DE995123T1 - Mikromechanischer drehraten- und beschleunigungssensor - Google Patents

Mikromechanischer drehraten- und beschleunigungssensor

Info

Publication number
DE995123T1
DE995123T1 DE0995123T DE98922405T DE995123T1 DE 995123 T1 DE995123 T1 DE 995123T1 DE 0995123 T DE0995123 T DE 0995123T DE 98922405 T DE98922405 T DE 98922405T DE 995123 T1 DE995123 T1 DE 995123T1
Authority
DE
Germany
Prior art keywords
rate
acceleration sensor
micromechanical
micromechanical rate
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE0995123T
Other languages
English (en)
Inventor
H Hulsing
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
AlliedSignal Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AlliedSignal Inc filed Critical AlliedSignal Inc
Publication of DE995123T1 publication Critical patent/DE995123T1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5769—Manufacturing; Mounting; Housings
DE0995123T 1997-05-27 1998-05-18 Mikromechanischer drehraten- und beschleunigungssensor Pending DE995123T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US4777497P 1997-05-27 1997-05-27
US08/949,883 US5962784A (en) 1997-05-27 1997-10-14 Micromachined rate and acceleration sensor
PCT/US1998/010148 WO1998054582A1 (en) 1997-05-27 1998-05-18 Micromachined rate and acceleration sensor

Publications (1)

Publication Number Publication Date
DE995123T1 true DE995123T1 (de) 2001-04-05

Family

ID=26725418

Family Applications (1)

Application Number Title Priority Date Filing Date
DE0995123T Pending DE995123T1 (de) 1997-05-27 1998-05-18 Mikromechanischer drehraten- und beschleunigungssensor

Country Status (4)

Country Link
US (2) US5962784A (de)
EP (1) EP0995123A1 (de)
DE (1) DE995123T1 (de)
WO (1) WO1998054582A1 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6689694B1 (en) 1998-04-01 2004-02-10 Dong-II Cho Micromechanical system fabrication method using (111) single crystalline silicon
KR100300002B1 (ko) * 1998-04-01 2001-11-22 조동일 (111)단결정실리콘을이용한마이크로머시닝제조방법
AU7859000A (en) * 1999-10-05 2001-05-10 L-3 Communications Corporation A method for improving the performance of micromachined devices
US6497152B2 (en) 2001-02-23 2002-12-24 Paroscientific, Inc. Method for eliminating output discontinuities in digital pressure transducers and digital pressure transducer employing same
US6595054B2 (en) 2001-05-14 2003-07-22 Paroscientific, Inc. Digital angular rate and acceleration sensor
US6848304B2 (en) * 2003-04-28 2005-02-01 Analog Devices, Inc. Six degree-of-freedom micro-machined multi-sensor
US6845665B2 (en) * 2003-04-28 2005-01-25 Analog Devices, Inc. Micro-machined multi-sensor providing 2-axes of acceleration sensing and 1-axis of angular rate sensing
US7444883B2 (en) * 2005-12-22 2008-11-04 Honeywell International Inc. Vibrating beam force transducer
US20080072671A1 (en) * 2006-09-26 2008-03-27 Eldon Eller Leveraged shear mode accelerometers
US9047850B1 (en) 2007-10-17 2015-06-02 David Wiley Beaty Electric instrument music control device with magnetic displacement sensors
US7923623B1 (en) 2007-10-17 2011-04-12 David Beaty Electric instrument music control device with multi-axis position sensors
US8338689B1 (en) 2008-10-17 2012-12-25 Telonics Pro Audio LLC Electric instrument music control device with multi-axis position sensors
JP5978140B2 (ja) * 2013-01-24 2016-08-24 日立オートモティブシステムズ株式会社 慣性センサ
WO2015042700A1 (en) 2013-09-24 2015-04-02 Motion Engine Inc. Mems components and method of wafer-level manufacturing thereof
EP3019442A4 (de) 2013-07-08 2017-01-25 Motion Engine Inc. Mems-vorrichtung und verfahren zur herstellung
US10591373B2 (en) 2013-08-01 2020-03-17 Mts Systems Corporation Load transducer having a biasing assembly
US9778122B2 (en) 2013-08-01 2017-10-03 Mts Systems Corporation Two-axis sensor body for a load transducer
WO2015013828A1 (en) 2013-08-02 2015-02-05 Motion Engine Inc. Mems motion sensor and method of manufacturing
JP6590812B2 (ja) 2014-01-09 2019-10-16 モーション・エンジン・インコーポレーテッド 集積ｍｅｍｓシステム
WO2015154173A1 (en) 2014-04-10 2015-10-15 Motion Engine Inc. Mems pressure sensor
US11674803B2 (en) 2014-06-02 2023-06-13 Motion Engine, Inc. Multi-mass MEMS motion sensor
US9658244B2 (en) 2014-07-08 2017-05-23 Honeywell International Inc. Reducing hysteresis effects in accelerometer
WO2016090467A1 (en) 2014-12-09 2016-06-16 Motion Engine Inc. 3d mems magnetometer and associated methods
US10407299B2 (en) 2015-01-15 2019-09-10 Motion Engine Inc. 3D MEMS device with hermetic cavity
WO2017152101A1 (en) * 2016-03-03 2017-09-08 Mts Systems Corporation Two-axis load transducer with biasing assembly
US10060943B2 (en) 2016-03-18 2018-08-28 Rosemount Aerospace Inc. Symmetric MEMS piezoelectric accelerometer for lateral noise

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2627592B1 (fr) * 1988-02-22 1990-07-27 Sagem Accelerometre pendulaire non asservi a poutre resonante
US4879914A (en) * 1989-02-27 1989-11-14 Sundstrand Data Control, Inc. Unitary push-pull force transducer
US5005413A (en) * 1989-02-27 1991-04-09 Sundstrand Data Control, Inc. Accelerometer with coplanar push-pull force transducers
US5605598A (en) * 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5241861A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
US5331853A (en) * 1991-02-08 1994-07-26 Alliedsignal Inc. Micromachined rate and acceleration sensor
JPH04122366U (ja) * 1991-04-19 1992-11-02 日本航空電子工業株式会社 振動式加速度計
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5476819A (en) * 1993-07-26 1995-12-19 Litton Systems, Inc. Substrate anchor for undercut silicon on insulator microstructures
US5456110A (en) * 1993-11-12 1995-10-10 Alliedsignal Inc. Dual pendulum vibrating beam accelerometer
US5501103B1 (en) * 1994-02-15 1998-08-04 Allied Signal Inc Two-port electromagnetic drive for a double-ended tuning fork
GB2301671B (en) * 1995-05-30 1999-10-13 Allied Signal Inc Angular rate sensor electronic balance
US6282959B1 (en) * 1996-06-11 2001-09-04 Alliedsignal Compensation of second-order non-linearity in sensors employing double-ended tuning forks

Also Published As

Publication number Publication date
US5974879A (en) 1999-11-02
US5962784A (en) 1999-10-05
WO1998054582A1 (en) 1998-12-03
EP0995123A1 (de) 2000-04-26

Similar Documents

Publication Publication Date Title
DE995123T1 (de) Mikromechanischer drehraten- und beschleunigungssensor
DE59605295D1 (de) Mikromechanischer Beschleunigungssensor
DE59607420D1 (de) Mikromechanischer drehratensensor
DE59704257D1 (de) Mikromechanischer sensor
DE59608599D1 (de) Beschleunigungssensor
BR9507972A (pt) Sensor de memória micromecânico
DE59814029D1 (de) Beschleunigungssensor
EP0997737A4 (de) Halbleiter-beschleunigungssensor mit selbstdiagnose
DE59607318D1 (de) Mikromechanisches bauelement
ID24262A (id) Sensor percepatan dan peralatan percepatan menggunakan sensor percepatan
DE69726631D1 (de) Winkelgeschwindigkeitsaufnehmer
DE59610132D1 (de) Mikromechanischer drehratensensor (drs)
DE69728502D1 (de) Aufprall- oder Beschleunigungssensor
DE69525935T2 (de) Beschleunigungssensor
DE29602453U1 (de) Inertialsensor-Anordnung
DE59500186D1 (de) Kapazitiver Beschleunigungssensor
DE69925837D1 (de) Mikromechanischer Sensor
DE59603812D1 (de) Beschleunigungsgrenzwertsensor
DE59503052D1 (de) Inertialsensor-Einheit
DE69504428D1 (de) Beschleunigungssensor
DE69817453D1 (de) Piezoelektrischer Beschleunigungssensor
DE69721704D1 (de) Aufprall- oder Beschleunigungssensor
DE69930652D1 (de) Monolithischer miniatur-beschleunigungssensor
DE59603447D1 (de) Beschleunigungssensor
DE69629150D1 (de) Beschleunigungsmessaufnehmer