DE69735726D1 - Abschirm-bänder für stimmgabel-gyroskope - Google Patents

Abschirm-bänder für stimmgabel-gyroskope

Info

Publication number
DE69735726D1
DE69735726D1 DE69735726T DE69735726T DE69735726D1 DE 69735726 D1 DE69735726 D1 DE 69735726D1 DE 69735726 T DE69735726 T DE 69735726T DE 69735726 T DE69735726 T DE 69735726T DE 69735726 D1 DE69735726 D1 DE 69735726D1
Authority
DE
Germany
Prior art keywords
voting
fork gyroscopes
tapes
screen
screen tapes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69735726T
Other languages
English (en)
Other versions
DE69735726T2 (de
Inventor
S Weinberg
C Pinson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Charles Stark Draper Laboratory Inc
Boeing North American Inc
Original Assignee
Charles Stark Draper Laboratory Inc
Rockwell International Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Charles Stark Draper Laboratory Inc, Rockwell International Corp filed Critical Charles Stark Draper Laboratory Inc
Application granted granted Critical
Publication of DE69735726D1 publication Critical patent/DE69735726D1/de
Publication of DE69735726T2 publication Critical patent/DE69735726T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
DE69735726T 1996-11-21 1997-11-18 Abschirm-bänder für stimmgabel-gyroskope Expired - Lifetime DE69735726T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US752570 1985-07-08
US08/752,570 US5892153A (en) 1996-11-21 1996-11-21 Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
PCT/US1997/021000 WO1998022827A1 (en) 1996-11-21 1997-11-18 Guard bands for tuning fork gyroscopes

Publications (2)

Publication Number Publication Date
DE69735726D1 true DE69735726D1 (de) 2006-05-24
DE69735726T2 DE69735726T2 (de) 2006-08-31

Family

ID=25026850

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69735726T Expired - Lifetime DE69735726T2 (de) 1996-11-21 1997-11-18 Abschirm-bänder für stimmgabel-gyroskope

Country Status (6)

Country Link
US (1) US5892153A (de)
EP (1) EP1007977B1 (de)
JP (1) JP3474582B2 (de)
CA (1) CA2272556C (de)
DE (1) DE69735726T2 (de)
WO (1) WO1998022827A1 (de)

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US9171964B2 (en) 2010-11-23 2015-10-27 Honeywell International Inc. Systems and methods for a three-layer chip-scale MEMS device
US8776601B2 (en) 2010-11-23 2014-07-15 Honeywell International Inc. MEMS sensor using multi-layer movable combs
US8748206B2 (en) 2010-11-23 2014-06-10 Honeywell International Inc. Systems and methods for a four-layer chip-scale MEMS device
US9493344B2 (en) 2010-11-23 2016-11-15 Honeywell International Inc. MEMS vertical comb structure with linear drive/pickoff
US9568491B2 (en) * 2013-07-08 2017-02-14 Honeywell International Inc. Reducing the effect of glass charging in MEMS devices
CN103528577B (zh) * 2013-10-12 2016-06-01 深迪半导体(上海)有限公司 一种z轴mems电容式陀螺仪
ITUB20159197A1 (it) * 2015-12-29 2017-06-29 St Microelectronics Srl Giroscopio microelettromeccanico con reiezione di disturbi e metodo di rilevamento di una velocita' angolare
CN108955663B (zh) * 2017-05-23 2022-03-25 北京大学 一种谐振式双轴微机械轮式陀螺
JP2019007855A (ja) 2017-06-26 2019-01-17 セイコーエプソン株式会社 振動デバイス、振動デバイスモジュール、電子機器および移動体
JP6802125B2 (ja) * 2017-08-24 2020-12-16 株式会社豊田中央研究所 振動ジャイロ

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Also Published As

Publication number Publication date
CA2272556C (en) 2003-10-14
EP1007977A4 (de) 2000-07-26
US5892153A (en) 1999-04-06
CA2272556A1 (en) 1998-05-28
JP2001504585A (ja) 2001-04-03
JP3474582B2 (ja) 2003-12-08
EP1007977B1 (de) 2006-04-19
EP1007977A1 (de) 2000-06-14
DE69735726T2 (de) 2006-08-31
WO1998022827A1 (en) 1998-05-28

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Representative=s name: WITTE, WELLER & PARTNER, 70178 STUTTGART