DE69740130D1 - Plasma-ätzreaktor und verfahren zum ätzen eines wafers - Google Patents
Plasma-ätzreaktor und verfahren zum ätzen eines wafersInfo
- Publication number
- DE69740130D1 DE69740130D1 DE69740130T DE69740130T DE69740130D1 DE 69740130 D1 DE69740130 D1 DE 69740130D1 DE 69740130 T DE69740130 T DE 69740130T DE 69740130 T DE69740130 T DE 69740130T DE 69740130 D1 DE69740130 D1 DE 69740130D1
- Authority
- DE
- Germany
- Prior art keywords
- plasma
- etching
- reactor
- power supply
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
- H05H1/16—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields
- H05H1/18—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields wherein the fields oscillate at very high frequency, e.g. in the microwave range, e.g. using cyclotron resonance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
- H01L21/02071—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a delineation, e.g. RIE, of conductive layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
- H01J37/32155—Frequency modulation
- H01J37/32165—Plural frequencies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32587—Triode systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32697—Electrostatic control
- H01J37/32706—Polarising the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/675,093 US6048435A (en) | 1996-07-03 | 1996-07-03 | Plasma etch reactor and method for emerging films |
PCT/US1997/001020 WO1998001012A1 (en) | 1996-07-03 | 1997-01-23 | Plasma etch reactor and method for emerging films |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69740130D1 true DE69740130D1 (de) | 2011-04-07 |
Family
ID=24709027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69740130T Expired - Lifetime DE69740130D1 (de) | 1996-07-03 | 1997-01-23 | Plasma-ätzreaktor und verfahren zum ätzen eines wafers |
Country Status (9)
Country | Link |
---|---|
US (3) | US6048435A (de) |
EP (1) | EP0913074B1 (de) |
JP (1) | JP2000516033A (de) |
KR (1) | KR100528733B1 (de) |
CN (4) | CN1549309A (de) |
AT (1) | ATE499825T1 (de) |
CA (1) | CA2259973A1 (de) |
DE (1) | DE69740130D1 (de) |
WO (1) | WO1998001012A1 (de) |
Families Citing this family (97)
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US20070107841A1 (en) * | 2000-12-13 | 2007-05-17 | Semequip, Inc. | Ion implantation ion source, system and method |
US7838850B2 (en) | 1999-12-13 | 2010-11-23 | Semequip, Inc. | External cathode ion source |
AU2430601A (en) * | 1999-12-13 | 2001-06-18 | Semequip, Inc. | Ion implantation ion source, system and method |
US6592709B1 (en) | 2000-04-05 | 2003-07-15 | Applied Materials Inc. | Method and apparatus for plasma processing |
US6872281B1 (en) * | 2000-09-28 | 2005-03-29 | Lam Research Corporation | Chamber configuration for confining a plasma |
US7270724B2 (en) | 2000-12-13 | 2007-09-18 | Uvtech Systems, Inc. | Scanning plasma reactor |
US6773683B2 (en) * | 2001-01-08 | 2004-08-10 | Uvtech Systems, Inc. | Photocatalytic reactor system for treating flue effluents |
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KR100422594B1 (ko) * | 2001-09-12 | 2004-03-16 | 주식회사 하이닉스반도체 | 반도체 소자의 커패시터 및 제조방법 |
US20030101935A1 (en) * | 2001-12-04 | 2003-06-05 | Walther Steven R. | Dose uniformity control for plasma doping systems |
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US6946511B2 (en) * | 2002-10-29 | 2005-09-20 | Dupont Dow Elastomers, Llc | Plasma resistant elastomer parts |
JP3846881B2 (ja) * | 2003-04-04 | 2006-11-15 | 日本エー・エス・エム株式会社 | プラズマ処理装置及びシリコン酸化膜を形成する方法 |
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US7988816B2 (en) | 2004-06-21 | 2011-08-02 | Tokyo Electron Limited | Plasma processing apparatus and method |
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US20060000802A1 (en) * | 2004-06-30 | 2006-01-05 | Ajay Kumar | Method and apparatus for photomask plasma etching |
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JP2006073790A (ja) * | 2004-09-02 | 2006-03-16 | Tokyo Institute Of Technology | プラズマエッチング装置 |
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-
1996
- 1996-07-03 US US08/675,093 patent/US6048435A/en not_active Expired - Lifetime
-
1997
- 1997-01-23 CN CNA2004100038594A patent/CN1549309A/zh active Pending
- 1997-01-23 WO PCT/US1997/001020 patent/WO1998001012A1/en not_active Application Discontinuation
- 1997-01-23 CN CNB200410003858XA patent/CN100378924C/zh not_active Expired - Fee Related
- 1997-01-23 CA CA002259973A patent/CA2259973A1/en not_active Abandoned
- 1997-01-23 JP JP10504082A patent/JP2000516033A/ja active Pending
- 1997-01-23 CN CNB971971080A patent/CN1210999C/zh not_active Expired - Fee Related
- 1997-01-23 AT AT97903910T patent/ATE499825T1/de not_active IP Right Cessation
- 1997-01-23 CN CNA2007101411646A patent/CN101106074A/zh active Pending
- 1997-01-23 KR KR10-1999-7000050A patent/KR100528733B1/ko not_active IP Right Cessation
- 1997-01-23 EP EP97903910A patent/EP0913074B1/de not_active Expired - Lifetime
- 1997-01-23 DE DE69740130T patent/DE69740130D1/de not_active Expired - Lifetime
-
1999
- 1999-08-27 US US09/384,858 patent/US6410448B1/en not_active Expired - Fee Related
- 1999-08-27 US US09/384,614 patent/US6190496B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CA2259973A1 (en) | 1998-01-08 |
CN1549309A (zh) | 2004-11-24 |
US6190496B1 (en) | 2001-02-20 |
EP0913074B1 (de) | 2011-02-23 |
CN101106074A (zh) | 2008-01-16 |
CN1210999C (zh) | 2005-07-13 |
US6048435A (en) | 2000-04-11 |
CN1549308A (zh) | 2004-11-24 |
CN1232601A (zh) | 1999-10-20 |
EP0913074A4 (de) | 2003-12-03 |
US6410448B1 (en) | 2002-06-25 |
ATE499825T1 (de) | 2011-03-15 |
KR20000023603A (ko) | 2000-04-25 |
CN100378924C (zh) | 2008-04-02 |
JP2000516033A (ja) | 2000-11-28 |
EP0913074A1 (de) | 1999-05-06 |
KR100528733B1 (ko) | 2005-11-16 |
WO1998001012A1 (en) | 1998-01-08 |
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