DE69728791D1 - Verfahren zur herstellung von glasgegenständen mit optischer qualität - Google Patents
Verfahren zur herstellung von glasgegenständen mit optischer qualitätInfo
- Publication number
- DE69728791D1 DE69728791D1 DE69728791T DE69728791T DE69728791D1 DE 69728791 D1 DE69728791 D1 DE 69728791D1 DE 69728791 T DE69728791 T DE 69728791T DE 69728791 T DE69728791 T DE 69728791T DE 69728791 D1 DE69728791 D1 DE 69728791D1
- Authority
- DE
- Germany
- Prior art keywords
- optical quality
- producing glass
- glass items
- items
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/02—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
- B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
- B24D3/344—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent the bonding agent being organic
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/778,501 US5876268A (en) | 1997-01-03 | 1997-01-03 | Method and article for the production of optical quality surfaces on glass |
| PCT/US1997/023795 WO1998029217A1 (en) | 1997-01-03 | 1997-12-22 | Method and article for the production of optical quality surfaces on glass |
| US778501 | 2004-02-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69728791D1 true DE69728791D1 (de) | 2004-05-27 |
| DE69728791T2 DE69728791T2 (de) | 2005-04-28 |
Family
ID=25113558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69728791T Expired - Fee Related DE69728791T2 (de) | 1997-01-03 | 1997-12-22 | Verfahren zur herstellung von glasoberflächen mit optischer qualität |
Country Status (9)
| Country | Link |
|---|---|
| US (3) | US5876268A (de) |
| EP (1) | EP0949986B1 (de) |
| JP (1) | JP2001507634A (de) |
| KR (1) | KR100483090B1 (de) |
| AU (1) | AU5618498A (de) |
| DE (1) | DE69728791T2 (de) |
| MY (1) | MY117614A (de) |
| TW (1) | TW404878B (de) |
| WO (1) | WO1998029217A1 (de) |
Families Citing this family (99)
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| US6599631B2 (en) | 2001-01-26 | 2003-07-29 | Nanogram Corporation | Polymer-inorganic particle composites |
| US5989301A (en) | 1998-02-18 | 1999-11-23 | Saint-Gobain Industrial Ceramics, Inc. | Optical polishing formulation |
| JP2002503559A (ja) * | 1998-02-19 | 2002-02-05 | ミネソタ マイニング アンド マニュファクチャリング カンパニー | ガラス研削用研磨製品および方法 |
| US5897426A (en) | 1998-04-24 | 1999-04-27 | Applied Materials, Inc. | Chemical mechanical polishing with multiple polishing pads |
| US6099389A (en) * | 1998-10-05 | 2000-08-08 | The United States Of America As Represented By The United States Department Of Energy | Fabrication of an optical component |
| US6296557B1 (en) * | 1999-04-02 | 2001-10-02 | Micron Technology, Inc. | Method and apparatus for releasably attaching polishing pads to planarizing machines in mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies |
| US6634929B1 (en) * | 1999-04-23 | 2003-10-21 | 3M Innovative Properties Company | Method for grinding glass |
| US6458018B1 (en) * | 1999-04-23 | 2002-10-01 | 3M Innovative Properties Company | Abrasive article suitable for abrading glass and glass ceramic workpieces |
| KR20060101791A (ko) * | 1999-04-23 | 2006-09-26 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | 유리를 연삭하는 방법 |
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| US6306012B1 (en) * | 1999-07-20 | 2001-10-23 | Micron Technology, Inc. | Methods and apparatuses for planarizing microelectronic substrate assemblies |
| WO2001017006A1 (fr) * | 1999-08-26 | 2001-03-08 | Hitachi Chemical Company, Ltd. | Compose de polissage chimiomecanique et procede de polissage |
| US6406363B1 (en) * | 1999-08-31 | 2002-06-18 | Lam Research Corporation | Unsupported chemical mechanical polishing belt |
| US6638144B2 (en) | 2000-04-28 | 2003-10-28 | 3M Innovative Properties Company | Method of cleaning glass |
| KR100373846B1 (ko) * | 2000-06-12 | 2003-02-26 | 지앤피테크놀로지 주식회사 | 반도체 및 광학부품용 연마패드 및 그 제조방법 |
| US6964604B2 (en) * | 2000-06-23 | 2005-11-15 | International Business Machines Corporation | Fiber embedded polishing pad |
| US6383066B1 (en) | 2000-06-23 | 2002-05-07 | International Business Machines Corporation | Multilayered polishing pad, method for fabricating, and use thereof |
| US6477926B1 (en) * | 2000-09-15 | 2002-11-12 | Ppg Industries Ohio, Inc. | Polishing pad |
| EP1770142A3 (de) | 2000-10-06 | 2008-05-07 | 3M Innovative Properties Company | Verfahren zur Herstellung agglomerierter abrasiver Partikel |
| AU2001296702A1 (en) | 2000-10-16 | 2002-04-29 | 3M Innovative Properties Company | Method of making ceramic aggregate particles |
| US6551366B1 (en) * | 2000-11-10 | 2003-04-22 | 3M Innovative Properties Company | Spray drying methods of making agglomerate abrasive grains and abrasive articles |
| US6572463B1 (en) * | 2000-12-27 | 2003-06-03 | Lam Research Corp. | Methods for making reinforced wafer polishing pads utilizing direct casting and apparatuses implementing the same |
| US6561889B1 (en) | 2000-12-27 | 2003-05-13 | Lam Research Corporation | Methods for making reinforced wafer polishing pads and apparatuses implementing the same |
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| US6620031B2 (en) * | 2001-04-04 | 2003-09-16 | Lam Research Corporation | Method for optimizing the planarizing length of a polishing pad |
| US6604990B2 (en) * | 2001-08-31 | 2003-08-12 | Universal Photonics Inc. | Polishing pad and method of producing the same |
| US6685756B2 (en) * | 2001-09-24 | 2004-02-03 | Saint-Gobain Abrasives Technology Company | Coated abrasives |
| GB0123089D0 (en) * | 2001-09-26 | 2001-11-14 | Coombes James E | Door dressing tool |
| US6827633B2 (en) * | 2001-12-28 | 2004-12-07 | Ebara Corporation | Polishing method |
| US20050054277A1 (en) * | 2003-09-04 | 2005-03-10 | Teng-Chun Tsai | Polishing pad and method of polishing wafer |
| WO2005053904A1 (en) * | 2003-11-26 | 2005-06-16 | 3M Innovative Properties Company | Method of abrading a workpiece |
| US7988534B1 (en) * | 2004-05-19 | 2011-08-02 | Sutton Stephen P | Optical polishing pitch formulations |
| US7198549B2 (en) * | 2004-06-16 | 2007-04-03 | Cabot Microelectronics Corporation | Continuous contour polishing of a multi-material surface |
| US7150770B2 (en) * | 2004-06-18 | 2006-12-19 | 3M Innovative Properties Company | Coated abrasive article with tie layer, and method of making and using the same |
| US20050282029A1 (en) * | 2004-06-18 | 2005-12-22 | 3M Innovative Properties Company | Polymerizable composition and articles therefrom |
| US7150771B2 (en) * | 2004-06-18 | 2006-12-19 | 3M Innovative Properties Company | Coated abrasive article with composite tie layer, and method of making and using the same |
| US7404756B2 (en) * | 2004-10-29 | 2008-07-29 | 3M Innovative Properties Company | Process for manufacturing optical and semiconductor elements |
| US20060094322A1 (en) * | 2004-10-29 | 2006-05-04 | Ouderkirk Andrew J | Process for manufacturing a light emitting array |
| US20060198953A1 (en) * | 2005-03-03 | 2006-09-07 | Longtide Technology Co., Ltd. | Process of forming special protecting structure for optical products |
| US7344575B2 (en) | 2005-06-27 | 2008-03-18 | 3M Innovative Properties Company | Composition, treated backing, and abrasive articles containing the same |
| US7344574B2 (en) | 2005-06-27 | 2008-03-18 | 3M Innovative Properties Company | Coated abrasive article, and method of making and using the same |
| KR100655584B1 (ko) * | 2005-07-08 | 2006-12-08 | 동부일렉트로닉스 주식회사 | 실접촉 면적이 서로 다른 영역을 하나의 패드로 구현한고정입자 패드 및 및 그 제조방법 |
| KR101334012B1 (ko) * | 2005-07-25 | 2013-12-02 | 호야 가부시키가이샤 | 마스크 블랭크용 기판의 제조방법, 마스크 블랭크의제조방법 및 마스크의 제조방법 |
| US7594845B2 (en) * | 2005-10-20 | 2009-09-29 | 3M Innovative Properties Company | Abrasive article and method of modifying the surface of a workpiece |
| US7789738B2 (en) * | 2006-07-03 | 2010-09-07 | San Fang Chemical Industry Co., Ltd. | Sheet for mounting polishing workpiece and method for making the same |
| US7316605B1 (en) * | 2006-07-03 | 2008-01-08 | San Fang Chemical Industry Co., Ltd. | Sheet for mounting polishing workpiece and method for making the same |
| US20080064310A1 (en) * | 2006-09-08 | 2008-03-13 | Chung-Chih Feng | Polishing pad having hollow fibers and the method for making the same |
| KR100721975B1 (ko) * | 2006-11-01 | 2007-05-25 | 장진현 | 자동차 라이트의 재생방법 |
| US7497885B2 (en) * | 2006-12-22 | 2009-03-03 | 3M Innovative Properties Company | Abrasive articles with nanoparticulate fillers and method for making and using them |
| US7972691B2 (en) * | 2006-12-22 | 2011-07-05 | Nanogram Corporation | Composites of polymers and metal/metalloid oxide nanoparticles and methods for forming these composites |
| US20080155904A1 (en) * | 2006-12-31 | 2008-07-03 | 3M Innovative Properties Company | Method of abrading a metal workpiece |
| US20080160879A1 (en) * | 2006-12-31 | 2008-07-03 | 3M Innovative Properties Company | Method of abrading a zirconium-based alloy workpiece |
| WO2008100568A1 (en) * | 2007-02-17 | 2008-08-21 | Nanogram Corporation | Functional composites, functional inks and applications thereof |
| US8323072B1 (en) * | 2007-03-21 | 2012-12-04 | 3M Innovative Properties Company | Method of polishing transparent armor |
| US20090252876A1 (en) * | 2007-05-07 | 2009-10-08 | San Fang Chemical Industry Co., Ltd. | Sheet for mounting polishing workpiece and method for making the same |
| US8038750B2 (en) | 2007-07-13 | 2011-10-18 | 3M Innovative Properties Company | Structured abrasive with overlayer, and method of making and using the same |
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| US9873180B2 (en) | 2014-10-17 | 2018-01-23 | Applied Materials, Inc. | CMP pad construction with composite material properties using additive manufacturing processes |
| US10875145B2 (en) | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Polishing pads produced by an additive manufacturing process |
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| US10399201B2 (en) | 2014-10-17 | 2019-09-03 | Applied Materials, Inc. | Advanced polishing pads having compositional gradients by use of an additive manufacturing process |
| US11745302B2 (en) | 2014-10-17 | 2023-09-05 | Applied Materials, Inc. | Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process |
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| KR20210042171A (ko) | 2018-09-04 | 2021-04-16 | 어플라이드 머티어리얼스, 인코포레이티드 | 진보한 폴리싱 패드들을 위한 제형들 |
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| US5077870A (en) * | 1990-09-21 | 1992-01-07 | Minnesota Mining And Manufacturing Company | Mushroom-type hook strip for a mechanical fastener |
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| US5219462A (en) * | 1992-01-13 | 1993-06-15 | Minnesota Mining And Manufacturing Company | Abrasive article having abrasive composite members positioned in recesses |
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| JPH0671544A (ja) * | 1992-08-26 | 1994-03-15 | Olympus Optical Co Ltd | 研削研磨方法 |
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| JPH0768469A (ja) * | 1993-09-03 | 1995-03-14 | Asahi Glass Co Ltd | ガラス板用研削加工シート |
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| CA2133259A1 (en) * | 1993-10-29 | 1995-04-30 | Gene O. Lindholm | Method for the polishing and finishing of optical lenses |
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| US5580647A (en) * | 1993-12-20 | 1996-12-03 | Minnesota Mining And Manufacturing Company | Abrasive articles incorporating addition polymerizable resins and reactive diluents |
| US5505747A (en) * | 1994-01-13 | 1996-04-09 | Minnesota Mining And Manufacturing Company | Method of making an abrasive article |
| EP0739263B1 (de) * | 1994-01-13 | 1999-04-21 | Minnesota Mining And Manufacturing Company | Schleifartikel, verfahren zur herstellung desselben, und schleifmaschine |
| JP3874790B2 (ja) * | 1994-02-22 | 2007-01-31 | スリーエム カンパニー | 研磨物品、その製造方法および仕上げ用のその使用方法 |
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| US5910471A (en) * | 1997-03-07 | 1999-06-08 | Minnesota Mining And Manufacturing Company | Abrasive article for providing a clear surface finish on glass |
| US5888119A (en) * | 1997-03-07 | 1999-03-30 | Minnesota Mining And Manufacturing Company | Method for providing a clear surface finish on glass |
-
1997
- 1997-01-03 US US08/778,501 patent/US5876268A/en not_active Expired - Lifetime
- 1997-12-22 EP EP97952613A patent/EP0949986B1/de not_active Expired - Lifetime
- 1997-12-22 KR KR10-1999-7006039A patent/KR100483090B1/ko not_active IP Right Cessation
- 1997-12-22 DE DE69728791T patent/DE69728791T2/de not_active Expired - Fee Related
- 1997-12-22 JP JP53018098A patent/JP2001507634A/ja not_active Withdrawn
- 1997-12-22 AU AU56184/98A patent/AU5618498A/en not_active Abandoned
- 1997-12-22 WO PCT/US1997/023795 patent/WO1998029217A1/en active IP Right Grant
- 1997-12-26 TW TW086119801A patent/TW404878B/zh not_active IP Right Cessation
-
1998
- 1998-01-03 MY MYPI98000016A patent/MY117614A/en unknown
- 1998-11-23 US US09/197,656 patent/US5989111A/en not_active Expired - Lifetime
-
1999
- 1999-09-20 US US09/400,005 patent/US6155910A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0949986B1 (de) | 2004-04-21 |
| JP2001507634A (ja) | 2001-06-12 |
| DE69728791T2 (de) | 2005-04-28 |
| MY117614A (en) | 2004-07-31 |
| US5989111A (en) | 1999-11-23 |
| TW404878B (en) | 2000-09-11 |
| WO1998029217A1 (en) | 1998-07-09 |
| KR20000062417A (ko) | 2000-10-25 |
| US5876268A (en) | 1999-03-02 |
| KR100483090B1 (ko) | 2005-04-15 |
| EP0949986A1 (de) | 1999-10-20 |
| AU5618498A (en) | 1998-07-31 |
| US6155910A (en) | 2000-12-05 |
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| 8364 | No opposition during term of opposition | ||
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