DE69728791D1 - Verfahren zur herstellung von glasgegenständen mit optischer qualität - Google Patents
Verfahren zur herstellung von glasgegenständen mit optischer qualitätInfo
- Publication number
- DE69728791D1 DE69728791D1 DE69728791T DE69728791T DE69728791D1 DE 69728791 D1 DE69728791 D1 DE 69728791D1 DE 69728791 T DE69728791 T DE 69728791T DE 69728791 T DE69728791 T DE 69728791T DE 69728791 D1 DE69728791 D1 DE 69728791D1
- Authority
- DE
- Germany
- Prior art keywords
- optical quality
- producing glass
- glass items
- items
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/02—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
- B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
- B24D3/344—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent the bonding agent being organic
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US778501 | 1997-01-03 | ||
| US08/778,501 US5876268A (en) | 1997-01-03 | 1997-01-03 | Method and article for the production of optical quality surfaces on glass |
| PCT/US1997/023795 WO1998029217A1 (en) | 1997-01-03 | 1997-12-22 | Method and article for the production of optical quality surfaces on glass |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69728791D1 true DE69728791D1 (de) | 2004-05-27 |
| DE69728791T2 DE69728791T2 (de) | 2005-04-28 |
Family
ID=25113558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69728791T Expired - Fee Related DE69728791T2 (de) | 1997-01-03 | 1997-12-22 | Verfahren zur herstellung von glasoberflächen mit optischer qualität |
Country Status (9)
| Country | Link |
|---|---|
| US (3) | US5876268A (de) |
| EP (1) | EP0949986B1 (de) |
| JP (1) | JP2001507634A (de) |
| KR (1) | KR100483090B1 (de) |
| AU (1) | AU5618498A (de) |
| DE (1) | DE69728791T2 (de) |
| MY (1) | MY117614A (de) |
| TW (1) | TW404878B (de) |
| WO (1) | WO1998029217A1 (de) |
Families Citing this family (99)
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| US7226966B2 (en) | 2001-08-03 | 2007-06-05 | Nanogram Corporation | Structures incorporating polymer-inorganic particle blends |
| US5989301A (en) | 1998-02-18 | 1999-11-23 | Saint-Gobain Industrial Ceramics, Inc. | Optical polishing formulation |
| EP1094918B1 (de) * | 1998-02-19 | 2005-05-04 | Minnesota Mining And Manufacturing Company | Schleifgegenstand und verfahren zum schleifen von glas |
| US5897426A (en) * | 1998-04-24 | 1999-04-27 | Applied Materials, Inc. | Chemical mechanical polishing with multiple polishing pads |
| US6099389A (en) * | 1998-10-05 | 2000-08-08 | The United States Of America As Represented By The United States Department Of Energy | Fabrication of an optical component |
| US6296557B1 (en) | 1999-04-02 | 2001-10-02 | Micron Technology, Inc. | Method and apparatus for releasably attaching polishing pads to planarizing machines in mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies |
| AU4652400A (en) * | 1999-04-23 | 2000-11-10 | 3M Innovative Properties Company | Method for grinding glass |
| US6634929B1 (en) * | 1999-04-23 | 2003-10-21 | 3M Innovative Properties Company | Method for grinding glass |
| US6458018B1 (en) * | 1999-04-23 | 2002-10-01 | 3M Innovative Properties Company | Abrasive article suitable for abrading glass and glass ceramic workpieces |
| US6375551B1 (en) | 1999-06-25 | 2002-04-23 | Corning Incorporated | Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms |
| US6306012B1 (en) * | 1999-07-20 | 2001-10-23 | Micron Technology, Inc. | Methods and apparatuses for planarizing microelectronic substrate assemblies |
| US7232529B1 (en) * | 1999-08-26 | 2007-06-19 | Hitachi Chemical Company, Ltd. | Polishing compound for chemimechanical polishing and polishing method |
| US6406363B1 (en) * | 1999-08-31 | 2002-06-18 | Lam Research Corporation | Unsupported chemical mechanical polishing belt |
| US6638144B2 (en) | 2000-04-28 | 2003-10-28 | 3M Innovative Properties Company | Method of cleaning glass |
| KR100373846B1 (ko) * | 2000-06-12 | 2003-02-26 | 지앤피테크놀로지 주식회사 | 반도체 및 광학부품용 연마패드 및 그 제조방법 |
| US6964604B2 (en) * | 2000-06-23 | 2005-11-15 | International Business Machines Corporation | Fiber embedded polishing pad |
| US6383066B1 (en) | 2000-06-23 | 2002-05-07 | International Business Machines Corporation | Multilayered polishing pad, method for fabricating, and use thereof |
| US6477926B1 (en) * | 2000-09-15 | 2002-11-12 | Ppg Industries Ohio, Inc. | Polishing pad |
| EP1332194B1 (de) | 2000-10-06 | 2007-01-03 | 3M Innovative Properties Company | Keramische aggregatteilchen |
| CA2423597A1 (en) | 2000-10-16 | 2002-04-25 | 3M Innovative Properties Company | Method of making ceramic aggregate particles |
| US6551366B1 (en) * | 2000-11-10 | 2003-04-22 | 3M Innovative Properties Company | Spray drying methods of making agglomerate abrasive grains and abrasive articles |
| US6572463B1 (en) * | 2000-12-27 | 2003-06-03 | Lam Research Corp. | Methods for making reinforced wafer polishing pads utilizing direct casting and apparatuses implementing the same |
| US6561889B1 (en) | 2000-12-27 | 2003-05-13 | Lam Research Corporation | Methods for making reinforced wafer polishing pads and apparatuses implementing the same |
| US6755728B2 (en) * | 2001-03-29 | 2004-06-29 | Noritake Co., Ltd. | Abrasive film in which water-soluble inorganic compound is added to binder |
| US6620031B2 (en) * | 2001-04-04 | 2003-09-16 | Lam Research Corporation | Method for optimizing the planarizing length of a polishing pad |
| US6604990B2 (en) * | 2001-08-31 | 2003-08-12 | Universal Photonics Inc. | Polishing pad and method of producing the same |
| US6685756B2 (en) * | 2001-09-24 | 2004-02-03 | Saint-Gobain Abrasives Technology Company | Coated abrasives |
| GB0123089D0 (en) * | 2001-09-26 | 2001-11-14 | Coombes James E | Door dressing tool |
| US6827633B2 (en) * | 2001-12-28 | 2004-12-07 | Ebara Corporation | Polishing method |
| US20050054277A1 (en) * | 2003-09-04 | 2005-03-10 | Teng-Chun Tsai | Polishing pad and method of polishing wafer |
| JP2007514553A (ja) * | 2003-11-26 | 2007-06-07 | スリーエム イノベイティブ プロパティズ カンパニー | 工作物の研磨方法 |
| US7988534B1 (en) * | 2004-05-19 | 2011-08-02 | Sutton Stephen P | Optical polishing pitch formulations |
| US7198549B2 (en) * | 2004-06-16 | 2007-04-03 | Cabot Microelectronics Corporation | Continuous contour polishing of a multi-material surface |
| US7150771B2 (en) * | 2004-06-18 | 2006-12-19 | 3M Innovative Properties Company | Coated abrasive article with composite tie layer, and method of making and using the same |
| US7150770B2 (en) * | 2004-06-18 | 2006-12-19 | 3M Innovative Properties Company | Coated abrasive article with tie layer, and method of making and using the same |
| US20050282029A1 (en) * | 2004-06-18 | 2005-12-22 | 3M Innovative Properties Company | Polymerizable composition and articles therefrom |
| US20060094322A1 (en) * | 2004-10-29 | 2006-05-04 | Ouderkirk Andrew J | Process for manufacturing a light emitting array |
| US7404756B2 (en) * | 2004-10-29 | 2008-07-29 | 3M Innovative Properties Company | Process for manufacturing optical and semiconductor elements |
| US20060198953A1 (en) * | 2005-03-03 | 2006-09-07 | Longtide Technology Co., Ltd. | Process of forming special protecting structure for optical products |
| US7344574B2 (en) | 2005-06-27 | 2008-03-18 | 3M Innovative Properties Company | Coated abrasive article, and method of making and using the same |
| US7344575B2 (en) | 2005-06-27 | 2008-03-18 | 3M Innovative Properties Company | Composition, treated backing, and abrasive articles containing the same |
| KR100655584B1 (ko) * | 2005-07-08 | 2006-12-08 | 동부일렉트로닉스 주식회사 | 실접촉 면적이 서로 다른 영역을 하나의 패드로 구현한고정입자 패드 및 및 그 제조방법 |
| KR101334012B1 (ko) * | 2005-07-25 | 2013-12-02 | 호야 가부시키가이샤 | 마스크 블랭크용 기판의 제조방법, 마스크 블랭크의제조방법 및 마스크의 제조방법 |
| US7594845B2 (en) * | 2005-10-20 | 2009-09-29 | 3M Innovative Properties Company | Abrasive article and method of modifying the surface of a workpiece |
| US7789738B2 (en) * | 2006-07-03 | 2010-09-07 | San Fang Chemical Industry Co., Ltd. | Sheet for mounting polishing workpiece and method for making the same |
| US7316605B1 (en) * | 2006-07-03 | 2008-01-08 | San Fang Chemical Industry Co., Ltd. | Sheet for mounting polishing workpiece and method for making the same |
| US20080064310A1 (en) * | 2006-09-08 | 2008-03-13 | Chung-Chih Feng | Polishing pad having hollow fibers and the method for making the same |
| KR100721975B1 (ko) * | 2006-11-01 | 2007-05-25 | 장진현 | 자동차 라이트의 재생방법 |
| US7972691B2 (en) * | 2006-12-22 | 2011-07-05 | Nanogram Corporation | Composites of polymers and metal/metalloid oxide nanoparticles and methods for forming these composites |
| US7497885B2 (en) * | 2006-12-22 | 2009-03-03 | 3M Innovative Properties Company | Abrasive articles with nanoparticulate fillers and method for making and using them |
| US20080160879A1 (en) * | 2006-12-31 | 2008-07-03 | 3M Innovative Properties Company | Method of abrading a zirconium-based alloy workpiece |
| US20080155904A1 (en) * | 2006-12-31 | 2008-07-03 | 3M Innovative Properties Company | Method of abrading a metal workpiece |
| US8119233B2 (en) * | 2007-02-17 | 2012-02-21 | Nanogram Corporation | Functional composites, functional inks and applications thereof |
| US8323072B1 (en) * | 2007-03-21 | 2012-12-04 | 3M Innovative Properties Company | Method of polishing transparent armor |
| US20090252876A1 (en) * | 2007-05-07 | 2009-10-08 | San Fang Chemical Industry Co., Ltd. | Sheet for mounting polishing workpiece and method for making the same |
| US8038750B2 (en) | 2007-07-13 | 2011-10-18 | 3M Innovative Properties Company | Structured abrasive with overlayer, and method of making and using the same |
| KR100777478B1 (ko) * | 2007-07-24 | 2007-11-16 | 양창호 | 자동차헤드라이트의 램프커버 복원방법 |
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| US7971347B2 (en) * | 2008-06-27 | 2011-07-05 | Intel Corporation | Method of interconnecting workpieces |
| MX2011000753A (es) * | 2008-07-22 | 2011-03-29 | Saint Gobain Abrasives Inc | Productos abrasivos recubiertos que contienen agregados. |
| EP2385968B1 (de) | 2009-01-08 | 2015-11-04 | Nanogram Corporation | Verbundwerkstoffe aus polysiloxanpolymeren und anorganischen nanopartikeln |
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| US8968435B2 (en) | 2012-03-30 | 2015-03-03 | Saint-Gobain Abrasives, Inc. | Abrasive products and methods for fine polishing of ophthalmic lenses |
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| EP3170879B1 (de) * | 2012-08-02 | 2021-09-08 | Robert Bosch GmbH | Schleifkorn mit einer oberfläche, die mindestens eine grundfläche mit einer aussenkontur enthält, die mindestens sieben ecken aufweist |
| US10160092B2 (en) * | 2013-03-14 | 2018-12-25 | Cabot Microelectronics Corporation | Polishing pad having polishing surface with continuous protrusions having tapered sidewalls |
| SG11201608134YA (en) * | 2014-04-03 | 2016-10-28 | 3M Innovative Properties Co | Polishing pads and systems and methods of making and using the same |
| US9873180B2 (en) | 2014-10-17 | 2018-01-23 | Applied Materials, Inc. | CMP pad construction with composite material properties using additive manufacturing processes |
| US10875145B2 (en) | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Polishing pads produced by an additive manufacturing process |
| US10875153B2 (en) | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Advanced polishing pad materials and formulations |
| CN107078048B (zh) * | 2014-10-17 | 2021-08-13 | 应用材料公司 | 使用加成制造工艺的具复合材料特性的cmp衬垫建构 |
| US10821573B2 (en) | 2014-10-17 | 2020-11-03 | Applied Materials, Inc. | Polishing pads produced by an additive manufacturing process |
| US11745302B2 (en) | 2014-10-17 | 2023-09-05 | Applied Materials, Inc. | Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process |
| US10399201B2 (en) | 2014-10-17 | 2019-09-03 | Applied Materials, Inc. | Advanced polishing pads having compositional gradients by use of an additive manufacturing process |
| JP7458693B2 (ja) * | 2015-06-25 | 2024-04-01 | スリーエム イノベイティブ プロパティズ カンパニー | ガラス質ボンド研磨物品及びその製造方法 |
| CN113103145B (zh) | 2015-10-30 | 2023-04-11 | 应用材料公司 | 形成具有期望ζ电位的抛光制品的设备与方法 |
| US10391605B2 (en) | 2016-01-19 | 2019-08-27 | Applied Materials, Inc. | Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process |
| CN117283450A (zh) * | 2016-01-19 | 2023-12-26 | 应用材料公司 | 多孔化学机械抛光垫 |
| US10407601B2 (en) | 2017-02-24 | 2019-09-10 | California Institute Of Technology | Microabrasive compositions containing oöids |
| US11471999B2 (en) | 2017-07-26 | 2022-10-18 | Applied Materials, Inc. | Integrated abrasive polishing pads and manufacturing methods |
| WO2019032286A1 (en) | 2017-08-07 | 2019-02-14 | Applied Materials, Inc. | ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME |
| CN111565892A (zh) | 2017-12-29 | 2020-08-21 | 圣戈班磨料磨具公司 | 磨料抛光制品 |
| JP7373503B2 (ja) | 2018-05-07 | 2023-11-02 | アプライド マテリアルズ インコーポレイテッド | 親水性及びゼータ電位の調節可能な化学機械研磨パッド |
| US11865663B2 (en) | 2018-05-10 | 2024-01-09 | George Shuai | Optical surface polishing |
| CN112654655A (zh) | 2018-09-04 | 2021-04-13 | 应用材料公司 | 先进抛光垫配方 |
| US11851570B2 (en) | 2019-04-12 | 2023-12-26 | Applied Materials, Inc. | Anionic polishing pads formed by printing processes |
| US11813712B2 (en) | 2019-12-20 | 2023-11-14 | Applied Materials, Inc. | Polishing pads having selectively arranged porosity |
| US11806829B2 (en) | 2020-06-19 | 2023-11-07 | Applied Materials, Inc. | Advanced polishing pads and related polishing pad manufacturing methods |
| US11878389B2 (en) | 2021-02-10 | 2024-01-23 | Applied Materials, Inc. | Structures formed using an additive manufacturing process for regenerating surface texture in situ |
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| JPS63283857A (ja) * | 1987-05-15 | 1988-11-21 | Asahi Chem Ind Co Ltd | 研磨布 |
| US4933234A (en) * | 1987-08-13 | 1990-06-12 | Minnesota Mining And Manufacturing Company | Primed polymeric surfaces for cyanoacrylate adhesives |
| US4906523A (en) * | 1987-09-24 | 1990-03-06 | Minnesota Mining And Manufacturing Company | Primer for surfaces containing inorganic oxide |
| JP2707264B2 (ja) * | 1987-12-28 | 1998-01-28 | ハイ・コントロール・リミテッド | 研磨シートおよびその製造方法 |
| US5254194A (en) * | 1988-05-13 | 1993-10-19 | Minnesota Mining And Manufacturing Company | Coated abrasive sheet material with loop material for attachment incorporated therein |
| BE1001701A3 (fr) * | 1988-05-30 | 1990-02-13 | Diamant Boart Sa | Meule a boisseau et utilisation de celle-ci pour le meulage et le polissage mecaniques du verre. |
| US4903440A (en) * | 1988-11-23 | 1990-02-27 | Minnesota Mining And Manufacturing Company | Abrasive product having binder comprising an aminoplast resin |
| US4959265A (en) * | 1989-04-17 | 1990-09-25 | Minnesota Mining And Manufacturing Company | Pressure-sensitive adhesive tape fastener for releasably attaching an object to a fabric |
| US5014468A (en) * | 1989-05-05 | 1991-05-14 | Norton Company | Patterned coated abrasive for fine surface finishing |
| US5011513A (en) * | 1989-05-31 | 1991-04-30 | Norton Company | Single step, radiation curable ophthalmic fining pad |
| US5077870A (en) * | 1990-09-21 | 1992-01-07 | Minnesota Mining And Manufacturing Company | Mushroom-type hook strip for a mechanical fastener |
| JPH04201181A (ja) * | 1990-11-30 | 1992-07-22 | Ichikawa Woolen Textile Co Ltd | 研磨用フェルト |
| US5152917B1 (en) * | 1991-02-06 | 1998-01-13 | Minnesota Mining & Mfg | Structured abrasive article |
| US5236472A (en) * | 1991-02-22 | 1993-08-17 | Minnesota Mining And Manufacturing Company | Abrasive product having a binder comprising an aminoplast binder |
| US5219462A (en) * | 1992-01-13 | 1993-06-15 | Minnesota Mining And Manufacturing Company | Abrasive article having abrasive composite members positioned in recesses |
| US5256170A (en) * | 1992-01-22 | 1993-10-26 | Minnesota Mining And Manufacturing Company | Coated abrasive article and method of making same |
| JPH0671544A (ja) * | 1992-08-26 | 1994-03-15 | Olympus Optical Co Ltd | 研削研磨方法 |
| DE69315088T2 (de) * | 1992-12-17 | 1998-03-26 | Minnesota Mining & Mfg | Aufschlaemmungen mit reduzierter viskositaet, daraus hergestellte schleifgegenstaende und verfahren zur herstellung der gegenstaende |
| US5435816A (en) * | 1993-01-14 | 1995-07-25 | Minnesota Mining And Manufacturing Company | Method of making an abrasive article |
| AU674735B2 (en) * | 1993-03-12 | 1997-01-09 | Minnesota Mining And Manufacturing Company | Method and article for polishing stone |
| US5549962A (en) * | 1993-06-30 | 1996-08-27 | Minnesota Mining And Manufacturing Company | Precisely shaped particles and method of making the same |
| JPH0768469A (ja) * | 1993-09-03 | 1995-03-14 | Asahi Glass Co Ltd | ガラス板用研削加工シート |
| DE69419764T2 (de) * | 1993-09-13 | 1999-12-23 | Minnesota Mining & Mfg | Schleifartikel, verfahren zur herstellung desselben, verfahren zur verwendung desselben zum endbearbeiten, und herstellungswerkzeug |
| CA2133259A1 (en) * | 1993-10-29 | 1995-04-30 | Gene O. Lindholm | Method for the polishing and finishing of optical lenses |
| US5577950A (en) * | 1993-11-29 | 1996-11-26 | Coburn Optical Industries, Inc. | Conformal tool operating apparatus and process for an ophthalmic lens finer/polisher |
| US5580647A (en) * | 1993-12-20 | 1996-12-03 | Minnesota Mining And Manufacturing Company | Abrasive articles incorporating addition polymerizable resins and reactive diluents |
| US5505747A (en) * | 1994-01-13 | 1996-04-09 | Minnesota Mining And Manufacturing Company | Method of making an abrasive article |
| AU692828B2 (en) * | 1994-01-13 | 1998-06-18 | Minnesota Mining And Manufacturing Company | Abrasive article, method of making same, and abrading apparatus |
| DE69511068T2 (de) * | 1994-02-22 | 2000-04-06 | Minnesota Mining & Mfg | Schleifartikel, verfahren zum herstellen derselben, und verfahren zum anwenden desselben bei endbearbeitung |
| US5489233A (en) * | 1994-04-08 | 1996-02-06 | Rodel, Inc. | Polishing pads and methods for their use |
| US5958794A (en) * | 1995-09-22 | 1999-09-28 | Minnesota Mining And Manufacturing Company | Method of modifying an exposed surface of a semiconductor wafer |
| US5888119A (en) * | 1997-03-07 | 1999-03-30 | Minnesota Mining And Manufacturing Company | Method for providing a clear surface finish on glass |
| US5910471A (en) * | 1997-03-07 | 1999-06-08 | Minnesota Mining And Manufacturing Company | Abrasive article for providing a clear surface finish on glass |
-
1997
- 1997-01-03 US US08/778,501 patent/US5876268A/en not_active Expired - Lifetime
- 1997-12-22 DE DE69728791T patent/DE69728791T2/de not_active Expired - Fee Related
- 1997-12-22 WO PCT/US1997/023795 patent/WO1998029217A1/en active IP Right Grant
- 1997-12-22 KR KR10-1999-7006039A patent/KR100483090B1/ko not_active IP Right Cessation
- 1997-12-22 JP JP53018098A patent/JP2001507634A/ja not_active Withdrawn
- 1997-12-22 EP EP97952613A patent/EP0949986B1/de not_active Expired - Lifetime
- 1997-12-22 AU AU56184/98A patent/AU5618498A/en not_active Abandoned
- 1997-12-26 TW TW086119801A patent/TW404878B/zh not_active IP Right Cessation
-
1998
- 1998-01-03 MY MYPI98000016A patent/MY117614A/en unknown
- 1998-11-23 US US09/197,656 patent/US5989111A/en not_active Expired - Lifetime
-
1999
- 1999-09-20 US US09/400,005 patent/US6155910A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US5989111A (en) | 1999-11-23 |
| EP0949986A1 (de) | 1999-10-20 |
| WO1998029217A1 (en) | 1998-07-09 |
| US5876268A (en) | 1999-03-02 |
| US6155910A (en) | 2000-12-05 |
| JP2001507634A (ja) | 2001-06-12 |
| KR100483090B1 (ko) | 2005-04-15 |
| KR20000062417A (ko) | 2000-10-25 |
| MY117614A (en) | 2004-07-31 |
| AU5618498A (en) | 1998-07-31 |
| TW404878B (en) | 2000-09-11 |
| EP0949986B1 (de) | 2004-04-21 |
| DE69728791T2 (de) | 2005-04-28 |
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| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |