DE69616757D1 - Verfahren zur herstellung eines mit metalloxid beschichteten glassubstrates und ein glassubstrat für eine elektronische anzeige - Google Patents

Verfahren zur herstellung eines mit metalloxid beschichteten glassubstrates und ein glassubstrat für eine elektronische anzeige

Info

Publication number
DE69616757D1
DE69616757D1 DE69616757T DE69616757T DE69616757D1 DE 69616757 D1 DE69616757 D1 DE 69616757D1 DE 69616757 T DE69616757 T DE 69616757T DE 69616757 T DE69616757 T DE 69616757T DE 69616757 D1 DE69616757 D1 DE 69616757D1
Authority
DE
Germany
Prior art keywords
glass substrate
producing
metal oxide
electronic display
substrate coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69616757T
Other languages
English (en)
Other versions
DE69616757T2 (de
Inventor
Hal Albertus Van
Nicolaas Bernards
Claudia Mutter
Bommel Jozef Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Philips Norden AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV, Philips Norden AB filed Critical Koninklijke Philips Electronics NV
Publication of DE69616757D1 publication Critical patent/DE69616757D1/de
Application granted granted Critical
Publication of DE69616757T2 publication Critical patent/DE69616757T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/25—Oxides by deposition from the liquid phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208—Oxides, e.g. ceramics
    • C23C18/1216—Metal oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1225—Deposition of multilayers of inorganic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125—Process of deposition of the inorganic material
    • C23C18/1258—Spray pyrolysis
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125—Process of deposition of the inorganic material
    • C23C18/1291—Process of deposition of the inorganic material by heating of the substrate
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/228—Other specific oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/112—Deposition methods from solutions or suspensions by spraying
DE69616757T 1995-12-06 1996-11-22 Verfahren zur herstellung eines mit metalloxid beschichteten glassubstrates und ein glassubstrat für eine elektronische anzeige Expired - Fee Related DE69616757T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP95203364 1995-12-06
PCT/IB1996/001281 WO1997020783A1 (en) 1995-12-06 1996-11-22 Method of manufacturing a glass substrate coated with a metal oxide and a glass substrate for an electronic display

Publications (2)

Publication Number Publication Date
DE69616757D1 true DE69616757D1 (de) 2001-12-13
DE69616757T2 DE69616757T2 (de) 2002-08-01

Family

ID=8220909

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69616757T Expired - Fee Related DE69616757T2 (de) 1995-12-06 1996-11-22 Verfahren zur herstellung eines mit metalloxid beschichteten glassubstrates und ein glassubstrat für eine elektronische anzeige

Country Status (6)

Country Link
US (1) US5905336A (de)
EP (1) EP0808295B1 (de)
JP (1) JPH11500099A (de)
KR (1) KR19980701858A (de)
DE (1) DE69616757T2 (de)
WO (1) WO1997020783A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5888112A (en) * 1996-12-31 1999-03-30 Micron Technology, Inc. Method for forming spacers on a display substrate
US6280838B1 (en) * 1997-01-10 2001-08-28 U. S. Philips Corporation Optical element, a display device provided with said optical element, and a method of manufacturing the optical element
US6013309A (en) * 1997-02-13 2000-01-11 Lg Electronics Inc. Protection layer of plasma display panel and method of forming the same
US6017579A (en) * 1997-04-14 2000-01-25 Symetrix Corporation Method of forming magnesium oxide films on glass substrate for use in plasma display panels
US5967871A (en) * 1997-07-24 1999-10-19 Photonics Systems, Inc. Method for making back glass substrate for plasma display panel
US6366014B1 (en) * 1997-08-01 2002-04-02 Canon Kabushiki Kaisha Charge-up suppressing member, charge-up suppressing film, electron beam apparatus, and image forming apparatus
JP2002530128A (ja) 1998-11-18 2002-09-17 ラジオバスキュラー、システムズ、リミテッド、ライアビリティ、カンパニー 放射性コーティング溶液、方法および基板
US6235352B1 (en) * 1999-11-29 2001-05-22 Electric Power Research Institute, Inc. Method of repairing a thermal barrier coating
DE10117775A1 (de) * 2001-04-09 2002-10-17 Abb Research Ltd Leistungshalbleitermodul sowie Verfahren zum Herstellen eines solchen Leistungshalbleitermoduls
KR100505986B1 (ko) * 2003-07-16 2005-08-03 엘지전자 주식회사 플라즈마 디스플레이 패널 및 그 제조방법
KR20070121844A (ko) * 2005-04-15 2007-12-27 이화이어 테크놀로지 코포레이션 후막 유전체 전계발광 디스플레이용 산화마그네슘 포함방벽층
KR100755309B1 (ko) * 2005-12-16 2007-09-05 엘지전자 주식회사 플라즈마 디스플레이 패널
US9338884B2 (en) 2011-08-10 2016-05-10 Nippon Soda Co., Ltd. Laminated body and manufacturing process therefor

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4083614A (en) * 1976-10-29 1978-04-11 International Business Machines Corporation Method of manufacturing a gas panel assembly
US4289816A (en) * 1978-05-30 1981-09-15 Lam Partnership Process for improved glass article coating, and such coated articles
US4277786A (en) * 1979-07-19 1981-07-07 General Electric Company Multi-electrode liquid crystal displays
JPH0644464B2 (ja) * 1983-10-05 1994-06-08 株式会社日立製作所 ディスプレイの製造方法及びそれに用いるガラス板の製造方法
NL9000060A (nl) * 1989-06-01 1991-01-02 Philips Nv Beeldweergeefinrichting van het dunne type.
JPH02263737A (ja) * 1989-03-31 1990-10-26 Narumi China Corp セラミック溶射被覆結晶化ガラス
DE69030145T2 (de) * 1989-08-18 1997-07-10 Galileo Electro Optics Corp Kontinuierliche Dünnschicht-Dynoden
JP2937369B2 (ja) * 1989-12-08 1999-08-23 株式会社ナカシマ ガラス被膜形成方法
JPH05221685A (ja) * 1992-02-12 1993-08-31 Nakashima:Kk ガラス被膜形成方法

Also Published As

Publication number Publication date
KR19980701858A (ko) 1998-06-25
US5905336A (en) 1999-05-18
WO1997020783A1 (en) 1997-06-12
DE69616757T2 (de) 2002-08-01
JPH11500099A (ja) 1999-01-06
EP0808295B1 (de) 2001-11-07
EP0808295A1 (de) 1997-11-26

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N

8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee