DE69828411D1 - Verfahren und vorrichtung zur herstellung von hri-filmen - Google Patents

Verfahren und vorrichtung zur herstellung von hri-filmen

Info

Publication number
DE69828411D1
DE69828411D1 DE69828411T DE69828411T DE69828411D1 DE 69828411 D1 DE69828411 D1 DE 69828411D1 DE 69828411 T DE69828411 T DE 69828411T DE 69828411 T DE69828411 T DE 69828411T DE 69828411 D1 DE69828411 D1 DE 69828411D1
Authority
DE
Germany
Prior art keywords
vaporizer
vapor
film
lip
flexible wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69828411T
Other languages
English (en)
Inventor
S Barnard
R Gervais
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Crown Roll Leaf Inc
Original Assignee
Crown Roll Leaf Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Crown Roll Leaf Inc filed Critical Crown Roll Leaf Inc
Application granted granted Critical
Publication of DE69828411D1 publication Critical patent/DE69828411D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623—Sulfides, selenides or tellurides
    • C23C14/0629—Sulfides, selenides or tellurides of zinc, cadmium or mercury
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
DE69828411T 1997-06-04 1998-06-02 Verfahren und vorrichtung zur herstellung von hri-filmen Expired - Lifetime DE69828411D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/869,076 US5951769A (en) 1997-06-04 1997-06-04 Method and apparatus for making high refractive index (HRI) film
PCT/US1998/011139 WO1998055665A1 (en) 1997-06-04 1998-06-02 Method and apparatus for making high refractive index (hri) film

Publications (1)

Publication Number Publication Date
DE69828411D1 true DE69828411D1 (de) 2005-02-03

Family

ID=25352879

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69828411T Expired - Lifetime DE69828411D1 (de) 1997-06-04 1998-06-02 Verfahren und vorrichtung zur herstellung von hri-filmen

Country Status (6)

Country Link
US (2) US5951769A (de)
EP (1) EP1007755B1 (de)
AT (1) ATE286154T1 (de)
AU (1) AU7606498A (de)
DE (1) DE69828411D1 (de)
WO (1) WO1998055665A1 (de)

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JP2005029895A (ja) * 2003-07-04 2005-02-03 Agfa Gevaert Nv 蒸着装置
US7951421B2 (en) * 2006-04-20 2011-05-31 Global Oled Technology Llc Vapor deposition of a layer
WO2012030792A1 (en) * 2010-08-30 2012-03-08 First Solar, Inc. Vapor deposition system
JP5709588B2 (ja) * 2011-03-03 2015-04-30 ホーヤ レンズ マニュファクチャリング フィリピン インク 蒸着装置
US20130037251A1 (en) * 2011-08-11 2013-02-14 General Electric Company Liquid cooled thermal control system and method for cooling an imaging detector
CN102978572A (zh) * 2011-09-07 2013-03-20 无锡尚德太阳能电力有限公司 制备CdTe薄膜的方法及热蒸发设备
KR102054477B1 (ko) * 2013-04-05 2019-12-11 삼성디스플레이 주식회사 박막 증착 장치
US10184168B2 (en) 2015-01-20 2019-01-22 Kennametal Inc. IMC evaporator boat-thermal insulation cartridge assembly
US20160208373A1 (en) * 2015-01-20 2016-07-21 Kennametal Inc. Imc evaporator boat assembly
JP5938155B1 (ja) * 2015-04-24 2016-06-22 大塚電子株式会社 光学測定装置および光学測定方法
DE102019110950A1 (de) 2019-04-29 2020-10-29 Kennametal Inc. Hartmetallzusammensetzungen und deren Anwendungen

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Also Published As

Publication number Publication date
EP1007755A1 (de) 2000-06-14
US6194031B1 (en) 2001-02-27
AU7606498A (en) 1998-12-21
US5951769A (en) 1999-09-14
EP1007755A4 (de) 2000-10-04
WO1998055665A1 (en) 1998-12-10
EP1007755B1 (de) 2004-12-29
ATE286154T1 (de) 2005-01-15

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Legal Events

Date Code Title Description
8332 No legal effect for de