DE69634222D1 - Weiterbildungen einer digitalen Mikro-Spiegelvorrichtung (DMD) - Google Patents

Weiterbildungen einer digitalen Mikro-Spiegelvorrichtung (DMD)

Info

Publication number
DE69634222D1
DE69634222D1 DE69634222T DE69634222T DE69634222D1 DE 69634222 D1 DE69634222 D1 DE 69634222D1 DE 69634222 T DE69634222 T DE 69634222T DE 69634222 T DE69634222 T DE 69634222T DE 69634222 D1 DE69634222 D1 DE 69634222D1
Authority
DE
Germany
Prior art keywords
dmd
mirror device
further developments
micro mirror
digital micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69634222T
Other languages
English (en)
Other versions
DE69634222T2 (de
Inventor
Larry J Hornbeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69634222D1 publication Critical patent/DE69634222D1/de
Application granted granted Critical
Publication of DE69634222T2 publication Critical patent/DE69634222T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
DE69634222T 1995-04-18 1996-04-18 Weiterbildungen einer digitalen Mikro-Spiegelvorrichtung (DMD) Expired - Lifetime DE69634222T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US424021 1995-04-18
US08/424,021 US5535047A (en) 1995-04-18 1995-04-18 Active yoke hidden hinge digital micromirror device

Publications (2)

Publication Number Publication Date
DE69634222D1 true DE69634222D1 (de) 2005-03-03
DE69634222T2 DE69634222T2 (de) 2006-01-05

Family

ID=23681129

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69634222T Expired - Lifetime DE69634222T2 (de) 1995-04-18 1996-04-18 Weiterbildungen einer digitalen Mikro-Spiegelvorrichtung (DMD)

Country Status (8)

Country Link
US (1) US5535047A (de)
EP (1) EP0738910B1 (de)
JP (1) JP3851679B2 (de)
KR (1) KR100416679B1 (de)
CN (1) CN1160218A (de)
CA (1) CA2173637C (de)
DE (1) DE69634222T2 (de)
TW (1) TW295631B (de)

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