DE69715928T2 - Fehlerkompensierter druckwandler - Google Patents
Fehlerkompensierter druckwandlerInfo
- Publication number
- DE69715928T2 DE69715928T2 DE69715928T DE69715928T DE69715928T2 DE 69715928 T2 DE69715928 T2 DE 69715928T2 DE 69715928 T DE69715928 T DE 69715928T DE 69715928 T DE69715928 T DE 69715928T DE 69715928 T2 DE69715928 T2 DE 69715928T2
- Authority
- DE
- Germany
- Prior art keywords
- pressure converter
- compensated pressure
- error compensated
- error
- converter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
- G01L9/045—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges with electric temperature compensating means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
- G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US2144596P | 1996-07-10 | 1996-07-10 | |
PCT/US1997/011907 WO1998001731A1 (en) | 1996-07-10 | 1997-07-10 | Pressure transducer with error compensation |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69715928D1 DE69715928D1 (de) | 2002-10-31 |
DE69715928T2 true DE69715928T2 (de) | 2003-08-07 |
Family
ID=21804276
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69715928T Expired - Lifetime DE69715928T2 (de) | 1996-07-10 | 1997-07-10 | Fehlerkompensierter druckwandler |
DE1009986T Pending DE1009986T1 (de) | 1996-07-10 | 1997-07-10 | Fehlerkompensierter druckwandler |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1009986T Pending DE1009986T1 (de) | 1996-07-10 | 1997-07-10 | Fehlerkompensierter druckwandler |
Country Status (5)
Country | Link |
---|---|
US (1) | US6023978A (de) |
EP (1) | EP1009986B1 (de) |
JP (1) | JP2001511884A (de) |
DE (2) | DE69715928T2 (de) |
WO (1) | WO1998001731A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014221067A1 (de) * | 2014-10-16 | 2016-04-21 | Robert Bosch Gmbh | Drucksensor zur Erfassung eines Drucks eines fluiden Mediums |
Families Citing this family (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7886610B2 (en) * | 1999-07-19 | 2011-02-15 | Donaldson Company, Inc. | Differential pressure gauge for filter |
US6473711B1 (en) | 1999-08-13 | 2002-10-29 | Rosemount Inc. | Interchangeable differential, absolute and gage type of pressure transmitter |
EP1118849B1 (de) * | 2000-01-18 | 2002-08-14 | Denso Corporation | Hochdruckwandler mit ein oder zwei Gewindeschäften mit Vielkontakt Sensor Chips |
US6450005B1 (en) | 2000-12-21 | 2002-09-17 | Honeywell International Inc. | Method and apparatus for the calibration and compensation of sensors |
US6581468B2 (en) * | 2001-03-22 | 2003-06-24 | Kavlico Corporation | Independent-excitation cross-coupled differential-pressure transducer |
US7073442B2 (en) * | 2002-07-03 | 2006-07-11 | Afbs, Inc. | Apparatus, systems and methods for use in three-dimensional printing |
US7306967B1 (en) | 2003-05-28 | 2007-12-11 | Adsem, Inc. | Method of forming high temperature thermistors |
US6909975B2 (en) * | 2003-11-24 | 2005-06-21 | Mks Instruments, Inc. | Integrated absolute and differential pressure transducer |
US7292132B1 (en) * | 2003-12-17 | 2007-11-06 | Adsem, Inc. | NTC thermistor probe |
US7812705B1 (en) | 2003-12-17 | 2010-10-12 | Adsem, Inc. | High temperature thermistor probe |
US7032456B1 (en) * | 2004-12-30 | 2006-04-25 | The United States Of America As Represented By The Secretary Of The Navy | Isostatic piezoresistive pressure transducer with temperature output |
US7884432B2 (en) | 2005-03-22 | 2011-02-08 | Ametek, Inc. | Apparatus and methods for shielding integrated circuitry |
KR100755588B1 (ko) * | 2006-02-21 | 2007-09-06 | 삼성전기주식회사 | 센서 복합 모듈의 초기 보정값 설정방법 |
US20080011297A1 (en) * | 2006-06-30 | 2008-01-17 | Scott Thomas Mazar | Monitoring physiologic conditions via transtracheal measurement of respiratory parameters |
US7467555B2 (en) | 2006-07-10 | 2008-12-23 | Rosemount Inc. | Pressure transmitter with multiple reference pressure sensors |
US7497124B2 (en) * | 2007-04-20 | 2009-03-03 | Delphi Technologies, Inc. | Dual pressure sensor apparatus |
US20090250254A1 (en) * | 2008-04-02 | 2009-10-08 | Sufariu Diana A | Methods for configurable manufacturing and apparatus |
US7698950B2 (en) * | 2008-04-04 | 2010-04-20 | Wika Alexander Wiegand Gmbh & Co. Kg | Pressure sensor assembly for measuring absolute pressure |
US7950286B2 (en) * | 2008-12-19 | 2011-05-31 | Honeywell International Inc. | Multi-range pressure sensor apparatus and method utilizing a single sense die and multiple signal paths |
US10330513B2 (en) * | 2009-05-27 | 2019-06-25 | Honeywell International Inc. | Multi-dynamic-range sensor |
US8943900B2 (en) | 2009-10-02 | 2015-02-03 | Schlumberger Technology Corporation | Method and apparatus for differential pressure measurement |
US8082797B2 (en) | 2009-11-11 | 2011-12-27 | Honeywell International Inc. | Pressure sensor assembly |
US8393222B2 (en) | 2010-02-27 | 2013-03-12 | Codman Neuro Sciences Sárl | Apparatus and method for minimizing drift of a piezo-resistive pressure sensor due to progressive release of mechanical stress over time |
US8656772B2 (en) | 2010-03-22 | 2014-02-25 | Honeywell International Inc. | Flow sensor with pressure output signal |
US8695417B2 (en) | 2011-01-31 | 2014-04-15 | Honeywell International Inc. | Flow sensor with enhanced flow range capability |
US8770034B2 (en) | 2011-09-06 | 2014-07-08 | Honeywell International Inc. | Packaged sensor with multiple sensors elements |
US8466523B2 (en) * | 2011-10-07 | 2013-06-18 | Continental Automotive Systems, Inc. | Differential pressure sensor device |
CN102507073A (zh) * | 2011-10-27 | 2012-06-20 | 威海市天罡仪表股份有限公司 | 一种压力、压差组合测量通信实现方法 |
US9052217B2 (en) | 2012-11-09 | 2015-06-09 | Honeywell International Inc. | Variable scale sensor |
EP2824438A1 (de) * | 2013-07-12 | 2015-01-14 | Siemens Aktiengesellschaft | Drucksensor |
US9234776B2 (en) * | 2013-09-26 | 2016-01-12 | Rosemount Inc. | Multivariable process fluid transmitter for high pressure applications |
US9423315B2 (en) * | 2013-10-15 | 2016-08-23 | Rosemount Aerospace Inc. | Duplex pressure transducers |
US9593994B2 (en) | 2014-10-16 | 2017-03-14 | DunAn Sensing, LLC | Compensated pressure sensors |
JP6158846B2 (ja) * | 2015-02-17 | 2017-07-05 | トヨタ自動車株式会社 | 圧力センサ |
US10107873B2 (en) | 2016-03-10 | 2018-10-23 | Allegro Microsystems, Llc | Electronic circuit for compensating a sensitivity drift of a hall effect element due to stress |
EP3229003A1 (de) * | 2016-04-04 | 2017-10-11 | IMI Hydronic Engineering International SA | Messmodul |
US10162017B2 (en) | 2016-07-12 | 2018-12-25 | Allegro Microsystems, Llc | Systems and methods for reducing high order hall plate sensitivity temperature coefficients |
US10203255B2 (en) * | 2016-08-25 | 2019-02-12 | Measurement Specialties, Inc. | Differential pressure sensor incorporating common mode error compensation |
US10371591B2 (en) | 2016-11-11 | 2019-08-06 | Measurement Specialties, Inc. | Method and apparatus for correction of pressure sensors |
US10466125B2 (en) | 2016-11-11 | 2019-11-05 | Measurement Specialties Inc. | Pressure sensor sub assembly and fabrication |
US10260981B2 (en) * | 2017-02-06 | 2019-04-16 | Nxp Usa, Inc. | Pressure sensor having sense elements in multiple wheatstone bridges with chained outputs |
US10782315B2 (en) * | 2017-04-17 | 2020-09-22 | Rosemount Aerospace Inc. | Apparatus and method for packaging, handling or testing of sensors |
US10520559B2 (en) | 2017-08-14 | 2019-12-31 | Allegro Microsystems, Llc | Arrangements for Hall effect elements and vertical epi resistors upon a substrate |
DE102017119358A1 (de) * | 2017-08-24 | 2019-02-28 | Endress+Hauser SE+Co. KG | Modulares Feldgerät |
US10809139B2 (en) | 2018-02-14 | 2020-10-20 | Carefusion 303, Inc. | Integrated sensor to monitor fluid delivery |
CN111566463A (zh) * | 2018-02-15 | 2020-08-21 | 三美电机株式会社 | 压力传感器装置 |
EP3995802A1 (de) * | 2020-11-05 | 2022-05-11 | Melexis Technologies NV | Doppeldrucksensor |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
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US3739644A (en) * | 1972-06-30 | 1973-06-19 | Gen Electric | Linearization of differential pressure integral silicon transducer |
JPS5937716Y2 (ja) * | 1979-01-31 | 1984-10-19 | 日産自動車株式会社 | 半導体差圧センサ |
EP0049955A1 (de) * | 1980-10-09 | 1982-04-21 | General Motors Corporation | Druckaufnehmer mit zwei Kammern |
JPS5930035A (ja) * | 1982-08-13 | 1984-02-17 | Mitsubishi Electric Corp | 半導体圧力センサ |
US4565096A (en) * | 1983-12-09 | 1986-01-21 | Rosemount Inc. | Pressure transducer |
US4565097A (en) * | 1984-05-09 | 1986-01-21 | Mark Telephone Products, Inc. | Method and apparatus for transducer error cancellation |
US4644482A (en) * | 1984-12-21 | 1987-02-17 | Pressure Systems Incorporated | Digital pressure transducer and corrections circuitry system |
US4625560A (en) * | 1985-05-13 | 1986-12-02 | The Scott & Fetzer Company | Capacitive digital integrated circuit pressure transducer |
US4658651A (en) * | 1985-05-13 | 1987-04-21 | Transamerica Delaval Inc. | Wheatstone bridge-type transducers with reduced thermal shift |
US4612811A (en) * | 1985-06-14 | 1986-09-23 | Gentran, Inc. | Temperature compensating pressure gage |
US4695817A (en) * | 1985-06-26 | 1987-09-22 | Kulite Semiconductor Products, Inc. | Environmentally protected pressure transducers employing two electrically interconnected transducer arrays |
US4817022A (en) * | 1986-07-30 | 1989-03-28 | Barber-Colman Company | Method and apparatus for automatic offset compensation in parameter-sensing transducer systems |
KR920005348Y1 (ko) * | 1988-03-01 | 1992-08-03 | 미쓰비시전기주식회사 | 압력센서 |
US5029479A (en) * | 1988-08-15 | 1991-07-09 | Imo Industries, Inc. | Differential pressure transducers |
US4926674A (en) * | 1988-11-03 | 1990-05-22 | Innovex Inc. | Self-zeroing pressure signal generator |
US5095401A (en) * | 1989-01-13 | 1992-03-10 | Kopin Corporation | SOI diaphragm sensor |
US5177661A (en) * | 1989-01-13 | 1993-01-05 | Kopin Corporation | SOI diaphgram sensor |
US5490034A (en) * | 1989-01-13 | 1996-02-06 | Kopin Corporation | SOI actuators and microsensors |
US4945762A (en) * | 1989-01-24 | 1990-08-07 | Sensym, Inc. | Silicon sensor with trimmable wheatstone bridge |
US5088329A (en) * | 1990-05-07 | 1992-02-18 | Sahagen Armen N | Piezoresistive pressure transducer |
US5146788A (en) * | 1990-10-25 | 1992-09-15 | Becton, Dickinson And Company | Apparatus and method for a temperature compensation of a catheter tip pressure transducer |
US5187985A (en) * | 1991-09-19 | 1993-02-23 | Honeywell Inc. | Amplified pressure transducer |
US5329818A (en) * | 1992-05-28 | 1994-07-19 | Rosemount Inc. | Correction of a pressure indication in a pressure transducer due to variations of an environmental condition |
US5458000A (en) * | 1993-07-20 | 1995-10-17 | Honeywell Inc. | Static pressure compensation of resonant integrated microbeam sensors |
US5460049A (en) * | 1994-01-26 | 1995-10-24 | Instrumention Northwest, Inc. | Digitally-temperature-compensated strain-gauge pressure measuring apparatus |
US5471884A (en) * | 1994-07-05 | 1995-12-05 | Motorola, Inc. | Gain-adjusting circuitry for combining two sensors to form a media isolated differential pressure sensor |
US5600071A (en) * | 1995-09-05 | 1997-02-04 | Motorola, Inc. | Vertically integrated sensor structure and method |
-
1997
- 1997-07-10 US US08/891,046 patent/US6023978A/en not_active Expired - Lifetime
- 1997-07-10 DE DE69715928T patent/DE69715928T2/de not_active Expired - Lifetime
- 1997-07-10 JP JP50533798A patent/JP2001511884A/ja active Pending
- 1997-07-10 DE DE1009986T patent/DE1009986T1/de active Pending
- 1997-07-10 EP EP97932547A patent/EP1009986B1/de not_active Expired - Lifetime
- 1997-07-10 WO PCT/US1997/011907 patent/WO1998001731A1/en active IP Right Grant
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014221067A1 (de) * | 2014-10-16 | 2016-04-21 | Robert Bosch Gmbh | Drucksensor zur Erfassung eines Drucks eines fluiden Mediums |
EP3207349A1 (de) * | 2014-10-16 | 2017-08-23 | Robert Bosch GmbH | Drucksensor zur erfassung eines drucks eines fluiden mediums |
US10429259B2 (en) | 2014-10-16 | 2019-10-01 | Robert Bosch Gmbh | Pressure sensor for measuring a pressure of a fluid medium |
Also Published As
Publication number | Publication date |
---|---|
EP1009986A1 (de) | 2000-06-21 |
WO1998001731A1 (en) | 1998-01-15 |
JP2001511884A (ja) | 2001-08-14 |
DE1009986T1 (de) | 2001-05-03 |
US6023978A (en) | 2000-02-15 |
DE69715928D1 (de) | 2002-10-31 |
EP1009986B1 (de) | 2002-09-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |