DE69610750D1 - Verfahren zur Positionierung einer Maske bezüglich einer anderen Maske und eines Werkstücks und Vorrichtung zur Durchführung des Verfahrens - Google Patents

Verfahren zur Positionierung einer Maske bezüglich einer anderen Maske und eines Werkstücks und Vorrichtung zur Durchführung des Verfahrens

Info

Publication number
DE69610750D1
DE69610750D1 DE69610750T DE69610750T DE69610750D1 DE 69610750 D1 DE69610750 D1 DE 69610750D1 DE 69610750 T DE69610750 T DE 69610750T DE 69610750 T DE69610750 T DE 69610750T DE 69610750 D1 DE69610750 D1 DE 69610750D1
Authority
DE
Germany
Prior art keywords
mask
workpiece
positioning
carrying
respect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69610750T
Other languages
English (en)
Other versions
DE69610750T2 (de
Inventor
Yoneta Tanaka
Manabu Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Application granted granted Critical
Publication of DE69610750D1 publication Critical patent/DE69610750D1/de
Publication of DE69610750T2 publication Critical patent/DE69610750T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G03F9/7026—Focusing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7084—Position of mark on substrate, i.e. position in (x, y, z) of mark, e.g. buried or resist covered mark, mark on rearside, at the substrate edge, in the circuit area, latent image mark, marks in plural levels

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE69610750T 1995-07-28 1996-07-25 Verfahren zur Positionierung einer Maske bezüglich einer anderen Maske und eines Werkstücks und Vorrichtung zur Durchführung des Verfahrens Expired - Lifetime DE69610750T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7192947A JP2994232B2 (ja) 1995-07-28 1995-07-28 マスクとマスクまたはマスクとワークの位置合わせ方法および装置

Publications (2)

Publication Number Publication Date
DE69610750D1 true DE69610750D1 (de) 2000-11-30
DE69610750T2 DE69610750T2 (de) 2001-05-10

Family

ID=16299665

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69610750T Expired - Lifetime DE69610750T2 (de) 1995-07-28 1996-07-25 Verfahren zur Positionierung einer Maske bezüglich einer anderen Maske und eines Werkstücks und Vorrichtung zur Durchführung des Verfahrens

Country Status (6)

Country Link
US (1) US5940528A (de)
EP (1) EP0756207B1 (de)
JP (1) JP2994232B2 (de)
KR (1) KR100413035B1 (de)
DE (1) DE69610750T2 (de)
TW (1) TW442711B (de)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7907793B1 (en) 2001-05-04 2011-03-15 Legend Films Inc. Image sequence depth enhancement system and method
US8396328B2 (en) 2001-05-04 2013-03-12 Legend3D, Inc. Minimal artifact image sequence depth enhancement system and method
JP3445100B2 (ja) * 1997-06-02 2003-09-08 キヤノン株式会社 位置検出方法及び位置検出装置
JPH11312635A (ja) * 1998-04-28 1999-11-09 Ushio Inc コンタクト露光方法
US8632590B2 (en) 1999-10-20 2014-01-21 Anulex Technologies, Inc. Apparatus and methods for the treatment of the intervertebral disc
US7004970B2 (en) 1999-10-20 2006-02-28 Anulex Technologies, Inc. Methods and devices for spinal disc annulus reconstruction and repair
US7615076B2 (en) 1999-10-20 2009-11-10 Anulex Technologies, Inc. Method and apparatus for the treatment of the intervertebral disc annulus
US6356337B1 (en) * 2000-03-08 2002-03-12 Anvik Corporation Two-sided substrate imaging using single-approach projection optics
US6211942B1 (en) * 2000-03-10 2001-04-03 Howa Machinery Ltd. Double-sided exposure system
EP1406126A1 (de) * 2001-01-15 2004-04-07 ASML Netherlands B.V. Verfahren zur Herstellung einer Vorrichtung
US7113258B2 (en) 2001-01-15 2006-09-26 Asml Netherlands B.V. Lithographic apparatus
US6768539B2 (en) 2001-01-15 2004-07-27 Asml Netherlands B.V. Lithographic apparatus
US8897596B1 (en) 2001-05-04 2014-11-25 Legend3D, Inc. System and method for rapid image sequence depth enhancement with translucent elements
MXPA03010039A (es) * 2001-05-04 2004-12-06 Legend Films Llc Sistema y metodo para mejorar la secuencia de imagen.
US9031383B2 (en) 2001-05-04 2015-05-12 Legend3D, Inc. Motion picture project management system
US9286941B2 (en) 2001-05-04 2016-03-15 Legend3D, Inc. Image sequence enhancement and motion picture project management system
US8401336B2 (en) 2001-05-04 2013-03-19 Legend3D, Inc. System and method for rapid image sequence depth enhancement with augmented computer-generated elements
TW594431B (en) 2002-03-01 2004-06-21 Asml Netherlands Bv Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods
EP1341046A3 (de) * 2002-03-01 2004-12-15 ASML Netherlands B.V. Kalibrationsverfahren, Kalibrationssubstrate, lithographischer Apparat und Verfahren zur Herstellung von Artikeln
JP3643572B2 (ja) * 2002-05-31 2005-04-27 株式会社アドテックエンジニアリング 投影露光装置及び位置合わせ装置
DE102004013886A1 (de) 2004-03-16 2005-10-06 Carl Zeiss Smt Ag Verfahren zur Mehrfachbelichtung, Mikrolithografie-Projektionsbelichtungsanlage und Projektionssystem
US7388663B2 (en) * 2004-10-28 2008-06-17 Asml Netherlands B.V. Optical position assessment apparatus and method
US7663732B2 (en) * 2005-03-18 2010-02-16 Canon Kabushiki Kaisha Exposure apparatus, exposure method and device manufacturing method for compensating position measuring system using temperature
US7782442B2 (en) 2005-12-06 2010-08-24 Nikon Corporation Exposure apparatus, exposure method, projection optical system and device producing method
JP2007318069A (ja) * 2005-12-06 2007-12-06 Nikon Corp 露光装置及び露光方法、並びにデバイス製造方法、投影光学系
EP1970944A4 (de) * 2005-12-06 2010-04-28 Nikon Corp Belichtungsvorrichtung, belichtungsverfahren, optisches projektionssystem und bauelementeherstellungsverfahren
KR100922203B1 (ko) * 2008-04-28 2009-10-20 주식회사 프로텍 레이저 디렉트 이미징 시스템용 상하부 노광 엔진의위치정렬방법 및 장치
KR100915452B1 (ko) * 2008-04-28 2009-09-04 주식회사 프로텍 Ｓｌｍ을 이용한 상 하부 동시 노광 방식의 빔 미러 픽셀영상 위치정렬방법 및 장치
US8923602B2 (en) * 2008-07-22 2014-12-30 Comau, Inc. Automated guidance and recognition system and method of the same
JP5523207B2 (ja) * 2010-06-01 2014-06-18 株式会社トプコン 露光装置
US8730232B2 (en) 2011-02-01 2014-05-20 Legend3D, Inc. Director-style based 2D to 3D movie conversion system and method
US9282321B2 (en) 2011-02-17 2016-03-08 Legend3D, Inc. 3D model multi-reviewer system
US9407904B2 (en) 2013-05-01 2016-08-02 Legend3D, Inc. Method for creating 3D virtual reality from 2D images
US9288476B2 (en) 2011-02-17 2016-03-15 Legend3D, Inc. System and method for real-time depth modification of stereo images of a virtual reality environment
US9241147B2 (en) 2013-05-01 2016-01-19 Legend3D, Inc. External depth map transformation method for conversion of two-dimensional images to stereoscopic images
US9113130B2 (en) 2012-02-06 2015-08-18 Legend3D, Inc. Multi-stage production pipeline system
WO2013011586A1 (ja) * 2011-07-21 2013-01-24 株式会社ニレコ 帯状体の端部位置検出装置及び帯状体の端部位置検出方法
JP5857725B2 (ja) * 2011-12-20 2016-02-10 ウシオ電機株式会社 露光装置
JP6200224B2 (ja) 2012-09-13 2017-09-20 日本メクトロン株式会社 フォトマスク、フォトマスク組、露光装置および露光方法
CN102968000A (zh) 2012-11-21 2013-03-13 京东方科技集团股份有限公司 一种双面制程方法及曝光装置
US9007365B2 (en) 2012-11-27 2015-04-14 Legend3D, Inc. Line depth augmentation system and method for conversion of 2D images to 3D images
US9547937B2 (en) 2012-11-30 2017-01-17 Legend3D, Inc. Three-dimensional annotation system and method
US9007404B2 (en) 2013-03-15 2015-04-14 Legend3D, Inc. Tilt-based look around effect image enhancement method
US9438878B2 (en) 2013-05-01 2016-09-06 Legend3D, Inc. Method of converting 2D video to 3D video using 3D object models
US9609307B1 (en) 2015-09-17 2017-03-28 Legend3D, Inc. Method of converting 2D video to 3D video using machine learning
DE102017105697A1 (de) * 2017-03-16 2018-09-20 Ev Group E. Thallner Gmbh Verfahren und Vorrichtung zur Ausrichtung zweier optischer Teilsysteme

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636566B2 (de) * 1973-06-18 1981-08-25
JPH03288112A (ja) * 1990-04-04 1991-12-18 Dainippon Screen Mfg Co Ltd 色消しレンズ系
JP3109852B2 (ja) * 1991-04-16 2000-11-20 キヤノン株式会社 投影露光装置
JP3120474B2 (ja) * 1991-06-10 2000-12-25 株式会社日立製作所 半導体集積回路装置の製造方法
JP2994968B2 (ja) * 1994-10-06 1999-12-27 ウシオ電機株式会社 マスクとワークの位置合わせ方法および装置

Also Published As

Publication number Publication date
EP0756207A2 (de) 1997-01-29
KR100413035B1 (ko) 2004-06-12
US5940528A (en) 1999-08-17
EP0756207A3 (de) 1997-11-12
JP2994232B2 (ja) 1999-12-27
EP0756207B1 (de) 2000-10-25
KR970007512A (ko) 1997-02-21
DE69610750T2 (de) 2001-05-10
TW442711B (en) 2001-06-23
JPH0945603A (ja) 1997-02-14

Similar Documents

Publication Publication Date Title
DE69610750T2 (de) Verfahren zur Positionierung einer Maske bezüglich einer anderen Maske und eines Werkstücks und Vorrichtung zur Durchführung des Verfahrens
DE69605512D1 (de) Verfahren zur Positionierung einer Maske bezüglich eines Werkstücks und Projektionsbelichtungsapparat zur Durchführung des Verfahrens
DE69323966D1 (de) Verfahren zur Ausführung eines Kopierverfahrens und Vorrichtung zur Durchführung des Verfahrens
DE69517087D1 (de) Verfahren und Vorrichtung zur Einstellung eines Druckkopfes
DE69515497D1 (de) Verfahren und vorrichtung zum verbinden einer komponente mit einem werkstück
DE69322281T2 (de) Verfahren und vorrichtung zur kontrolle einer strassenfraesmaschine in abhaengigkeit eines rueckschlagfalls
DE69603598T2 (de) Verfahren und vorrichtung zum anbringen eines gegenstandes an einer glasoberfläche
DE59503972D1 (de) Vorrichtung und Verfahren zur Beeinflussung eines Ventils
DE59401422D1 (de) Verfahren und vorrichtung zur erzeugung eines werkstücks
DE69423306T2 (de) Vorrichtung und Verfahren zur Auswahl eines Schriftensatzes
DE69515447D1 (de) Verfahren und Vorrichtung zur Herstellung eines Flächenhaftverschluss
DE59605729D1 (de) Verfahren und vorrichtung zur ansteuerung einer hydroanlage eines arbeitsgerätes
DE69520553D1 (de) Verfahren zur Positionierung einer Maske bezüglich eines Werkstücks und Vorrichtung zur Durchführung des Verfahrens
DE59304566D1 (de) Verfahren zum Anstellen einer Kammerrakel an eine farbabgebende Walze und Vorrichtung zur Durchführung des Verfahrens
DE69904694D1 (de) Verfahren zur herstellung und umwälzung eines schaums in einer installation und vorrichtung zum durchführen des verfahrens
DE69413611D1 (de) Verfahren und Vorrichtung zur Einstellung des Abstandes zwischen einem Werkstück und einer Maske
DE69704623D1 (de) Verfahren und vorrichtung zur herstellung eines dreidimensionalen gegenstandes aus einer härtbaren flüssigkeit
DE69707518T2 (de) Mustersuchverfahren und Vorrichtung zur Positionierung einer Maske bezüglich eines Werkstücks
DE69702286D1 (de) Verfahren zur Positionierung einer Maske bezüglich eines Werkstücks und Vorrichtung zur Durchführung des Verfahrens
ATA138894A (de) Verfahren zum einstellen eines vorritzers gegenüber einem trennsägeblatt und vorrichtung zur durchführung des verfahrens
DE59601091D1 (de) Vorrichtung und verfahren zum herstellen eines wabenkörpers aus verschlungenen blechlagen
DE69511201D1 (de) Verfahren und Vorrichtung zur Ausrichtung einer Maske und einem Werkstück
DE59303860D1 (de) Verfahren zur spanenden Bearbeitung eines Radsatzes und Einrichtung zur Durchführung des Verfahrens
DE59904965D1 (de) Vorrichtung und verfahren zum befestigen eines webblattes an einem ladenbalken und webblatt zum durchführen des verfahrens
DE29502537U1 (de) Vorrichtung zur insbesondere spanenden Bearbeitung eines Werkstückes

Legal Events

Date Code Title Description
8364 No opposition during term of opposition