DE69712115D1 - Festkörperbildaufnahmevorrichtung für analysevorrichtung - Google Patents

Festkörperbildaufnahmevorrichtung für analysevorrichtung

Info

Publication number
DE69712115D1
DE69712115D1 DE69712115T DE69712115T DE69712115D1 DE 69712115 D1 DE69712115 D1 DE 69712115D1 DE 69712115 T DE69712115 T DE 69712115T DE 69712115 T DE69712115 T DE 69712115T DE 69712115 D1 DE69712115 D1 DE 69712115D1
Authority
DE
Germany
Prior art keywords
solid state
state imaging
imaging device
analyzing
analyzing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69712115T
Other languages
English (en)
Other versions
DE69712115T2 (de
Inventor
Katsuyuki Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Application granted granted Critical
Publication of DE69712115D1 publication Critical patent/DE69712115D1/de
Publication of DE69712115T2 publication Critical patent/DE69712115T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0248—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using a sighting port, e.g. camera or human eye
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/30—Transforming light or analogous information into electric information
    • H04N5/33—Transforming infrared radiation
DE69712115T 1997-11-28 1997-11-28 Festkörperbildaufnahmevorrichtung für analysevorrichtung Expired - Fee Related DE69712115T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1997/004365 WO1999029103A1 (fr) 1997-11-28 1997-11-28 Dispositif de capture d'images a semi-conducteurs et analyseur utilisant ledit dispositif

Publications (2)

Publication Number Publication Date
DE69712115D1 true DE69712115D1 (de) 2002-05-23
DE69712115T2 DE69712115T2 (de) 2002-09-26

Family

ID=14181552

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69712115T Expired - Fee Related DE69712115T2 (de) 1997-11-28 1997-11-28 Festkörperbildaufnahmevorrichtung für analysevorrichtung

Country Status (6)

Country Link
US (1) US6765609B1 (de)
EP (1) EP1043890B1 (de)
JP (1) JP3236026B2 (de)
AU (1) AU5068098A (de)
DE (1) DE69712115T2 (de)
WO (1) WO1999029103A1 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60045484D1 (de) * 1999-09-30 2011-02-17 Shimadzu Corp Ultraschnelles bildaufnahmegerät
JP2001339638A (ja) * 2000-05-26 2001-12-07 Hamamatsu Photonics Kk ストリークカメラ装置
JP3943022B2 (ja) * 2000-12-01 2007-07-11 株式会社荏原製作所 基板検査装置
US6826424B1 (en) * 2000-12-19 2004-11-30 Haishan Zeng Methods and apparatus for fluorescence and reflectance imaging and spectroscopy and for contemporaneous measurements of electromagnetic radiation with multiple measuring devices
TW589723B (en) * 2001-09-10 2004-06-01 Ebara Corp Detecting apparatus and device manufacturing method
US7092584B2 (en) 2002-01-04 2006-08-15 Time Warner Entertainment Company Lp Registration of separations
US6947607B2 (en) 2002-01-04 2005-09-20 Warner Bros. Entertainment Inc. Reduction of differential resolution of separations
GB0225791D0 (en) * 2002-11-05 2002-12-11 Kratos Analytical Ltd Charged particle spectrometer and detector therefor
AU2003292643A1 (en) * 2002-12-27 2004-07-29 Technos Institute Co., Ltd. Equipment for measuring distribution of void or particle size
JP4409860B2 (ja) * 2003-05-28 2010-02-03 浜松ホトニクス株式会社 光検出器を用いた分光器
ATE517365T1 (de) * 2004-08-27 2011-08-15 Koninkl Philips Electronics Nv Ausrichtungssystem für spektroskopische analysen
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) * 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
GB2428868B (en) * 2005-10-28 2008-11-19 Thermo Electron Corp Spectrometer for surface analysis and method therefor
US20070278421A1 (en) * 2006-04-24 2007-12-06 Gleason K R Sample preparation technique
JP5358979B2 (ja) * 2008-03-06 2013-12-04 富士通株式会社 Ｘ線評価用試料の作製方法
JP5512961B2 (ja) * 2008-05-15 2014-06-04 浜松ホトニクス株式会社 分光モジュール及びその製造方法
JP5207938B2 (ja) 2008-05-15 2013-06-12 浜松ホトニクス株式会社 分光モジュール及び分光モジュールの製造方法
JP5205241B2 (ja) 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光モジュール
JP5162049B2 (ja) * 2008-05-15 2013-03-13 浜松ホトニクス株式会社 分光モジュール及び分光モジュールの製造方法
JP5415060B2 (ja) 2008-05-15 2014-02-12 浜松ホトニクス株式会社 分光モジュール
US9241128B2 (en) 2013-02-14 2016-01-19 Warner Bros. Entertainment Inc. Video conversion technology
GB201609995D0 (en) * 2016-06-08 2016-07-20 Aquasium Technology Ltd Shaped welding head
JP2018185269A (ja) * 2017-04-27 2018-11-22 Ckd株式会社 検査装置、ｐｔｐ包装機及びｐｔｐシートの製造方法
US11199649B2 (en) * 2019-08-21 2021-12-14 The United States Of America, As Represented By The Secretary Of The Navy Metamaterial, focal plane array for broad spectrum imaging
US11094499B1 (en) * 2020-10-04 2021-08-17 Borries Pte. Ltd. Apparatus of charged-particle beam such as electron microscope comprising sliding specimen table within objective lens

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3931462A (en) * 1975-03-11 1976-01-06 The United States Of America As Represented By The United States National Aeronautics And Space Administration Office Of General Counsel-Code Gp Stack plume visualization system
JPH0752122B2 (ja) * 1988-06-21 1995-06-05 浜松ホトニクス株式会社 色彩輝度計
JPH05129574A (ja) * 1991-11-07 1993-05-25 Ricoh Co Ltd 密着型イメ−ジセンサ
US5528368A (en) * 1992-03-06 1996-06-18 The United States Of America As Represented By The Department Of Health And Human Services Spectroscopic imaging device employing imaging quality spectral filters
JP3241828B2 (ja) * 1992-11-18 2001-12-25 浜松ホトニクス株式会社 固体撮像装置
EP0746746B1 (de) * 1992-12-28 2001-10-17 HINNRICHS, Michele Multispektrale bildanalyse

Also Published As

Publication number Publication date
JP3236026B2 (ja) 2001-12-04
DE69712115T2 (de) 2002-09-26
EP1043890A4 (de) 2001-02-14
US6765609B1 (en) 2004-07-20
EP1043890A1 (de) 2000-10-11
AU5068098A (en) 1999-06-16
EP1043890B1 (de) 2002-04-17
WO1999029103A1 (fr) 1999-06-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee