EP0725415A3 - Field emission devices employing activated diamond particle emitters and methods for making same - Google Patents

Field emission devices employing activated diamond particle emitters and methods for making same Download PDF

Info

Publication number
EP0725415A3
EP0725415A3 EP96300474A EP96300474A EP0725415A3 EP 0725415 A3 EP0725415 A3 EP 0725415A3 EP 96300474 A EP96300474 A EP 96300474A EP 96300474 A EP96300474 A EP 96300474A EP 0725415 A3 EP0725415 A3 EP 0725415A3
Authority
EP
European Patent Office
Prior art keywords
methods
field emission
making same
emission devices
diamond particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96300474A
Other languages
German (de)
French (fr)
Other versions
EP0725415B1 (en
EP0725415A2 (en
Inventor
Sungho Jin
Wei Zhu
Gregory P Kochanski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Publication of EP0725415A2 publication Critical patent/EP0725415A2/en
Publication of EP0725415A3 publication Critical patent/EP0725415A3/en
Application granted granted Critical
Publication of EP0725415B1 publication Critical patent/EP0725415B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
    • H01J23/02—Electrodes; Magnetic control means; Screens
    • H01J23/06—Electron or ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30457—Diamond
EP96300474A 1995-01-31 1996-01-24 Method for making an electron field emission device Expired - Lifetime EP0725415B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US381375 1995-01-31
US08/381,375 US5616368A (en) 1995-01-31 1995-01-31 Field emission devices employing activated diamond particle emitters and methods for making same

Publications (3)

Publication Number Publication Date
EP0725415A2 EP0725415A2 (en) 1996-08-07
EP0725415A3 true EP0725415A3 (en) 1996-11-27
EP0725415B1 EP0725415B1 (en) 1999-12-08

Family

ID=23504783

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96300474A Expired - Lifetime EP0725415B1 (en) 1995-01-31 1996-01-24 Method for making an electron field emission device

Country Status (5)

Country Link
US (1) US5616368A (en)
EP (1) EP0725415B1 (en)
JP (1) JP3096629B2 (en)
CA (1) CA2166507C (en)
DE (1) DE69605459T2 (en)

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FR2726689B1 (en) * 1994-11-08 1996-11-29 Commissariat Energie Atomique FIELD-EFFECT ELECTRON SOURCE AND MANUFACTURING METHOD THEREOF, APPLICATION TO CATHODOLUMINESCENCE VISUALIZATION DEVICES
US5982095A (en) * 1995-09-19 1999-11-09 Lucent Technologies Inc. Plasma displays having electrodes of low-electron affinity materials
CN1202271A (en) * 1995-11-15 1998-12-16 纳幕尔杜邦公司 Process for making a field emitter cathode using particulate field emitter material
AU7728696A (en) * 1995-11-15 1997-06-05 E.I. Du Pont De Nemours And Company Diamond powder field emitters and field emitter cathodes made therefrom
US5837331A (en) * 1996-03-13 1998-11-17 Motorola, Inc. Amorphous multi-layered structure and method of making the same
US6259202B1 (en) * 1996-06-12 2001-07-10 The Trustees Of Princeton University Plasma treatment of conductive layers
GB9626221D0 (en) * 1996-12-18 1997-02-05 Smiths Industries Plc Diamond surfaces
WO1998045868A1 (en) * 1997-04-09 1998-10-15 Matsushita Electric Industrial Co., Ltd. Electron emitting device and method of manufacturing the same
RU2161838C2 (en) * 1997-06-24 2001-01-10 Тарис Технолоджис, Инк. Field-emission film-coated cathode and process of its manufacture
DE19757141A1 (en) * 1997-12-20 1999-06-24 Philips Patentverwaltung Array of diamond / hydrogen electrodes
JPH11213866A (en) * 1998-01-22 1999-08-06 Sony Corp Electron-emitting device, its manufacture, and display apparatus using the device
US6010918A (en) * 1998-02-10 2000-01-04 Fed Corporation Gate electrode structure for field emission devices and method of making
JP2963993B1 (en) * 1998-07-24 1999-10-18 工業技術院長 Ultra-fine particle deposition method
JP2000182508A (en) * 1998-12-16 2000-06-30 Sony Corp Field emission type cathode, electron emitting device, and manufacture of electron emitting device
GB9905132D0 (en) * 1999-03-06 1999-04-28 Smiths Industries Plc Electron emitting devices
JP3595718B2 (en) 1999-03-15 2004-12-02 株式会社東芝 Display element and method of manufacturing the same
GB0006762D0 (en) * 2000-03-22 2000-05-10 Smiths Industries Plc Displays
GB0015928D0 (en) * 2000-06-30 2000-08-23 Printable Field Emitters Limit Field emitters
US6876724B2 (en) * 2000-10-06 2005-04-05 The University Of North Carolina - Chapel Hill Large-area individually addressable multi-beam x-ray system and method of forming same
US7227924B2 (en) * 2000-10-06 2007-06-05 The University Of North Carolina At Chapel Hill Computed tomography scanning system and method using a field emission x-ray source
US7082182B2 (en) * 2000-10-06 2006-07-25 The University Of North Carolina At Chapel Hill Computed tomography system for imaging of human and small animal
US7085351B2 (en) * 2000-10-06 2006-08-01 University Of North Carolina At Chapel Hill Method and apparatus for controlling electron beam current
US6553096B1 (en) 2000-10-06 2003-04-22 The University Of North Carolina Chapel Hill X-ray generating mechanism using electron field emission cathode
US6436221B1 (en) * 2001-02-07 2002-08-20 Industrial Technology Research Institute Method of improving field emission efficiency for fabricating carbon nanotube field emitters
JP4095272B2 (en) * 2001-09-25 2008-06-04 株式会社東芝 Fine particle production method and fine particle production apparatus
US6541397B1 (en) * 2002-03-29 2003-04-01 Applied Materials, Inc. Removable amorphous carbon CMP stop
EP1576419A4 (en) * 2002-12-09 2006-07-12 Pixelligent Technologies Llc Programmable photolithographic mask and reversible photo-bleachable materials based on nano-sized semiconductor particles and their applications
US7447298B2 (en) * 2003-04-01 2008-11-04 Cabot Microelectronics Corporation Decontamination and sterilization system using large area x-ray source
JP2005174856A (en) * 2003-12-15 2005-06-30 Toshiba Corp Sealant and image display device using the same
US7262555B2 (en) * 2005-03-17 2007-08-28 Micron Technology, Inc. Method and system for discretely controllable plasma processing
US8155262B2 (en) * 2005-04-25 2012-04-10 The University Of North Carolina At Chapel Hill Methods, systems, and computer program products for multiplexing computed tomography
JP2007299723A (en) * 2006-04-07 2007-11-15 Asahi Glass Co Ltd Field-electron emitting element
US8189893B2 (en) * 2006-05-19 2012-05-29 The University Of North Carolina At Chapel Hill Methods, systems, and computer program products for binary multiplexing x-ray radiography
WO2009012453A1 (en) * 2007-07-19 2009-01-22 The University Of North Carolina At Chapel Hill Stationary x-ray digital breast tomosynthesis systems and related methods
US8600003B2 (en) 2009-01-16 2013-12-03 The University Of North Carolina At Chapel Hill Compact microbeam radiation therapy systems and methods for cancer treatment and research
US8338317B2 (en) * 2011-04-06 2012-12-25 Infineon Technologies Ag Method for processing a semiconductor wafer or die, and particle deposition device
EP2543443B1 (en) * 2010-03-04 2019-01-09 Imagineering, Inc. Coating forming device, and method for producing coating forming material
US8358739B2 (en) 2010-09-03 2013-01-22 The University Of North Carolina At Chapel Hill Systems and methods for temporal multiplexing X-ray imaging
US9782136B2 (en) 2014-06-17 2017-10-10 The University Of North Carolina At Chapel Hill Intraoral tomosynthesis systems, methods, and computer readable media for dental imaging
US10980494B2 (en) 2014-10-20 2021-04-20 The University Of North Carolina At Chapel Hill Systems and related methods for stationary digital chest tomosynthesis (s-DCT) imaging
US10835199B2 (en) 2016-02-01 2020-11-17 The University Of North Carolina At Chapel Hill Optical geometry calibration devices, systems, and related methods for three dimensional x-ray imaging

Citations (3)

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Publication number Priority date Publication date Assignee Title
GB2260641A (en) * 1991-09-30 1993-04-21 Kobe Steel Ltd Cold cathode emitter element
EP0572777A1 (en) * 1992-06-01 1993-12-08 Motorola, Inc. Cathodoluminescent display apparatus and method for realization
EP0718864A1 (en) * 1994-12-22 1996-06-26 AT&T Corp. Field emission devices employing ultra-fine diamond particle emitters

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US5131941A (en) * 1959-04-08 1992-07-21 Lemelson Jerome H Reaction apparatus and method
CA1235087A (en) * 1983-11-28 1988-04-12 Akio Hiraki Diamond-like thin film and method for making the same
FR2623013A1 (en) * 1987-11-06 1989-05-12 Commissariat Energie Atomique ELECTRO SOURCE WITH EMISSIVE MICROPOINT CATHODES AND FIELD EMISSION-INDUCED CATHODOLUMINESCENCE VISUALIZATION DEVICE USING THE SOURCE
JPH01246116A (en) * 1988-03-29 1989-10-02 Natl Inst For Res In Inorg Mater Production of acicular, fibrous or porous diamond or their aggregate
US4874981A (en) * 1988-05-10 1989-10-17 Sri International Automatically focusing field emission electrode
US5019003A (en) * 1989-09-29 1991-05-28 Motorola, Inc. Field emission device having preformed emitters
US5234723A (en) * 1990-10-05 1993-08-10 Polar Materials Inc. Continous plasma activated species treatment process for particulate
US5138237A (en) * 1991-08-20 1992-08-11 Motorola, Inc. Field emission electron device employing a modulatable diamond semiconductor emitter
US5129850A (en) * 1991-08-20 1992-07-14 Motorola, Inc. Method of making a molded field emission electron emitter employing a diamond coating
US5283500A (en) * 1992-05-28 1994-02-01 At&T Bell Laboratories Flat panel field emission display apparatus
US5463271A (en) * 1993-07-09 1995-10-31 Silicon Video Corp. Structure for enhancing electron emission from carbon-containing cathode
US5474808A (en) * 1994-01-07 1995-12-12 Michigan State University Method of seeding diamond
US5925701A (en) * 1997-12-22 1999-07-20 Eastman Kodak Company Stable aqueous polymeric dispersions containing hydrated metal salts of strong acids

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2260641A (en) * 1991-09-30 1993-04-21 Kobe Steel Ltd Cold cathode emitter element
EP0572777A1 (en) * 1992-06-01 1993-12-08 Motorola, Inc. Cathodoluminescent display apparatus and method for realization
EP0718864A1 (en) * 1994-12-22 1996-06-26 AT&T Corp. Field emission devices employing ultra-fine diamond particle emitters

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SATOSHI KATSUMATA ET AL: "PATTERNING OF CVD DIAMOND FILMS BY SEEDING AND THEIR FIELD EMISSION PROPERTIES", DIAMOND AND RELATED MATERIALS, vol. 3, no. 11/12, 1 November 1994 (1994-11-01), pages 1296 - 1300, XP000483360 *

Also Published As

Publication number Publication date
US5616368A (en) 1997-04-01
EP0725415B1 (en) 1999-12-08
EP0725415A2 (en) 1996-08-07
CA2166507A1 (en) 1996-08-01
DE69605459D1 (en) 2000-01-13
JPH08241665A (en) 1996-09-17
DE69605459T2 (en) 2000-07-27
JP3096629B2 (en) 2000-10-10
CA2166507C (en) 2000-12-12

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