EP0713773A2 - Microdroplets generator in particular for ink jet printers - Google Patents

Microdroplets generator in particular for ink jet printers Download PDF

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Publication number
EP0713773A2
EP0713773A2 EP95810667A EP95810667A EP0713773A2 EP 0713773 A2 EP0713773 A2 EP 0713773A2 EP 95810667 A EP95810667 A EP 95810667A EP 95810667 A EP95810667 A EP 95810667A EP 0713773 A2 EP0713773 A2 EP 0713773A2
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EP
European Patent Office
Prior art keywords
transducers
generator according
drop generator
transducer
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95810667A
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German (de)
French (fr)
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EP0713773B1 (en
EP0713773A3 (en
Inventor
Joachim Heinzl
Wolfgang Schullerus
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Pelikan Produktions AG
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Pelikan Produktions AG
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Publication of EP0713773A3 publication Critical patent/EP0713773A3/en
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14282—Structure of print heads with piezoelectric elements of cantilever type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

Definitions

  • a drop generator for microdrops is known.
  • a multiplicity of piezoelectric bending transducers are arranged in an ink-filled chamber of a housing, each of which is assigned to a nozzle leading through a housing wall.
  • an ink droplet is ejected from the nozzle in question.
  • This drop generator is simply constructed. However, the printed image is unsatisfactory, sometimes uneven and washed out. Similar drop generators are described in DE-OS 31 14 224 and DE-OS 31 14 259.
  • the present invention has for its object to eliminate the above disadvantage. This object is achieved by the combination of features of the claims.
  • the partition walls reliably prevent ink from escaping from an adjacent nozzle when one transducer is actuated, because the pressure waves can no longer spread to the adjacent nozzle. In addition, the viscous coupling between adjacent transducers is completely avoided.
  • the partitions also bring a significant increase in efficiency. Because the ink can no longer move sideways under the activated bending transducer, a considerably higher pressure is generated at the nozzle with the same deflection. Therefore, on the one hand, a significantly higher and more constant drop flight speed and, on the other hand, a lower power requirement can be achieved.
  • a piezoelectric transducer unit 12 is fastened on a base 9 attached to or molded onto the nozzle plate 2 and arranged opposite the wall 6 and is positioned by means of interacting positioning means, for example by pins 10, which are inserted into bores in the base 9 and engage in bores in the unit 12 .
  • the unit 12 consists of a piezoceramic plate 13 which is laminated at the top with a thin metal foil 14 and at the bottom with a thicker metal foil 15. From the free end 16 through the nozzles 7 to the base 9, slots 17 are cut into this composite plate at regular intervals, e.g. ground with a diamond disc, so that the element 12 has a comb-like structure with a connecting web 18 over the base 9 and tines 19.
  • the film 14 is interrupted on the web 18 in the extension of the slots 17, so that a film strip is formed for each tine 19.
  • the film 15, on the other hand, is continuous on the web 18 and projects over the plate 13 on the end face. It is connected to a connecting line 20 for the return conductor.
  • Each strip of film 14 is connected to a connecting line 21 for the outgoing conductor.
  • partitions 26 connected on the end face of the nozzle plate 2 to a chamber wall 6, 25 are fastened, each separating two prongs 19 and being narrower than the slots 17.
  • FIG. 2a shows a prong 19 in the rest position.
  • a negative pressure prevails in the liquid chamber 5, so that a concave meniscus 28 is formed in the nozzle 7, the capillary pressure of which is in equilibrium with the negative pressure.
  • the piezoceramic layer 13 of the prong 19 tries to shorten under the influence of the electric field (cross-effect). This shortening is opposed by the thicker metal foil 15 with a greater resistance than the thinner metal foil 14, so that the tine 19 bends away from the nozzle plate 2 (FIG. 2b).
  • the rate of deformation is selected by a suitable choice of the pulse shape at the connection 21 such that the liquid meniscus 28 in the nozzle 7 retracts only very little.
  • the pulse at connection 21 drops and the previously introduced electrical charge flows away, the tine 19 snaps back into the basic position (FIG. 2 c) and a drop 29 is ejected from the nozzle 7.
  • Figure 3d shows the state shortly after the droplet ejection.
  • the liquid meniscus 28 has withdrawn deeper into the nozzle 7. Liquid flows through the inlet opening 8 until the meniscus 28 has reached its equilibrium position again.
  • coating materials e.g. ORMOCERe (organically modified ceramics), epoxies, acrylates, polyurethanes and thermoplastic polymers are used.
  • the selection depends on the working fluid used, since resistance of the coating to the fluid is required. However, the liquid must also wet the coated surfaces well, so that the chamber 5 of the drop generator can be vented properly.
  • the non-conductive coating means that even electrically conductive inks, e.g. Water-based inks, which are desirable in many cases in printing applications, can be used.
  • electrically conductive inks e.g. Water-based inks
  • only electrically non-conductive inks could be used. This restricted the area of application of these devices considerably. In addition, this property can make the ink considerably more expensive.
  • a bimorph bending transducer element 12 is shown in FIG. It consists of the piezoceramic layer 13, the relatively thick, thus bonded metal foil 15, which at the same time forms the electrode for the return conductor, and the electrode 34, which replaces the thinner metal foil 14 according to FIGS. 1-5.
  • the electrode 34 which replaces the thinner metal foil 14 according to FIGS. 1-5.
  • FIG. 7 shows a so-called SS-CMB (single sided ceramic multilayer bender). These transducers are described in "Actuator 94 Conference Proceedings", Bremen 1994 by J. Verkerk et al. described in more detail to which reference is made.
  • the element 12 here consists of an active piezoceramic layer 35, a passive piezoceramic layer 36 and a plurality of electrode layers 37 which divide the layer 35 into several layers and are alternately connected to end metallizations 38, 39 and thus to the connecting lines 20, 21.
  • the layers 40 of the layer 35 are alternately polarized in opposite directions.
  • the layer 35 as a whole becomes shorter or longer compared to the passive layer 36, depending on the polarity of the voltage applied. Due to the parallel connection of many thin piezoceramic layers (20-100 ⁇ m per layer) in the SS-CMB, relatively low voltages are sufficient to achieve high field strengths. As a result, the required pulse voltage for droplet ejection - depending on the thickness and number of layers - drops to around 20-40 V. Another advantage is that temperature fluctuations only cause negligible deflection of the tines, since apart from the very thin electrode layers (1 -2 ⁇ m per layer) only one material is used.
  • a symmetrical multi-layer bending transducer element 12 is shown in FIG. It is created by laminating two layers 45, 46 piezoactive materials with the same polarity direction.
  • the outer electrodes 47 which are connected to one another by the end metallization 38 are connected to the return conductor 20 for all tines.
  • the center electrode 48 is severed before the lamination of the second piezoactive layer 45 in the extension of the slots 17.
  • the nozzles 7 and thus also the tines 19 must be arranged very closely. If the minimum size of the transducers allows, a one to two row arrangement should be aimed for. In the case of a two-row structure (FIGS. 4 and 5) for 300 dpi, the pitch of the tines 19 of a row is 1/150 ′′ or approximately 170 ⁇ m. A 100 ⁇ m wide tine with a surrounding gap of 20 ⁇ m in width therefore requires the structuring of 30 ⁇ m thick partitions. In order for the individual tines to be able to transfer enough kinetic energy into the ink, they must be a multiple of this width high, e.g.
  • the partition walls 26 have to be designed with much larger aspect ratios. Suitable techniques are available today, such as the LIGA process or anisotropic etching of silicon single crystals. These methods are described in W. Menz, P. Bley; Microsystem technology for engineers, Weinheim 1993 described. Other suitable processes for the production of the partition walls are, for example, the electrodeposition of metals onto the nozzle plate 2, the stamping or injection molding, in which case the molds can be produced using the LIGA process. In particular in the case of production by injection molding, the partition walls 26 can be formed in one piece with the nozzle plate 2, the frame 3, the base 9 and, if appropriate, the intermediate wall 25 (FIG. 4). Other suitable methods for producing the partition walls 26 are the photolithographic structuring of photoresist lacquers or foils.
  • FIGS. 9-11 show variants in which the housing 1 contains a plurality of staggered chambers 5, each with a converter element 12 according to FIGS. 1-3 or according to one of FIGS. 6-8.
  • the axes of the nozzles 7 are inclined at least at the outlet end or at right angles to the direction of movement of the tine ends 16.
  • the nozzles 7 are narrowed towards the outlet cross section.
  • the nozzles 7 of the different rows are slightly offset from one another in the longitudinal direction of the rows.
  • FIG. 9 In the embodiment according to FIG. 9, three identical housing elements 55 corresponding to FIG. 1 but with thicker nozzle plate 56 and an additional nozzle plate 56 are stacked on top of one another.
  • the nozzle channel 57 is bent at a right angle.
  • An additional channel 58 connects the inlet opening 8 to a distribution channel 59 in a cover plate 60.
  • the axes of the nozzles 7 run at 45 ° to the direction of movement of the tine ends 16.
  • the tine ends 16 are ground off at 45 °, so that their end faces 66 run parallel to the plate 65.
  • the ends 66 therefore have a movement component perpendicular to the plate 65.
  • the chambers 5 here have lateral connections which can be connected to the storage container via a distributor line. However, the connections can also be connected to a separate container, wherein the containers can contain inks of different colors, so that the drop generator is also suitable for multi-color printing.
  • the distributor plate 60 is omitted and the channels 58 are connected to separate containers.

Abstract

The system to generate micro drops, especially for an ink-jet printer, has a housing (1) with a chamber (5) containing a number of piezo electric bending transducers. The chamber (5) has dividing walls (26) between them at least near the second end (16), opposite the first end fixed to the housing (1). The dividing walls (26) are processed to give electroplated deposits of metal, or through anisotropic etching of monocrystalline silicon, or through photographic structuring of photo varnishes or films. The upper transducer surface has a cladding, which is not electrically conductive, such as of organically modified ceramics, an epoxy resin, an acrylate polymer or of polyurethane.

Description

Aus der DE-OS 31 14 192 ist ein Tropfenerzeuger für Mikrotropfen bekannt. In einer mit Tinte gefüllten Kammer eines Gehäuses sind eine Vielzahl von piezoelektrischen Biege-Wandlern angeordnet, die je einer durch eine Gehäusewand führenden Düse zugeordnet sind. Wird ein Wandler betätigt, so wird aus der betreffenden Düse ein Tintentröpfchen ausgestossen. Dieser Tropfenerzeuger ist einfach aufgebaut. Allerdings ist das Druckbild unbefriedigend, manchmal ungleichmässig und verwaschen. Aehnliche Tropfenerzeuger sind in der DE-OS 31 14 224 und in der DE-OS 31 14 259 beschrieben.From DE-OS 31 14 192 a drop generator for microdrops is known. A multiplicity of piezoelectric bending transducers are arranged in an ink-filled chamber of a housing, each of which is assigned to a nozzle leading through a housing wall. When a transducer is actuated, an ink droplet is ejected from the nozzle in question. This drop generator is simply constructed. However, the printed image is unsatisfactory, sometimes uneven and washed out. Similar drop generators are described in DE-OS 31 14 224 and DE-OS 31 14 259.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, den obigen Nachteil zu beseitigen. Diese Aufgabe wird durch die Merkmalskombination der Ansprüche gelöst.The present invention has for its object to eliminate the above disadvantage. This object is achieved by the combination of features of the claims.

Durch die Trennwände zwischen den einzelnen Biegewandlern wird ein Uebersprechen zwischen den benachbarten Wandlern vollständig vermieden. Die Trennwände verhindern zuverlässig, dass bei Betätigung des einen Wandlers zugleich Tinte aus einer benachbarten Düse austreten kann, denn die Druckwellen können sich nicht mehr bis zur benachbarten Düse ausbreiten. Ausserdem wird die viskose Kupplung zwischen benachbarten Wandlern vollständig vermieden. Die Trennwände bringen darüber hinaus eine erhebliche Steigerung des Wirkungsgrades. Weil die Tinte unter dem aktivierten Biegewandler nicht mehr seitlich ausweichen kann, wird bei gleicher Auslenkung ein erheblich höherer Druck an der Düse erzeugt. Daher kann einerseits eine wesentlich höhere und konstantere Tropfenfluggeschwindigkeit und andererseits ein niedrigerer Leistungsbedarf erreicht werden.Crosstalk between the adjacent transducers is completely avoided by the partition walls between the individual bending transducers. The partition walls reliably prevent ink from escaping from an adjacent nozzle when one transducer is actuated, because the pressure waves can no longer spread to the adjacent nozzle. In addition, the viscous coupling between adjacent transducers is completely avoided. The partitions also bring a significant increase in efficiency. Because the ink can no longer move sideways under the activated bending transducer, a considerably higher pressure is generated at the nozzle with the same deflection. Therefore, on the one hand, a significantly higher and more constant drop flight speed and, on the other hand, a lower power requirement can be achieved.

Nachfolgend werden Ausführungsbeispiele der Erfindung anhand der Zeichnungen erläutert. Darin zeigt:

Figur 1
einen Längsschnitt durch einen Tropfenerzeuger,
Figuren 2a bis 2d
den Tropfenerzeuger nach Figur 1 in verschiedenen Betriebszuständen,
Figur 3
eine perspektivische Ansicht eines Teils des Tropfenerzeugers,
Figur 4
eine Draufsicht auf eine Düsenplatte, mit Trennwänden und Rahmen,
Figur 5
eine Draufsicht entsprechend Figur 4 mit eingesetzten Wandlereinheiten,
Figuren 6 bis 8
drei Ausführungsformen des Wandlers, und
Figuren 9 bis 11
drei Ausführungsformen mit mehrlagigen Tropfenerzeugern.
Exemplary embodiments of the invention are explained below with reference to the drawings. It shows:
Figure 1
a longitudinal section through a drop generator,
Figures 2a to 2d
1 in various operating states,
Figure 3
a perspective view of part of the drop generator,
Figure 4
a plan view of a nozzle plate, with partitions and frame,
Figure 5
3 shows a top view corresponding to FIG. 4 with converter units inserted,
Figures 6 to 8
three embodiments of the converter, and
Figures 9 to 11
three embodiments with multi-layer drop generators.

Der Tropfenerzeuger nach Figuren 1-5 hat ein Gehäuse 1 bestehend aus einer Düsenplatte 2, einem Rahmen 3 und einer Abdeckplatte 4, die zusammen eine Kammer 5 bilden. Die Düsenplatte 2 hat benachbart einer Wand 6 des Rahmens 3 eine geradlinige Reihe regelmässig voneinander beabstandeter Düsen 7. Die Abdeckplatte 4 hat eine in die Kammer 5 mündende Eintrittsöffnung 8 zum Anschluss eines nicht dargestellten Tinten-Vorratsbehälters. Auf einem an der Düsenplatte 2 befestigten oder daran angeformten, gegenüber der Wand 6 angeordneten Sockel 9 ist eine piezoelektrische Wandlereinheit 12 befestigt und durch zusammenwirkende Positioniermittel positioniert, z.B. durch Stifte 10, die in Bohrungen des Sockels 9 eingesetzt sind und in Bohrungen der Einheit 12 eingreifen.1-5 has a housing 1 consisting of a nozzle plate 2, a frame 3 and a cover plate 4, which together form a chamber 5. The nozzle plate 2 has, next to a wall 6 of the frame 3, a straight line of regularly spaced nozzles 7. The cover plate 4 has an inlet opening 8 opening into the chamber 5 for connecting an ink reservoir (not shown). A piezoelectric transducer unit 12 is fastened on a base 9 attached to or molded onto the nozzle plate 2 and arranged opposite the wall 6 and is positioned by means of interacting positioning means, for example by pins 10, which are inserted into bores in the base 9 and engage in bores in the unit 12 .

Die Einheit 12 besteht aus einer piezokeramischen Platte 13, die oben mit einer dünnen Metallfolie 14 und unten mit einer dickeren Metallfolie 15 kaschiert ist. Vom freien Ende 16 über den Düsen 7 bis zum Sockel 9 sind in diese Verbundplatte in regelmässigen Abständen Schlitze 17 eingeschnitten, z.B. mit einer Diamantscheibe geschliffen, sodass das Element 12 eine kammartige Struktur mit einem Verbindungssteg 18 über dem Sockel 9 und Zinken 19 hat. Die Folie 14 ist auf dem Steg 18 in Verlängerung der Schlitze 17 unterbrochen, sodass für jede Zinke 19 ein Folienstreifen gebildet ist. Die Folie 15 ist dagegen auf dem Steg 18 durchgehend und überragt die Platte 13 stirnseitig. Sie ist mit einer Anschlussleitung 20 für den Rückleiter verbunden. Jeder Streifen der Folie 14 ist mit je einer Anschlussleitung 21 für den Hinleiter verbunden. Wie aus Figuren 3 und 4 ersichtlich ist, sind auf der Düsenplatte 2 stirnseitig an eine Kammerwand 6, 25 angeschlossene Trennwände 26 befestigt, die je zwei Zinken 19 voneinander trennen und schmaler sind als die Schlitze 17.The unit 12 consists of a piezoceramic plate 13 which is laminated at the top with a thin metal foil 14 and at the bottom with a thicker metal foil 15. From the free end 16 through the nozzles 7 to the base 9, slots 17 are cut into this composite plate at regular intervals, e.g. ground with a diamond disc, so that the element 12 has a comb-like structure with a connecting web 18 over the base 9 and tines 19. The film 14 is interrupted on the web 18 in the extension of the slots 17, so that a film strip is formed for each tine 19. The film 15, on the other hand, is continuous on the web 18 and projects over the plate 13 on the end face. It is connected to a connecting line 20 for the return conductor. Each strip of film 14 is connected to a connecting line 21 for the outgoing conductor. As can be seen from FIGS. 3 and 4, partitions 26 connected on the end face of the nozzle plate 2 to a chamber wall 6, 25 are fastened, each separating two prongs 19 and being narrower than the slots 17.

In Figuren 2a bis 2d ist die Betriebsweise des beschriebenen Tropfenerzeugers schematisch dargestellt Figur 2a zeigt eine Zinke 19 in Ruhelage. In der Flüssigkeitskammer 5 herrscht Unterdruck, sodass sich in der Düse 7 ein konkaver Meniskus 28 bildet, dessen Kapillardruck mit dem Unterdruck im Gleichgewicht steht. Wird nun an den Anschluss 21 eine Spannung angelegt, versucht die Piezokeramikschicht 13 der Zinke 19 sich unter dem Einfluss des elektrischen Feldes (Quereffekt) zu verkürzen. Dieser Verkürzung setzt die dickere Metallfolie 15 einen stärkeren Widerstand entgegen als die dünnere Metallfolie 14, sodass die Zinke 19 von der Düsenplatte 2 wegbiegt (Figur 2b). Die Verformungsgeschwindigkeit wird durch geeignete Wahl der Impulsform am Anschluss 21 so gewählt, dass sich der Flüssigkeitsmeniskus 28 in der Düse 7 nur sehr wenig zurückzieht. Beim Abfall des Impulses am Anschluss 21 und Abfluss der zuvor eingebrachten elektrischen Ladung schnellt die Zinke 19 zurück in die Grundstellung (Figur 2c) und aus der Düse 7 wird ein Tropfen 29 ausgestossen. Figur 3d stellt den Zustand kurz nach dem Tropfenausstoss dar. Der Flüssigkeitsmeniskus 28 hat sich tiefer in die Düse 7 zurückgezogen. Flüssigkeit strömt durch die Eintrittsöffnung 8 nach, bis der Meniskus 28 wieder seine Gleichgewichtslage erreicht hat.The operation of the drop generator described is shown schematically in FIGS. 2a to 2d. FIG. 2a shows a prong 19 in the rest position. A negative pressure prevails in the liquid chamber 5, so that a concave meniscus 28 is formed in the nozzle 7, the capillary pressure of which is in equilibrium with the negative pressure. If a voltage is now applied to the connection 21, the piezoceramic layer 13 of the prong 19 tries to shorten under the influence of the electric field (cross-effect). This shortening is opposed by the thicker metal foil 15 with a greater resistance than the thinner metal foil 14, so that the tine 19 bends away from the nozzle plate 2 (FIG. 2b). The rate of deformation is selected by a suitable choice of the pulse shape at the connection 21 such that the liquid meniscus 28 in the nozzle 7 retracts only very little. When the pulse at connection 21 drops and the previously introduced electrical charge flows away, the tine 19 snaps back into the basic position (FIG. 2 c) and a drop 29 is ejected from the nozzle 7. Figure 3d shows the state shortly after the droplet ejection. The liquid meniscus 28 has withdrawn deeper into the nozzle 7. Liquid flows through the inlet opening 8 until the meniscus 28 has reached its equilibrium position again.

Weil diese Zinkenbewegung zwischen zwei Trennwänden erfolgt, können sich weder Druckimpulse auf benachbarte Düsen 7 fortpflanzen, noch können durch viskose Reibung benachbarte Zinken mitangeregt werden. Dadurch wird die Gefahr des Uebersprechens vermieden. Da die Flüssigkeit nicht seitlich ausweichen kann, wird ein wesentlich besserer Wirkungsgrad erreicht.Because this tine movement takes place between two partition walls, pressure impulses can neither propagate to adjacent nozzles 7, nor can adjacent tines be co-excited by viscous friction. This avoids the risk of crosstalk. Since the liquid cannot escape laterally, a much better efficiency is achieved.

Vorzugsweise hat die Wandlereinheit 12 eine elektrisch isolierende Beschichtung. Dafür eignen sich beispielsweise

  • Beschichtung mit flüssigen Reaktionsharzen durch Tauchen oder Aufsprühen mit anschliessendem Abschleudern der überschüssigen Menge und thermischer oder Strahlungshärtung,
  • Beschichtung mit verdünnten Reaktionslacken durch Tauchen oder Aufsprühen mit anschliessendem Ablüften und Härten,
  • Beschichtung mit pulverförmigen Thermoplasten durch Wirbelsintern, dabei Erwärmen des Piezokamms durch hochfrequente Wechselspannung.
The converter unit 12 preferably has an electrically insulating coating. For example, are suitable for this
  • Coating with liquid reactive resins by dipping or spraying with subsequent spinning off of the excess amount and thermal or radiation curing,
  • Coating with dilute reaction lacquers by dipping or spraying with subsequent flashing off and hardening,
  • Coating with powdered thermoplastics by sintering, thereby heating the piezo comb by high-frequency alternating voltage.

Als Beschichtungsstoffe kommen z.B. ORMOCERe (organically modified ceramics), Epoxide, Acrylate, Polyurethane sowie thermoplastische Polymere zum Einsatz. Die Auswahl richtet sich nach der eingesetzten Arbeitsflüssigkeit, da Beständigkeit der Beschichtung gegenüber der Flüssigkeit gefordert ist. Die Flüssigkeit muss aber auch die beschichteten Oberflächen gut benetzen, damit eine einwandfreie Entlüftung der Kammer 5 des Tropfenerzeugers möglich ist.As coating materials e.g. ORMOCERe (organically modified ceramics), epoxies, acrylates, polyurethanes and thermoplastic polymers are used. The selection depends on the working fluid used, since resistance of the coating to the fluid is required. However, the liquid must also wet the coated surfaces well, so that the chamber 5 of the drop generator can be vented properly.

Durch die nichtleitende Beschichtung wird erreicht, dass auch elektrisch leitende Tinten, z.B. Tinten auf Wasserbasis, welche bei Druckanwendungen in vielen Fällen erwünscht sind, verwendet werden können. Bei den Tropfenerzeugern gemäss dem eingangs genannten Stand der Technik konnten demgegenüber nur elektrisch nichtleitende Tinten verwendet werden. Dadurch war der Einsatzbereich dieser Geräte erheblich beschränkt. Ausserdem verteuerte diese Eigenschaft die Tinte unter Umständen erheblich.The non-conductive coating means that even electrically conductive inks, e.g. Water-based inks, which are desirable in many cases in printing applications, can be used. In contrast, in the drop generators according to the prior art mentioned at the outset, only electrically non-conductive inks could be used. This restricted the area of application of these devices considerably. In addition, this property can make the ink considerably more expensive.

In Figur 6 ist ein bimorphes Biegewandler-Element 12 dargestellt. Es besteht aus der Piezokeramikschicht 13, der relativ dicken, damit verklebten Metallfolie 15, die gleichzeitig die Elektrode für den Rückleiter bildet sowie der Elektrode 34, welche die dünnere Metallfolie 14 nach Figuren 1-5 ersetzt. Zum Erzeugen hoher Feldstärken sind hier allerdings wie bei der Ausführungsform nach Figuren 1-5 relativ hohe Spannungen erforderlich. Wegen der sehr dünnen Elektrode 34 sind jedoch die erforderlichen Spannungen geringer als bei der Ausführungsform nach Figuren 1-5.A bimorph bending transducer element 12 is shown in FIG. It consists of the piezoceramic layer 13, the relatively thick, thus bonded metal foil 15, which at the same time forms the electrode for the return conductor, and the electrode 34, which replaces the thinner metal foil 14 according to FIGS. 1-5. To generate high field strengths, however, as in the embodiment according to FIGS. 1-5, relatively high voltages are required. However, because of the very thin electrode 34, the required ones Tensions lower than in the embodiment according to FIGS. 1-5.

In Figur 7 ist ein sogenannter SS-CMB (Single sided ceramic multilayer bender) dargestellt. Diese Wandler sind in "Actuator 94 Conference Proceedings", Bremen 1994 durch J. Verkerk et al. ausführlicher beschrieben, auf welche verwiesen wird. Das Element 12 besteht hier aus einer aktiven Piezokeramikschicht 35, einer passiven Piezokeramikschicht 36 sowie mehreren Elektrodenschichten 37, welche die Schicht 35 in mehrere Lagen unterteilen und abwechslungsweise mit stirnseitigen Metallisierungen 38, 39 und damit mit den Anschlussleitungen 20, 21 verbunden sind. Die Lagen 40 der Schicht 35 sind abwechselnd entgegengesetzt polarisiert. Weil die Feldrichtung ebenfalls von Lage zu Lage abwechselt, wird beim Anlegen einer Spannung die Schicht 35 als Ganzes gegenüber der passiven Schicht 36 kürzer bzw. länger je nach Polarität der angelegten Spannung. Durch die Parallelschaltung vieler dünner Piezokeramik-Lagen (20-100 µm pro Lage) im SS-CMB genügen schon relativ niedrige Spannungen um hohe Feldstärken zu erreichen. Dadurch sinkt die erforderliche Impulsspannung für den Tropfenausstoss - abhängig von der Dicke und Anzahl der Lagen - auf etwa 20-40 V. Ein weiterer Vorteil besteht darin, dass Temparaturschwankungen nur vernachlässigbar geringe Verbiegungen der Zinken bewirken, da bis auf die sehr dünnen Elektrodenschichten (1-2 µm pro Schicht) nur ein einziges Material verwendet wird.FIG. 7 shows a so-called SS-CMB (single sided ceramic multilayer bender). These transducers are described in "Actuator 94 Conference Proceedings", Bremen 1994 by J. Verkerk et al. described in more detail to which reference is made. The element 12 here consists of an active piezoceramic layer 35, a passive piezoceramic layer 36 and a plurality of electrode layers 37 which divide the layer 35 into several layers and are alternately connected to end metallizations 38, 39 and thus to the connecting lines 20, 21. The layers 40 of the layer 35 are alternately polarized in opposite directions. Because the field direction also changes from layer to layer, when a voltage is applied, the layer 35 as a whole becomes shorter or longer compared to the passive layer 36, depending on the polarity of the voltage applied. Due to the parallel connection of many thin piezoceramic layers (20-100 µm per layer) in the SS-CMB, relatively low voltages are sufficient to achieve high field strengths. As a result, the required pulse voltage for droplet ejection - depending on the thickness and number of layers - drops to around 20-40 V. Another advantage is that temperature fluctuations only cause negligible deflection of the tines, since apart from the very thin electrode layers (1 -2 µm per layer) only one material is used.

In Figur 8 ist ein symmetrisches Mehrlagen-Biegewandler-Element 12 dargestellt. Es entsteht durch Laminieren zweier Lagen 45, 46 piezoaktiven Materials mit gleicher Polaritätsrichtung. Die durch die stirnseitige Metallisierung 38 miteinander verbundenen äusseren Elektroden 47 sind für alle Zinken gemeinsam an den Rückleiter 20 angeschlossen. Die Mittelelektrode 48 wird vor dem Laminieren der zweiten piezoaktiven Schicht 45 in Verlängerung der Schlitze 17 durchtrennt. Beim Anlegen einer Spannung zwischen der Mitten- und Aussenelektrode wird sich jede Schicht quer zum elektrischen Feld gemäss dessen Richtung in ihrer Länge ändern, d.h. die eine Schicht verkürzt sich, die andere dehnt sich aus. Da die Schichten fest miteinander verbunden sind, verbiegt sich der Schichtaufbau. Auch mit diesem Aufbau kann die zum Auslenken erforderliche Spannung erheblich gesenkt werden, weil bei gleicher Zinkendicke und gleicher Spannung die Feldstärke verdoppelt wird und beide Schichten 45, 46 im ausbiegenden Sinne aktiv sind, während bei der Ausführungsform nach Figur 6 die Folie 15 nur passiv wirkt.A symmetrical multi-layer bending transducer element 12 is shown in FIG. It is created by laminating two layers 45, 46 piezoactive materials with the same polarity direction. The outer electrodes 47 which are connected to one another by the end metallization 38 are connected to the return conductor 20 for all tines. The center electrode 48 is severed before the lamination of the second piezoactive layer 45 in the extension of the slots 17. When a voltage is applied between the center and outer electrodes, each layer will change in length transversely to the electric field in accordance with its direction, ie one layer shortens, the other expands. Since the layers are firmly connected to each other, the layer structure bends. With this construction, too, the tension required for deflection can be considerably reduced, because with the same tine thickness and tension, the field strength is doubled and both layers 45, 46 are active in the bending sense, while in the embodiment according to FIG. 6 the film 15 only acts passively .

Für heute gebräuchliche Drucksysteme mit einem Druckraster von 300 Punkten pro Zoll (dpi = dots per inch) müssen die Düsen 7 und damit auch die Zinken 19 sehr eng angeordnet werden. Falls die Mindestgrösse der Wandler dies erlaubt, ist eine ein- bis zweireihige Anordnung anzustreben. Bei zweireihigem Aufbau (Figuren 4 und 5) für 300 dpi beträgt die Teilung der Zinken 19 einer Reihe 1/150'' oder ca. 170 µm. Eine 100 µm breite Zinke mit einem umgebenden Spalt von 20 µm Breite erfordert also die Strukturierung von 30 µm dicken Trennwänden. Damit die einzelnen Zinken genügend Bewegungsenergie in die Tinte übertragen können, müssen sie ein Vielfaches dieser Breite hoch sein, z.B. können sie ein Höhen-Zu-Breiten-Verhältnis (Aspektverhältnis) von 5:1 aufweisen. Infolgedessen müssen die Trennwände 26 mit noch wesentlich grösseren Aspektverhältnissen ausgeführt werden. Geeignete Techniken dafür stehen heute zur Vefügung, z.B. das LIGA-Verfahren oder anisotropes Aetzen von Silizium-Einkristallen. Diese Verfahren sind in W. Menz, P. Bley; Mikrosystemtechnik für Ingenieure, Weinheim 1993 beschrieben. Andere geeignete Verfahren für die Herstellung der Trennwände sind zum Beispiel das galvanische Abscheiden von Metallen auf die Düsenplatte 2, das Prägen oder Spritzgiessen, wobei in diesen letzten beiden Fällen die Formen mit dem LIGA-Verfahren hergestellt werden können. Insbesondere bei der Herstellung durch Spritzgiessen können die Trennwände 26 einstückig mit der Düsenplatte 2, dem Rahmen 3, dem Sockel 9 und gegebenenfalls der Zwischenwand 25 (Figur 4) geformt werden. Weitere geeignete Verfahren zur Herstellung der Trennwände 26 sind die photolitographische Strukturierung von Photoresist-Lacken oder -folien.For printing systems in use today with a printing screen of 300 dots per inch (dpi = dots per inch), the nozzles 7 and thus also the tines 19 must be arranged very closely. If the minimum size of the transducers allows, a one to two row arrangement should be aimed for. In the case of a two-row structure (FIGS. 4 and 5) for 300 dpi, the pitch of the tines 19 of a row is 1/150 ″ or approximately 170 μm. A 100 µm wide tine with a surrounding gap of 20 µm in width therefore requires the structuring of 30 µm thick partitions. In order for the individual tines to be able to transfer enough kinetic energy into the ink, they must be a multiple of this width high, e.g. they can have a height-to-width ratio (aspect ratio) of 5: 1. As a result, the partition walls 26 have to be designed with much larger aspect ratios. Suitable techniques are available today, such as the LIGA process or anisotropic etching of silicon single crystals. These methods are described in W. Menz, P. Bley; Microsystem technology for engineers, Weinheim 1993 described. Other suitable processes for the production of the partition walls are, for example, the electrodeposition of metals onto the nozzle plate 2, the stamping or injection molding, in which case the molds can be produced using the LIGA process. In particular in the case of production by injection molding, the partition walls 26 can be formed in one piece with the nozzle plate 2, the frame 3, the base 9 and, if appropriate, the intermediate wall 25 (FIG. 4). Other suitable methods for producing the partition walls 26 are the photolithographic structuring of photoresist lacquers or foils.

Zum Anschluss der Leitungen 21, 22 eignet sich z.B. das Tape Automated Bonding-Verfahren.For connecting the lines 21, 22, e.g. the tape automated bonding process.

Die Ausführungsformen nach Figuren 9-11 zeigen Varianten, in welchen das Gehäuse 1 mehrere gestaffelt angeordnete Kammern 5 mit je einem Wandlerelement 12 gemäss Figuren 1-3 oder gemäss einer der Figuren 6-8 enthält. Die Achsen der Düsen 7 verlaufen zumindest am Austrittsende geneigt oder rechtwinklig zur Bewegungsrichtung der Zinkenenden 16. Die Düsen 7 sind gegen den Austrittsquerschnitt verengt. Die Düsen 7 der verschiedenen Reihen sind in Längsrichtung der Reihen etwas gegeneinander versetzt.The embodiments according to FIGS. 9-11 show variants in which the housing 1 contains a plurality of staggered chambers 5, each with a converter element 12 according to FIGS. 1-3 or according to one of FIGS. 6-8. The axes of the nozzles 7 are inclined at least at the outlet end or at right angles to the direction of movement of the tine ends 16. The nozzles 7 are narrowed towards the outlet cross section. The nozzles 7 of the different rows are slightly offset from one another in the longitudinal direction of the rows.

Bei der Ausführungsform nach Figur 9 sind drei identische Gehäuse-Elemente 55 entsprechend Figur 1 aber mit dickerer Düsenplatte 56 und eine zusätzliche Düsenplatte 56 übereinandergestapelt. Der Düsenkanal 57 ist rechtwinklig abgeknickt. Ein zusätzlicher Kanal 58 verbindet die Eintrittsöffnung 8 mit einem Verteilerkanal 59 in einer Abdeckplatte 60.In the embodiment according to FIG. 9, three identical housing elements 55 corresponding to FIG. 1 but with thicker nozzle plate 56 and an additional nozzle plate 56 are stacked on top of one another. The nozzle channel 57 is bent at a right angle. An additional channel 58 connects the inlet opening 8 to a distribution channel 59 in a cover plate 60.

Bei der Ausführungsform nach Figur 10 verlaufen die Achsen der Düsen 7 unter 45° zur Bewegungsrichtung der Zinkenenden 16.In the embodiment according to FIG. 10, the axes of the nozzles 7 run at 45 ° to the direction of movement of the tine ends 16.

Bei der Ausführungsform nach Figur 11 sind vier Reihen von Düsen 7 in einer durchgehenden Düsenplatte 65 angeordnet und die Zinkenenden 16 sind unter 45° abgeschliffen, sodass ihre Stirnflächen 66 parallel zur Platte 65 verlaufen. Beim Auslenken der Zinken 19 haben daher die Stirnenden 66 eine Bewegungskomponente senkrecht zur Platte 65. Die Kammern 5 haben hier seitliche Anschlüsse, die über einer Verteilerleitung mit dem Vorratsbehälter verbunden werden können. Die Anschlüsse können aber auch an je einen separaten Behälter angeschlossen sein, wobei die Behälter Tinten unterschiedlicher Farben enthalten können, sodass sich der Tropfenerzeuger auch für den Mehrfarbendruck eignet. Diese Variante ist auch bei den Ausführungsformen nach Figuren 9 und 10 möglich, indem die Verteilerplatte 60 weggelassen wird und die Kanäle 58 an separate Behälter angeschlossen werden.In the embodiment according to FIG. 11, four rows of nozzles 7 are arranged in a continuous nozzle plate 65 and the tine ends 16 are ground off at 45 °, so that their end faces 66 run parallel to the plate 65. When the tines 19 are deflected, the ends 66 therefore have a movement component perpendicular to the plate 65. The chambers 5 here have lateral connections which can be connected to the storage container via a distributor line. However, the connections can also be connected to a separate container, wherein the containers can contain inks of different colors, so that the drop generator is also suitable for multi-color printing. This variant is also possible in the embodiments according to FIGS. 9 and 10, in that the distributor plate 60 is omitted and the channels 58 are connected to separate containers.

Mit den Ausführungsformen nach Figuren 9-11 können auf engstem Raum sehr viele Düsen 7 untergebracht werden, sodass eine hervorragende Druckqualität ermöglicht wird.With the embodiments according to FIGS. 9-11, a large number of nozzles 7 can be accommodated in a very small space, so that excellent print quality is made possible.

Claims (13)

Tropfenerzeuger für Mikrotropfen, insbesondere für Ink-Jet-Printer, umfassend ein Gehäuse (1) mit einer Kammer (5), einer Vielzahl von piezoelektrischen Biegewandlern (19) in der Kammer (5), deren erstes Ende (18) am Gehäuse (1) befestigt ist, sowie je einer Düse (7) in einer Kammerwand (2) unter dem freien zweiten Ende (16) der Wandler (19), dadurch gekennzeichnet, dass die Kammer (5) mindestens benachbart dem zweiten Ende (16) der Wandler (19) durch Trennwände (26) zwischen diesen Wandlern (19) unterteilt ist.Drop generator for microdrops, in particular for ink-jet printers, comprising a housing (1) with a chamber (5), a plurality of piezoelectric bending transducers (19) in the chamber (5), the first end (18) of which on the housing (1 ) and one nozzle (7) each in a chamber wall (2) under the free second end (16) of the transducers (19), characterized in that the chamber (5) is at least adjacent to the second end (16) of the transducers (19) is divided by partitions (26) between these transducers (19). Tropfenerzeuger nach Anspruch 1, wobei die ersten Enden (18) der Wandler (19) miteinander verbunden sind, sodass die Wandler (19) eine kammartige Wandlereinheit (12) bilden.A drop generator according to claim 1, wherein the first ends (18) of the transducers (19) are connected to one another so that the transducers (19) form a comb-like transducer unit (12). Tropfenerzeuger nach Anspruch 1 oder 2, wobei das Verhältnis der Höhe zur Dicke der Trennwände (26) 10-100 beträgt.A drop generator according to claim 1 or 2, wherein the ratio of the height to the thickness of the partition walls (26) is 10-100. Tropfenerzeuger nach einem der Ansprüche 1-3, wobei die Trennwände (26) durch galvanisches Abscheiden von Metall oder durch anisotropes Aetzen von monokristallinem Silizium oder durch Spritzgiessen oder durch Prägen oder durch photografische Strukturierung von Photoresist-Lacken oder -Folien hergestellt sind.Drop generator according to one of claims 1-3, wherein the partition walls (26) by electrodeposition of metal or by anisotropic etching of monocrystalline silicon or are produced by injection molding or by embossing or by photographic structuring of photoresist lacquers or foils. Tropfenerzeuger nach einem der Ansprüche 1-4, wobei die Trennwände (26) einstückig mit einer Düsenplatte (2) verbunden sind, durch welche sich die Düsen (7) erstrecken.A droplet generator according to any one of claims 1-4, wherein the partitions (26) are integrally connected to a nozzle plate (2) through which the nozzles (7) extend. Tropfenerzeuger nach einem der Ansprüche 1-5, wobei die Stirnflächen der zweiten Enden (16) der Wandler (19) von einer Kammerwand (6) einen Abstand haben, der höchstens das Fünffache des Zwischenraums zwischen Wandlern (19) und Trennwänden (26) beträgt.A drop generator according to any one of claims 1-5, wherein the end faces of the second ends (16) of the transducers (19) are at a distance from a chamber wall (6) which is at most five times the space between transducers (19) and partition walls (26) . Tropfenerzeuger nach einem der Ansprüche 1-6, wobei die Düsen (7) gegen ihren Austritssquerschnitt verengt sind.Drop generator according to one of claims 1-6, wherein the nozzles (7) are narrowed against their outlet cross-section. Tropfenerzeuger nach einem der Ansprüche 1-7, wobei die Oberflächen der Wandler (19) mit einem elektrisch nichtleitenden Ueberzug versehen sind, der vorzugsweise aus ORMOCER-Material oder aus Epoxidharz oder aus einem Acrylat-Polymer oder aus Polyurethan besteht.Drop generator according to one of claims 1-7, wherein the surfaces of the transducers (19) are provided with an electrically non-conductive coating, which preferably consists of ORMOCER material or of epoxy resin or of an acrylate polymer or of polyurethane. Tropfenerzeuger nach einem der Ansprüche 1-8, wobei die Wandler (19) und das Gehäuse (1) zusammenwirkende Positionierelemente (10) aufweisen.Drop generator according to one of claims 1-8, wherein the transducer (19) and the housing (1) have interacting positioning elements (10). Tropfenerzeuger nach einem der Ansprüche 1-9, wobei die Wandler (19) als Mehrlagen-Piezokeramik-Wandler mit einer zusätzlichen passiven Piezokeramiklage oder als symmetrische Mehrlagen-Biegewandler ausgebildet sind.Drop generator according to one of claims 1-9, wherein the transducer (19) as a multi-layer piezoceramic transducer with a additional passive piezoceramic layer or as a symmetrical multi-layer bending transducer. Tropfenerzeuger nach einem der Ansprüche 1-10, wobei die Wandler (19) in ihrer Grundstellung im Bereich ihrer zweiten Enden (16) Abstand von der Düsenplatte (2) haben.Drop generator according to one of claims 1-10, wherein the transducers (19) in their basic position in the region of their second ends (16) are at a distance from the nozzle plate (2). Tropfenerzeuger nach einem der Ansprüche 1-11, wobei im Gehäuse (1) mehrere gestaffelt angeordnete Kammern (5) gebildet sind, die je eine Reihe von Wandlern (19), Trennwänden (26) und Düsen (7) enthalten, wobei die Achsen der Düsen (7) zumindest am Austrittsquerschnitt geneigt oder rechtwinklig zur Auslenkrichtung der zweiten Wandlerenden (16) verlaufen.Drop generator according to one of claims 1-11, wherein in the housing (1) a plurality of staggered chambers (5) are formed, each containing a series of transducers (19), partitions (26) and nozzles (7), the axes of the Nozzles (7) are inclined at least at the outlet cross section or run at right angles to the deflection direction of the second transducer ends (16). Tropfenerzeuger nach einem der Ansprüche 1-12, wobei die Stirnflächen der zweiten Enden (16) der Wandler (19) geneigt zur Längsrichtung der Wandler (19) abgeschnitten sind.A droplet generator according to any one of claims 1-12, wherein the end faces of the second ends (16) of the transducers (19) are cut at an angle to the longitudinal direction of the transducers (19).
EP95810667A 1994-11-24 1995-10-27 Microdroplets generator in particular for ink jet printers Expired - Lifetime EP0713773B1 (en)

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US6116517A (en) * 1996-07-01 2000-09-12 Joachim Heinzl Droplet mist generator
DE19626428A1 (en) * 1996-07-01 1998-01-15 Heinzl Joachim Droplet cloud generator
US6286925B1 (en) 1996-10-08 2001-09-11 Pelikan Produktions Ag Method of controlling piezo elements in a printhead of a droplet generator
US7845764B2 (en) 1997-07-15 2010-12-07 Silverbrook Research Pty Ltd Inkjet printhead having nozzle arrangements with actuator pivot anchors
US7980670B2 (en) 1997-07-15 2011-07-19 Silverbrook Research Pty Ltd Inkjet printhead having selectively actuable nozzles arranged in nozzle pairs
US7416282B2 (en) * 1997-07-15 2008-08-26 Silverbrook Research Pty Ltd Printhead having common actuator for inkjet nozzles
DE19831335A1 (en) * 1998-07-13 2000-02-10 Michael Angermann Appts to produce micro droplets of molten conductive metals uses a magneto-hydrodynamic pump with modulation to give a clean and controlled droplet ejection
US6460979B1 (en) 1999-03-15 2002-10-08 Tally Computerdrucker Gmbh Piezo bending transducer drop-on demand print head and method of actuating it
DE19911399C2 (en) * 1999-03-15 2001-03-01 Joachim Heinzl Method for controlling a piezo print head and piezo print head controlled according to this method
EP1036660A1 (en) 1999-03-15 2000-09-20 Tally GmbH Drop-on-Demand printhead with piezo bending transducers and driving method for the same
DE10007055A1 (en) * 2000-02-17 2001-09-06 Tally Computerdrucker Gmbh Micro droplet generator for ink jet printer with stepped passive section and pointed active section for frequency stability
DE10007053C2 (en) * 2000-02-17 2001-12-20 Tally Computerdrucker Gmbh Method for producing components of a drop generator for microdrops, in particular a nozzle head for ink printers, and drop generator itself
DE10007053A1 (en) * 2000-02-17 2001-09-06 Tally Computerdrucker Gmbh Production of components of a drop generator comprises cutting, etching or shaping recesses lying parallel to each other in a wafer, forming groups of recesses, and etching groups
DE10007052A1 (en) * 2000-02-17 2001-09-06 Tally Computerdrucker Gmbh Production of components of a drop generator comprises etching peripheral slits in a first wafer to form frame plates, etching nozzles having pre-chambers in a second wafer
DE10039255A1 (en) * 2000-08-11 2002-02-21 Tally Computerdrucker Gmbh Ink droplet generator for ink jet printers uses multiplayer piezo actuators
DE10039255B4 (en) * 2000-08-11 2004-02-12 Tally Computerdrucker Gmbh Drop generator for microdroplets, in particular for the nozzle head of an ink printer
EP1285762A2 (en) 2001-08-10 2003-02-26 Tally Computerdrucker GmbH Microdroplets generator in particular for ink jet printers
DE10139397B4 (en) * 2001-08-10 2005-12-22 Tallygenicom Computerdrucker Gmbh Drop generator for microdrops, in particular nozzle head for ink printers
US6969156B2 (en) 2001-08-10 2005-11-29 Tally Computer Drucker Gmbh Droplet generator for microdroplets, in particular nozzle head for inkjet printer
EP1285762A3 (en) * 2001-08-10 2003-04-02 Tally Computerdrucker GmbH Microdroplets generator in particular for ink jet printers
DE10139397A1 (en) * 2001-08-10 2003-02-27 Tally Computerdrucker Gmbh Drop generator for microdroplets, in particular nozzle heads for ink printers
DE102004040700B4 (en) * 2004-08-23 2007-04-26 Tallygenicom Computerdrucker Gmbh Method and control circuit for selectively driving selected piezoelectric actuators from a plurality of nozzles of a nozzle head in dot matrix printers
IT201800003552A1 (en) * 2018-03-14 2019-09-14 St Microelectronics Srl PIEZOELECTRIC VALVE MODULE, METHOD OF MANUFACTURE OF THE VALVE MODULE, METHOD OF OPERATION OF THE VALVE MODULE AND BREATHING AID DEVICE INCLUDING ONE OR MORE VALVE MODULES
EP3540281A1 (en) 2018-03-14 2019-09-18 STMicroelectronics S.r.l. Piezoelectric valve module, method for manufacturing the valve module, method for operating the valve module, and respiratory aid device including one or more valve modules
US10941880B2 (en) 2018-03-14 2021-03-09 Stmicroelectronics S.R.L. Piezoelectric valve module, method for manufacturing the valve module, method for operating the valve module, and respiratory aid device including one or more of the valve modules

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DE59507429D1 (en) 2000-01-20
US5739832A (en) 1998-04-14
EP0713773A3 (en) 1997-04-16
CH688960A5 (en) 1998-06-30

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