DE69918063D1 - Reaktor zur radiofrequenz betriebenen plasma-aktivierten chemischen dampfabscheidung und verfahren - Google Patents
Reaktor zur radiofrequenz betriebenen plasma-aktivierten chemischen dampfabscheidung und verfahrenInfo
- Publication number
- DE69918063D1 DE69918063D1 DE69918063T DE69918063T DE69918063D1 DE 69918063 D1 DE69918063 D1 DE 69918063D1 DE 69918063 T DE69918063 T DE 69918063T DE 69918063 T DE69918063 T DE 69918063T DE 69918063 D1 DE69918063 D1 DE 69918063D1
- Authority
- DE
- Germany
- Prior art keywords
- frequency
- electrode
- vapor deposition
- chemical vapor
- power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
- C23C16/5096—Flat-bed apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
- H01J37/32155—Frequency modulation
- H01J37/32165—Plural frequencies
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/026,566 US6112697A (en) | 1998-02-19 | 1998-02-19 | RF powered plasma enhanced chemical vapor deposition reactor and methods |
US26566 | 1998-02-19 | ||
PCT/US1999/003229 WO1999043017A1 (en) | 1998-02-19 | 1999-02-16 | Rf powered plasma enhanced chemical vapor deposition reactor and methods |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69918063D1 true DE69918063D1 (de) | 2004-07-22 |
DE69918063T2 DE69918063T2 (de) | 2005-06-30 |
Family
ID=21832548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69918063T Expired - Lifetime DE69918063T2 (de) | 1998-02-19 | 1999-02-16 | Reaktor zur radiofrequenz betriebenen plasma-aktivierten chemischen dampfabscheidung und verfahren |
Country Status (9)
Country | Link |
---|---|
US (2) | US6112697A (de) |
EP (1) | EP1057207B1 (de) |
JP (2) | JP3822055B2 (de) |
KR (1) | KR100388529B1 (de) |
AT (1) | ATE269586T1 (de) |
AU (1) | AU3293999A (de) |
DE (1) | DE69918063T2 (de) |
TW (1) | TW523830B (de) |
WO (1) | WO1999043017A1 (de) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2806324B1 (fr) * | 2000-03-15 | 2002-09-27 | Air Liquide | Procede et dispositif de mise en oeuvre d'une reaction chimique et procede de traitement de surface utilisant de tels procede et dispositif |
US6857387B1 (en) | 2000-05-03 | 2005-02-22 | Applied Materials, Inc. | Multiple frequency plasma chamber with grounding capacitor at cathode |
US6562684B1 (en) | 2000-08-30 | 2003-05-13 | Micron Technology, Inc. | Methods of forming dielectric materials |
US6782337B2 (en) | 2000-09-20 | 2004-08-24 | Kla-Tencor Technologies Corp. | Methods and systems for determining a critical dimension an a presence of defects on a specimen |
US7196782B2 (en) | 2000-09-20 | 2007-03-27 | Kla-Tencor Technologies Corp. | Methods and systems for determining a thin film characteristic and an electrical property of a specimen |
US6673637B2 (en) | 2000-09-20 | 2004-01-06 | Kla-Tencor Technologies | Methods and systems for determining a presence of macro defects and overlay of a specimen |
US6891627B1 (en) | 2000-09-20 | 2005-05-10 | Kla-Tencor Technologies Corp. | Methods and systems for determining a critical dimension and overlay of a specimen |
US6694284B1 (en) | 2000-09-20 | 2004-02-17 | Kla-Tencor Technologies Corp. | Methods and systems for determining at least four properties of a specimen |
US6812045B1 (en) | 2000-09-20 | 2004-11-02 | Kla-Tencor, Inc. | Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation |
JP4877884B2 (ja) * | 2001-01-25 | 2012-02-15 | 東京エレクトロン株式会社 | プラズマ処理装置 |
WO2002095800A2 (en) * | 2001-05-22 | 2002-11-28 | Reflectivity, Inc. | A method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants |
US20040025791A1 (en) * | 2002-08-09 | 2004-02-12 | Applied Materials, Inc. | Etch chamber with dual frequency biasing sources and a single frequency plasma generating source |
US6838012B2 (en) * | 2002-10-31 | 2005-01-04 | Lam Research Corporation | Methods for etching dielectric materials |
US20040188240A1 (en) * | 2003-03-28 | 2004-09-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | Process for in-situ nitridation of salicides |
GB0309932D0 (en) * | 2003-04-30 | 2003-06-04 | Boc Group Plc | Apparatus and method for forming a plasma |
US7431857B2 (en) * | 2003-08-15 | 2008-10-07 | Applied Materials, Inc. | Plasma generation and control using a dual frequency RF source |
US20050118541A1 (en) * | 2003-11-28 | 2005-06-02 | Applied Materials, Inc. | Maintenance of photoresist adhesion and activity on the surface of dielectric ARCS for 90 nm feature sizes |
US7829471B2 (en) | 2005-07-29 | 2010-11-09 | Applied Materials, Inc. | Cluster tool and method for process integration in manufacturing of a photomask |
US20070031609A1 (en) | 2005-07-29 | 2007-02-08 | Ajay Kumar | Chemical vapor deposition chamber with dual frequency bias and method for manufacturing a photomask using the same |
US7375038B2 (en) | 2005-09-28 | 2008-05-20 | Applied Materials, Inc. | Method for plasma etching a chromium layer through a carbon hard mask suitable for photomask fabrication |
US7695633B2 (en) * | 2005-10-18 | 2010-04-13 | Applied Materials, Inc. | Independent control of ion density, ion energy distribution and ion dissociation in a plasma reactor |
US20070246162A1 (en) * | 2006-04-24 | 2007-10-25 | Applied Materials, Inc. | Plasma reactor apparatus with an inductive plasma source and a VHF capacitively coupled plasma source with variable frequency |
US7727413B2 (en) * | 2006-04-24 | 2010-06-01 | Applied Materials, Inc. | Dual plasma source process using a variable frequency capacitively coupled source to control plasma ion density |
US20070245958A1 (en) * | 2006-04-24 | 2007-10-25 | Applied Materials, Inc. | Dual plasma source process using a variable frequency capacitively coupled source for controlling ion radial distribution |
US20070245960A1 (en) * | 2006-04-24 | 2007-10-25 | Applied Materials, Inc. | Process using combined capacitively and inductively coupled plasma sources for controlling plasma ion density |
US20070246163A1 (en) * | 2006-04-24 | 2007-10-25 | Applied Materials, Inc. | Plasma reactor apparatus with independent capacitive and inductive plasma sources |
US20070246443A1 (en) * | 2006-04-24 | 2007-10-25 | Applied Materials, Inc. | Process using combined capacitively and inductively coupled plasma process for controlling plasma ion dissociation |
US20070245961A1 (en) * | 2006-04-24 | 2007-10-25 | Applied Materials, Inc. | Dual plasma source process using a variable frequency capacitively coupled source for controlling plasma ion dissociation |
US7645357B2 (en) * | 2006-04-24 | 2010-01-12 | Applied Materials, Inc. | Plasma reactor apparatus with a VHF capacitively coupled plasma source of variable frequency |
US20070246161A1 (en) * | 2006-04-24 | 2007-10-25 | Applied Materials, Inc. | Plasma reactor apparatus with a toroidal plasma source and a VHF capacitively coupled plasma source with variable frequency |
US7780864B2 (en) | 2006-04-24 | 2010-08-24 | Applied Materials, Inc. | Process using combined capacitively and inductively coupled plasma sources for controlling plasma ion radial distribution |
US8673080B2 (en) | 2007-10-16 | 2014-03-18 | Novellus Systems, Inc. | Temperature controlled showerhead |
US20090104541A1 (en) * | 2007-10-23 | 2009-04-23 | Eui Kyoon Kim | Plasma surface treatment to prevent pattern collapse in immersion lithography |
US20090188625A1 (en) * | 2008-01-28 | 2009-07-30 | Carducci James D | Etching chamber having flow equalizer and lower liner |
US8637794B2 (en) | 2009-10-21 | 2014-01-28 | Lam Research Corporation | Heating plate with planar heating zones for semiconductor processing |
US9034142B2 (en) * | 2009-12-18 | 2015-05-19 | Novellus Systems, Inc. | Temperature controlled showerhead for high temperature operations |
KR101415552B1 (ko) * | 2009-12-21 | 2014-07-07 | 주식회사 미코 | 접지구조물, 이를 구비하는 히터 및 화학기상 증착장치 |
JP5730521B2 (ja) | 2010-09-08 | 2015-06-10 | 株式会社日立ハイテクノロジーズ | 熱処理装置 |
US8791392B2 (en) | 2010-10-22 | 2014-07-29 | Lam Research Corporation | Methods of fault detection for multiplexed heater array |
KR101937115B1 (ko) | 2011-03-04 | 2019-01-09 | 노벨러스 시스템즈, 인코포레이티드 | 하이브리드 세라믹 샤워헤드 |
US8618446B2 (en) | 2011-06-30 | 2013-12-31 | Applied Materials, Inc. | Substrate support with substrate heater and symmetric RF return |
US10741365B2 (en) | 2014-05-05 | 2020-08-11 | Lam Research Corporation | Low volume showerhead with porous baffle |
US10378107B2 (en) | 2015-05-22 | 2019-08-13 | Lam Research Corporation | Low volume showerhead with faceplate holes for improved flow uniformity |
US10023959B2 (en) | 2015-05-26 | 2018-07-17 | Lam Research Corporation | Anti-transient showerhead |
US10332810B2 (en) | 2016-10-24 | 2019-06-25 | Kla-Tencor Corp. | Process modules integrated into a metrology and/or inspection tool |
US20200098562A1 (en) * | 2018-09-26 | 2020-03-26 | Lam Research Corporation | Dual frequency silane-based silicon dioxide deposition to minimize film instability |
Family Cites Families (35)
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US4585516A (en) * | 1985-03-04 | 1986-04-29 | Tegal Corporation | Variable duty cycle, multiple frequency, plasma reactor |
US5230931A (en) * | 1987-08-10 | 1993-07-27 | Semiconductor Energy Laboratory Co., Ltd. | Plasma-assisted cvd of carbonaceous films by using a bias voltage |
US4887005A (en) | 1987-09-15 | 1989-12-12 | Rough J Kirkwood H | Multiple electrode plasma reactor power distribution system |
JP2629871B2 (ja) | 1988-08-29 | 1997-07-16 | スズキ株式会社 | 車両用変速機 |
JPH02213480A (ja) * | 1989-02-14 | 1990-08-24 | Nippon Light Metal Co Ltd | 高周波プラズマ発生用アルミニウム電極 |
JPH02298024A (ja) * | 1989-05-12 | 1990-12-10 | Tadahiro Omi | リアクティブイオンエッチング装置 |
JP3016821B2 (ja) * | 1990-06-15 | 2000-03-06 | 東京エレクトロン株式会社 | プラズマ処理方法 |
FR2663806A1 (fr) * | 1990-06-25 | 1991-12-27 | Commissariat Energie Atomique | Reacteur a plasma du type triode, utilisable notamment pour la gravure, le depot ou le nettoyage de surfaces. |
DE4025396A1 (de) * | 1990-08-10 | 1992-02-13 | Leybold Ag | Einrichtung fuer die herstellung eines plasmas |
US5052339A (en) * | 1990-10-16 | 1991-10-01 | Air Products And Chemicals, Inc. | Radio frequency plasma enhanced chemical vapor deposition process and reactor |
JPH04362091A (ja) * | 1991-06-05 | 1992-12-15 | Mitsubishi Heavy Ind Ltd | プラズマ化学気相成長装置 |
US5260236A (en) * | 1991-06-07 | 1993-11-09 | Intel Corporation | UV transparent oxynitride deposition in single wafer PECVD system |
JPH05175163A (ja) * | 1991-12-24 | 1993-07-13 | Mitsubishi Electric Corp | プラズマ処理装置 |
EP0849766A3 (de) * | 1992-01-24 | 1998-10-14 | Applied Materials, Inc. | Ätzverfahren |
JP3122228B2 (ja) * | 1992-05-13 | 2001-01-09 | 忠弘 大見 | プロセス装置 |
US5567267A (en) * | 1992-11-20 | 1996-10-22 | Tokyo Electron Limited | Method of controlling temperature of susceptor |
US5665167A (en) * | 1993-02-16 | 1997-09-09 | Tokyo Electron Kabushiki Kaisha | Plasma treatment apparatus having a workpiece-side electrode grounding circuit |
JP3351843B2 (ja) * | 1993-02-24 | 2002-12-03 | 忠弘 大見 | 成膜方法 |
US5439524A (en) * | 1993-04-05 | 1995-08-08 | Vlsi Technology, Inc. | Plasma processing apparatus |
US5433786A (en) * | 1993-08-27 | 1995-07-18 | The Dow Chemical Company | Apparatus for plasma enhanced chemical vapor deposition comprising shower head electrode with magnet disposed therein |
US5468296A (en) * | 1993-12-17 | 1995-11-21 | Lsi Logic Corporation | Apparatus for igniting low pressure inductively coupled plasma |
US5900103A (en) * | 1994-04-20 | 1999-05-04 | Tokyo Electron Limited | Plasma treatment method and apparatus |
DE69512371T2 (de) * | 1994-05-13 | 2000-04-06 | Applied Materials Inc | Magnetisch verbesserte multiple kapazitive plasmagenerationsvorrichtung und verfahren |
US5607542A (en) * | 1994-11-01 | 1997-03-04 | Applied Materials Inc. | Inductively enhanced reactive ion etching |
US5716534A (en) * | 1994-12-05 | 1998-02-10 | Tokyo Electron Limited | Plasma processing method and plasma etching method |
US5605637A (en) * | 1994-12-15 | 1997-02-25 | Applied Materials Inc. | Adjustable dc bias control in a plasma reactor |
US5710486A (en) * | 1995-05-08 | 1998-01-20 | Applied Materials, Inc. | Inductively and multi-capacitively coupled plasma reactor |
EP0831679B1 (de) | 1995-06-05 | 2008-10-01 | Musashino Kikai Co., Ltd. | Leistungsversorgung für multielektroden-entladung |
TW434745B (en) * | 1995-06-07 | 2001-05-16 | Tokyo Electron Ltd | Plasma processing apparatus |
US5656123A (en) * | 1995-06-07 | 1997-08-12 | Varian Associates, Inc. | Dual-frequency capacitively-coupled plasma reactor for materials processing |
JP2814370B2 (ja) * | 1995-06-18 | 1998-10-22 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US5865937A (en) * | 1995-08-21 | 1999-02-02 | Applied Materials, Inc. | Broad-band adjustable power ratio phase-inverting plasma reactor |
EP0776991B1 (de) * | 1995-12-05 | 2002-02-06 | Applied Materials, Inc. | Plasmatempern von Dünnschichten |
JPH09167755A (ja) * | 1995-12-15 | 1997-06-24 | Nec Corp | プラズマ酸化膜処理装置 |
US5981899A (en) | 1997-01-17 | 1999-11-09 | Balzers Aktiengesellschaft | Capacitively coupled RF-plasma reactor |
-
1998
- 1998-02-19 US US09/026,566 patent/US6112697A/en not_active Expired - Lifetime
-
1999
- 1999-02-16 KR KR10-2000-7008726A patent/KR100388529B1/ko not_active IP Right Cessation
- 1999-02-16 WO PCT/US1999/003229 patent/WO1999043017A1/en active IP Right Grant
- 1999-02-16 EP EP99934367A patent/EP1057207B1/de not_active Expired - Lifetime
- 1999-02-16 DE DE69918063T patent/DE69918063T2/de not_active Expired - Lifetime
- 1999-02-16 AU AU32939/99A patent/AU3293999A/en not_active Abandoned
- 1999-02-16 AT AT99934367T patent/ATE269586T1/de not_active IP Right Cessation
- 1999-02-16 JP JP2000532862A patent/JP3822055B2/ja not_active Expired - Fee Related
- 1999-03-15 TW TW088102447A patent/TW523830B/zh active
-
2000
- 2000-06-19 US US09/597,659 patent/US6227141B1/en not_active Expired - Lifetime
-
2003
- 2003-05-26 JP JP2003147766A patent/JP4217883B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO1999043017A1 (en) | 1999-08-26 |
ATE269586T1 (de) | 2004-07-15 |
JP3822055B2 (ja) | 2006-09-13 |
KR20010040831A (ko) | 2001-05-15 |
EP1057207A1 (de) | 2000-12-06 |
US6112697A (en) | 2000-09-05 |
EP1057207B1 (de) | 2004-06-16 |
AU3293999A (en) | 1999-09-06 |
US6227141B1 (en) | 2001-05-08 |
JP2002504748A (ja) | 2002-02-12 |
JP4217883B2 (ja) | 2009-02-04 |
DE69918063T2 (de) | 2005-06-30 |
KR100388529B1 (ko) | 2003-06-25 |
TW523830B (en) | 2003-03-11 |
JP2004006885A (ja) | 2004-01-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |