DE69717538D1 - Konfokales Rastermikroskop - Google Patents
Konfokales RastermikroskopInfo
- Publication number
- DE69717538D1 DE69717538D1 DE69717538T DE69717538T DE69717538D1 DE 69717538 D1 DE69717538 D1 DE 69717538D1 DE 69717538 T DE69717538 T DE 69717538T DE 69717538 T DE69717538 T DE 69717538T DE 69717538 D1 DE69717538 D1 DE 69717538D1
- Authority
- DE
- Germany
- Prior art keywords
- scanning microscope
- confocal scanning
- confocal
- microscope
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/006—Optical details of the image generation focusing arrangements; selection of the plane to be imaged
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0028—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders specially adapted for specific applications, e.g. for endoscopes, ophthalmoscopes, attachments to conventional microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0036—Scanning details, e.g. scanning stages
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/656,668 US5880465A (en) | 1996-05-31 | 1996-05-31 | Scanning confocal microscope with oscillating objective lens |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69717538D1 true DE69717538D1 (de) | 2003-01-16 |
DE69717538T2 DE69717538T2 (de) | 2003-09-25 |
Family
ID=24634053
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69717538T Expired - Fee Related DE69717538T2 (de) | 1996-05-31 | 1997-05-20 | Konfokales Rastermikroskop |
Country Status (4)
Country | Link |
---|---|
US (1) | US5880465A (de) |
EP (1) | EP0810457B1 (de) |
JP (1) | JPH1090606A (de) |
DE (1) | DE69717538T2 (de) |
Families Citing this family (65)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19740678A1 (de) * | 1997-09-16 | 1999-03-18 | Polytec Gmbh | Vorrichtung zur berührungslosen Schwingungsmessung |
US6201639B1 (en) * | 1998-03-20 | 2001-03-13 | James W. Overbeck | Wide field of view and high speed scanning microscopy |
US20030036855A1 (en) | 1998-03-16 | 2003-02-20 | Praelux Incorporated, A Corporation Of New Jersey | Method and apparatus for screening chemical compounds |
IL138496A0 (en) * | 1998-03-16 | 2001-10-31 | Praelux Inc | Confocal microscopy imaging system |
US6185030B1 (en) | 1998-03-20 | 2001-02-06 | James W. Overbeck | Wide field of view and high speed scanning microscopy |
US6472671B1 (en) | 2000-02-09 | 2002-10-29 | Jean I. Montagu | Quantified fluorescence microscopy |
US6545264B1 (en) * | 1998-10-30 | 2003-04-08 | Affymetrix, Inc. | Systems and methods for high performance scanning |
EP1145066B1 (de) * | 1998-12-21 | 2005-03-02 | Evotec OAI AG | Positionierung des messvolumens in einem scanning-mikroskopischen verfahren |
US6181474B1 (en) | 1999-03-22 | 2001-01-30 | Kovex Corporation | Scanning confocal microscope with objective lens position tracking |
US6548796B1 (en) * | 1999-06-23 | 2003-04-15 | Regents Of The University Of Minnesota | Confocal macroscope |
JP2003507777A (ja) * | 1999-08-26 | 2003-02-25 | アフィメトリックス インコーポレイテッド | 高性能走査を行う装置及び方法 |
JP4337999B2 (ja) * | 1999-09-14 | 2009-09-30 | ソニー株式会社 | 焦点位置制御機構及び方法、並びに、半導体ウェハの検査装置及び方法 |
JP2001082925A (ja) * | 1999-09-14 | 2001-03-30 | Sony Corp | 紫外光の焦点位置制御機構及び方法、並びに、検査装置及び方法 |
US6555802B2 (en) * | 2000-01-07 | 2003-04-29 | Axon Instruments, Inc. | Scanning microscope |
US6809812B2 (en) * | 2000-06-16 | 2004-10-26 | Spectracode, Inc. | Spectral analysis system with moving objective lens |
DE10148188A1 (de) | 2001-09-28 | 2003-04-17 | Leica Mikroskopie & Syst | Mikroskop mit kontrasterhöhender Bildaufnahmevorrichtung |
JP3678192B2 (ja) * | 2001-11-21 | 2005-08-03 | 横河電機株式会社 | 計測装置 |
US20030222143A1 (en) * | 2002-06-04 | 2003-12-04 | Mitchell Phillip V. | Precision laser scan head |
US7072103B1 (en) * | 2002-09-27 | 2006-07-04 | Cypress Semiconductor Corporation | Microscope with objective lens position control apparatus |
US6859312B1 (en) | 2002-09-27 | 2005-02-22 | Cypress Semiconductor Corporation | Bellows zoom microscope |
US7092153B1 (en) | 2002-09-27 | 2006-08-15 | Cypress Semiconductor Corporation | Temperature-controlled gas microscope |
WO2004034894A1 (en) | 2002-10-16 | 2004-04-29 | Campbell Science Group, Inc. | Cornea characteristics measuring device |
DE10394067D2 (de) * | 2002-11-18 | 2005-10-06 | Nanofocus Ag | Verfahren zur Verbesserung des Signal-Rausch-Verhältnisses bei konfokalen Mikroskopen mit Multi-Pinhole Filterung |
CA2510617A1 (en) * | 2002-12-23 | 2004-07-15 | Christian A. Tahan | Method and apparatus for the production of energy |
US7162300B2 (en) * | 2003-01-13 | 2007-01-09 | Medtronic, Inc. | Synchronized atrial anti-tachy pacing system and method |
JP4209709B2 (ja) * | 2003-03-20 | 2009-01-14 | 株式会社キーエンス | 変位計 |
JP2005114708A (ja) * | 2003-09-19 | 2005-04-28 | Keyence Corp | 光学式変位計とそれを用いた粘性液体の塗布断面積の測定方法 |
GB2407378B (en) | 2003-10-24 | 2006-09-06 | Lein Applied Diagnostics Ltd | Ocular property measuring apparatus and method therefor |
GB2409033C (en) * | 2003-12-12 | 2006-05-24 | Lein Applied Diagnostics Ltd | Extended focal region measuring apparatus and method |
US7375326B2 (en) * | 2004-06-21 | 2008-05-20 | Applied Materials, Israel, Ltd. | Method and system for focusing a charged particle beam |
DE502004002547D1 (de) * | 2004-06-22 | 2007-02-15 | Polytec Gmbh | Vorrichtung zum optischen Vermessen eines Objektes |
US7224521B2 (en) * | 2004-09-13 | 2007-05-29 | Cytyc Corporation | Parcentric objective |
US8231098B2 (en) | 2004-12-07 | 2012-07-31 | Newport Corporation | Methods and devices for active vibration damping of an optical structure |
DE102004053905B4 (de) * | 2004-11-05 | 2007-10-11 | My Optical Systems Gmbh | Verfahren zur berührungslosen Erfassung von geometrischen Eigenschaften einer Objektoberfläche |
US7609440B2 (en) * | 2004-11-10 | 2009-10-27 | Olympus Corporation | In-vivo examination apparatus |
JP4999279B2 (ja) * | 2005-03-09 | 2012-08-15 | スカラ株式会社 | 拡大用アタッチメント |
JP2006284196A (ja) * | 2005-03-31 | 2006-10-19 | Sanyo Electric Co Ltd | ビーム照射装置 |
GB2441162B (en) * | 2006-08-23 | 2011-03-16 | Shiv Kumar Sharma | Three-dimensional image display apparatus |
EP2076809A1 (de) * | 2006-10-24 | 2009-07-08 | Koninklijke Philips Electronics N.V. | System zur abbildung eines objekts |
US20080212078A1 (en) * | 2006-12-27 | 2008-09-04 | Suss Micro Tec Test Systems Gmbh | Arrangement and method for focusing a multiplane image acquisition on a prober |
US7692785B2 (en) * | 2007-03-29 | 2010-04-06 | General Electric Company | System and method for optical power management |
GB0707433D0 (en) * | 2007-04-18 | 2007-05-23 | Stfc Science & Technology | Fluorescence measurement |
US9018561B2 (en) * | 2007-05-23 | 2015-04-28 | Cymer, Llc | High power seed/amplifier laser system with beam shaping intermediate the seed and amplifier |
JP5160826B2 (ja) | 2007-07-19 | 2013-03-13 | 株式会社トプコン | 角膜観察装置 |
GB2451441B (en) | 2007-07-30 | 2012-07-11 | Lein Applied Diagnostics Ltd | Optical alignment apparatus and method thereof |
GB2451443B (en) | 2007-07-30 | 2012-12-26 | Lein Applied Diagnostics Ltd | Optical measurement apparatus and method therefor |
GB2457302B (en) | 2008-02-11 | 2013-04-10 | Lein Applied Diagnostics Ltd | Measurement apparatus and method therefor |
HUP0800433A2 (en) * | 2008-07-15 | 2010-03-01 | Femtonics Kft | Laser scanning microscope for scanning along a 3d trajectory |
US8374818B2 (en) * | 2008-12-19 | 2013-02-12 | Affymetrix, Inc. | System, method and apparatus for calibrating inspection tools |
US20110028949A1 (en) * | 2009-07-29 | 2011-02-03 | Lensx Lasers, Inc. | Optical System for Ophthalmic Surgical Laser |
DE102010007729A1 (de) | 2010-02-12 | 2011-08-18 | Leica Microsystems CMS GmbH, 35578 | Vorrichtung zum Scannen eines Objekts, Verfahren zum Betreiben der Vorrichtung und Scanmikroskop |
EP2579084B1 (de) * | 2010-06-03 | 2023-11-08 | Nikon Corporation | Mikroskopvorrichtung |
DE102011121928B4 (de) * | 2011-08-01 | 2015-03-05 | Physik Instrumente (Pi) Gmbh & Co. Kg | Anordnung zum Betreiben eines dynamischen Nanofokussiersystems |
JP6243110B2 (ja) * | 2012-10-15 | 2017-12-06 | アストロデザイン株式会社 | レーザー走査顕微鏡装置 |
JP6148852B2 (ja) * | 2012-12-25 | 2017-06-14 | アイシン・エィ・ダブリュ株式会社 | 内径測定装置 |
JP6043623B2 (ja) * | 2012-12-25 | 2016-12-14 | アイシン・エィ・ダブリュ株式会社 | 内径測定装置 |
DE102013012941A1 (de) | 2013-07-31 | 2015-02-05 | Johannes Kindt | Langreichweitiger Mehrachsen-Scanner im Mikroskop-Objektivformat |
JP2015125177A (ja) | 2013-12-25 | 2015-07-06 | ソニー株式会社 | 顕微鏡システムおよびその画像データ転送方法 |
JP6171970B2 (ja) | 2014-02-10 | 2017-08-02 | ソニー株式会社 | レーザ走査型顕微鏡装置および制御方法 |
CZ2014184A3 (cs) * | 2014-03-26 | 2015-08-26 | Tescan Orsay Holding, A.S. | Analytický systém s Ramanovým mikroskopem a elektronovým mikroskopem |
JP7245051B2 (ja) | 2016-03-08 | 2023-03-23 | エンスペクトラ・ヘルス・インコーポレイテッド | 皮膚の疾患の非侵襲的な検出 |
WO2018201082A1 (en) | 2017-04-28 | 2018-11-01 | Zebra Medical Technologies, Inc. | Systems and methods for imaging and measurement of sarcomeres |
US10976562B2 (en) * | 2017-10-10 | 2021-04-13 | Kla Corporation | Nano-structured non-polarizing beamsplitter |
US11933729B2 (en) * | 2020-08-07 | 2024-03-19 | Abberior Instruments Gmbh | Method, computer program, and apparatus for adapting an estimator for use in a microscope |
CN113566716B (zh) * | 2021-08-27 | 2023-04-28 | 西安应用光学研究所 | 振动环境下反射镜组件微小相对位移测量装置及测量方法 |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3536700C3 (de) * | 1985-10-15 | 1994-07-07 | Focus Mestechnik Gmbh & Co Kg | Gerät zum Ermitteln des lokalen Abstandes einer Prüffläche von einer Referenzfläche, deren geometrische Lage in bezug auf das Gerät bekannt ist |
US4815058A (en) * | 1985-10-21 | 1989-03-21 | Hitachi, Ltd. | Optical information processing apparatus |
GB8625054D0 (en) * | 1986-10-20 | 1986-11-26 | Renishaw Plc | Optical measuring probe |
GB8625053D0 (en) * | 1986-10-20 | 1986-11-26 | Renishaw Plc | Optical probe |
DE3635840A1 (de) * | 1986-10-22 | 1988-05-05 | Thomson Brandt Gmbh | Mit strahlen abtastendes abtastsystem |
NL8700148A (nl) * | 1987-01-21 | 1988-08-16 | Stichting Tech Wetenschapp | Inrichting voor het focusseren van electro-magnetische golven of geluid. |
DE3720079A1 (de) * | 1987-06-16 | 1988-12-29 | Breitmeier Ulrich | Optischer abtastkopf |
US5003400A (en) * | 1987-08-19 | 1991-03-26 | Hitachi, Ltd. | Focusing apparatus of video camera or the like |
GB8724575D0 (en) * | 1987-10-20 | 1987-11-25 | Renishaw Plc | Focus detection system |
DE3800427C2 (de) * | 1988-01-09 | 1997-05-28 | Breitmeier Ulrich | Gerät zum Ermitteln des Abstands eines auf einer Prüffläche liegenden Prüfpunktes von einer Referenzfläche |
US4863252A (en) * | 1988-02-11 | 1989-09-05 | Tracor Northern, Inc. | Objective lens positioning system for confocal tandem scanning reflected light microscope |
US5144477A (en) * | 1988-04-11 | 1992-09-01 | Medical Research Council | Method of operating a scanning confocal imaging system |
US5032720A (en) * | 1988-04-21 | 1991-07-16 | White John G | Confocal imaging system |
JPH0378720A (ja) * | 1989-08-22 | 1991-04-03 | Nikon Corp | 共焦点型レーザ走査顕微鏡 |
US5084612A (en) * | 1989-10-20 | 1992-01-28 | Fuji Photo Film Co., Ltd. | Imaging method for scanning microscopes, and confocal scanning microscope |
DE3938113C2 (de) * | 1989-11-16 | 1994-11-03 | Focus Mestechnik Gmbh & Co Kg | Optisches Dickenmeßgerät für transparente Werkstücke |
US5035476A (en) * | 1990-06-15 | 1991-07-30 | Hamamatsu Photonics K.K. | Confocal laser scanning transmission microscope |
DE4019405A1 (de) * | 1990-06-18 | 1991-12-19 | Focus Messtechnik Gmbh & Co Kg | Optischer abtastkopf |
DE4020527A1 (de) * | 1990-06-28 | 1992-01-09 | Focus Messtechnik Gmbh & Co Kg | Optische messmaschine |
GB9016632D0 (en) * | 1990-07-28 | 1990-09-12 | Medical Res Council | Confocal imaging system for microscopy |
US5177512A (en) * | 1990-10-25 | 1993-01-05 | Konan Camera Research Institute Inc. | Eyeball microscope |
US5162641A (en) * | 1991-02-19 | 1992-11-10 | Phoenix Laser Systems, Inc. | System and method for detecting, correcting and measuring depth movement of target tissue in a laser surgical system |
US5162941A (en) * | 1991-07-23 | 1992-11-10 | The Board Of Governors Of Wayne State University | Confocal microscope |
JPH0527177A (ja) * | 1991-07-25 | 1993-02-05 | Fuji Photo Film Co Ltd | 走査型顕微鏡 |
JPH05203878A (ja) * | 1992-01-27 | 1993-08-13 | Jeol Ltd | 走査型レーザー顕微鏡 |
US5225923A (en) * | 1992-07-09 | 1993-07-06 | General Scanning, Inc. | Scanning microscope employing improved scanning mechanism |
JP3267685B2 (ja) * | 1992-07-28 | 2002-03-18 | セイコーインスツルメンツ株式会社 | 微細表面観察装置 |
US5283433A (en) * | 1992-10-05 | 1994-02-01 | The Regents Of The University Of California | Scanning confocal microscope providing a continuous display |
GB2273994A (en) * | 1992-12-18 | 1994-07-06 | Morphometrix Inc | Process microscopy system |
US5483055A (en) * | 1994-01-18 | 1996-01-09 | Thompson; Timothy V. | Method and apparatus for performing an automatic focus operation for a microscope |
IL107549A (en) * | 1993-11-09 | 1996-01-31 | Nova Measuring Instr Ltd | Device for measuring the thickness of thin films |
US5506725A (en) * | 1994-12-28 | 1996-04-09 | Koike Seiki Co., Ltd. | Transmission type confocal laser microscope |
-
1996
- 1996-05-31 US US08/656,668 patent/US5880465A/en not_active Expired - Fee Related
-
1997
- 1997-05-20 EP EP97303485A patent/EP0810457B1/de not_active Expired - Lifetime
- 1997-05-20 DE DE69717538T patent/DE69717538T2/de not_active Expired - Fee Related
- 1997-06-02 JP JP9143983A patent/JPH1090606A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US5880465A (en) | 1999-03-09 |
EP0810457B1 (de) | 2002-12-04 |
JPH1090606A (ja) | 1998-04-10 |
DE69717538T2 (de) | 2003-09-25 |
EP0810457A1 (de) | 1997-12-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |