DE69615321T2 - Flaches elektromagnetisches betätigungsorgan - Google Patents

Flaches elektromagnetisches betätigungsorgan

Info

Publication number
DE69615321T2
DE69615321T2 DE69615321T DE69615321T DE69615321T2 DE 69615321 T2 DE69615321 T2 DE 69615321T2 DE 69615321 T DE69615321 T DE 69615321T DE 69615321 T DE69615321 T DE 69615321T DE 69615321 T2 DE69615321 T2 DE 69615321T2
Authority
DE
Germany
Prior art keywords
electromagnetic actuator
flat electromagnetic
flat
actuator
electromagnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69615321T
Other languages
English (en)
Other versions
DE69615321D1 (de
Inventor
Norihiro Asada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Signal Co Ltd
Original Assignee
Nippon Signal Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Signal Co Ltd filed Critical Nippon Signal Co Ltd
Application granted granted Critical
Publication of DE69615321D1 publication Critical patent/DE69615321D1/de
Publication of DE69615321T2 publication Critical patent/DE69615321T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
DE69615321T 1995-05-26 1996-04-26 Flaches elektromagnetisches betätigungsorgan Expired - Lifetime DE69615321T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7128056A JP2987750B2 (ja) 1995-05-26 1995-05-26 プレーナ型電磁アクチュエータ
PCT/JP1996/001149 WO1996037943A1 (fr) 1995-05-26 1996-04-26 Actionneur electromagnetique plat

Publications (2)

Publication Number Publication Date
DE69615321D1 DE69615321D1 (de) 2001-10-25
DE69615321T2 true DE69615321T2 (de) 2002-07-04

Family

ID=14975400

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69615321T Expired - Lifetime DE69615321T2 (de) 1995-05-26 1996-04-26 Flaches elektromagnetisches betätigungsorgan

Country Status (6)

Country Link
US (1) US5912608A (de)
EP (1) EP0778657B1 (de)
JP (1) JP2987750B2 (de)
KR (1) KR100402264B1 (de)
DE (1) DE69615321T2 (de)
WO (1) WO1996037943A1 (de)

Families Citing this family (120)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6201629B1 (en) 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
JP4414498B2 (ja) * 1997-12-09 2010-02-10 オリンパス株式会社 光偏向器
US7170665B2 (en) 2002-07-24 2007-01-30 Olympus Corporation Optical unit provided with an actuator
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
US5991079A (en) * 1998-10-14 1999-11-23 Eastman Kodak Company Method of making a light modulator
US6014257A (en) * 1998-10-14 2000-01-11 Eastman Kodak Company Light modulator
US6088148A (en) * 1998-10-30 2000-07-11 Eastman Kodak Company Micromagnetic light modulator
JP4111619B2 (ja) * 1999-02-26 2008-07-02 日本信号株式会社 プレーナ型光走査装置の実装構造
DE59911490D1 (de) 1999-03-09 2005-02-24 Nanosurf Ag Liestal Positionierkopf für ein Rastersondenmikroskop
US6657764B1 (en) * 1999-03-18 2003-12-02 The Trustees Of Boston University Very large angle integrated optical scanner made with an array of piezoelectric monomorphs
US6201631B1 (en) * 1999-10-08 2001-03-13 Lucent Technologies Inc. Process for fabricating an optical mirror array
US6753638B2 (en) 2000-02-03 2004-06-22 Calient Networks, Inc. Electrostatic actuator for micromechanical systems
US7064879B1 (en) 2000-04-07 2006-06-20 Microsoft Corporation Magnetically actuated microelectrochemical systems actuator
NL1015131C1 (nl) * 2000-04-16 2001-10-19 Tmp Total Micro Products B V Inrichting en werkwijze voor het schakelen van elektromagnetische signalen of bundels.
US6628041B2 (en) 2000-05-16 2003-09-30 Calient Networks, Inc. Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same
US6585383B2 (en) 2000-05-18 2003-07-01 Calient Networks, Inc. Micromachined apparatus for improved reflection of light
US6560384B1 (en) 2000-06-01 2003-05-06 Calient Networks, Inc. Optical switch having mirrors arranged to accommodate freedom of movement
US6728016B1 (en) 2000-06-05 2004-04-27 Calient Networks, Inc. Safe procedure for moving mirrors in an optical cross-connect switch
US6587611B1 (en) 2000-06-06 2003-07-01 Calient Networks, Inc. Maintaining path integrity in an optical switch
GB2384060B (en) * 2000-08-27 2004-12-15 Corning Intellisense Corp Magnetically actuated micro-electro-mechanical apparatus
US6388789B1 (en) * 2000-09-19 2002-05-14 The Charles Stark Draper Laboratory, Inc. Multi-axis magnetically actuated device
US6825967B1 (en) 2000-09-29 2004-11-30 Calient Networks, Inc. Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same
JP3926552B2 (ja) 2000-10-25 2007-06-06 日本信号株式会社 アクチュエ−タ
US6775048B1 (en) 2000-10-31 2004-08-10 Microsoft Corporation Microelectrical mechanical structure (MEMS) optical modulator and optical display system
JP4674017B2 (ja) * 2000-11-20 2011-04-20 オリンパス株式会社 光偏向器
JP4544734B2 (ja) * 2000-12-21 2010-09-15 シチズンファインテックミヨタ株式会社 プレーナー型ガルバノミラー
US6792177B2 (en) 2001-03-12 2004-09-14 Calient Networks, Inc. Optical switch with internal monitoring
WO2002079853A1 (en) * 2001-03-16 2002-10-10 Corning Intellisense Corporation Electrostatically actuated micro-electro-mechanical devices and method of manufacture
US6707591B2 (en) 2001-04-10 2004-03-16 Silicon Light Machines Angled illumination for a single order light modulator based projection system
JP2002307396A (ja) * 2001-04-13 2002-10-23 Olympus Optical Co Ltd アクチュエータ
US6813055B2 (en) * 2001-05-30 2004-11-02 Fiberyard, Inc. Optical beam steering device
US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US7110633B1 (en) 2001-08-13 2006-09-19 Calient Networks, Inc. Method and apparatus to provide alternative paths for optical protection path switch arrays
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
JP2003066362A (ja) 2001-08-23 2003-03-05 Olympus Optical Co Ltd 光偏向器
US7190509B2 (en) 2001-11-07 2007-03-13 Trex Enterprises Corp. Optically addressed MEMS
US6804959B2 (en) 2001-12-31 2004-10-19 Microsoft Corporation Unilateral thermal buckle-beam actuator
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
JP3970066B2 (ja) * 2002-03-18 2007-09-05 オリンパス株式会社 光偏向器及び電磁型アクチュエータ
US7053519B2 (en) 2002-03-29 2006-05-30 Microsoft Corporation Electrostatic bimorph actuator
US6894823B2 (en) * 2002-04-26 2005-05-17 Corning Intellisense Llc Magnetically actuated microelectromechanical devices and method of manufacture
US6767751B2 (en) 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
US7142743B2 (en) * 2002-05-30 2006-11-28 Corning Incorporated Latching mechanism for magnetically actuated micro-electro-mechanical devices
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US6984917B2 (en) * 2002-06-06 2006-01-10 Lucent Technologies Inc. Optical element having two axes of rotation for use in tightly spaced mirror arrays
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
KR100451409B1 (ko) * 2002-10-15 2004-10-06 한국전자통신연구원 마이크로 광스위치 및 그 제조방법
US7071594B1 (en) 2002-11-04 2006-07-04 Microvision, Inc. MEMS scanner with dual magnetic and capacitive drive
US7446911B2 (en) * 2002-11-26 2008-11-04 Brother Kogyo Kabushiki Kaisha Optical scanning apparatus and image forming apparatus
JP3677604B2 (ja) * 2002-12-17 2005-08-03 日本航空電子工業株式会社 磁気アクチュエータ
JP2010172190A (ja) * 2002-12-27 2010-08-05 Nippon Signal Co Ltd:The プレーナ型電磁アクチュエータ
US6760145B1 (en) 2003-01-23 2004-07-06 Corning Incorporated Actuator for dual-axis rotation micromirror
US6829077B1 (en) 2003-02-28 2004-12-07 Silicon Light Machines, Inc. Diffractive light modulator with dynamically rotatable diffraction plane
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
JP2005165276A (ja) * 2003-11-10 2005-06-23 Olympus Corp 光偏向器
US7482730B2 (en) * 2004-02-09 2009-01-27 Microvision, Inc. High performance MEMS scanner
US7796314B2 (en) * 2004-03-08 2010-09-14 Board Of Regents Of The Nevada System Of Higher Education Method and apparatus for two-axis, high-speed beam steering
US7442918B2 (en) * 2004-05-14 2008-10-28 Microvision, Inc. MEMS device having simplified drive
US7636101B2 (en) 2005-02-09 2009-12-22 Microvision, Inc. MEMS scanner adapted to a laser printer
KR100707133B1 (ko) * 2006-05-16 2007-04-13 삼성전자주식회사 미러구조 및 이를 포함하는 광스캐너
TWI304394B (en) * 2006-07-03 2008-12-21 Nat Univ Tsing Hua Magnetic element and manufacturing process, driving structure and driving method therefor
TW200835646A (en) * 2007-02-16 2008-09-01 Nat Univ Tsing Hua Driving method for magnetic element
JP4928301B2 (ja) * 2007-02-20 2012-05-09 キヤノン株式会社 揺動体装置、その駆動方法、光偏向器、及び光偏向器を用いた画像表示装置
JP4232835B2 (ja) 2007-03-07 2009-03-04 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
JP4232834B2 (ja) 2007-03-07 2009-03-04 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
JP4329831B2 (ja) 2007-03-12 2009-09-09 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
KR100911144B1 (ko) * 2007-03-27 2009-08-06 삼성전자주식회사 2축구동 전자기 액추에이터
TWI341602B (en) * 2007-08-15 2011-05-01 Nat Univ Tsing Hua Magnetic element and manufacturing method therefor
KR101345288B1 (ko) * 2007-09-21 2013-12-27 삼성전자주식회사 2축 구동 전자기 스캐너
DE102008001056A1 (de) 2008-04-08 2009-10-15 Robert Bosch Gmbh Umlenkeinrichtung für einen Strahl einer elektromagnetischen Welle
DE102008001893A1 (de) 2008-05-21 2009-11-26 Robert Bosch Gmbh Umlenkeinrichtung für elektromagnetische Strahlen
DE102008001896B4 (de) 2008-05-21 2023-02-02 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
KR100973979B1 (ko) * 2008-08-22 2010-08-05 한국과학기술원 전자기력을 이용한 다축 구동기
JP5206610B2 (ja) 2008-08-25 2013-06-12 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
DE102008042346A1 (de) 2008-09-25 2010-04-01 Robert Bosch Gmbh Magnetjoch, mikromechanisches Bauteil und Herstellungsverfahren für ein Magnetjoch und ein mikromechanisches Bauteil
WO2010096439A1 (en) * 2009-02-17 2010-08-26 Leversense, Llc Resonant sensors and methods of use thereof for the determination of analytes
WO2011033496A1 (en) 2009-09-16 2011-03-24 Maradin Technologies Ltd. Micro coil apparatus and manufacturing methods therefor
JP5577742B2 (ja) 2010-02-23 2014-08-27 セイコーエプソン株式会社 光スキャナーおよび画像形成装置
JP5381801B2 (ja) 2010-02-23 2014-01-08 セイコーエプソン株式会社 画像形成装置
JP5333286B2 (ja) 2010-02-23 2013-11-06 セイコーエプソン株式会社 光スキャナーおよび画像形成装置
EP2372452A1 (de) 2010-03-24 2011-10-05 Iee International Electronics & Engineering S.A. Stereoskopischer Bildgeber
LU91714B1 (en) 2010-07-29 2012-01-30 Iee Sarl Active illumination scanning imager
JP5447283B2 (ja) 2010-08-12 2014-03-19 セイコーエプソン株式会社 光スキャナーおよび画像形成装置
JP5659672B2 (ja) 2010-10-06 2015-01-28 セイコーエプソン株式会社 光スキャナー、ミラーチップ、光スキャナーの製造方法、および画像形成装置
JP5598296B2 (ja) 2010-12-08 2014-10-01 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置
DE102010062591A1 (de) 2010-12-08 2012-06-14 Robert Bosch Gmbh Magnetischer Aktor
FR2977668B1 (fr) 2011-07-04 2013-07-12 Univ Paris Curie Dispositif piezoelectrique
DE102011113147B3 (de) * 2011-09-14 2013-01-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur optischen Abstandsmessung
JP6044943B2 (ja) * 2011-10-25 2016-12-14 インテル・コーポレーション アクチュエータ
JP4968760B1 (ja) * 2011-11-01 2012-07-04 パイオニア株式会社 アクチュエータ
WO2013168266A1 (ja) * 2012-05-10 2013-11-14 パイオニア株式会社 駆動装置
WO2013168273A1 (ja) * 2012-05-10 2013-11-14 パイオニア株式会社 駆動装置
JP6111532B2 (ja) 2012-05-11 2017-04-12 セイコーエプソン株式会社 光学デバイス、光スキャナーおよび画像表示装置
JP5942576B2 (ja) 2012-05-11 2016-06-29 セイコーエプソン株式会社 光学デバイス、光スキャナーおよび画像表示装置
JP6094105B2 (ja) 2012-09-13 2017-03-15 セイコーエプソン株式会社 アクチュエーター、光スキャナー、画像表示装置、ヘッドマウントディスプレイ
WO2014063737A1 (en) * 2012-10-25 2014-05-01 Lemoptix Sa A mems device
JP6075062B2 (ja) 2012-12-27 2017-02-08 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置
CN105934698B (zh) * 2013-01-11 2019-04-16 英特尔公司 镜驱动装置
WO2014192123A1 (ja) * 2013-05-30 2014-12-04 パイオニア株式会社 剛体構造体
TWI557061B (zh) * 2013-07-26 2016-11-11 Globalmems Taiwan Corp Ltd Movable vehicle structure for microelectromechanical systems
US9815689B2 (en) 2013-07-26 2017-11-14 GlobalMEMS TAIWAN CORPORATION LIMITED Micro-electromechanical system (MEMS) carrier
JP6550207B2 (ja) 2013-10-29 2019-07-24 セイコーエプソン株式会社 光スキャナー、画像表示装置、ヘッドマウントディスプレイおよびヘッドアップディスプレイ
JP2015087444A (ja) 2013-10-29 2015-05-07 セイコーエプソン株式会社 光スキャナー、画像表示装置、ヘッドマウントディスプレイおよびヘッドアップディスプレイ
JP2015087443A (ja) 2013-10-29 2015-05-07 セイコーエプソン株式会社 光スキャナー、画像表示装置、ヘッドマウントディスプレイおよびヘッドアップディスプレイ
US20160124215A1 (en) * 2014-10-31 2016-05-05 Intel Corporation Electromagnetic mems device
US20160124214A1 (en) * 2014-10-31 2016-05-05 Intel Corporation Electromagnetic mems device
US9854226B2 (en) 2014-12-22 2017-12-26 Google Inc. Illuminator for camera system having three dimensional time-of-flight capture with movable mirror element
US9664897B1 (en) * 2015-10-14 2017-05-30 Intel Corporation Apparatus with a rotatable MEMS device
JP2017181715A (ja) 2016-03-30 2017-10-05 セイコーエプソン株式会社 光スキャナー用部材、光スキャナー、光スキャナーの製造方法、画像表示装置およびヘッドマウントディスプレイ
JP2018060168A (ja) 2016-09-30 2018-04-12 セイコーエプソン株式会社 光スキャナー、光スキャナーの製造方法、画像表示装置、ヘッドマウントディスプレイ及びヘッドアップディスプレイ
CN107907993A (zh) * 2017-12-08 2018-04-13 上海禾赛光电科技有限公司 谐振式扫描镜、扫描方法、角度的测量方法及加工方法
EP3954028A1 (de) * 2019-04-09 2022-02-16 Tomorrow's Motion GmbH Magnetantrieb mit äusserem magnetfeld
CN214503997U (zh) * 2020-03-06 2021-10-26 台湾东电化股份有限公司 光学元件驱动机构
KR20240002347A (ko) 2022-06-29 2024-01-05 (주) 피케이씨 능동형 비상 유도등

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4421381A (en) * 1980-04-04 1983-12-20 Yokogawa Hokushin Electric Corp. Mechanical vibrating element
JPS60107017A (ja) * 1983-11-16 1985-06-12 Hitachi Ltd 光偏向素子
JPS63241905A (ja) * 1987-03-27 1988-10-07 Sumitomo Special Metals Co Ltd 磁界発生装置
JP3003429B2 (ja) * 1992-10-08 2000-01-31 富士電機株式会社 ねじり振動子および光偏向子
JPH07175505A (ja) * 1993-08-30 1995-07-14 Matsushita Joho Syst Kk 機器制御システム
JP2657769B2 (ja) * 1994-01-31 1997-09-24 正喜 江刺 変位検出機能を備えたプレーナー型ガルバノミラー及びその製造方法

Also Published As

Publication number Publication date
EP0778657A1 (de) 1997-06-11
EP0778657A4 (de) 1998-02-04
JP2987750B2 (ja) 1999-12-06
EP0778657B1 (de) 2001-09-19
US5912608A (en) 1999-06-15
KR100402264B1 (ko) 2004-02-05
WO1996037943A1 (fr) 1996-11-28
JPH08322227A (ja) 1996-12-03
DE69615321D1 (de) 2001-10-25
KR970705220A (ko) 1997-09-06

Similar Documents

Publication Publication Date Title
DE69615321T2 (de) Flaches elektromagnetisches betätigungsorgan
DE69637351D1 (de) Elektromagnetischer stellantrieb
DE69616319D1 (de) Elektromagnetischer betätiger
ATE311656T1 (de) Elektromagnetischer betätiger
DE69608004D1 (de) Elektrisches Stellglied
DE69625390D1 (de) Elektromagnetspule
DE69700214D1 (de) Elektromagnetisches Betätigungselement
DE29620741U1 (de) Schmalbauender elektromagnetischer Aktuator
DE69714388D1 (de) Elektromagnetischer Betätiger
DE59603580D1 (de) Elektromagnetische betätigungseinrichtung
DE59600257D1 (de) Linearantrieb
DE69618154D1 (de) Elektromagnetische Betätigungseinrichtung
DE69623148D1 (de) Betätiger
NO962054L (no) Elektromagnetisk akselerator
DE69605482D1 (de) Betätigungsvorrichtung
DE59806749D1 (de) Elektromagnetische stelleinrichtung
DE29516875U1 (de) Betätigungselement
DE29514786U1 (de) Stellantrieb
DE69817231D1 (de) Elektromagnetische Betätigungsvorrichtungen
DE29502702U1 (de) Betätigungsvorrichtung
KR970042558U (ko) 선형구동기
DE29513855U1 (de) Mehrfachstellgerät
DE59801964D1 (de) Elektromagnetische stelleinrichtung
DE29514336U1 (de) Betätigungseinrichtung
DE29711825U1 (de) Elektromagnetischer Aktor

Legal Events

Date Code Title Description
8364 No opposition during term of opposition