DE69734997D1 - Gaszuführvorrichtung - Google Patents
GaszuführvorrichtungInfo
- Publication number
- DE69734997D1 DE69734997D1 DE69734997T DE69734997T DE69734997D1 DE 69734997 D1 DE69734997 D1 DE 69734997D1 DE 69734997 T DE69734997 T DE 69734997T DE 69734997 T DE69734997 T DE 69734997T DE 69734997 D1 DE69734997 D1 DE 69734997D1
- Authority
- DE
- Germany
- Prior art keywords
- gas feed
- feed
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Revoked
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/4238—With cleaner, lubrication added to fluid or liquid sealing at valve interface
- Y10T137/4245—Cleaning or steam sterilizing
- Y10T137/4259—With separate material addition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/5109—Convertible
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/5109—Convertible
- Y10T137/5283—Units interchangeable between alternate locations
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87917—Flow path with serial valves and/or closures
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US739936 | 1991-08-02 | ||
US08/739,936 US5992463A (en) | 1996-10-30 | 1996-10-30 | Gas panel |
PCT/US1997/019709 WO1998021744A2 (en) | 1996-10-30 | 1997-10-29 | Gas panel |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69734997D1 true DE69734997D1 (de) | 2006-02-02 |
DE69734997T2 DE69734997T2 (de) | 2006-09-21 |
Family
ID=24974393
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69734997T Revoked DE69734997T2 (de) | 1996-10-30 | 1997-10-29 | Gaszuführvorrichtung |
Country Status (8)
Country | Link |
---|---|
US (7) | US5992463A (de) |
EP (1) | EP0938634B1 (de) |
JP (1) | JP2001503840A (de) |
KR (1) | KR100633190B1 (de) |
AU (1) | AU5097198A (de) |
DE (1) | DE69734997T2 (de) |
TW (1) | TW406306B (de) |
WO (1) | WO1998021744A2 (de) |
Families Citing this family (131)
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---|---|---|---|---|
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JP3737869B2 (ja) * | 1997-05-13 | 2006-01-25 | シーケーディ株式会社 | プロセスガス供給ユニット |
JP4378553B2 (ja) * | 1997-10-13 | 2009-12-09 | 忠弘 大見 | 流体制御装置 |
JP3780096B2 (ja) * | 1998-04-27 | 2006-05-31 | シーケーディ株式会社 | プロセスガス供給ユニット |
JP2000145979A (ja) * | 1998-11-16 | 2000-05-26 | Fujikin Inc | 下段部材の固定装置およびこれを備えた流体制御装置 |
WO2000031462A1 (en) * | 1998-11-20 | 2000-06-02 | Mykrolis Corporation | System and method for integrating gas components |
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DE10013192B4 (de) * | 2000-03-17 | 2004-05-06 | Festo Ag & Co. | Ventilanordnung |
JP2001269567A (ja) * | 2000-03-24 | 2001-10-02 | Bioneer Corp | 多チャネル定量制御バルブ装置 |
US6357760B1 (en) | 2000-05-19 | 2002-03-19 | Michael Doyle | Ring seal |
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-
1996
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-
1997
- 1997-10-29 KR KR1019997003781A patent/KR100633190B1/ko not_active IP Right Cessation
- 1997-10-29 JP JP52259798A patent/JP2001503840A/ja not_active Ceased
- 1997-10-29 AU AU50971/98A patent/AU5097198A/en not_active Abandoned
- 1997-10-29 DE DE69734997T patent/DE69734997T2/de not_active Revoked
- 1997-10-29 EP EP97913896A patent/EP0938634B1/de not_active Revoked
- 1997-10-29 WO PCT/US1997/019709 patent/WO1998021744A2/en not_active Application Discontinuation
- 1997-10-30 TW TW086116147A patent/TW406306B/zh not_active IP Right Cessation
-
1999
- 1999-08-10 US US09/371,408 patent/US6192938B1/en not_active Expired - Fee Related
- 1999-08-10 US US09/371,659 patent/US6142539A/en not_active Expired - Lifetime
- 1999-08-10 US US09/371,655 patent/US6189570B1/en not_active Expired - Fee Related
-
2000
- 2000-12-07 US US09/732,435 patent/US20010013371A1/en not_active Abandoned
- 2000-12-07 US US09/732,434 patent/US6474700B2/en not_active Expired - Lifetime
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2001
- 2001-08-23 US US09/939,487 patent/US6435215B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2001503840A (ja) | 2001-03-21 |
KR20000052913A (ko) | 2000-08-25 |
US6189570B1 (en) | 2001-02-20 |
US5992463A (en) | 1999-11-30 |
US6142539A (en) | 2000-11-07 |
EP0938634B1 (de) | 2005-12-28 |
WO1998021744A3 (en) | 1998-10-22 |
TW406306B (en) | 2000-09-21 |
AU5097198A (en) | 1998-06-03 |
EP0938634A4 (de) | 2004-10-06 |
DE69734997T2 (de) | 2006-09-21 |
KR100633190B1 (ko) | 2006-10-11 |
US6474700B2 (en) | 2002-11-05 |
US20010013371A1 (en) | 2001-08-16 |
WO1998021744A2 (en) | 1998-05-22 |
EP0938634A2 (de) | 1999-09-01 |
WO1998021744A9 (en) | 1999-06-10 |
US20020020353A1 (en) | 2002-02-21 |
US20020046775A1 (en) | 2002-04-25 |
US6435215B1 (en) | 2002-08-20 |
US6192938B1 (en) | 2001-02-27 |
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