DE69707735T2 - Vorrichtung zum Verdampfen einer Flüssigkeit und Gasausstosseinrichtung - Google Patents
Vorrichtung zum Verdampfen einer Flüssigkeit und GasausstosseinrichtungInfo
- Publication number
- DE69707735T2 DE69707735T2 DE69707735T DE69707735T DE69707735T2 DE 69707735 T2 DE69707735 T2 DE 69707735T2 DE 69707735 T DE69707735 T DE 69707735T DE 69707735 T DE69707735 T DE 69707735T DE 69707735 T2 DE69707735 T2 DE 69707735T2
- Authority
- DE
- Germany
- Prior art keywords
- evaporating
- liquid
- gas ejection
- ejection device
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/4557—Heated nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11028296 | 1996-04-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69707735D1 DE69707735D1 (de) | 2001-12-06 |
DE69707735T2 true DE69707735T2 (de) | 2002-08-01 |
Family
ID=14531747
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69707735T Expired - Fee Related DE69707735T2 (de) | 1996-04-05 | 1997-04-04 | Vorrichtung zum Verdampfen einer Flüssigkeit und Gasausstosseinrichtung |
Country Status (5)
Country | Link |
---|---|
US (1) | US6036783A (de) |
EP (1) | EP0799907B1 (de) |
KR (1) | KR970072043A (de) |
DE (1) | DE69707735T2 (de) |
TW (1) | TW322602B (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009049839A1 (de) * | 2009-10-16 | 2011-12-15 | Calyxo Gmbh | Gasverdampfer für Beschichtungsanlagen |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6409839B1 (en) * | 1997-06-02 | 2002-06-25 | Msp Corporation | Method and apparatus for vapor generation and film deposition |
JPH11312649A (ja) * | 1998-04-30 | 1999-11-09 | Nippon Asm Kk | Cvd装置 |
US6210485B1 (en) * | 1998-07-21 | 2001-04-03 | Applied Materials, Inc. | Chemical vapor deposition vaporizer |
US6358323B1 (en) | 1998-07-21 | 2002-03-19 | Applied Materials, Inc. | Method and apparatus for improved control of process and purge material in a substrate processing system |
US20030101938A1 (en) * | 1998-10-27 | 2003-06-05 | Applied Materials, Inc. | Apparatus for the deposition of high dielectric constant films |
JP3470055B2 (ja) * | 1999-01-22 | 2003-11-25 | 株式会社渡邊商行 | Mocvd用気化器及び原料溶液の気化方法 |
US6267820B1 (en) * | 1999-02-12 | 2001-07-31 | Applied Materials, Inc. | Clog resistant injection valve |
DE19921744B4 (de) * | 1999-05-11 | 2008-04-30 | Applied Materials Gmbh & Co. Kg | Verfahren zum Transport von mindestens einer dampfförmigen Substanz durch die Wand einer Vakuumkammer in die Vakuumkammer sowie Vorrichtung zur Durchführung des Verfahrens und deren Verwendung |
US6548112B1 (en) * | 1999-11-18 | 2003-04-15 | Tokyo Electron Limited | Apparatus and method for delivery of precursor vapor from low vapor pressure liquid sources to a CVD chamber |
US6596085B1 (en) | 2000-02-01 | 2003-07-22 | Applied Materials, Inc. | Methods and apparatus for improved vaporization of deposition material in a substrate processing system |
US6572706B1 (en) * | 2000-06-19 | 2003-06-03 | Simplus Systems Corporation | Integrated precursor delivery system |
US6299692B1 (en) * | 2000-07-21 | 2001-10-09 | Applied Materials, Inc. | Head for vaporizing and flowing various precursor materials onto semiconductor wafers during chemical vapor deposition |
US6302965B1 (en) * | 2000-08-15 | 2001-10-16 | Applied Materials, Inc. | Dispersion plate for flowing vaporizes compounds used in chemical vapor deposition of films onto semiconductor surfaces |
KR100881681B1 (ko) * | 2001-01-18 | 2009-02-06 | 가부시키가이샤 와타나베 쇼코 | 기화기 및 이를 이용한 각종 장치와 기화 방법 |
AU2002242304A1 (en) * | 2001-02-28 | 2002-09-12 | Porter Instrument Company, Inc. | Manifolded fluid delivery system |
US6827974B2 (en) * | 2002-03-29 | 2004-12-07 | Pilkington North America, Inc. | Method and apparatus for preparing vaporized reactants for chemical vapor deposition |
JP4202856B2 (ja) * | 2003-07-25 | 2008-12-24 | 東京エレクトロン株式会社 | ガス反応装置 |
EP1747302B1 (de) * | 2004-05-20 | 2012-12-26 | Akzo Nobel N.V. | Bubbler zur konstanten dampfzufuhr einer festen chemikalie |
US20070194470A1 (en) * | 2006-02-17 | 2007-08-23 | Aviza Technology, Inc. | Direct liquid injector device |
CN101454478A (zh) * | 2006-04-20 | 2009-06-10 | 壳牌可再生能源有限公司 | 沉积材料的热蒸发设备、用途和方法 |
US8778079B2 (en) * | 2007-10-11 | 2014-07-15 | Valence Process Equipment, Inc. | Chemical vapor deposition reactor |
JP2009246168A (ja) * | 2008-03-31 | 2009-10-22 | Tokyo Electron Ltd | 液体原料気化器及びそれを用いた成膜装置 |
JP5603065B2 (ja) * | 2009-01-30 | 2014-10-08 | パナソニックヘルスケア株式会社 | 滅菌物質供給装置およびアイソレータ |
JP5614935B2 (ja) | 2009-02-03 | 2014-10-29 | 株式会社渡辺商行 | 気化器、この気化器を用いたmocvd用気化器、これら気化器若しくはmocvd用気化器に用いられるセンターロッド、及びキャリアガスの分 |
KR101234409B1 (ko) * | 2009-09-30 | 2013-02-18 | 시케이디 가부시키가이샤 | 액체 기화 시스템 |
US20120276291A1 (en) * | 2011-04-28 | 2012-11-01 | Bird Chester D | Methods and Apparatuses for Reducing Gelation of Glass Precursor Materials During Vaporization |
US9574268B1 (en) * | 2011-10-28 | 2017-02-21 | Asm America, Inc. | Pulsed valve manifold for atomic layer deposition |
US9388492B2 (en) | 2011-12-27 | 2016-07-12 | Asm America, Inc. | Vapor flow control apparatus for atomic layer deposition |
US10113232B2 (en) | 2014-07-31 | 2018-10-30 | Lam Research Corporation | Azimuthal mixer |
US9951421B2 (en) * | 2014-12-10 | 2018-04-24 | Lam Research Corporation | Inlet for effective mixing and purging |
US9877514B2 (en) | 2015-09-21 | 2018-01-30 | Cloud V Enterprises | Vaporizer with electronically heated nail |
US10662527B2 (en) | 2016-06-01 | 2020-05-26 | Asm Ip Holding B.V. | Manifolds for uniform vapor deposition |
TWI616555B (zh) * | 2017-01-17 | 2018-03-01 | 漢民科技股份有限公司 | 應用於半導體設備之噴氣裝置 |
US11492701B2 (en) | 2019-03-19 | 2022-11-08 | Asm Ip Holding B.V. | Reactor manifolds |
US11788190B2 (en) | 2019-07-05 | 2023-10-17 | Asm Ip Holding B.V. | Liquid vaporizer |
US11946136B2 (en) | 2019-09-20 | 2024-04-02 | Asm Ip Holding B.V. | Semiconductor processing device |
KR20210048408A (ko) | 2019-10-22 | 2021-05-03 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 증착 반응기 매니폴드 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4847469A (en) * | 1987-07-15 | 1989-07-11 | The Boc Group, Inc. | Controlled flow vaporizer |
JP2796975B2 (ja) * | 1988-11-28 | 1998-09-10 | 株式会社高純度化学研究所 | 液体原料気化装置 |
KR940002439B1 (ko) * | 1990-03-09 | 1994-03-24 | 니뽄 덴신 덴와 가부시끼가이샤 | 금속 박막 성장방법 및 장치 |
US5252134A (en) * | 1991-05-31 | 1993-10-12 | Stauffer Craig M | Integrated delivery system for chemical vapor from non-gaseous sources for semiconductor processing |
DE4124018C1 (de) * | 1991-07-19 | 1992-11-19 | Leybold Ag, 6450 Hanau, De | |
JPH0582507A (ja) * | 1991-09-18 | 1993-04-02 | Applied Materials Japan Kk | 液体気化バルブ |
JPH06291040A (ja) * | 1992-03-03 | 1994-10-18 | Rintetsuku:Kk | 液体気化供給方法と液体気化供給器 |
JP3118493B2 (ja) * | 1993-04-27 | 2000-12-18 | 菱電セミコンダクタシステムエンジニアリング株式会社 | 液体原料用cvd装置 |
US5435850A (en) * | 1993-09-17 | 1995-07-25 | Fei Company | Gas injection system |
-
1997
- 1997-04-03 TW TW086104281A patent/TW322602B/zh active
- 1997-04-04 DE DE69707735T patent/DE69707735T2/de not_active Expired - Fee Related
- 1997-04-04 EP EP97105636A patent/EP0799907B1/de not_active Expired - Lifetime
- 1997-04-04 KR KR1019970012473A patent/KR970072043A/ko not_active Application Discontinuation
- 1997-04-07 US US08/834,593 patent/US6036783A/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009049839A1 (de) * | 2009-10-16 | 2011-12-15 | Calyxo Gmbh | Gasverdampfer für Beschichtungsanlagen |
DE102009049839B4 (de) * | 2009-10-16 | 2012-12-06 | Calyxo Gmbh | Gasverdampfer für Beschichtungsanlagen sowie Verfahren zu dessen Betreiben |
Also Published As
Publication number | Publication date |
---|---|
EP0799907A1 (de) | 1997-10-08 |
EP0799907B1 (de) | 2001-10-31 |
US6036783A (en) | 2000-03-14 |
DE69707735D1 (de) | 2001-12-06 |
KR970072043A (ko) | 1997-11-07 |
TW322602B (de) | 1997-12-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |