnetische modulation des kraftsensors zur wechseldetektion in einem rasterkraftmikroskop |
Country Status (5)
Country | Link |
---|---|
US (2) | US5513518A (de) |
EP (1) | EP0813675B1 (de) |
JP (1) | JP3249132B2 (de) |
DE (1) | DE69609493T2 (de) |
WO (1) | WO1996028706A1 (de) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5983712A (en) * | 1994-05-19 | 1999-11-16 | Molecular Imaging Corporation | Microscope for compliance measurement |
US5866805A (en) | 1994-05-19 | 1999-02-02 | Molecular Imaging Corporation Arizona Board Of Regents | Cantilevers for a magnetically driven atomic force microscope |
US5753814A (en) | 1994-05-19 | 1998-05-19 | Molecular Imaging Corporation | Magnetically-oscillated probe microscope for operation in liquids |
US5670712A (en) * | 1994-08-15 | 1997-09-23 | The Regents Of The University Of California | Method and apparatus for magnetic force control of a scanning probe |
US5675154A (en) * | 1995-02-10 | 1997-10-07 | Molecular Imaging Corporation | Scanning probe microscope |
US5750989A (en) * | 1995-02-10 | 1998-05-12 | Molecular Imaging Corporation | Scanning probe microscope for use in fluids |
US5621210A (en) * | 1995-02-10 | 1997-04-15 | Molecular Imaging Corporation | Microscope for force and tunneling microscopy in liquids |
EP0807799B1 (de) * | 1996-05-13 | 2002-10-09 | Seiko Instruments Inc. | Abtastgerät für eine Sonde |
US6038916A (en) * | 1997-07-22 | 2000-03-21 | Digital Instruments | Method and apparatus for measuring energy dissipation by a probe during operation of an atomic force microscope |
US6181131B1 (en) | 1997-07-25 | 2001-01-30 | University Of Washington | Magnetic resonance force microscopy with oscillator actuation |
US6518570B1 (en) * | 1998-04-03 | 2003-02-11 | Brookhaven Science Associates | Sensing mode atomic force microscope |
US6121611A (en) * | 1998-05-20 | 2000-09-19 | Molecular Imaging Corporation | Force sensing probe for scanning probe microscopy |
US6330824B1 (en) | 1999-02-19 | 2001-12-18 | The University Of North Carolina At Chapel Hill | Photothermal modulation for oscillating mode atomic force microscopy in solution |
DE10007617B4 (de) * | 1999-03-20 | 2006-04-20 | International Business Machines Corp. | Charakterisierung von Magnetfeldern |
DE19912814C2 (de) | 1999-03-22 | 2002-02-14 | Max Planck Gesellschaft | Verfahren und Vorrichtung zur Rastertunnelmikroskopie |
US6245204B1 (en) | 1999-03-23 | 2001-06-12 | Molecular Imaging Corporation | Vibrating tip conducting probe microscope |
US6377066B1 (en) | 1999-07-09 | 2002-04-23 | Mfi Technologies Corporation | Method and apparatus for sub-micron imaging and probing on probe station |
FR2807162B1 (fr) * | 2000-03-31 | 2002-06-28 | Inst Curie | Sonde d'analyse de surface pour un microscope a force atomique et microscope a force atomique la comportant |
KR100794976B1 (ko) * | 2000-11-30 | 2008-01-16 | 아실럼 리서치 코포레이션 | 고정밀 위치 측정을 위한 개량형 선형 가변 차동 변환기 |
SE0103781D0 (sv) * | 2001-11-12 | 2001-11-12 | Nanofactory Instruments Ab | Mätanordning för elektronmikroskop |
US6668628B2 (en) | 2002-03-29 | 2003-12-30 | Xerox Corporation | Scanning probe system with spring probe |
US6866255B2 (en) * | 2002-04-12 | 2005-03-15 | Xerox Corporation | Sputtered spring films with low stress anisotropy |
ES2194607B1 (es) * | 2002-05-03 | 2005-03-16 | Consejo Superior Investigaciones Cientificas | Un dispositivo de control de una señal de excitacion de un elemento oscilador mecanico resonante, un dispositivo de medicion, un metodo para controlar la señal de excitacion, un metodo para realizar mediciones, un programa de ordenador y un dispositivo de almacenamiento. |
US6952952B2 (en) * | 2002-11-01 | 2005-10-11 | Molecular Imaging Corporation | Topography and recognition imaging atomic force microscope and method of operation |
US7191639B2 (en) * | 2003-04-08 | 2007-03-20 | California Institute Of Technology | On-chip magnetic force actuation of microcantilevers by coplanar coils |
US7015584B2 (en) * | 2003-07-08 | 2006-03-21 | Xerox Corporation | High force metal plated spring structure |
US6819125B1 (en) * | 2003-07-23 | 2004-11-16 | Micron Technology, Inc. | Method and apparatus for integrated circuit failure analysis |
US20050088173A1 (en) * | 2003-10-24 | 2005-04-28 | Abraham David W. | Method and apparatus for tunable magnetic force interaction in a magnetic force microscope |
KR100631208B1 (ko) | 2004-07-20 | 2006-10-04 | 삼성전자주식회사 | 전자기유도를 이용한 바이오결합 검출장치 및 이를 이용한검출 방법 |
US7230440B2 (en) | 2004-10-21 | 2007-06-12 | Palo Alto Research Center Incorporated | Curved spring structure with elongated section located under cantilevered section |
US8330485B2 (en) * | 2004-10-21 | 2012-12-11 | Palo Alto Research Center Incorporated | Curved spring structure with downturned tip |
US20070236213A1 (en) * | 2006-03-30 | 2007-10-11 | Paden Bradley E | Telemetry method and apparatus using magnetically-driven mems resonant structure |
US8024963B2 (en) * | 2006-10-05 | 2011-09-27 | Asylum Research Corporation | Material property measurements using multiple frequency atomic force microscopy |
ES2303491A1 (es) * | 2007-12-21 | 2008-08-01 | Universidad Politecnica De Madrid | Detector de campo magnetico, mecanico y miniaturizable y su funcionamiento. |
WO2010044871A1 (en) | 2008-10-14 | 2010-04-22 | Roger Proksch | Integrated micro actuator and linear variable defferential transformer for high precision position measurements |
US8650660B2 (en) | 2008-11-13 | 2014-02-11 | Bruker Nano, Inc. | Method and apparatus of using peak force tapping mode to measure physical properties of a sample |
US8955161B2 (en) | 2008-11-13 | 2015-02-10 | Bruker Nano, Inc. | Peakforce photothermal-based detection of IR nanoabsorption |
US8739309B2 (en) * | 2008-11-13 | 2014-05-27 | Bruker Nano, Inc. | Method and apparatus of operating a scanning probe microscope |
US8484760B2 (en) | 2009-11-24 | 2013-07-09 | International Business Machines Corporation | Device comprising a cantilever and scanning system |
EP2507642B1 (de) | 2009-12-01 | 2021-02-24 | Bruker Nano, Inc. | Verfahren und vorrichtung zur bedienung eines rastersondenmikroskops |
US8726410B2 (en) * | 2010-07-30 | 2014-05-13 | The United States Of America As Represented By The Secretary Of The Air Force | Atomic force microscopy system and method for nanoscale measurement |
CN102519354A (zh) * | 2011-11-18 | 2012-06-27 | 东南大学 | 扫描式触觉纹理检测装置 |
WO2014043632A1 (en) | 2012-09-14 | 2014-03-20 | The University Of North Carolina At Chapel Hill | Methods, systems, and computer readable media for dual resonance frequency enhanced electrostatic force microscopy |
CN104865408A (zh) * | 2015-04-28 | 2015-08-26 | 中山大学 | 一种调控原子力显微镜悬臂梁共振频率的方法和装置 |
KR102457857B1 (ko) | 2016-08-22 | 2022-10-24 | 브루커 나노, 아이엔씨. | 진동 모드를 이용한 샘플의 적외선 특성 |
CN110441559B (zh) * | 2019-08-26 | 2020-07-28 | 上海大学 | 一种力实时可调的微纳探针自动成型装置和控制方法 |
Family Cites Families (116)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1433887A (en) * | 1973-04-19 | 1976-03-17 | Bactomatic Inc | Microbiological detection apparatus |
CH643397A5 (de) * | 1979-09-20 | 1984-05-30 | Ibm | Raster-tunnelmikroskop. |
EP0071666B1 (de) * | 1981-08-10 | 1985-02-06 | International Business Machines Corporation | Elektrische bewegbare Träger |
US4520570A (en) * | 1983-12-30 | 1985-06-04 | International Business Machines Corporation | Piezoelectric x-y-positioner |
DE3572030D1 (en) * | 1985-03-07 | 1989-09-07 | Ibm | Scanning tunneling microscope |
USRE33387E (en) * | 1985-11-26 | 1990-10-16 | International Business Machines Corporation | Atomic force microscope and method for imaging surfaces with atomic resolution |
US4724318A (en) * | 1985-11-26 | 1988-02-09 | International Business Machines Corporation | Atomic force microscope and method for imaging surfaces with atomic resolution |
DE3610540A1 (de) * | 1986-03-27 | 1987-10-01 | Kernforschungsanlage Juelich | Bewegungseinrichtung zur mikrobewegung von objekten |
EP0252745A3 (de) * | 1986-07-11 | 1990-01-24 | AGENCY OF INDUSTRIAL SCIENCE & TECHNOLOGY MINISTRY OF INTERNATIONAL TRADE & INDUSTRY | Gerät zum Steuern relativer Verschiebungen |
US4877957A (en) * | 1986-07-14 | 1989-10-31 | Olympus Optical Co., Ltd. | Scanning type tunnel microscope |
EP0262253A1 (de) * | 1986-10-03 | 1988-04-06 | International Business Machines Corporation | Mikromechanische Fühlervorrichtung für atomare Kräfte |
US4800274A (en) * | 1987-02-02 | 1989-01-24 | The Regents Of The University Of California | High resolution atomic force microscope |
JPS643502A (en) * | 1987-06-25 | 1989-01-09 | Seiko Instr & Electronics | Scanning type tunnel microscope |
EP0307211A3 (de) * | 1987-09-10 | 1991-05-15 | Seiko Instruments Inc. | Speicher-Lesegerät |
US4868396A (en) * | 1987-10-13 | 1989-09-19 | Arizona Board Of Regents, Arizona State University | Cell and substrate for electrochemical STM studies |
JP2566794B2 (ja) * | 1987-10-15 | 1996-12-25 | セイコー電子工業株式会社 | 走査型トンネル顕微鏡の測定方法 |
US4823004A (en) * | 1987-11-24 | 1989-04-18 | California Institute Of Technology | Tunnel and field effect carrier ballistics |
JPH06105262B2 (ja) * | 1987-11-27 | 1994-12-21 | セイコー電子工業株式会社 | 電気化学測定およびトンネル電流同時測定方法および装置 |
EP0331148B1 (de) * | 1988-03-04 | 1994-07-13 | Kabushiki Kaisha Toshiba | Mikroskop |
US5257024A (en) * | 1988-05-26 | 1993-10-26 | Quan-Scan, Inc. | Search position encoder |
US4956817A (en) * | 1988-05-26 | 1990-09-11 | Quanscan, Inc. | High density data storage and retrieval system |
US4871938A (en) * | 1988-06-13 | 1989-10-03 | Digital Instruments, Inc. | Positioning device for a scanning tunneling microscope |
DE3844821C2 (en) | 1988-07-03 | 1993-07-22 | Kfa Juelich Gmbh, 5170 Juelich, De | Micromanipulator for raster tunnel microscope |
US4889988A (en) * | 1988-07-06 | 1989-12-26 | Digital Instruments, Inc. | Feedback control for scanning tunnel microscopes |
USRE34331E (en) * | 1988-07-06 | 1993-08-03 | Digital Instruments, Inc. | Feedback control for scanning tunnel microscopes |
US4999495A (en) * | 1988-08-31 | 1991-03-12 | Seiko Instruments Inc. | Scanning tunneling microscope |
US5009111A (en) * | 1988-08-31 | 1991-04-23 | Quanscan, Inc. | Differential force balance apparatus |
US5018865A (en) * | 1988-10-21 | 1991-05-28 | Ferrell Thomas L | Photon scanning tunneling microscopy |
US4968390A (en) * | 1988-11-03 | 1990-11-06 | Board Of Regents, The University Of Texas System | High resolution deposition and etching in polymer films |
US4947042A (en) * | 1988-12-13 | 1990-08-07 | Mitsubishi Denki Kabushiki Kaisha | Tunnel unit and scanning head for scanning tunneling microscope |
JPH02187944A (ja) * | 1989-01-13 | 1990-07-24 | Sharp Corp | 再生装置 |
JP2814256B2 (ja) * | 1989-01-31 | 1998-10-22 | セイコーインスツルメンツ株式会社 | 電気化学測定トンネル電流同時測定装置およびトンネル探針 |
US4924091A (en) * | 1989-02-01 | 1990-05-08 | The Regents Of The University Of California | Scanning ion conductance microscope |
US4935634A (en) * | 1989-03-13 | 1990-06-19 | The Regents Of The University Of California | Atomic force microscope with optional replaceable fluid cell |
US4952857A (en) * | 1989-03-24 | 1990-08-28 | Quanscan, Inc. | Scanning micromechanical probe control system |
US4968914A (en) * | 1989-03-24 | 1990-11-06 | Quanscan, Inc. | High resolution electromechanical translation device |
US5260622A (en) * | 1989-03-24 | 1993-11-09 | Topometrix Corporation | High resolution electromechanical translation device |
US5304924A (en) * | 1989-03-29 | 1994-04-19 | Canon Kabushiki Kaisha | Edge detector |
US5260824A (en) * | 1989-04-24 | 1993-11-09 | Olympus Optical Co., Ltd. | Atomic force microscope |
US5051646A (en) * | 1989-04-28 | 1991-09-24 | Digital Instruments, Inc. | Method of driving a piezoelectric scanner linearly with time |
GB8910566D0 (en) * | 1989-05-08 | 1989-06-21 | Amersham Int Plc | Imaging apparatus and method |
US5017010A (en) * | 1989-05-16 | 1991-05-21 | International Business Machines Corporation | High sensitivity position sensor and method |
US5229606A (en) * | 1989-06-05 | 1993-07-20 | Digital Instruments, Inc. | Jumping probe microscope |
US5266801A (en) * | 1989-06-05 | 1993-11-30 | Digital Instruments, Inc. | Jumping probe microscope |
JP2909828B2 (ja) * | 1989-07-05 | 1999-06-23 | セイコーインスツルメンツ株式会社 | 複合走査型トンネル顕微鏡 |
JP2909829B2 (ja) * | 1989-07-05 | 1999-06-23 | セイコーインスツルメンツ株式会社 | 位置合わせ機能付複合走査型トンネル顕微鏡 |
US4992659A (en) * | 1989-07-27 | 1991-02-12 | International Business Machines Corporation | Near-field lorentz force microscopy |
US4999494A (en) * | 1989-09-11 | 1991-03-12 | Digital Instruments, Inc. | System for scanning large sample areas with a scanning probe microscope |
JP2815196B2 (ja) * | 1989-10-02 | 1998-10-27 | オリンパス光学工業株式会社 | 微細表面形状計測装置 |
US5206702A (en) * | 1989-10-09 | 1993-04-27 | Olympus Optical Co., Ltd. | Technique for canceling the effect of external vibration on an atomic force microscope |
US5003815A (en) * | 1989-10-20 | 1991-04-02 | International Business Machines Corporation | Atomic photo-absorption force microscope |
US5189906A (en) * | 1989-11-28 | 1993-03-02 | Digital Instruments, Inc. | Compact atomic force microscope |
US5025658A (en) * | 1989-11-28 | 1991-06-25 | Digital Instruments, Inc. | Compact atomic force microscope |
US4954704A (en) * | 1989-12-04 | 1990-09-04 | Digital Instruments, Inc. | Method to increase the speed of a scanning probe microscope |
US5224376A (en) | 1989-12-08 | 1993-07-06 | Digital Instruments, Inc. | Atomic force microscope |
US5237859A (en) * | 1989-12-08 | 1993-08-24 | Digital Instruments, Inc. | Atomic force microscope |
US5202004A (en) * | 1989-12-20 | 1993-04-13 | Digital Instruments, Inc. | Scanning electrochemical microscopy |
US4992728A (en) * | 1989-12-21 | 1991-02-12 | International Business Machines Corporation | Electrical probe incorporating scanning proximity microscope |
US5289004A (en) * | 1990-03-27 | 1994-02-22 | Olympus Optical Co., Ltd. | Scanning probe microscope having cantilever and detecting sample characteristics by means of reflected sample examination light |
US5066858A (en) * | 1990-04-18 | 1991-11-19 | Digital Instruments, Inc. | Scanning tunneling microscopes with correction for coupling effects |
US5198715A (en) * | 1990-05-23 | 1993-03-30 | Digital Instruments, Inc. | Scanner for scanning probe microscopes having reduced Z-axis non-linearity |
US5103095A (en) * | 1990-05-23 | 1992-04-07 | Digital Instruments, Inc. | Scanning probe microscope employing adjustable tilt and unitary head |
US5253516A (en) * | 1990-05-23 | 1993-10-19 | Digital Instruments, Inc. | Atomic force microscope for small samples having dual-mode operating capability |
US5245863A (en) * | 1990-07-11 | 1993-09-21 | Olympus Optical Co., Ltd. | Atomic probe microscope |
US5077473A (en) * | 1990-07-26 | 1991-12-31 | Digital Instruments, Inc. | Drift compensation for scanning probe microscopes using an enhanced probe positioning system |
US5081390A (en) * | 1990-08-13 | 1992-01-14 | Digital Instruments, Inc. | Method of operating a scanning probe microscope to improve drift characteristics |
US5274230A (en) * | 1990-08-31 | 1993-12-28 | Olympus Optical Co., Ltd. | Scanning probe microscope having first and second optical waveguides |
US5231286A (en) * | 1990-08-31 | 1993-07-27 | Olympus Optical Co., Ltd. | Scanning probe microscope utilizing an optical element in a waveguide for dividing the center part of the laser beam perpendicular to the waveguide |
US5266897A (en) * | 1990-09-05 | 1993-11-30 | International Business Machines Corporation | Magnetic field observation with tunneling microscopy |
JPH0758193B2 (ja) * | 1990-09-14 | 1995-06-21 | 三菱電機株式会社 | 原子間力顕微鏡の微動走査機構 |
US5144833A (en) * | 1990-09-27 | 1992-09-08 | International Business Machines Corporation | Atomic force microscopy |
JPH04161807A (ja) * | 1990-10-26 | 1992-06-05 | Olympus Optical Co Ltd | 走査型プローブ顕微鏡 |
JP2915554B2 (ja) * | 1990-11-19 | 1999-07-05 | オリンパス光学工業株式会社 | バリアハイト測定装置 |
JPH04188022A (ja) * | 1990-11-22 | 1992-07-06 | Olympus Optical Co Ltd | 変位検出装置 |
US5283437A (en) * | 1990-12-21 | 1994-02-01 | International Business Machines Corporation | Pneumatically and electrostatically driven scanning tunneling microscope |
US5107113A (en) * | 1990-12-26 | 1992-04-21 | Bell Communications Research, Inc. | Method and apparatus for correcting distortions in scanning tunneling microscope images |
US5157251A (en) * | 1991-03-13 | 1992-10-20 | Park Scientific Instruments | Scanning force microscope having aligning and adjusting means |
JP3000491B2 (ja) * | 1991-04-10 | 2000-01-17 | キヤノン株式会社 | カンチレバーユニット及びこれを用いた情報処理装置、原子間力顕微鏡、磁力顕微鏡 |
US5293042A (en) * | 1991-05-10 | 1994-03-08 | Olympus Optical Co., Ltd. | Servo circuit of scanning probe microscope |
JPH04337403A (ja) * | 1991-05-14 | 1992-11-25 | Olympus Optical Co Ltd | 光集積型変位センサー |
JP2961334B2 (ja) * | 1991-05-28 | 1999-10-12 | セイコーインスツルメンツ株式会社 | 尖鋭な金属針を持つ原子間力顕微鏡のカンチレバー製造法 |
US5319977A (en) | 1991-06-20 | 1994-06-14 | The Board Of Trustees Of The Leland Stanford Junior University | Near field acoustic ultrasonic microscope system and method |
US5155361A (en) * | 1991-07-26 | 1992-10-13 | The Arizona Board Of Regents, A Body Corporate Acting For And On Behalf Of Arizona State University | Potentiostatic preparation of molecular adsorbates for scanning probe microscopy |
JPH0540009A (ja) * | 1991-08-08 | 1993-02-19 | Nikon Corp | 走査型トンネル顕微鏡 |
JPH0540034A (ja) | 1991-08-08 | 1993-02-19 | Nikon Corp | 複合型顕微鏡 |
US5317153A (en) * | 1991-08-08 | 1994-05-31 | Nikon Corporation | Scanning probe microscope |
US5323003A (en) | 1991-09-03 | 1994-06-21 | Canon Kabushiki Kaisha | Scanning probe microscope and method of observing sample by using such a microscope |
US5210410A (en) * | 1991-09-26 | 1993-05-11 | The Board Of Trustees Of The Leland Stanford Junior University | Scanning probe microscope having scan correction |
US5298975A (en) * | 1991-09-27 | 1994-03-29 | International Business Machines Corporation | Combined scanning force microscope and optical metrology tool |
JP2598851B2 (ja) * | 1992-01-23 | 1997-04-09 | 松下電器産業株式会社 | 位置決め装置 |
JP2501282B2 (ja) * | 1992-02-04 | 1996-05-29 | インターナショナル・ビジネス・マシーンズ・コーポレイション | 原子間力走査顕微鏡を使用した表面プロフィル検査方法及びその装置 |
US5204531A (en) * | 1992-02-14 | 1993-04-20 | Digital Instruments, Inc. | Method of adjusting the size of the area scanned by a scanning probe |
US5280341A (en) * | 1992-02-27 | 1994-01-18 | International Business Machines Corporation | Feedback controlled differential fiber interferometer |
US5291775A (en) * | 1992-03-04 | 1994-03-08 | Topometrix | Scanning force microscope with integrated optics and cantilever mount |
US5319960A (en) * | 1992-03-06 | 1994-06-14 | Topometrix | Scanning force microscope |
JPH05256641A (ja) * | 1992-03-11 | 1993-10-05 | Olympus Optical Co Ltd | カンチレバー変位検出装置 |
US5267471A (en) * | 1992-04-30 | 1993-12-07 | Ibm Corporation | Double cantilever sensor for atomic force microscope |
JP3081979B2 (ja) | 1992-05-08 | 2000-08-28 | セイコーインスツルメンツ株式会社 | 顕微鏡 |
US5266896A (en) * | 1992-06-09 | 1993-11-30 | International Business Machines Corporation | Mechanical detection and imaging of magnetic resonance by magnetic moment modulation |
US5262643A (en) * | 1992-06-12 | 1993-11-16 | International Business Machines Corp. | Automatic tip approach method and apparatus for scanning probe microscope |
JP3141555B2 (ja) * | 1992-08-10 | 2001-03-05 | 株式会社日立製作所 | 走査表面磁気顕微鏡 |
US5306919A (en) * | 1992-09-21 | 1994-04-26 | Digital Instruments, Inc. | Positioning device for scanning probe microscopes |
US5331589A (en) * | 1992-10-30 | 1994-07-19 | International Business Machines Corporation | Magnetic STM with a non-magnetic tip |
US5314254A (en) * | 1992-11-03 | 1994-05-24 | Digital Instruments | Stiffness enhancer for movable stage assembly |
US5308974B1 (en) * | 1992-11-30 | 1998-01-06 | Digital Instr Inc | Scanning probe microscope using stored data for vertical probe positioning |
US5314829A (en) * | 1992-12-18 | 1994-05-24 | California Institute Of Technology | Method for imaging informational biological molecules on a semiconductor substrate |
US5321977A (en) | 1992-12-31 | 1994-06-21 | International Business Machines Corporation | Integrated tip strain sensor for use in combination with a single axis atomic force microscope |
US5338932A (en) | 1993-01-04 | 1994-08-16 | Motorola, Inc. | Method and apparatus for measuring the topography of a semiconductor device |
US5307693A (en) * | 1993-01-21 | 1994-05-03 | At&T Bell Laboratories | Force-sensing system, including a magnetically mounted rocking element |
JP2743761B2 (ja) | 1993-03-19 | 1998-04-22 | 松下電器産業株式会社 | 走査型プローブ顕微鏡および原子種同定方法 |
US5461907A (en) | 1993-03-23 | 1995-10-31 | Regents Of The University Of California | Imaging, cutting, and collecting instrument and method |
US5354985A (en) | 1993-06-03 | 1994-10-11 | Stanford University | Near field scanning optical and force microscope including cantilever and optical waveguide |
US5388452A (en) * | 1993-10-15 | 1995-02-14 | Quesant Instrument Corporation | Detection system for atomic force microscopes |
US5357105A (en) * | 1993-11-09 | 1994-10-18 | Quesant Instrument Corporation | Light modulated detection system for atomic force microscopes |
US5515719A (en) * | 1994-05-19 | 1996-05-14 | Molecular Imaging Corporation | Controlled force microscope for operation in liquids |
US5670712A (en) * | 1994-08-15 | 1997-09-23 | The Regents Of The University Of California | Method and apparatus for magnetic force control of a scanning probe |
-
1995
- 1995-03-10 US US08/403,238 patent/US5513518A/en not_active Expired - Lifetime
- 1995-11-07 US US08/553,111 patent/US5612491A/en not_active Expired - Lifetime
-
1996
- 1996-02-29 WO PCT/US1996/002753 patent/WO1996028706A1/en active IP Right Grant
- 1996-02-29 DE DE69609493T patent/DE69609493T2/de not_active Expired - Lifetime
- 1996-02-29 JP JP52765996A patent/JP3249132B2/ja not_active Expired - Lifetime
- 1996-02-29 EP EP96910346A patent/EP0813675B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5612491A (en) | 1997-03-18 |
EP0813675A4 (de) | 1998-06-03 |
JP3249132B2 (ja) | 2002-01-21 |
DE69609493T2 (de) | 2001-06-28 |
EP0813675B1 (de) | 2000-07-26 |
EP0813675A1 (de) | 1997-12-29 |
US5513518A (en) | 1996-05-07 |
WO1996028706A1 (en) | 1996-09-19 |
JPH10511467A (ja) | 1998-11-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69609493D1 (de) | Magnetische modulation des kraftsensors zur wechseldetektion in einem rasterkraftmikroskop | |
DE59611033D1 (de) | Vorrichtung zur Prüfung von ferromagnetischen Materialien | |
DE69624281D1 (de) | Vorrichtung zur Anzeige von Information | |
DE69615815T2 (de) | Vorrichtung zur magnetischen fehlerdetektion | |
DE69638204D1 (de) | Magnetischer wegsensor | |
DE69727632D1 (de) | Gerät zur dreidimensionalen Formerfassung | |
DE69637541D1 (de) | System zur Erfassung von Teilchen | |
DE59607223D1 (de) | Einrichtung zur drehzahlmessung oder drehrichtungserkennung eines drehmagnetfeldes | |
DE69614211T2 (de) | Gerät zur Erfassung und Anzeige von zusätzlichen Programmen | |
PL321139A1 (en) | Nucleic acids suitable for use as fungi detecting and identifying probes | |
DE69424347T2 (de) | Vorrichtung zur Konversion von Anzeige-Information | |
DE69320678D1 (de) | Vorrichtung zur Detektion von Verschiebungsinformation | |
DE69819407D1 (de) | Messverfahren und Messvorrichtung zur Durchführung des Verfahrens | |
DE9414869U1 (de) | Vorrichtung zur lösbaren Verankerung eines Sensors | |
ATE164251T1 (de) | Vorrichtung zur aufnahme eines flächenförmigen werbeträgers | |
DE69825244D1 (de) | Vorrichtung zur auffindung eines körpers in einem trüben medium | |
DE69215784D1 (de) | Gerät zur Detektion elektrostatischer Kräfte in Lösungen | |
DE69518414D1 (de) | Sensor zur positionserfassung eines strahlenbündels | |
DE29507357U1 (de) | Vorrichtung zur Erfassung und Anzeige des Tretkraftverlaufs an einem Fahrrad | |
DE59406820D1 (de) | Einrichtung zur signalformung und zur bezugsmarkenerkennung | |
DE59609036D1 (de) | Vorrichtung zur detektierung von auslenkungen eines magnetischen körpers | |
DE784319T1 (de) | Vorrichtung zur wiedergabe von aufnahmemedien | |
DE29515614U1 (de) | Vorrichtung zur Lageerfassung von laufenden Warenbahnen | |
DE69624458D1 (de) | Vorrichtung zur wiedergabe von aufnahmemedien | |
DE59607884D1 (de) | Vorrichtung zur erfassung von in medien enthaltenem kohlenwasserstoff |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: MOLECULAR IMAGING CORP., TEMPE, ARIZ., US |
|
8364 | No opposition during term of opposition | ||
R082 | Change of representative |
Ref document number: 813675 Country of ref document: EP Representative=s name: MEHLER ACHLER PATENTANWAELTE, 65185 WIESBADEN, DE |
|
R082 | Change of representative |
Ref document number: 813675 Country of ref document: EP Representative=s name: MEHLER ACHLER PATENTANWAELTE, 65185 WIESBADEN, DE |
|
R082 | Change of representative |
Ref document number: 813675 Country of ref document: EP Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER, ZINKLER & PAR, DE |