DE69717538T2 - Konfokales Rastermikroskop - Google Patents

Konfokales Rastermikroskop

Info

Publication number
DE69717538T2
DE69717538T2 DE69717538T DE69717538T DE69717538T2 DE 69717538 T2 DE69717538 T2 DE 69717538T2 DE 69717538 T DE69717538 T DE 69717538T DE 69717538 T DE69717538 T DE 69717538T DE 69717538 T2 DE69717538 T2 DE 69717538T2
Authority
DE
Germany
Prior art keywords
scanning microscope
confocal scanning
confocal
microscope
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69717538T
Other languages
English (en)
Other versions
DE69717538D1 (de
Inventor
Matthew C Boettner
Steven J Ouderkirk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kovex Corp
Original Assignee
Kovex Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kovex Corp filed Critical Kovex Corp
Application granted granted Critical
Publication of DE69717538D1 publication Critical patent/DE69717538D1/de
Publication of DE69717538T2 publication Critical patent/DE69717538T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052Optical details of the image generation
    • G02B21/006Optical details of the image generation focusing arrangements; selection of the plane to be imaged
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0028Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders specially adapted for specific applications, e.g. for endoscopes, ophthalmoscopes, attachments to conventional microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036Scanning details, e.g. scanning stages
DE69717538T 1996-05-31 1997-05-20 Konfokales Rastermikroskop Expired - Fee Related DE69717538T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/656,668 US5880465A (en) 1996-05-31 1996-05-31 Scanning confocal microscope with oscillating objective lens

Publications (2)

Publication Number Publication Date
DE69717538D1 DE69717538D1 (de) 2003-01-16
DE69717538T2 true DE69717538T2 (de) 2003-09-25

Family

ID=24634053

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69717538T Expired - Fee Related DE69717538T2 (de) 1996-05-31 1997-05-20 Konfokales Rastermikroskop

Country Status (4)

Country Link
US (1) US5880465A (de)
EP (1) EP0810457B1 (de)
JP (1) JPH1090606A (de)
DE (1) DE69717538T2 (de)

Families Citing this family (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19740678A1 (de) * 1997-09-16 1999-03-18 Polytec Gmbh Vorrichtung zur berührungslosen Schwingungsmessung
US6201639B1 (en) * 1998-03-20 2001-03-13 James W. Overbeck Wide field of view and high speed scanning microscopy
KR100560588B1 (ko) * 1998-03-16 2006-03-16 에머샘 바이오사이언시즈 코프 공초점 마이크로스코피 영상 시스템
US20030036855A1 (en) 1998-03-16 2003-02-20 Praelux Incorporated, A Corporation Of New Jersey Method and apparatus for screening chemical compounds
US6185030B1 (en) * 1998-03-20 2001-02-06 James W. Overbeck Wide field of view and high speed scanning microscopy
US6472671B1 (en) 2000-02-09 2002-10-29 Jean I. Montagu Quantified fluorescence microscopy
US6545264B1 (en) * 1998-10-30 2003-04-08 Affymetrix, Inc. Systems and methods for high performance scanning
WO2000037984A2 (de) * 1998-12-21 2000-06-29 Evotec Biosystems Ag Positionierung des messvolumens in einem scanning-mikroskopischen verfahren
US6181474B1 (en) 1999-03-22 2001-01-30 Kovex Corporation Scanning confocal microscope with objective lens position tracking
US6548796B1 (en) 1999-06-23 2003-04-15 Regents Of The University Of Minnesota Confocal macroscope
EP1218915A4 (de) * 1999-08-26 2002-10-09 Affymetrix Inc Systeme und verfahren zur hochleistungsrasterung
JP4337999B2 (ja) * 1999-09-14 2009-09-30 ソニー株式会社 焦点位置制御機構及び方法、並びに、半導体ウェハの検査装置及び方法
JP2001082925A (ja) * 1999-09-14 2001-03-30 Sony Corp 紫外光の焦点位置制御機構及び方法、並びに、検査装置及び方法
GB2360162B (en) * 2000-01-07 2004-06-02 Axon Instr Inc Scanning microscope
US6809812B2 (en) * 2000-06-16 2004-10-26 Spectracode, Inc. Spectral analysis system with moving objective lens
DE10148188A1 (de) 2001-09-28 2003-04-17 Leica Mikroskopie & Syst Mikroskop mit kontrasterhöhender Bildaufnahmevorrichtung
JP3678192B2 (ja) * 2001-11-21 2005-08-03 横河電機株式会社 計測装置
US20030222143A1 (en) * 2002-06-04 2003-12-04 Mitchell Phillip V. Precision laser scan head
US6859312B1 (en) 2002-09-27 2005-02-22 Cypress Semiconductor Corporation Bellows zoom microscope
US7072103B1 (en) * 2002-09-27 2006-07-04 Cypress Semiconductor Corporation Microscope with objective lens position control apparatus
US7092153B1 (en) 2002-09-27 2006-08-15 Cypress Semiconductor Corporation Temperature-controlled gas microscope
AU2003284141A1 (en) 2002-10-16 2004-05-04 Campbell Science Group, Inc. Cornea characteristics measuring device
DE10394067D2 (de) * 2002-11-18 2005-10-06 Nanofocus Ag Verfahren zur Verbesserung des Signal-Rausch-Verhältnisses bei konfokalen Mikroskopen mit Multi-Pinhole Filterung
US20060029178A1 (en) * 2002-12-23 2006-02-09 Tahan A C Method and apparatus for the production of energy
US7162300B2 (en) * 2003-01-13 2007-01-09 Medtronic, Inc. Synchronized atrial anti-tachy pacing system and method
JP4209709B2 (ja) * 2003-03-20 2009-01-14 株式会社キーエンス 変位計
JP2005114708A (ja) * 2003-09-19 2005-04-28 Keyence Corp 光学式変位計とそれを用いた粘性液体の塗布断面積の測定方法
GB2407378B (en) 2003-10-24 2006-09-06 Lein Applied Diagnostics Ltd Ocular property measuring apparatus and method therefor
GB2409033B (en) * 2003-12-12 2006-05-24 Lein Applied Diagnostics Ltd Extended focal region measuring apparatus and method
US7375326B2 (en) * 2004-06-21 2008-05-20 Applied Materials, Israel, Ltd. Method and system for focusing a charged particle beam
EP1610088B1 (de) * 2004-06-22 2007-01-03 Polytec GmbH Vorrichtung zum optischen Vermessen eines Objektes
US7224521B2 (en) * 2004-09-13 2007-05-29 Cytyc Corporation Parcentric objective
US8231098B2 (en) * 2004-12-07 2012-07-31 Newport Corporation Methods and devices for active vibration damping of an optical structure
DE102004053905B4 (de) * 2004-11-05 2007-10-11 My Optical Systems Gmbh Verfahren zur berührungslosen Erfassung von geometrischen Eigenschaften einer Objektoberfläche
US7609440B2 (en) * 2004-11-10 2009-10-27 Olympus Corporation In-vivo examination apparatus
JP4999279B2 (ja) * 2005-03-09 2012-08-15 スカラ株式会社 拡大用アタッチメント
JP2006284196A (ja) * 2005-03-31 2006-10-19 Sanyo Electric Co Ltd ビーム照射装置
GB2441162B (en) * 2006-08-23 2011-03-16 Shiv Kumar Sharma Three-dimensional image display apparatus
JP2010507828A (ja) * 2006-10-24 2010-03-11 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 物体を結像させるためのシステム
US20080212078A1 (en) * 2006-12-27 2008-09-04 Suss Micro Tec Test Systems Gmbh Arrangement and method for focusing a multiplane image acquisition on a prober
US7692785B2 (en) * 2007-03-29 2010-04-06 General Electric Company System and method for optical power management
GB0707433D0 (en) * 2007-04-18 2007-05-23 Stfc Science & Technology Fluorescence measurement
US9018561B2 (en) * 2007-05-23 2015-04-28 Cymer, Llc High power seed/amplifier laser system with beam shaping intermediate the seed and amplifier
JP5160826B2 (ja) 2007-07-19 2013-03-13 株式会社トプコン 角膜観察装置
GB2451441B (en) 2007-07-30 2012-07-11 Lein Applied Diagnostics Ltd Optical alignment apparatus and method thereof
GB2451443B (en) 2007-07-30 2012-12-26 Lein Applied Diagnostics Ltd Optical measurement apparatus and method therefor
GB2457302B (en) 2008-02-11 2013-04-10 Lein Applied Diagnostics Ltd Measurement apparatus and method therefor
HUP0800433A2 (en) * 2008-07-15 2010-03-01 Femtonics Kft Laser scanning microscope for scanning along a 3d trajectory
US8374818B2 (en) * 2008-12-19 2013-02-12 Affymetrix, Inc. System, method and apparatus for calibrating inspection tools
US8419721B2 (en) * 2009-07-29 2013-04-16 Alcon Lensx, Inc. Optical system for ophthalmic surgical laser
DE102010007729A1 (de) 2010-02-12 2011-08-18 Leica Microsystems CMS GmbH, 35578 Vorrichtung zum Scannen eines Objekts, Verfahren zum Betreiben der Vorrichtung und Scanmikroskop
CN102934005B (zh) * 2010-06-03 2016-06-15 株式会社尼康 显微镜装置
DE102011121928B4 (de) * 2011-08-01 2015-03-05 Physik Instrumente (Pi) Gmbh & Co. Kg Anordnung zum Betreiben eines dynamischen Nanofokussiersystems
JP6243110B2 (ja) * 2012-10-15 2017-12-06 アストロデザイン株式会社 レーザー走査顕微鏡装置
JP6043623B2 (ja) * 2012-12-25 2016-12-14 アイシン・エィ・ダブリュ株式会社 内径測定装置
JP6148852B2 (ja) * 2012-12-25 2017-06-14 アイシン・エィ・ダブリュ株式会社 内径測定装置
DE102013012941A1 (de) 2013-07-31 2015-02-05 Johannes Kindt Langreichweitiger Mehrachsen-Scanner im Mikroskop-Objektivformat
JP2015125177A (ja) 2013-12-25 2015-07-06 ソニー株式会社 顕微鏡システムおよびその画像データ転送方法
JP6171970B2 (ja) 2014-02-10 2017-08-02 ソニー株式会社 レーザ走査型顕微鏡装置および制御方法
CZ2014184A3 (cs) * 2014-03-26 2015-08-26 Tescan Orsay Holding, A.S. Analytický systém s Ramanovým mikroskopem a elektronovým mikroskopem
CN115919266A (zh) * 2016-03-08 2023-04-07 恩斯派克特拉健康公司 皮肤疾病的非侵入式检测
WO2018201082A1 (en) 2017-04-28 2018-11-01 Zebra Medical Technologies, Inc. Systems and methods for imaging and measurement of sarcomeres
US10976562B2 (en) * 2017-10-10 2021-04-13 Kla Corporation Nano-structured non-polarizing beamsplitter
US11933729B2 (en) * 2020-08-07 2024-03-19 Abberior Instruments Gmbh Method, computer program, and apparatus for adapting an estimator for use in a microscope
CN113566716B (zh) * 2021-08-27 2023-04-28 西安应用光学研究所 振动环境下反射镜组件微小相对位移测量装置及测量方法

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3536700C3 (de) * 1985-10-15 1994-07-07 Focus Mestechnik Gmbh & Co Kg Gerät zum Ermitteln des lokalen Abstandes einer Prüffläche von einer Referenzfläche, deren geometrische Lage in bezug auf das Gerät bekannt ist
US4815058A (en) * 1985-10-21 1989-03-21 Hitachi, Ltd. Optical information processing apparatus
GB8625053D0 (en) * 1986-10-20 1986-11-26 Renishaw Plc Optical probe
GB8625054D0 (en) * 1986-10-20 1986-11-26 Renishaw Plc Optical measuring probe
DE3635840A1 (de) * 1986-10-22 1988-05-05 Thomson Brandt Gmbh Mit strahlen abtastendes abtastsystem
NL8700148A (nl) * 1987-01-21 1988-08-16 Stichting Tech Wetenschapp Inrichting voor het focusseren van electro-magnetische golven of geluid.
DE3720079A1 (de) * 1987-06-16 1988-12-29 Breitmeier Ulrich Optischer abtastkopf
US5003400A (en) * 1987-08-19 1991-03-26 Hitachi, Ltd. Focusing apparatus of video camera or the like
GB8724575D0 (en) * 1987-10-20 1987-11-25 Renishaw Plc Focus detection system
DE3800427C2 (de) * 1988-01-09 1997-05-28 Breitmeier Ulrich Gerät zum Ermitteln des Abstands eines auf einer Prüffläche liegenden Prüfpunktes von einer Referenzfläche
US4863252A (en) * 1988-02-11 1989-09-05 Tracor Northern, Inc. Objective lens positioning system for confocal tandem scanning reflected light microscope
US5144477A (en) * 1988-04-11 1992-09-01 Medical Research Council Method of operating a scanning confocal imaging system
US5032720A (en) * 1988-04-21 1991-07-16 White John G Confocal imaging system
JPH0378720A (ja) * 1989-08-22 1991-04-03 Nikon Corp 共焦点型レーザ走査顕微鏡
US5084612A (en) * 1989-10-20 1992-01-28 Fuji Photo Film Co., Ltd. Imaging method for scanning microscopes, and confocal scanning microscope
DE3938113C2 (de) * 1989-11-16 1994-11-03 Focus Mestechnik Gmbh & Co Kg Optisches Dickenmeßgerät für transparente Werkstücke
US5035476A (en) * 1990-06-15 1991-07-30 Hamamatsu Photonics K.K. Confocal laser scanning transmission microscope
DE4019405A1 (de) * 1990-06-18 1991-12-19 Focus Messtechnik Gmbh & Co Kg Optischer abtastkopf
DE4020527A1 (de) * 1990-06-28 1992-01-09 Focus Messtechnik Gmbh & Co Kg Optische messmaschine
GB9016632D0 (en) * 1990-07-28 1990-09-12 Medical Res Council Confocal imaging system for microscopy
US5177512A (en) * 1990-10-25 1993-01-05 Konan Camera Research Institute Inc. Eyeball microscope
US5162641A (en) * 1991-02-19 1992-11-10 Phoenix Laser Systems, Inc. System and method for detecting, correcting and measuring depth movement of target tissue in a laser surgical system
US5162941A (en) * 1991-07-23 1992-11-10 The Board Of Governors Of Wayne State University Confocal microscope
JPH0527177A (ja) * 1991-07-25 1993-02-05 Fuji Photo Film Co Ltd 走査型顕微鏡
JPH05203878A (ja) * 1992-01-27 1993-08-13 Jeol Ltd 走査型レーザー顕微鏡
US5225923A (en) * 1992-07-09 1993-07-06 General Scanning, Inc. Scanning microscope employing improved scanning mechanism
JP3267685B2 (ja) * 1992-07-28 2002-03-18 セイコーインスツルメンツ株式会社 微細表面観察装置
US5283433A (en) * 1992-10-05 1994-02-01 The Regents Of The University Of California Scanning confocal microscope providing a continuous display
GB2273994A (en) * 1992-12-18 1994-07-06 Morphometrix Inc Process microscopy system
US5483055A (en) * 1994-01-18 1996-01-09 Thompson; Timothy V. Method and apparatus for performing an automatic focus operation for a microscope
IL107549A (en) * 1993-11-09 1996-01-31 Nova Measuring Instr Ltd Device for measuring the thickness of thin films
US5506725A (en) * 1994-12-28 1996-04-09 Koike Seiki Co., Ltd. Transmission type confocal laser microscope

Also Published As

Publication number Publication date
EP0810457A1 (de) 1997-12-03
EP0810457B1 (de) 2002-12-04
JPH1090606A (ja) 1998-04-10
DE69717538D1 (de) 2003-01-16
US5880465A (en) 1999-03-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee