DE69628445D1 - Zweistufige chemische mischvorrichtung - Google Patents

Zweistufige chemische mischvorrichtung

Info

Publication number
DE69628445D1
DE69628445D1 DE69628445T DE69628445T DE69628445D1 DE 69628445 D1 DE69628445 D1 DE 69628445D1 DE 69628445 T DE69628445 T DE 69628445T DE 69628445 T DE69628445 T DE 69628445T DE 69628445 D1 DE69628445 D1 DE 69628445D1
Authority
DE
Germany
Prior art keywords
chemical
concentration
mix
mixed
batches
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69628445T
Other languages
English (en)
Other versions
DE69628445T2 (de
Inventor
T Ferri
Tobin Geatz
L Green
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Messer LLC
Original Assignee
Applied Chemical Solutions Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Chemical Solutions Inc filed Critical Applied Chemical Solutions Inc
Application granted granted Critical
Publication of DE69628445D1 publication Critical patent/DE69628445D1/de
Publication of DE69628445T2 publication Critical patent/DE69628445T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D9/00—Level control, e.g. controlling quantity of material stored in vessel
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/135—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture
    • G05D11/138—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture by sensing the concentration of the mixture, e.g. measuring pH value
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
    • G05D11/133—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components with discontinuous action
DE69628445T 1995-11-07 1996-11-07 Zweistufige chemische mischvorrichtung Expired - Fee Related DE69628445T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/554,787 US5632960A (en) 1995-11-07 1995-11-07 Two-stage chemical mixing system
PCT/US1996/017820 WO1997017640A1 (en) 1995-11-07 1996-11-07 Two-stage chemical mixing system

Publications (2)

Publication Number Publication Date
DE69628445D1 true DE69628445D1 (de) 2003-07-03
DE69628445T2 DE69628445T2 (de) 2004-01-15

Family

ID=24214718

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69628445T Expired - Fee Related DE69628445T2 (de) 1995-11-07 1996-11-07 Zweistufige chemische mischvorrichtung

Country Status (7)

Country Link
US (2) US5632960A (de)
EP (1) EP0864123B1 (de)
JP (1) JP2000500696A (de)
KR (1) KR100394181B1 (de)
AT (1) ATE241818T1 (de)
DE (1) DE69628445T2 (de)
WO (1) WO1997017640A1 (de)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6065863A (en) * 1997-04-17 2000-05-23 Solvent Solutions, Inc. System for mixing bulk windshield washer liquid for both cold and warm climates
US6004025A (en) * 1997-05-16 1999-12-21 Life Technologies, Inc. Automated liquid manufacturing system
US6332559B1 (en) * 1997-10-15 2001-12-25 Ekolink Pty Ltd Liquor dispensing apparatus
BR9800361A (pt) * 1998-02-13 2000-09-26 Renner Du Pont Tintas Automoti Processo continuo e automatico para a produção de tintas automotivas e outros
US20070119816A1 (en) * 1998-04-16 2007-05-31 Urquhart Karl J Systems and methods for reclaiming process fluids in a processing environment
US7980753B2 (en) 1998-04-16 2011-07-19 Air Liquide Electronics U.S. Lp Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation system
KR100548750B1 (ko) * 1998-04-30 2006-02-06 더 비오씨 그룹, 인크. 슬러리 혼합용 전도율 귀환 제어 시스템
TW479841U (en) * 1998-06-17 2002-03-11 United Microelectronics Corp Polishing slurry supply apparatus
US6224252B1 (en) * 1998-07-07 2001-05-01 Air Products And Chemicals, Inc. Chemical generator with controlled mixing and concentration feedback and adjustment
JP3728945B2 (ja) * 1998-10-30 2005-12-21 オルガノ株式会社 フォトレジスト現像廃液からの現像液の回収再利用方法及び装置
US6247838B1 (en) * 1998-11-24 2001-06-19 The Boc Group, Inc. Method for producing a liquid mixture having a predetermined concentration of a specified component
US6527018B2 (en) * 2000-06-07 2003-03-04 Fuji Photo Film Co., Ltd. Method and system for optimizing batch process of preparing solution
TWI298826B (en) * 2001-02-06 2008-07-11 Hirama Lab Co Ltd Purified developer producing equipment and method
JP3869730B2 (ja) * 2002-01-16 2007-01-17 株式会社平間理化研究所 処理液調製供給方法及び装置
US20040151062A1 (en) * 2003-01-30 2004-08-05 Taiwan Semiconductor Manufacturing Co., Ltd. Automatic chemical mixing system
KR100500475B1 (ko) * 2003-11-10 2005-07-12 삼성전자주식회사 케미컬 혼합장치
US20050146982A1 (en) * 2003-12-31 2005-07-07 Carlson Stephen J. Quick blend module
US7281840B2 (en) * 2004-07-09 2007-10-16 Tres-Ark, Inc. Chemical mixing apparatus
US20060080041A1 (en) * 2004-07-08 2006-04-13 Anderson Gary R Chemical mixing apparatus, system and method
KR20070041556A (ko) * 2004-07-08 2007-04-18 트레스-아크, 인크 화학물 혼합용 장치와 시스템 및 방법
US20060196541A1 (en) * 2005-03-04 2006-09-07 David Gerken Control of fluid conditions in bulk fluid distribution systems
US7810516B2 (en) * 2005-03-04 2010-10-12 Air Liquide Electronics U.S. Lp Control of fluid conditions in bulk fluid distribution systems
US20090092001A1 (en) 2005-07-27 2009-04-09 Clay Hildreth Solution making system and method
DE102005059177B3 (de) * 2005-11-10 2007-06-28 Vortex-Nanofluid Gmbh Vorrichtung und Verfahren zum Herstellen von Nano-Dispersionen
US7743783B2 (en) * 2006-04-04 2010-06-29 Air Liquide Electronics U.S. Lp Method and apparatus for recycling process fluids
US20070251585A1 (en) * 2006-04-28 2007-11-01 David Paul Edwards Fluid distribution system
US8235580B2 (en) 2006-10-12 2012-08-07 Air Liquide Electronics U.S. Lp Reclaim function for semiconductor processing systems
WO2008139417A2 (en) * 2007-05-14 2008-11-20 L'air Liquide-Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Systems and methods for mixing fluids
WO2012128603A1 (fr) 2011-03-22 2012-09-27 Aouad Salah Mohammed Dispositif automatique et procede de preparation de solutions
US10544340B2 (en) 2011-10-20 2020-01-28 Henderson Products, Inc. Brine generation system
US10766010B2 (en) 2011-10-20 2020-09-08 Henderson Products, Inc. High throughput brine generating system
US9097388B2 (en) * 2012-07-13 2015-08-04 Intermolecular, Inc. Effluent management, waste dilution, effluent pre-dilution, acid waste handling
US20160296902A1 (en) 2016-06-17 2016-10-13 Air Liquide Electronics U.S. Lp Deterministic feedback blender
US20190255495A1 (en) * 2016-11-01 2019-08-22 Cms Technology, Inc. Systems and methods for improved blending of agents in chemical applications
US11724236B2 (en) * 2018-12-20 2023-08-15 Xia Tai Xin Semiconductor (Qing Dao) Ltd. System and method for fluid preparation
US11761582B2 (en) * 2019-09-05 2023-09-19 Dhf America, Llc Pressure regulation system and method for a fluidic product having particles
WO2021108739A1 (en) 2019-11-27 2021-06-03 Diversified Fluid Solutions, Llc On-demand in-line-blending and supply of chemicals
KR102612978B1 (ko) * 2022-08-02 2023-12-13 나가세 엔지니어링 서비스 코리아(주) 혼합 시스템

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2230978A1 (en) * 1973-05-23 1974-12-20 Inst Francais Du Petrole Fluid flow control from storage reservoir - gives precise control even when rate of flow is low
US3877682A (en) * 1974-03-08 1975-04-15 Mosstype Corp Automatic chemical measuring and mixing machine
US3960295A (en) * 1974-08-19 1976-06-01 Vladimir Horak Continuous liquid proportioning system
US4019528A (en) * 1975-07-23 1977-04-26 Anton Braun Fluid mixing apparatus
US4106671A (en) * 1975-10-31 1978-08-15 Beckman Instruments, Inc. Liquid head control system
DE2708422C2 (de) * 1977-02-26 1979-04-05 Jagenberg-Werke Ag, 4000 Duesseldorf Einrichtung zur impulsweisen Abgabe sehr kleiner Flüssigkeitsmengen, insbesondere von H2O2
HU178929B (en) * 1979-07-21 1982-07-28 Ganz Mueszer Muevek Equipment for the determination of evaporation and/or precipitate
US4242841A (en) * 1979-07-30 1981-01-06 Ushakov Vladimir F Apparatus for preparing and feeding an abrasive-containing suspension into the zone of action of work tools of polishing and finishing lathes
US4362033A (en) * 1980-05-08 1982-12-07 Dominion Textile, Inc. Automatic mixing and cloth bleaching control
DE3037898A1 (de) * 1980-10-07 1982-05-06 Bruker Analytische Meßtechnik GmbH, 7512 Rheinstetten Mischkammer
US4483357A (en) * 1983-02-22 1984-11-20 Globe-Union Inc. Method for two stage in-line acid mixing
FR2551360B1 (fr) * 1983-09-05 1986-05-16 Martineau Sarl Expl Ets Procede pour produire des solutions a concentrations souhaitees a partir de produits liquides et de diluant et un appareil mettant en oeuvre ce procede
US4523854A (en) * 1983-11-07 1985-06-18 World Color Press, Inc. Apparatus for mixing fountain solution
US4580699A (en) * 1983-12-20 1986-04-08 Chem-Trend Incorporated Proportioner
US4669496A (en) * 1984-03-12 1987-06-02 Figgie International Inc. Liquid proportioner
US5137694A (en) * 1985-05-08 1992-08-11 Ecolab Inc. Industrial solid detergent dispenser and cleaning system
US4823987A (en) * 1986-04-28 1989-04-25 Ryco Graphic Manufacturing, Inc. Liquid mixing system and method
NO172266C (no) * 1988-04-29 1993-06-23 Ulstein Nor As Fremgangsmaate og innretning for automatisk fremstilling av en blanding som bestaar av minst to stroembare bestanddeler
US4863277A (en) * 1988-12-22 1989-09-05 Vigoro Industries, Inc. Automated batch blending system for liquid fertilizer
US5108655A (en) * 1989-05-30 1992-04-28 Electro-System, Incorporated Foam monitoring control system
SE467816B (sv) * 1990-02-19 1992-09-21 Gambro Ab System foer beredning av en vaetska avsedd foer medicinskt bruk
US5148945B1 (en) * 1990-09-17 1996-07-02 Applied Chemical Solutions Apparatus and method for the transfer and delivery of high purity chemicals
US5417346A (en) * 1990-09-17 1995-05-23 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
US5370269A (en) * 1990-09-17 1994-12-06 Applied Chemical Solutions Process and apparatus for precise volumetric diluting/mixing of chemicals
KR930008856B1 (ko) * 1991-05-15 1993-09-16 금성일렉트론 주식회사 혼합용액의 일정비율 혼합장치
US5340210A (en) * 1992-02-25 1994-08-23 Nalco Chemical Company Apparatus for blending chemicals with a reversible multi-speed pump
JP3141919B2 (ja) * 1994-10-13 2001-03-07 三菱瓦斯化学株式会社 薬液調合装置および方法

Also Published As

Publication number Publication date
WO1997017640A1 (en) 1997-05-15
DE69628445T2 (de) 2004-01-15
EP0864123A4 (de) 1999-01-20
US5874049A (en) 1999-02-23
KR100394181B1 (ko) 2003-12-18
EP0864123B1 (de) 2003-05-28
JP2000500696A (ja) 2000-01-25
ATE241818T1 (de) 2003-06-15
EP0864123A1 (de) 1998-09-16
US5632960A (en) 1997-05-27
KR19990067393A (ko) 1999-08-16

Similar Documents

Publication Publication Date Title
DE69628445T2 (de) Zweistufige chemische mischvorrichtung
CA2219334A1 (en) Process for preparing a chlorine-dioxide-containing disinfectant solution for water treatment
JPS558835A (en) Treatment of surplus sludge
WO2003094980A1 (fr) Appareil de production d'eau sterilisee
AU3369299A (en) Stable concentrated rare earth carboxylate liquids
JPS6420286A (en) Fragrant gel composition
DK1087658T3 (da) Biologisk aktiv mikrodispersionssammensætning
JPS57115179A (en) Immobilized enzymatic active substance and its preparation
NZ508073A (en) Biologically active composition
ES2000033A6 (es) Composicion de bitionol sulfoxido porcedimiento para su fabricacion y metodo de utilizacion de aquella
DE60020871D1 (de) Formulierungen mit verlängerter freisetzung zur implantation
JPS5626197A (en) Preparation of l-phenylalanine
JPS5295625A (en) Preparation of sucrose benzoate
DE60038115D1 (de) Flüssigkeitsabgabestabilisierung für wafervorbereitungssystem
JPS54463A (en) Coagulating system
Yamaguchi et al. Active center and mode of reaction of blasticidin S deaminase
ES456588A1 (es) Procedimiento para la preparacion desinfeccion, neutraliza- cion yno desintoxicacion de aguas residuales altamente soli-citadas.
JPS54141052A (en) Disposal of organic exhaust water
ES2143960A1 (es) Nueva disolucion acuosa de formaldehido estabilizada, procedimiento para su preparacion y aplicaciones.
SU1536549A1 (ru) Реакционный кристаллизатор
JPS55144887A (en) Preparation of physiologically active substance
JPS57184493A (en) Improvement of svi of mixed liquid in aeration vessel
ES2093766T3 (es) Procedimiento para la fabricacion de una composicion detergente de alta actividad que contiene acido succinico.
JPS6427700A (en) Method for dehydrating sludge with flocculant
DE3376389D1 (en) Process and apparatus for the preparation of mixtures and in-line dosage of hardly mixable components, for example water and polymers

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee
8327 Change in the person/name/address of the patent owner

Owner name: THE BOC GROUP,INC.(N.D.GES.D.STAATES DELAWARE), NE