DE69805836T2 - Verfahren und system zur erhöhung der menge an in einer flüssigkeit gelöstem gas und zur beibehaltung dieser erhöhten menge bis zur verwendung - Google Patents

Verfahren und system zur erhöhung der menge an in einer flüssigkeit gelöstem gas und zur beibehaltung dieser erhöhten menge bis zur verwendung

Info

Publication number
DE69805836T2
DE69805836T2 DE69805836T DE69805836T DE69805836T2 DE 69805836 T2 DE69805836 T2 DE 69805836T2 DE 69805836 T DE69805836 T DE 69805836T DE 69805836 T DE69805836 T DE 69805836T DE 69805836 T2 DE69805836 T2 DE 69805836T2
Authority
DE
Germany
Prior art keywords
maintaining
increasing
liquid
until use
increased
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69805836T
Other languages
English (en)
Other versions
DE69805836D1 (de
Inventor
L Nelson
K Christenson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tel Manufacturing and Engineering of America Inc
Original Assignee
FSI International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FSI International Inc filed Critical FSI International Inc
Publication of DE69805836D1 publication Critical patent/DE69805836D1/de
Application granted granted Critical
Publication of DE69805836T2 publication Critical patent/DE69805836T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/72—Treatment of water, waste water, or sewage by oxidation
    • C02F1/78—Treatment of water, waste water, or sewage by oxidation with ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/78—Details relating to ozone treatment devices
    • C02F2201/782—Ozone generators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S210/00—Liquid purification or separation
    • Y10S210/90—Ultra pure water, e.g. conductivity water
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S261/00—Gas and liquid contact apparatus
    • Y10S261/42—Ozonizers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S261/00—Gas and liquid contact apparatus
    • Y10S261/65—Vaporizers
DE69805836T 1997-10-29 1998-10-27 Verfahren und system zur erhöhung der menge an in einer flüssigkeit gelöstem gas und zur beibehaltung dieser erhöhten menge bis zur verwendung Expired - Fee Related DE69805836T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/960,277 US5971368A (en) 1997-10-29 1997-10-29 System to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized
PCT/US1998/022629 WO1999021798A1 (en) 1997-10-29 1998-10-27 Method and system to increase the quantity of dissolved gas in a liquid and to maintain this increased quantity until utilized

Publications (2)

Publication Number Publication Date
DE69805836D1 DE69805836D1 (de) 2002-07-11
DE69805836T2 true DE69805836T2 (de) 2003-01-16

Family

ID=25503008

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69805836T Expired - Fee Related DE69805836T2 (de) 1997-10-29 1998-10-27 Verfahren und system zur erhöhung der menge an in einer flüssigkeit gelöstem gas und zur beibehaltung dieser erhöhten menge bis zur verwendung

Country Status (7)

Country Link
US (3) US5971368A (de)
EP (1) EP1027291B1 (de)
JP (1) JP2001520935A (de)
KR (1) KR100550368B1 (de)
CN (1) CN1196178C (de)
DE (1) DE69805836T2 (de)
WO (1) WO1999021798A1 (de)

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DE69805836D1 (de) 2002-07-11
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WO1999021798A1 (en) 1999-05-06
US20030042631A1 (en) 2003-03-06
US6648307B2 (en) 2003-11-18
EP1027291B1 (de) 2002-06-05
EP1027291A1 (de) 2000-08-16
US6488271B1 (en) 2002-12-03
CN1277594A (zh) 2000-12-20
US5971368A (en) 1999-10-26
JP2001520935A (ja) 2001-11-06

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