DE69836730D1 - Hochauflösende röntgenbilderdarstellung von sehr kleinen objekten - Google Patents
Hochauflösende röntgenbilderdarstellung von sehr kleinen objektenInfo
- Publication number
- DE69836730D1 DE69836730D1 DE69836730T DE69836730T DE69836730D1 DE 69836730 D1 DE69836730 D1 DE 69836730D1 DE 69836730 T DE69836730 T DE 69836730T DE 69836730 T DE69836730 T DE 69836730T DE 69836730 D1 DE69836730 D1 DE 69836730D1
- Authority
- DE
- Germany
- Prior art keywords
- pct
- resolution
- ray image
- sample
- small objects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005855 radiation Effects 0.000 abstract 2
- 238000001514 detection method Methods 0.000 abstract 1
- 238000003384 imaging method Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K7/00—Gamma- or X-ray microscopes
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
- G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AUPO6041A AUPO604197A0 (en) | 1997-04-08 | 1997-04-08 | Deriving a phase-contrast image |
AUPO604197 | 1997-04-08 | ||
AUPO7453A AUPO745397A0 (en) | 1997-06-20 | 1997-06-20 | High resolution x-ray imaging of very small objects |
AUPO745397 | 1997-06-20 | ||
PCT/AU1998/000237 WO1998045853A1 (en) | 1997-04-08 | 1998-04-08 | High resolution x-ray imaging of very small objects |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69836730D1 true DE69836730D1 (de) | 2007-02-08 |
DE69836730T2 DE69836730T2 (de) | 2007-10-04 |
Family
ID=25645392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69836730T Expired - Fee Related DE69836730T2 (de) | 1997-04-08 | 1998-04-08 | Hochauflösende röntgenbilderdarstellung von sehr kleinen objekten |
Country Status (12)
Country | Link |
---|---|
US (2) | US6163590A (de) |
EP (1) | EP0974149B1 (de) |
JP (1) | JP2001519022A (de) |
KR (1) | KR100606490B1 (de) |
CN (1) | CN1175430C (de) |
AT (1) | ATE349757T1 (de) |
CA (1) | CA2285296C (de) |
DE (1) | DE69836730T2 (de) |
HK (1) | HK1026505A1 (de) |
IL (1) | IL132351A (de) |
RU (1) | RU2224311C2 (de) |
WO (1) | WO1998045853A1 (de) |
Families Citing this family (79)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2285296C (en) * | 1997-04-08 | 2007-12-04 | Stephen William Wilkins | High resolution x-ray imaging of very small objects |
EP1126477A3 (de) * | 2000-02-14 | 2003-06-18 | Leica Microsystems Lithography GmbH | Verfahren zur Untersuchung von Strukturen auf einem Halbleiter-Substrat |
AUPQ831200A0 (en) * | 2000-06-22 | 2000-07-13 | X-Ray Technologies Pty Ltd | X-ray micro-target source |
WO2003040712A1 (en) * | 2001-11-05 | 2003-05-15 | Vanderbilt University | Phase-contrast enhanced computed tomography |
US7186022B2 (en) * | 2002-01-31 | 2007-03-06 | The Johns Hopkins University | X-ray source and method for more efficiently producing selectable x-ray frequencies |
KR100592956B1 (ko) * | 2002-06-03 | 2006-06-23 | 삼성전자주식회사 | 방사선 영상 장치 및 초점 조정 방법 |
JP3998556B2 (ja) * | 2002-10-17 | 2007-10-31 | 株式会社東研 | 高分解能x線顕微検査装置 |
US7130379B2 (en) * | 2003-05-28 | 2006-10-31 | International Business Machines Corporation | Device and method for generating an x-ray point source by geometric confinement |
US20070025504A1 (en) * | 2003-06-20 | 2007-02-01 | Tumer Tumay O | System for molecular imaging |
US7394890B1 (en) * | 2003-11-07 | 2008-07-01 | Xradia, Inc. | Optimized x-ray energy for high resolution imaging of integrated circuits structures |
US7218703B2 (en) * | 2003-11-21 | 2007-05-15 | Tohken Co., Ltd. | X-ray microscopic inspection apparatus |
EP1679733A3 (de) * | 2004-01-23 | 2007-04-04 | Tohken Co., Ltd. | Röntgenmikroskopischer Inspektionsapparat |
EP1557865A1 (de) * | 2004-01-23 | 2005-07-27 | Tohken Co., Ltd. | Mikrofokus-Röntgenröhre für ein Inspektionsmikroskop |
US7286640B2 (en) * | 2004-04-09 | 2007-10-23 | Xradia, Inc. | Dual-band detector system for x-ray imaging of biological samples |
US7412024B1 (en) * | 2004-04-09 | 2008-08-12 | Xradia, Inc. | X-ray mammography |
US7006741B1 (en) * | 2005-03-22 | 2006-02-28 | Bi Yu | Contact-field optical microscope |
GB0509611D0 (en) * | 2005-05-11 | 2005-06-15 | Amersham Biosciences Ab | Method and device for imaging a sample |
DE102005041923A1 (de) * | 2005-09-03 | 2007-03-08 | Comet Gmbh | Vorrichtung zur Erzeugung von Röntgen- oder XUV-Strahlung |
DE202005017496U1 (de) * | 2005-11-07 | 2007-03-15 | Comet Gmbh | Target für eine Mikrofocus- oder Nanofocus-Röntgenröhre |
DE102006037256B4 (de) | 2006-02-01 | 2017-03-30 | Paul Scherer Institut | Fokus-Detektor-Anordnung einer Röntgenapparatur zur Erzeugung projektiver oder tomographischer Phasenkontrastaufnahmen sowie Röntgensystem, Röntgen-C-Bogen-System und Röntgen-CT-System |
DE102006037255A1 (de) * | 2006-02-01 | 2007-08-02 | Siemens Ag | Fokus-Detektor-Anordnung einer Röntgenapparatur zur Erzeugung projektiver oder tomographischer Phasenkontrastaufnahmen |
DE102006037282B4 (de) * | 2006-02-01 | 2017-08-17 | Siemens Healthcare Gmbh | Fokus-Detektor-Anordnung mit röntgenoptischem Gitter zur Phasenkontrastmessung |
DE102006030874B4 (de) * | 2006-07-04 | 2013-03-14 | Pro-Beam Ag & Co. Kgaa | Verfahren und Vorrichtung zur Bearbeitung von Werkstücken |
JP2009210371A (ja) * | 2008-03-04 | 2009-09-17 | Tohken Co Ltd | 低加速電圧x線顕微装置 |
US7787588B1 (en) * | 2008-07-21 | 2010-08-31 | Xradia, Inc. | System and method for quantitative reconstruction of Zernike phase-contrast images |
JP4565168B2 (ja) * | 2009-01-29 | 2010-10-20 | 独立行政法人産業技術総合研究所 | 走査型x線顕微鏡および走査型x線顕微鏡像の観察方法 |
JP5317120B2 (ja) * | 2009-05-22 | 2013-10-16 | 独立行政法人産業技術総合研究所 | X線顕微鏡用試料収容セル、x線顕微鏡、およびx線顕微鏡像の観察方法 |
EP2509487A1 (de) * | 2009-12-10 | 2012-10-17 | Koninklijke Philips Electronics N.V. | Kalibrierung von bildsystemen mit verschiedenem phasenkontrast |
JP5626757B2 (ja) * | 2010-02-24 | 2014-11-19 | 独立行政法人産業技術総合研究所 | X線顕微鏡像観察用試料支持部材、x線顕微鏡像観察用試料収容セル、およびx線顕微鏡 |
JP2011209118A (ja) * | 2010-03-30 | 2011-10-20 | Jeol Ltd | X線顕微鏡及びx線を用いた顕微方法。 |
CN101846497A (zh) * | 2010-04-29 | 2010-09-29 | 上海宏力半导体制造有限公司 | 关键尺寸矫正方法及其装置 |
JP5750763B2 (ja) * | 2011-09-09 | 2015-07-22 | 国立研究開発法人産業技術総合研究所 | X線顕微鏡用試料収容セルおよびx線顕微鏡像の観察方法 |
US20150117599A1 (en) | 2013-10-31 | 2015-04-30 | Sigray, Inc. | X-ray interferometric imaging system |
US9237876B2 (en) * | 2012-09-20 | 2016-01-19 | University Of Houston System | Single step X-ray phase imaging |
DE102012221885A1 (de) * | 2012-11-29 | 2014-06-05 | Siemens Aktiengesellschaft | Verfahren und Vorrichtung zur Vorbereitung einer Probe für die Invitrodiagnostik |
US10269528B2 (en) | 2013-09-19 | 2019-04-23 | Sigray, Inc. | Diverging X-ray sources using linear accumulation |
US10295485B2 (en) | 2013-12-05 | 2019-05-21 | Sigray, Inc. | X-ray transmission spectrometer system |
US9449781B2 (en) | 2013-12-05 | 2016-09-20 | Sigray, Inc. | X-ray illuminators with high flux and high flux density |
US9390881B2 (en) | 2013-09-19 | 2016-07-12 | Sigray, Inc. | X-ray sources using linear accumulation |
US10297359B2 (en) | 2013-09-19 | 2019-05-21 | Sigray, Inc. | X-ray illumination system with multiple target microstructures |
US9448190B2 (en) | 2014-06-06 | 2016-09-20 | Sigray, Inc. | High brightness X-ray absorption spectroscopy system |
US9570265B1 (en) | 2013-12-05 | 2017-02-14 | Sigray, Inc. | X-ray fluorescence system with high flux and high flux density |
USRE48612E1 (en) | 2013-10-31 | 2021-06-29 | Sigray, Inc. | X-ray interferometric imaging system |
US10304580B2 (en) | 2013-10-31 | 2019-05-28 | Sigray, Inc. | Talbot X-ray microscope |
CN103558238A (zh) * | 2013-11-11 | 2014-02-05 | 中国工程物理研究院激光聚变研究中心 | 内爆芯部自发射诊断用多光谱显微成像系统 |
US9823203B2 (en) | 2014-02-28 | 2017-11-21 | Sigray, Inc. | X-ray surface analysis and measurement apparatus |
US9594036B2 (en) | 2014-02-28 | 2017-03-14 | Sigray, Inc. | X-ray surface analysis and measurement apparatus |
WO2015134277A1 (en) | 2014-03-05 | 2015-09-11 | Faxitron Bioptics, Llc | System and method for multi-axis imaging of specimens |
CN103839598B (zh) * | 2014-03-26 | 2015-07-15 | 中国工程物理研究院激光聚变研究中心 | 一种内爆双流线诊断系统 |
US10401309B2 (en) | 2014-05-15 | 2019-09-03 | Sigray, Inc. | X-ray techniques using structured illumination |
CN104323790B (zh) * | 2014-10-27 | 2016-09-21 | 中国科学院深圳先进技术研究院 | 同轴相衬成像方法及系统和相衬ct方法及系统 |
US10352880B2 (en) | 2015-04-29 | 2019-07-16 | Sigray, Inc. | Method and apparatus for x-ray microscopy |
US10295486B2 (en) | 2015-08-18 | 2019-05-21 | Sigray, Inc. | Detector for X-rays with high spatial and high spectral resolution |
WO2017040977A1 (en) | 2015-09-04 | 2017-03-09 | Faxitron Bioptics, Llc | Multi-axis specimen imaging device with embedded orientation markers |
CN105486341B (zh) * | 2015-11-25 | 2017-12-08 | 长春乙天科技有限公司 | 一种大幅面高速高精度自动光学检测设备 |
CN105911681A (zh) * | 2016-06-28 | 2016-08-31 | 顾士平 | 高分辨率X射线、γ射线、电子射线显微镜 |
EP3176569B1 (de) * | 2016-10-11 | 2018-12-26 | FEI Company | Anordnung zur röntgentomographie |
WO2018085719A1 (en) * | 2016-11-04 | 2018-05-11 | Hologic, Inc. | Specimen radiography system |
CN106596594B (zh) * | 2016-11-25 | 2018-12-21 | 天津大学 | 一种基于成像系统特性的x射线相位成像方法 |
US10247683B2 (en) | 2016-12-03 | 2019-04-02 | Sigray, Inc. | Material measurement techniques using multiple X-ray micro-beams |
WO2018175570A1 (en) | 2017-03-22 | 2018-09-27 | Sigray, Inc. | Method of performing x-ray spectroscopy and x-ray absorption spectrometer system |
US11317881B2 (en) | 2017-09-11 | 2022-05-03 | Faxitron Bioptics, Llc | Imaging system with adaptive object magnification |
US10578566B2 (en) | 2018-04-03 | 2020-03-03 | Sigray, Inc. | X-ray emission spectrometer system |
US10989822B2 (en) | 2018-06-04 | 2021-04-27 | Sigray, Inc. | Wavelength dispersive x-ray spectrometer |
EP3579664A1 (de) * | 2018-06-08 | 2019-12-11 | Excillum AB | Verfahren zur steuerung einer röntgenquelle |
US10658145B2 (en) | 2018-07-26 | 2020-05-19 | Sigray, Inc. | High brightness x-ray reflection source |
US10656105B2 (en) | 2018-08-06 | 2020-05-19 | Sigray, Inc. | Talbot-lau x-ray source and interferometric system |
CN112638261A (zh) | 2018-09-04 | 2021-04-09 | 斯格瑞公司 | 利用滤波的x射线荧光的系统和方法 |
WO2020051221A2 (en) | 2018-09-07 | 2020-03-12 | Sigray, Inc. | System and method for depth-selectable x-ray analysis |
CN109541675B (zh) * | 2018-12-06 | 2020-05-26 | 四川理工学院 | 基于点源空间效率函数的层析γ扫描体素效率刻度方法 |
US11143605B2 (en) | 2019-09-03 | 2021-10-12 | Sigray, Inc. | System and method for computed laminography x-ray fluorescence imaging |
US11175243B1 (en) | 2020-02-06 | 2021-11-16 | Sigray, Inc. | X-ray dark-field in-line inspection for semiconductor samples |
US20210289610A1 (en) * | 2020-03-10 | 2021-09-16 | Globalfoundries U.S. Inc. | Failure analysis apparatus using x-rays |
CN111289545A (zh) * | 2020-03-18 | 2020-06-16 | 中国工程物理研究院流体物理研究所 | 一种基于相衬成像的高能x射线ct装置及成像方法 |
US11215572B2 (en) | 2020-05-18 | 2022-01-04 | Sigray, Inc. | System and method for x-ray absorption spectroscopy using a crystal analyzer and a plurality of detector elements |
DE112021004828T5 (de) | 2020-09-17 | 2023-08-03 | Sigray, Inc. | System und verfahren unter verwendung von röntgenstrahlen für tiefenauflösende messtechnik und analyse |
US11593938B2 (en) * | 2020-10-04 | 2023-02-28 | Borrirs Pte. Ltd. | Rapid and automatic virus imaging and analysis system as well as methods thereof |
KR20230109735A (ko) | 2020-12-07 | 2023-07-20 | 시그레이, 아이엔씨. | 투과 x-선 소스를 이용한 고처리량 3D x-선 이미징 시스템 |
US11885755B2 (en) | 2022-05-02 | 2024-01-30 | Sigray, Inc. | X-ray sequential array wavelength dispersive spectrometer |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
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US5044001A (en) * | 1987-12-07 | 1991-08-27 | Nanod Ynamics, Inc. | Method and apparatus for investigating materials with X-rays |
US5042058A (en) * | 1989-03-22 | 1991-08-20 | University Of California | Ultrashort time-resolved x-ray source |
US5045696A (en) * | 1989-03-31 | 1991-09-03 | Shimadzu Corporation | Photoelectron microscope |
US5004919A (en) * | 1989-07-05 | 1991-04-02 | Jeol, Ltd. | Transmission electron microscope |
EP0432568A3 (en) * | 1989-12-11 | 1991-08-28 | General Electric Company | X ray tube anode and tube having same |
DE4027285A1 (de) * | 1990-08-29 | 1992-03-05 | Zeiss Carl Fa | Roentgenmikroskop |
US5528646A (en) * | 1992-08-27 | 1996-06-18 | Olympus Optical Co., Ltd. | Sample vessel for X-ray microscopes |
US5285061A (en) * | 1992-08-28 | 1994-02-08 | Csl Opto-Electronics Corp. | X-ray photocathode for a real time x-ray image intensifier |
JP2927627B2 (ja) * | 1992-10-20 | 1999-07-28 | 株式会社日立製作所 | 走査電子顕微鏡 |
US5550378A (en) * | 1993-04-05 | 1996-08-27 | Cardiac Mariners, Incorporated | X-ray detector |
US5349624A (en) * | 1993-05-21 | 1994-09-20 | The United States Of America As Represented By The Secretary Of The Navy | Solid particle contaminant detection and analysis system |
US5402460A (en) * | 1993-08-02 | 1995-03-28 | University Of Washington | Three-dimensional microtomographic analysis system |
JP3184675B2 (ja) * | 1993-09-22 | 2001-07-09 | 株式会社東芝 | 微細パターンの測定装置 |
JP3191554B2 (ja) * | 1994-03-18 | 2001-07-23 | 株式会社日立製作所 | X線撮像装置 |
US5680429A (en) * | 1995-01-18 | 1997-10-21 | Shimadzu Corporation | X-ray generating apparatus and X-ray microscope |
AUPN201295A0 (en) * | 1995-03-28 | 1995-04-27 | Commonwealth Scientific And Industrial Research Organisation | Simplified conditions and configurations for phase-contrast imaging with hard x-rays |
US5563415A (en) * | 1995-06-07 | 1996-10-08 | Arch Development Corporation | Magnetic lens apparatus for a low-voltage high-resolution electron microscope |
JP2642907B2 (ja) * | 1995-06-14 | 1997-08-20 | 工業技術院長 | X線露光装置 |
JPH095500A (ja) * | 1995-06-26 | 1997-01-10 | Shimadzu Corp | X線顕微鏡 |
CA2285296C (en) * | 1997-04-08 | 2007-12-04 | Stephen William Wilkins | High resolution x-ray imaging of very small objects |
-
1998
- 1998-04-08 CA CA002285296A patent/CA2285296C/en not_active Expired - Fee Related
- 1998-04-08 IL IL13235198A patent/IL132351A/xx not_active IP Right Cessation
- 1998-04-08 US US09/180,878 patent/US6163590A/en not_active Expired - Fee Related
- 1998-04-08 KR KR1019997009281A patent/KR100606490B1/ko not_active IP Right Cessation
- 1998-04-08 RU RU99123366/06A patent/RU2224311C2/ru active
- 1998-04-08 JP JP54214998A patent/JP2001519022A/ja not_active Ceased
- 1998-04-08 WO PCT/AU1998/000237 patent/WO1998045853A1/en active IP Right Grant
- 1998-04-08 DE DE69836730T patent/DE69836730T2/de not_active Expired - Fee Related
- 1998-04-08 CN CNB988039842A patent/CN1175430C/zh not_active Expired - Fee Related
- 1998-04-08 EP EP98913430A patent/EP0974149B1/de not_active Expired - Lifetime
- 1998-04-08 AT AT98913430T patent/ATE349757T1/de not_active IP Right Cessation
-
2000
- 2000-09-14 HK HK00105776A patent/HK1026505A1/xx not_active IP Right Cessation
- 2000-12-05 US US09/730,960 patent/US6430254B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20010006201A (ko) | 2001-01-26 |
EP0974149B1 (de) | 2006-12-27 |
CA2285296C (en) | 2007-12-04 |
US6430254B2 (en) | 2002-08-06 |
IL132351A (en) | 2003-03-12 |
IL132351A0 (en) | 2001-03-19 |
EP0974149A1 (de) | 2000-01-26 |
JP2001519022A (ja) | 2001-10-16 |
CN1175430C (zh) | 2004-11-10 |
RU2224311C2 (ru) | 2004-02-20 |
KR100606490B1 (ko) | 2006-07-31 |
CN1252158A (zh) | 2000-05-03 |
US20010001010A1 (en) | 2001-05-10 |
WO1998045853A1 (en) | 1998-10-15 |
HK1026505A1 (en) | 2000-12-15 |
DE69836730T2 (de) | 2007-10-04 |
ATE349757T1 (de) | 2007-01-15 |
US6163590A (en) | 2000-12-19 |
CA2285296A1 (en) | 1998-10-15 |
EP0974149A4 (de) | 2004-05-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |