DE69814198D1 - Messverfahren und Messinstrument mit Triggersonde - Google Patents

Messverfahren und Messinstrument mit Triggersonde

Info

Publication number
DE69814198D1
DE69814198D1 DE69814198T DE69814198T DE69814198D1 DE 69814198 D1 DE69814198 D1 DE 69814198D1 DE 69814198 T DE69814198 T DE 69814198T DE 69814198 T DE69814198 T DE 69814198T DE 69814198 D1 DE69814198 D1 DE 69814198D1
Authority
DE
Germany
Prior art keywords
measuring
trigger probe
measuring instrument
measuring method
instrument
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69814198T
Other languages
English (en)
Other versions
DE69814198T2 (de
Inventor
Motonori Ogihara
Nobuhiro Ishikawa
Takashi Noda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Application granted granted Critical
Publication of DE69814198D1 publication Critical patent/DE69814198D1/de
Publication of DE69814198T2 publication Critical patent/DE69814198T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
DE69814198T 1997-02-10 1998-02-10 Messverfahren und Messinstrument mit Triggersonde Expired - Fee Related DE69814198T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2657497 1997-02-10
JP2657497 1997-02-10
JP5493797 1997-03-10
JP5493797 1997-03-10

Publications (2)

Publication Number Publication Date
DE69814198D1 true DE69814198D1 (de) 2003-06-12
DE69814198T2 DE69814198T2 (de) 2004-04-08

Family

ID=26364378

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69814198T Expired - Fee Related DE69814198T2 (de) 1997-02-10 1998-02-10 Messverfahren und Messinstrument mit Triggersonde

Country Status (4)

Country Link
US (1) US6044569A (de)
EP (1) EP0858015B1 (de)
CN (1) CN1136430C (de)
DE (1) DE69814198T2 (de)

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US6131301A (en) * 1997-07-18 2000-10-17 Renishaw Plc Method of and apparatus for measuring workpieces using a coordinate positioning machine
GB2336433B (en) * 1998-04-14 2002-02-06 Mitutoyo Corp Touch signal probe
EP0971308A1 (de) * 1998-07-06 2000-01-12 Thomas Dr. Riedel Dreidimensionales Eingabegerät und Verfahren zum Digitalisieren von Objekten
JP3633788B2 (ja) * 1998-07-13 2005-03-30 株式会社ミツトヨ 測定装置
DE19848642A1 (de) * 1998-10-22 2000-04-27 Heidenhain Gmbh Dr Johannes Verfahren zur Kompensation von temperaturbedingten Maßabweichungen in der Maschinengeometrie
JP2000199710A (ja) * 1999-01-06 2000-07-18 Mitsutoyo Corp タッチ信号プロ―ブの接触部位検出構造
US6708420B1 (en) * 1999-01-06 2004-03-23 Patrick M. Flanagan Piezoelectric touch probe
US6229297B1 (en) * 1999-06-30 2001-05-08 Hewlett-Packard Company Device for determining the position of an object relative to a surface
US6704684B2 (en) * 1999-10-22 2004-03-09 Carl-Zeiss-Stiftung Method for determining measuring points on a workpiece and a measuring system therefor
US6460261B1 (en) * 1999-11-18 2002-10-08 Mitutoyo Corporation V-groove shape measuring method and apparatus by using rotary table
JP2001264050A (ja) * 2000-03-14 2001-09-26 Mitsutoyo Corp 微細形状測定装置
US6442857B1 (en) * 2000-11-10 2002-09-03 Toto Ltd. Portable surface inspector
EP1241436B1 (de) * 2001-03-14 2014-11-19 Tesa Sa Koordinatenmessmaschine und Verfahren zum Einbringen eines Kommandos zum Ändern des Messmodus
EP1397642A1 (de) * 2001-06-21 2004-03-17 Werth Messtechnik GmbH Verfahren und vorrichtung zum ermitteln eines objektpunktes an einem objekt
US6957496B2 (en) * 2002-02-14 2005-10-25 Faro Technologies, Inc. Method for improving measurement accuracy of a portable coordinate measurement machine
US6925722B2 (en) * 2002-02-14 2005-08-09 Faro Technologies, Inc. Portable coordinate measurement machine with improved surface features
USRE42082E1 (en) 2002-02-14 2011-02-01 Faro Technologies, Inc. Method and apparatus for improving measurement accuracy of a portable coordinate measurement machine
US7881896B2 (en) 2002-02-14 2011-02-01 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
US6973734B2 (en) * 2002-02-14 2005-12-13 Faro Technologies, Inc. Method for providing sensory feedback to the operator of a portable measurement machine
US6952882B2 (en) 2002-02-14 2005-10-11 Faro Technologies, Inc. Portable coordinate measurement machine
US7246030B2 (en) * 2002-02-14 2007-07-17 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
US7519493B2 (en) * 2002-02-14 2009-04-14 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
JP4009152B2 (ja) 2002-07-09 2007-11-14 株式会社ミツトヨ 表面形状測定装置および表面形状測定方法
US7376261B2 (en) 2003-11-25 2008-05-20 Mitutoyo Corporation Surface scan measuring device and method of forming compensation table for scanning probe
DE102005011285A1 (de) * 2004-05-27 2005-12-15 Dr. Johannes Heidenhain Gmbh Vorrichtung und Verfahren zur Koordinatenmessung
GB0501690D0 (en) * 2005-01-27 2005-03-02 Renishaw Plc Articulating device
US7372581B2 (en) * 2005-04-11 2008-05-13 Faro Technologies, Inc. Three-dimensional coordinate measuring device
JP4372759B2 (ja) * 2006-02-10 2009-11-25 株式会社ミツトヨ 形状測定装置、形状測定方法及び形状測定プログラム
JP5221004B2 (ja) * 2006-05-25 2013-06-26 株式会社ミツトヨ 測定装置、表面性状測定方法、及び表面性状測定プログラム
JP5189806B2 (ja) * 2006-09-07 2013-04-24 株式会社ミツトヨ 表面形状測定装置
GB0703423D0 (en) * 2007-02-22 2007-04-04 Renishaw Plc Calibration method and apparatus
US8122610B2 (en) * 2008-03-28 2012-02-28 Hexagon Metrology, Inc. Systems and methods for improved coordination acquisition member comprising calibration information
CN102472662B (zh) 2009-06-30 2014-06-18 六边形度量衡股份公司 使用振动检测的坐标测量机
DE102009049534A1 (de) * 2009-10-06 2011-04-07 Carl Zeiss Industrielle Messtechnik Gmbh Koordinatenmessgerät mit Lageänderungssensoren
US8151477B2 (en) 2009-11-06 2012-04-10 Hexagon Metrology Ab CMM with modular functionality
DE102010018250A1 (de) * 2010-04-23 2011-10-27 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Koordinatenmessung an Werkstücken auf einem Koordinatenmessgerät
JP5557620B2 (ja) * 2010-06-29 2014-07-23 株式会社ミツトヨ 形状測定装置
JP5523995B2 (ja) * 2010-09-03 2014-06-18 株式会社ミツトヨ 測定装置
JP5936357B2 (ja) * 2012-01-06 2016-06-22 株式会社ミツトヨ 姿勢検出器、接触プローブ、および、マルチセンシングプローブ
JP6030339B2 (ja) * 2012-05-17 2016-11-24 株式会社ミツトヨ 形状測定装置
CN102814707B (zh) * 2012-08-14 2015-02-18 西安理工大学 一种触发式传感器触发行程的测定装置及方法
DE102012215215A1 (de) * 2012-08-27 2014-05-28 Inb Vision Ag Verfahren und Vorrichtung zum Erkennen von Abweichungen einer Oberfläche eines Objekts
JP2014130091A (ja) * 2012-12-28 2014-07-10 Canon Inc 測定装置および測定方法
CN103727869A (zh) * 2013-09-22 2014-04-16 雷孔成 袖珍三坐标测长仪
US20150178484A1 (en) 2013-12-20 2015-06-25 Mitutoyo Corporation Remote Accessory Management in a Programming Environment for a Progammable Metrology System
US9606525B2 (en) 2013-12-23 2017-03-28 Mitutoyo Corporation Remote accessory for generating customized and synchronized reference notes for a programmable metrology system
US9250055B2 (en) 2014-05-09 2016-02-02 Mitutoyo Corporation High speed contact detector for measurement sensors
CN103995588B (zh) * 2014-05-14 2017-01-18 沈文策 移动距离的获取方法、装置及其应用方法和装置
US9759540B2 (en) 2014-06-11 2017-09-12 Hexagon Metrology, Inc. Articulating CMM probe
DE102014112396B4 (de) * 2014-08-28 2022-01-13 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Einzelpunktantastung eines Werkstücks und Koordinatenmessgerät
JP6216400B2 (ja) * 2016-02-26 2017-10-18 株式会社ミツトヨ 測定プローブ
JP6212148B2 (ja) * 2016-02-26 2017-10-11 株式会社ミツトヨ 測定プローブ
CN106482702A (zh) * 2016-09-26 2017-03-08 昆山工研院新型平板显示技术中心有限公司 一种测试基板翘曲的方法及装置
EP3470777B1 (de) 2017-10-10 2021-09-29 Hexagon Technology Center GmbH System, verfahren und computerprogrammprodukt zur bestimmung eines zustands einer werkzeugpositionierungsmaschine
CN110296674B (zh) * 2019-06-12 2021-07-30 智久(厦门)机器人科技有限公司 一种深度相机的距离误差补偿方法、装置、存储介质
DE102019122655A1 (de) * 2019-08-22 2021-02-25 M & H Inprocess Messtechnik Gmbh Messsystem

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GB2045437B (en) * 1979-03-30 1984-02-08 Renishaw Electrical Ltd Coordinate measuring machine
US4362978A (en) * 1980-10-27 1982-12-07 Unimation, Inc. Control system for manipulator apparatus
US4484118A (en) * 1981-08-29 1984-11-20 Toshiba Kikai Kabushiki Kaisha Method and apparatus for measuring a workpiece
DE3336854C2 (de) * 1983-10-11 1986-01-16 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Tasteinrichtung zur Ermittlung von Lage und/oder Abmessungen eines Prüfobjekts
DE3523188A1 (de) * 1985-06-28 1987-01-08 Zeiss Carl Fa Steuerung fuer koordinatenmessgeraete
GB8920447D0 (en) * 1989-09-09 1989-10-25 Renishaw Plc Method and apparatus of datuming a coordinate positioning machine
NO911774D0 (no) * 1991-05-06 1991-05-06 Sensonor As Anordning ved innkapsling av et funksjonsorgan, samt fremgangsmaate for fremstilling av samme.
GB9110818D0 (en) * 1991-05-21 1991-07-10 Renishaw Metrology Ltd A method of measuring workpieces using a surface contacting measuring probe
DE4204602A1 (de) * 1992-02-15 1993-08-19 Zeiss Carl Fa Verfahren zur koordinatenmessung an werkstuecken
JP2902205B2 (ja) * 1992-03-06 1999-06-07 株式会社ミツトヨ 空間誤差補正装置
DE4245012B4 (de) * 1992-04-14 2004-09-23 Carl Zeiss Verfahren zur Messung von Formelementen auf einem Koordinatenmeßgerät
US5657549A (en) * 1995-10-04 1997-08-19 Shen; Yin-Lin Method of improving accuracy of touch trigger probe

Also Published As

Publication number Publication date
EP0858015B1 (de) 2003-05-07
EP0858015A1 (de) 1998-08-12
US6044569A (en) 2000-04-04
CN1191301A (zh) 1998-08-26
CN1136430C (zh) 2004-01-28
DE69814198T2 (de) 2004-04-08

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee