DE69806846T2 - Verbesserungen für räumliche Lichtmodulatoren - Google Patents

Verbesserungen für räumliche Lichtmodulatoren

Info

Publication number
DE69806846T2
DE69806846T2 DE69806846T DE69806846T DE69806846T2 DE 69806846 T2 DE69806846 T2 DE 69806846T2 DE 69806846 T DE69806846 T DE 69806846T DE 69806846 T DE69806846 T DE 69806846T DE 69806846 T2 DE69806846 T2 DE 69806846T2
Authority
DE
Germany
Prior art keywords
spatial light
light modulators
modulators
spatial
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69806846T
Other languages
English (en)
Other versions
DE69806846D1 (de
Inventor
James M Florence
James Huffman
Rodney Miller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE69806846D1 publication Critical patent/DE69806846D1/de
Publication of DE69806846T2 publication Critical patent/DE69806846T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
DE69806846T 1997-05-08 1998-05-04 Verbesserungen für räumliche Lichtmodulatoren Expired - Lifetime DE69806846T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US4598697P 1997-05-08 1997-05-08

Publications (2)

Publication Number Publication Date
DE69806846D1 DE69806846D1 (de) 2002-09-05
DE69806846T2 true DE69806846T2 (de) 2002-12-12

Family

ID=21940942

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69806846T Expired - Lifetime DE69806846T2 (de) 1997-05-08 1998-05-04 Verbesserungen für räumliche Lichtmodulatoren

Country Status (4)

Country Link
US (2) US5943157A (de)
EP (1) EP0877272B1 (de)
JP (1) JP4406098B2 (de)
DE (1) DE69806846T2 (de)

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JP4406098B2 (ja) 2010-01-27
EP0877272A1 (de) 1998-11-11
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US5943157A (en) 1999-08-24
US6038056A (en) 2000-03-14

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