DE69714909T2 - Piezoelektrisches Element des Dünnschichttyps - Google Patents

Piezoelektrisches Element des Dünnschichttyps

Info

Publication number
DE69714909T2
DE69714909T2 DE69714909T DE69714909T DE69714909T2 DE 69714909 T2 DE69714909 T2 DE 69714909T2 DE 69714909 T DE69714909 T DE 69714909T DE 69714909 T DE69714909 T DE 69714909T DE 69714909 T2 DE69714909 T2 DE 69714909T2
Authority
DE
Germany
Prior art keywords
thin film
piezoelectric element
film type
type
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69714909T
Other languages
English (en)
Other versions
DE69714909D1 (de
Inventor
Yukihisa Takeuchi
Koji Kimura
Masao Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE69714909D1 publication Critical patent/DE69714909D1/de
Publication of DE69714909T2 publication Critical patent/DE69714909T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
DE69714909T 1996-05-27 1997-05-23 Piezoelektrisches Element des Dünnschichttyps Expired - Lifetime DE69714909T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP13204596 1996-05-27
JP11959897 1997-05-09

Publications (2)

Publication Number Publication Date
DE69714909D1 DE69714909D1 (de) 2002-10-02
DE69714909T2 true DE69714909T2 (de) 2003-04-30

Family

ID=26457293

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69714909T Expired - Lifetime DE69714909T2 (de) 1996-05-27 1997-05-23 Piezoelektrisches Element des Dünnschichttyps

Country Status (4)

Country Link
US (1) US5852337A (de)
EP (1) EP0810676B1 (de)
CN (1) CN1170990A (de)
DE (1) DE69714909T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9773966B2 (en) 2014-09-08 2017-09-26 Shimano Inc. Piezoelectric sensor for bicycle component

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CN102023065B (zh) * 2009-09-11 2016-04-13 北京京东方光电科技有限公司 用于检测液晶面板生产中毛刷压入量的接触力测量基板
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US8811636B2 (en) 2011-11-29 2014-08-19 Qualcomm Mems Technologies, Inc. Microspeaker with piezoelectric, metal and dielectric membrane
DE102012200757B4 (de) 2012-01-05 2022-01-05 Vitesco Technologies GmbH Füllstandsgeber
US9450171B2 (en) * 2012-04-19 2016-09-20 Sae Magnetics (H.K.) Ltd. Thin film piezoelectric element and manufacturing method thereof, micro-actuator, head gimbal assembly and disk drive unit with the same
EP2912789B1 (de) 2012-10-26 2017-08-02 Rensselaer Polytechnic Institute Akustisch-elektrische kanalkonstruktion und betrieb mit adaptiven wandlerarrays
CN103067838B (zh) * 2012-12-28 2015-10-28 缪建民 一种高灵敏度压电式硅麦克风的制备方法
WO2014141925A1 (ja) 2013-03-15 2014-09-18 コニカミノルタ株式会社 インクジェットヘッドおよびその製造方法と、インクジェットプリンタ
JP6136464B2 (ja) * 2013-03-29 2017-05-31 セイコーエプソン株式会社 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波画像装置
CN103245409B (zh) * 2013-04-17 2016-12-28 中北大学 基于压电效应的mems仿生结构矢量水声传感器
US9536511B2 (en) * 2013-12-31 2017-01-03 Acist Medical Systems, Inc. Ultrasound transducer stack
TWI519702B (zh) * 2014-06-16 2016-02-01 徐業良 活動感知地墊及其總成
CN106291562A (zh) * 2015-05-30 2017-01-04 鸿富锦精密工业（深圳）有限公司 超声波感测器及其制造方法、超声波感测器阵列
JP6809008B2 (ja) * 2016-07-08 2021-01-06 オムロン株式会社 Ｍｅｍｓ構造及び、ｍｅｍｓ構造を有する静電容量型センサ、圧電型センサ、音響センサ
CN106646371B (zh) * 2016-09-29 2019-05-03 武汉工程大学 一种水下超声源定位系统
CN109141731A (zh) * 2018-07-26 2019-01-04 西北工业大学 一种可用于水下湍流边界层壁面脉动压力测试的柔性基微传感器及其制造方法
US20220416765A1 (en) * 2019-09-05 2022-12-29 Changzhou Chemsemi Co., Ltd. Bulk acoustic wave resonance device and bulk acoustic wave filter
CN111817679B (zh) * 2020-06-09 2021-10-15 见闻录(浙江)半导体有限公司 一种薄膜体声波谐振器及其制作工艺
WO2022016536A1 (zh) * 2020-07-24 2022-01-27 深圳市汇顶科技股份有限公司 超声传感器制备方法、超声传感器以及电子设备
CN111864053A (zh) * 2020-07-24 2020-10-30 深圳市汇顶科技股份有限公司 超声传感器制备方法、超声传感器以及电子设备
TWI757904B (zh) * 2020-10-06 2022-03-11 友達光電股份有限公司 電子裝置
CN113013319B (zh) * 2021-02-24 2023-04-07 武汉理工大学 一种基于一体化结构的低频主动抑振系统
CN115506002B (zh) * 2022-09-19 2023-07-14 张家港红东设备制造有限公司 酸洗电极对、电极组、电极装置及酸洗电极位置调整方法

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9773966B2 (en) 2014-09-08 2017-09-26 Shimano Inc. Piezoelectric sensor for bicycle component
US10833246B2 (en) 2014-09-08 2020-11-10 Shimano Inc. Piezoelectric sensor for bicycle component

Also Published As

Publication number Publication date
US5852337A (en) 1998-12-22
EP0810676A1 (de) 1997-12-03
CN1170990A (zh) 1998-01-21
EP0810676B1 (de) 2002-08-28
DE69714909D1 (de) 2002-10-02

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