DE69812092D1 - Verfahren zum beschichten von kanten mit diamantähnlichem kohlenstoff - Google Patents

Verfahren zum beschichten von kanten mit diamantähnlichem kohlenstoff

Info

Publication number
DE69812092D1
DE69812092D1 DE69812092T DE69812092T DE69812092D1 DE 69812092 D1 DE69812092 D1 DE 69812092D1 DE 69812092 T DE69812092 T DE 69812092T DE 69812092 T DE69812092 T DE 69812092T DE 69812092 D1 DE69812092 D1 DE 69812092D1
Authority
DE
Germany
Prior art keywords
diamond
carbon
coating edges
edges
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69812092T
Other languages
English (en)
Other versions
DE69812092T2 (de
Inventor
A Hopwood
L Pappas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northeastern University Boston
Original Assignee
Northeastern University Boston
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northeastern University Boston filed Critical Northeastern University Boston
Application granted granted Critical
Publication of DE69812092D1 publication Critical patent/DE69812092D1/de
Publication of DE69812092T2 publication Critical patent/DE69812092T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/103—Diamond-like carbon coating, i.e. DLC
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/103—Diamond-like carbon coating, i.e. DLC
    • Y10S427/104—Utilizing low energy electromagnetic radiation, e.g. microwave, radio wave, IR, UV, visible, actinic laser
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/103—Diamond-like carbon coating, i.e. DLC
    • Y10S427/106—Utilizing plasma, e.g. corona, glow discharge, cold plasma
DE69812092T 1997-06-18 1998-06-11 Verfahren zum beschichten von kanten mit diamantähnlichem kohlenstoff Expired - Lifetime DE69812092T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/878,222 US6077572A (en) 1997-06-18 1997-06-18 Method of coating edges with diamond-like carbon
PCT/US1998/012270 WO1998058097A1 (en) 1997-06-18 1998-06-11 A method of coating edges with diamond-like carbon

Publications (2)

Publication Number Publication Date
DE69812092D1 true DE69812092D1 (de) 2003-04-17
DE69812092T2 DE69812092T2 (de) 2003-11-20

Family

ID=25371614

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69812092T Expired - Lifetime DE69812092T2 (de) 1997-06-18 1998-06-11 Verfahren zum beschichten von kanten mit diamantähnlichem kohlenstoff

Country Status (22)

Country Link
US (1) US6077572A (de)
EP (1) EP0990060B1 (de)
JP (1) JP4145361B2 (de)
KR (1) KR100586803B1 (de)
CN (1) CN1121510C (de)
AR (1) AR017505A1 (de)
AT (1) ATE234371T1 (de)
AU (1) AU736551B2 (de)
BR (1) BR9810170A (de)
CA (1) CA2290514C (de)
CO (1) CO5031272A1 (de)
DE (1) DE69812092T2 (de)
EG (1) EG21236A (de)
ES (1) ES2190084T3 (de)
HK (1) HK1023791A1 (de)
PL (1) PL186562B1 (de)
RU (1) RU2205894C2 (de)
TR (1) TR199902875T2 (de)
TW (1) TW574397B (de)
UA (1) UA59401C2 (de)
WO (1) WO1998058097A1 (de)
ZA (1) ZA985256B (de)

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US6767836B2 (en) * 2002-09-04 2004-07-27 Asm Japan K.K. Method of cleaning a CVD reaction chamber using an active oxygen species
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US8499462B2 (en) 2006-04-10 2013-08-06 The Gillette Company Cutting members for shaving razors
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JP5474948B2 (ja) * 2008-06-11 2014-04-16 エルリコン トレーディング アクチェンゲゼルシャフト，トリューブバハ 被加工物搬送台
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PL218575B1 (pl) 2011-02-28 2014-12-31 Fundacja Rozwoju Kardiochirurgii Im Prof Zbigniewa Religi Sposób wytwarzania warstw powierzchniowych na implantach medycznych
JP5905297B2 (ja) * 2012-02-27 2016-04-20 株式会社パイロットコーポレーション 筆記具
JP6234860B2 (ja) 2014-03-25 2017-11-22 株式会社Ｓｃｒｅｅｎホールディングス 成膜装置および成膜方法
US10415904B1 (en) 2015-04-23 2019-09-17 The United States Of America As Represented By The Secretary Of The Army Firing weapons bonded with diamond-like carbon solid and methods for production thereof
CN108085657B (zh) * 2017-12-29 2020-03-17 苏州大学 基于螺旋波等离子体技术制备氮掺杂类金刚石薄膜的方法
CN112044706A (zh) * 2020-08-05 2020-12-08 王华彬 一种涂布刮刀涂层涂敷的工艺

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Also Published As

Publication number Publication date
RU2205894C2 (ru) 2003-06-10
CA2290514C (en) 2004-06-01
EP0990060B1 (de) 2003-03-12
WO1998058097A9 (en) 1999-04-08
EG21236A (en) 2001-03-31
AU736551B2 (en) 2001-08-02
BR9810170A (pt) 2000-08-08
PL337485A1 (en) 2000-08-28
ES2190084T3 (es) 2003-07-16
CN1260843A (zh) 2000-07-19
EP0990060A1 (de) 2000-04-05
TW574397B (en) 2004-02-01
JP2002505716A (ja) 2002-02-19
WO1998058097A1 (en) 1998-12-23
KR100586803B1 (ko) 2006-06-07
HK1023791A1 (en) 2000-09-22
DE69812092T2 (de) 2003-11-20
UA59401C2 (uk) 2003-09-15
KR20010013862A (ko) 2001-02-26
AR017505A1 (es) 2001-09-12
ZA985256B (en) 1999-01-06
ATE234371T1 (de) 2003-03-15
JP4145361B2 (ja) 2008-09-03
PL186562B1 (pl) 2004-01-30
CA2290514A1 (en) 1998-12-23
US6077572A (en) 2000-06-20
TR199902875T2 (xx) 2000-05-22
CN1121510C (zh) 2003-09-17
CO5031272A1 (es) 2001-04-27
AU8069498A (en) 1999-01-04

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